CN214264329U - High power laser cutting head is with reflecting copper mirror from taking cooling structure - Google Patents
High power laser cutting head is with reflecting copper mirror from taking cooling structure Download PDFInfo
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- CN214264329U CN214264329U CN202022957625.0U CN202022957625U CN214264329U CN 214264329 U CN214264329 U CN 214264329U CN 202022957625 U CN202022957625 U CN 202022957625U CN 214264329 U CN214264329 U CN 214264329U
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Abstract
The utility model discloses a high power laser cutting head is with reflection copper mirror from taking cooling structure, it includes the copper mirror body, integrated into one piece sets up cooling flow channel groove, the lid at the copper mirror body back closes copper mirror lid, parcel on the cooling flow channel groove the copper mirror body with copper mirror lid periphery is surperficial and seals cooling flow channel groove outlying copper mirror outer loop, be provided with on the copper mirror lid with the coolant inlet and the coolant export of cooling flow channel groove intercommunication. The utility model discloses can effectually cool down to the reflection copper mirror, improve the heat altered shape problem of reflection copper mirror greatly, improve the machining efficiency and the processingquality of laser processing equipment to and the stability of work.
Description
[ technical field ] A method for producing a semiconductor device
The utility model belongs to the technical field of the laser cutting head, especially, relate to a high power laser cutting head is with reflecting copper mirror from taking cooling structure.
[ background of the invention ]
Fiber laser cutting has become a trend in the general metal processing industry, and is widely applied to sheet metal processing and the like. With the market demand for thicker and thicker processed plates, the requirements for the core components of the laser processing equipment, namely the laser and the laser processing head, become more and more severe. The optical element material in the laser processing head at present is generally artificial fused quartz with high purity and low hydroxyl. Limited by the high cost of quartz materials and coating technology in the high energy optical field, optical elements of laser processing equipment above the kilowatt level in the market are more prone to use low-cost high-reflectivity oxygen-free copper mirrors. Because the reflectivity of the optical reflecting surface of the copper mirror cannot be completely reflected, the copper mirror can absorb the energy of a laser beam while reflecting high-power laser, so that the surface profile of the copper mirror is subjected to thermal deformation to a certain degree. The change in the surface profile of the copper mirror eventually causes the beam quality and energy distribution of the machining beam to be destroyed, thereby reducing the machining efficiency and quality of the laser machining apparatus.
Therefore, there is a need to provide a new high power laser cutting head with a copper mirror with a cooling structure to solve the above problems.
[ Utility model ] content
The utility model aims to provide a high power laser cutting head is with reflecting copper mirror from taking cooling structure can effectually cool down to reflecting copper mirror, improves the heat altered shape problem of reflecting copper mirror greatly, has improved the machining efficiency and the processingquality of laser processing equipment to and the stability of work.
The utility model discloses a following technical scheme realizes above-mentioned purpose: the utility model provides a high power laser cutting head is with reflection copper mirror from taking cooling structure, it includes the copper mirror body, integrated into one piece sets up cooling runner groove, the lid at the copper mirror body back closes copper mirror lid, parcel on the cooling runner groove the copper mirror body with on the copper mirror lid peripheral surface and seal cooling runner groove outlying copper mirror outer loop, the copper mirror lid be provided with the coolant entry and the coolant export of cooling runner groove intercommunication.
Furthermore, the copper mirror body, the copper mirror cover and the copper mirror outer ring are all oval, and are assembled together to form an oval reflecting copper mirror.
Furthermore, annular grooves are formed in the peripheral surfaces of the copper mirror body and the copper mirror cover, and sealing rings for sealing the contact surface between the copper mirror body and the copper mirror outer ring or sealing the contact surface between the copper mirror cover and the copper mirror outer ring are arranged in the annular grooves.
Furthermore, the copper mirror body is oval, and the wall thickness of the outer ring of the copper mirror is 1/6-1/5 of the oval major axis of the copper mirror body.
Further, the cooling runner groove is in a double-ellipse spiral shape.
Furthermore, the cooling runner groove comprises a linear flow dividing section, a flow guiding section and an elliptical spiral section in sequence along the flow direction of the cooling medium.
Furthermore, the starting point of the elliptical spiral section is the focus of the optical elliptical light-passing aperture in the elliptical reflecting copper mirror, the tail end of the straight line flow dividing section is provided with a flow guide point, and the flow guide point and the starting point of the elliptical spiral section form the flow guide section.
Furthermore, the included angle of the lead of the flow guide section relative to the corresponding ellipse long axis of the ellipse spiral section is 20-30 degrees.
Further, the cross-sectional area of the cooling channel is equal to 1/2 of the cooling medium inlet aperture.
Furthermore, the copper mirror cover is oval, the cooling medium inlet is located on the oval central point, and the cooling medium outlet is arranged on the edge of the cooling runner groove close to the oval long axis direction.
Compared with the prior art, the utility model relates to a high power laser cutting head lies in with reflection copper mirror from taking cooling structure's beneficial effect: the elliptical copper mirror reflector consists of a copper mirror body, a copper mirror cover, a copper mirror outer ring and two O-shaped rings. The copper mirror body is provided with double symmetrical elliptical spiral grooves which can form double cooling channels; the cooling medium enters the symmetrical elliptical spiral groove in a manner of being divided into two parts by taking the central point of the copper mirror cover as an inlet; under the condition of the same flow rate and pressure, the flow rate of the inner double cooling channels can be improved by the cooling medium entering the copper mirror body, and the rapid and uniform cooling is realized; the double cooling channels take the elliptic focus as a starting point, and the streamline is in an elliptic helix form, so that the flow velocity of the fluid is greatly improved, and the fluid resistance is reduced; sealing grooves are dug on the circumferential surfaces of the copper mirror body and the mirror cover and matched with an O-shaped ring and a copper mirror outer ring, so that the sealing of the cooling cavity can be realized; no screw and locking mechanism exist in the whole copper mirror, so that the optical reflecting surface shape is prevented from being deformed due to stress in the locking process, the size and weight of a copper mirror assembly are greatly reduced, and great advantages are brought to later-stage mechanism integration design and assembly coupling.
[ description of the drawings ]
Fig. 1 is a schematic structural diagram of an embodiment of the present invention;
fig. 2 is a schematic diagram of an explosive structure according to an embodiment of the present invention;
fig. 3 is a schematic view of a vertical cross-section structure according to an embodiment of the present invention;
fig. 4 is a schematic view of a vertical cross-section partial structure according to an embodiment of the present invention;
fig. 5 is a schematic horizontal sectional structure diagram of an embodiment of the present invention;
FIG. 6 is a schematic flow diagram of a cooling medium according to an embodiment of the present invention;
the figures in the drawings represent:
the 100 high-power laser cutting head is a reflecting copper mirror with a cooling structure;
1, a copper mirror body and 11 annular grooves; 2, cooling runner grooves, 21 linear flow distribution sections, 22 flow guide sections and 23 elliptical spiral sections; 3, a copper mirror cover; 4, an outer ring of a copper mirror; 5 a cooling medium inlet; 6 a cooling medium outlet; 7, sealing rings.
[ detailed description ] embodiments
Example (b):
referring to fig. 1 to 6, the present embodiment is a copper mirror 100 with a cooling structure for a high power laser cutting head, which includes a copper mirror body 1, a cooling channel groove 2 integrally formed on the back of the copper mirror body 1, a copper mirror cover 3 covering the cooling channel groove 2, a copper mirror outer ring 4 wrapping the outer peripheral surfaces of the copper mirror body 1 and the copper mirror cover 3 and sealing the outer periphery of the cooling channel groove 2, and a cooling medium inlet 5 and a cooling medium outlet 6 communicating with the cooling channel groove 2 are disposed on the copper mirror cover 3.
The copper mirror body 1, the copper mirror cover 3 and the copper mirror outer ring 4 are assembled together to form the copper mirror, and the whole copper mirror is in an oval shape.
The peripheral surfaces of the copper mirror body 1 and the copper mirror cover 3 are both provided with annular grooves 11, and the annular grooves 11 are internally provided with sealing rings 7 for sealing the contact surfaces of the copper mirror body 1 and the copper mirror outer ring 4 or the contact surfaces of the copper mirror cover 3 and the copper mirror outer ring 4. The sealing ring 7 is matched with the copper mirror outer ring 4 to form a sealing cavity for the cooling runner groove 2.
The wall thickness of the copper mirror outer ring 4 is 1/5-1/6 of the ellipse major axis of the copper mirror body 1.
The cooling flow channel groove 2 is in a double-ellipse spiral shape, the cooling medium inlet 5 is positioned on the center point of the ellipse, and the cooling flow channel groove 2 sequentially comprises a linear flow distribution section 21, a flow guide section 22 and an ellipse spiral section 23 along the flow direction of the cooling medium. Through the structural design of three-section flow channels, the flow velocity of a cooling medium can be greatly improved by matching with the elliptical spiral structure, and the cooling effect is improved.
The starting point of the elliptical spiral section 23 is the focus of the optical elliptical light-passing aperture in the elliptical reflecting copper mirror, the tail end of the straight-line flow-dividing section 21 is provided with a flow guide point, and the flow guide point and the starting point of the elliptical spiral section 23 form the flow guide section 22. The included angle of the lead of the flow guide section 22 relative to the ellipse spiral section 23 corresponding to the ellipse major axis is 20-30 degrees. Through fluid simulation analysis, the angle is limited to effectively ensure that the pressure loss of the cooling medium is minimum when the cooling medium reaches the optimal flow speed under the condition of the same pressure.
The cross-sectional area of the cooling flow channel groove 2 is equal to 1/2 of the bore of the cooling medium inlet 5.
The copper mirror cover 3 is oval, the cooling medium inlet 5 is formed in the center point, and the cooling medium outlet 6 is formed in the position, close to the edge of the cooling runner groove 2, of the oval long axis direction.
The working principle of the copper reflector 100 with the cooling structure for the high-power laser cutting head in the embodiment is as follows: the cooling medium flows into the mirror body cooling runner groove 2 from the cooling medium inlet 5 on the copper mirror cover 3, is divided into two parts through the linear flow dividing section 21, and flows out from the cooling medium outlet 6 on the copper mirror cover 3 after passing through the flow guiding section 22 and the elliptical spiral section 23, so that the heat on the copper mirror body 1 is taken away.
The embodiment is a reflection copper mirror 100 with a cooling structure for a high-power laser cutting head, wherein a cooling medium uniformly cools the copper mirror in a cooling runner groove in a high-flow-rate and low-fluid-resistance manner, so that the optical reflection surface shape is prevented from generating micro deformation due to the existence of local hot spots or poor heat conduction performance of the copper mirror; meanwhile, the whole copper mirror does not have a screw and a locking mechanism, so that the surface shape of the optical reflecting surface is prevented from being deformed due to stress in the locking process; overall structure has greatly simplified the copper mirror structure, has greatly reduced the volume and the weight of copper mirror subassembly, has brought great advantage for later stage mechanism integrated design and subassembly coupling.
What has been described above are only some embodiments of the invention. For those skilled in the art, without departing from the inventive concept, several modifications and improvements can be made, which are within the scope of the invention.
Claims (10)
1. The utility model provides a high power laser cutting head is with reflecting copper mirror from taking cooling structure which characterized in that: it includes the copper mirror body, integrated into one piece sets up cooling runner groove, the lid at the copper mirror body back closes copper mirror lid, parcel on the cooling runner groove the copper mirror body with on the copper mirror lid peripheral surface and seal cooling runner groove outlying copper mirror outer loop, be provided with on the copper mirror lid with cooling medium entry and the coolant outlet of runner groove intercommunication.
2. The high power laser cutting head of claim 1 is with reflection copper mirror from tape cooling structure, characterized by: the copper mirror body, the copper mirror cover and the copper mirror outer ring are all oval, and are assembled together to form an oval reflecting copper mirror.
3. The high power laser cutting head of claim 1 is with reflection copper mirror from tape cooling structure, characterized by: the copper mirror body with all be provided with the annular groove on the peripheral surface of copper mirror lid, be provided with in the annular groove and seal the copper mirror body with copper mirror outer loop contact surface, or seal the copper mirror lid with the sealing washer of copper mirror outer loop contact surface.
4. The high power laser cutting head of claim 1 is with reflection copper mirror from tape cooling structure, characterized by: the copper mirror body is oval, and the wall thickness of the outer ring of the copper mirror is 1/6-1/5 of the oval major axis of the copper mirror body.
5. The high power laser cutting head of claim 1 is with reflection copper mirror from tape cooling structure, characterized by: the cooling runner groove is in a double-ellipse spiral shape.
6. The high power laser cutting head of claim 1 is with reflection copper mirror from tape cooling structure, characterized by: the cooling runner groove comprises a linear flow distribution section, a flow guide section and an elliptical spiral section in sequence along the flow direction of a cooling medium.
7. The high power laser cutting head of claim 6 is with reflection copper mirror from tape cooling structure, characterized by: the starting point of the elliptic spiral section is the focus of the optical elliptic light-passing caliber in the elliptic reflecting copper mirror, the tail end of the straight line flow dividing section is provided with a flow guide point, and the flow guide point and the starting point of the elliptic spiral section form the flow guide section.
8. The high power laser cutting head of claim 6 is with reflection copper mirror from tape cooling structure, characterized by: the included angle of the lead of the flow guide section relative to the elliptic spiral section corresponding to the elliptic major axis is 20-30 degrees.
9. The high power laser cutting head of claim 1 is with reflection copper mirror from tape cooling structure, characterized by: the cross-sectional area of the cooling channel slot is equal to 1/2 of the cooling medium inlet aperture.
10. The high power laser cutting head of claim 1 is with reflection copper mirror from tape cooling structure, characterized by: the copper mirror cover is oval, the cooling medium inlet is located on the oval central point, and the cooling medium outlet is arranged on the edge of the cooling runner groove close to the oval long axis direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022957625.0U CN214264329U (en) | 2020-12-11 | 2020-12-11 | High power laser cutting head is with reflecting copper mirror from taking cooling structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022957625.0U CN214264329U (en) | 2020-12-11 | 2020-12-11 | High power laser cutting head is with reflecting copper mirror from taking cooling structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214264329U true CN214264329U (en) | 2021-09-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022957625.0U Active CN214264329U (en) | 2020-12-11 | 2020-12-11 | High power laser cutting head is with reflecting copper mirror from taking cooling structure |
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| Country | Link |
|---|---|
| CN (1) | CN214264329U (en) |
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2020
- 2020-12-11 CN CN202022957625.0U patent/CN214264329U/en active Active
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