CN209614565U - A kind of cooling system and the laser equipment using it - Google Patents

Abstract

The utility model provides a kind of cooling system and the laser equipment using it, laser equipment includes: apparatus body, galvanometer motor, galvanometer and cooling system, galvanometer motor is arranged on apparatus body, galvanometer is connected on the power output shaft of galvanometer motor, wherein, cooling system includes: cooling block, inlet tube and outlet tube, cooling block is made from a material that be thermally conductive, cooling block is mounted between galvanometer motor and galvanometer, and cooling block and power output shaft thermal contact conductance, cooling block has cooling chamber, cooling block is equipped with the inlet and liquid outlet being connected to cooling chamber, inlet tube is connected with the inlet of cooling block, outlet tube is connected with the liquid outlet of cooling block, coolant liquid flows out after flowing through cooling block and outlet tube from inlet tube, to which the heat of cooling block continuously be taken away, it is suitable to make to maintain always inside galvanometer head In temperature range, the undesirable influence of processing quality caused by being deformed because of eyeglass overheat is reduced, ensure that processing quality and efficiency.

Description

A kind of cooling system and the laser equipment using it

Technical field

The utility model belongs to field of laser processing more particularly to a kind of cooling system and the laser equipment using it.

Background technique

With present industry more and more quickly development, the requirement on machining accuracy of technique is also improving step by step, very big by one Parts thereof processing, which requires, accomplishes micron order, so that precision machining industry emerges rapidly, and laser machining industry is it Middle one kind.

Using also including slightly larger component in the components of laser processing, needed when to some slightly larger components using laser processing The laser energy of higher power is provided, but with the raising of laser energy, eyeglass can be because received energy be too from laser It is high and generating heat causes to deform, so that laser optical path is not accurate, cause laser processing quality not up to standard.

Utility model content

The technical problem to be solved by the utility model is to provide a kind of cooling system and using its laser equipment, make When bearing high power laser light energy, the temperature of eyeglass can still maintain within the scope of Applicable temperature galvanometer head, guarantee processing matter Amount and efficiency.

In order to solve the above technical problems, the utility model is realized in this way, a kind of cooling system is provided, laser is applied to Equipment, the laser equipment include apparatus body, galvanometer motor and galvanometer, and galvanometer motor is arranged on apparatus body, the vibration Mirror is connected on the power output shaft of the galvanometer motor, and the cooling system includes: cooling block, inlet tube and outlet tube, institute It states cooling block to be made from a material that be thermally conductive, the cooling block is mounted between the galvanometer motor and the galvanometer, and the cooling Block and the power output shaft thermal contact conductance, the cooling block have cooling chamber, and the cooling block is equipped with and the cooling chamber The inlet and liquid outlet of connection, the inlet tube are connected with the inlet of the cooling block, the outlet tube with it is described cold But the liquid outlet of block is connected, and coolant liquid flows out after flowing through the cooling block and the outlet tube from the inlet tube.

Further, the galvanometer includes the first galvanometer and the second galvanometer, and the galvanometer motor includes the first galvanometer motor With the second galvanometer motor, first galvanometer is connected on the power output shaft of first galvanometer motor, second galvanometer It is connected on the power output shaft of second galvanometer motor；The cooling block includes the first cooling block and the second cooling block, institute Stating cooling system further includes the first connecting conduit, has the first cooling chamber in first cooling block, in second cooling block With the second cooling chamber, first cooling chamber is connected with second cooling chamber by first connecting conduit, described Inlet tube is connected with first cooling chamber, and the outlet tube is connected with second cooling chamber.

Further, the cooling system further includes connecting plate, and the connecting plate is arranged on the apparatus body, described First galvanometer and second galvanometer are both connected on the connecting plate, and first passage and second is offered on the connecting plate and is led to Road, one end of the inlet tube are connected with the outlet end of the first passage, and one end of the outlet tube is logical with described second The arrival end in road is connected.

Further, first cooling block and second cooling block include: cover board and cooling matrix, the cover board With through-hole is all had in the middle part of the cooling matrix, offer cooling bath on the cooling matrix, the cooling bath is around setting Outside the through-hole, the cover board matches with the cooling matrix, by institute when the cover plate lid is located on the cooling matrix Cooling bath sealing is stated to form first cooling chamber or second cooling chamber.

Further, the wall for enclosing the cooling bath is respectively inner and outer wall, and the height of the inner wall is lower than described The height of outer wall, the end surface side of the inner wall offer interior seal groove, and the end surface side of the outer wall offers external seal slot, described Interior seal groove and the external seal slot are ring-type, and the interior seal groove is embedded with inner seal ring, are embedded on the external seal slot There is exterior seal ring；The plate face side of the cover board mutually assembled with the cooling matrix has annular projection, when the cover plate lid is closed When on the cooling matrix, the annular projection is chimeric with the medial surface of the outer wall, and the end face of the annular projection is supported On the inner seal ring, the edge of the cover board is supported on the exterior seal ring.

Further, the laser equipment also has field flattening lens, and the cooling system further includes the second connecting conduit, institute Stating has third cooling chamber in field flattening lens, offered on the side of the field flattening lens be connected to the third cooling chamber out Liquid mouth and inlet, second connecting conduit connect the outlet end of the second channel and the inlet of the field flattening lens.

Further, the end of the inlet tube, first connecting conduit, the outlet tube and second connecting conduit Portion is provided with quick coupling.

Further, the cooling system further includes the first fixed block and the second fixed block, first fixed block and institute It states the second fixed block to be securely fitted on the apparatus body, first galvanometer motor and the fixed dress of first cooling block It fits on first fixed block, second galvanometer motor and second cooling block are securely fitted in second fixed block On.

Further, a kind of laser equipment is provided, comprising: apparatus body, galvanometer motor, galvanometer and cooling system, it is described Galvanometer motor is arranged on the apparatus body, and the galvanometer is connected on the power output shaft of the galvanometer motor, described cold But system is the cooling system as described in any one in above scheme.

Further, the laser equipment further includes field flattening lens, and the cooling system further includes the second connecting conduit, institute Stating has third cooling chamber in field flattening lens, offered on the side of the field flattening lens be connected to the third cooling chamber out Liquid mouth and inlet, second connecting conduit are connected to the inlet and the outlet tube of the third cooling chamber, coolant liquid from Followed by second connecting conduit and the third cooling chamber and going out from the field flattening lens after the outlet tube outflow The outflow of liquid mouth.

In the utility model cooling system and application its laser equipment compared with prior art, beneficial effect is:

Heat on galvanometer and galvanometer motor can be transmitted on cooling block, and coolant liquid flows through cooling from inlet tube During flowing out after block and outlet tube, coolant liquid is contacted with the cavity wall of cooling chamber to absorb the heat of cooling block, to make to shake The heat of mirror and galvanometer motor, which continuously passes through cooling block and is conducted to coolant liquid, to be taken away, and makes to maintain always inside galvanometer head In preference temperature scope, the undesirable influence of processing quality caused by being deformed because of eyeglass overheat is reduced, ensure that processing matter Amount and efficiency.

Detailed description of the invention

Fig. 1 is the structural schematic diagram one of cooling system and the laser equipment using it in the utility model embodiment；

Fig. 2 is the structural schematic diagram two of cooling system and the laser equipment using it in the utility model embodiment；

Fig. 3 is the structural schematic diagram three of cooling system and the laser equipment using it in the utility model embodiment；

Fig. 4 is the structural representation of cooling system and the connecting plate in application its laser equipment in the utility model embodiment Figure；

Fig. 5 is cooling system and the structural schematic diagram of the laser equipment cover plate using it in the utility model embodiment；

Fig. 6 is the elevational schematic view of cooling system and the laser equipment cover plate using it in the utility model embodiment；

Fig. 7 is the schematic front view of cooling system and the laser equipment cover plate using it in the utility model embodiment；

Fig. 8 is the structural representation of cooling matrix in cooling system and application its laser equipment in the utility model embodiment Figure.

In the accompanying drawings, each appended drawing reference indicates: 01, assembling shell；011, bottom plate；012, side plate；013, back plate；02, first Galvanometer；03, the second galvanometer；04, the first galvanometer motor；05, the second galvanometer motor；06, connecting plate；061, first passage；062, Second channel；063, convex block；064, fitting opening；07, the first cooling block；08, the second cooling block；09, inlet tube；10, first Connecting conduit；11, outlet tube；12, the second connecting conduit；13, field flattening lens；14, cover board；141, annular projection；15, cooling base Body；151, cooling bath；152, inner wall；153, outer wall；154, lug；1521, interior seal groove；1531, external seal slot；16, first Fixed block；17, the second fixed block.

Specific embodiment

In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain The utility model is not used to limit the utility model.

Embodiment:

In the present embodiment, as shown in Figure 1-3, laser equipment includes: apparatus body, galvanometer motor, galvanometer and cooling system System, galvanometer motor are arranged on apparatus body, and galvanometer is connected on the power output shaft of galvanometer motor, wherein cooling system packet Include: cooling block, inlet tube 09 and outlet tube 11, cooling block is made from a material that be thermally conductive, and cooling block is mounted on galvanometer motor and galvanometer Between, and cooling block and power output shaft thermal contact conductance, cooling block has a cooling chamber, and cooling block is equipped with to be connected to cooling chamber Inlet and liquid outlet, inlet tube 09 are connected with the inlet of cooling block, and outlet tube 11 is connected with the liquid outlet of cooling block, Coolant liquid flows out after flowing through cooling block and outlet tube 11 from inlet tube 09.

Heat on galvanometer and galvanometer motor can be transmitted on cooling block, and coolant liquid flows through cold from inlet tube 09 But during flowing out after block and outlet tube 11, coolant liquid is contacted with the cavity wall of cooling chamber to absorb the heat of cooling block, thus Make the heat of galvanometer and galvanometer motor continuously pass through cooling block and be conducted to coolant liquid to take away, makes to tie up always inside galvanometer head It holds in preference temperature scope, reduces the undesirable influence of processing quality caused by being deformed because of eyeglass overheat, ensure that and add Working medium amount and efficiency.

Specifically, as shown in Figure 1-3, galvanometer include the first galvanometer 02 and the second galvanometer 03, galvanometer motor include first vibration Mirror motor 04 and the second galvanometer motor 05, the first galvanometer 02 are connected on the power output shaft of the first galvanometer motor 04, the second vibration Mirror 03 is connected on the power output shaft of the second galvanometer motor 05；Cooling block includes the first cooling block 07 and the second cooling block 08, Cooling system further includes the first connecting conduit 10 and connecting plate 06, has the first cooling chamber in the first cooling block 07, and second is cooling There is the second cooling chamber, the first cooling chamber is connected with the second cooling chamber by the first connecting conduit 10, inlet tube 09 in block 08 It is connected with the first cooling chamber, outlet tube 11 is connected with the second cooling chamber, and first passage 061 and are offered on connecting plate 06 The one end in two channels 062, inlet tube 09 is connected with the outlet end of first passage 061, one end of outlet tube 11 and second channel 062 arrival end is connected.Heat on first galvanometer 02 and the second galvanometer 03 can be transmitted to by power output shaft respectively On first cooling block 07 and the second cooling block 08, coolant liquid flows into from the arrival end of first passage 061 and leads to followed by first Going out from second channel 062 after road 061, inlet tube 09, the first cooling chamber, the second cooling chamber, outlet tube 11 and second channel 062 The outflow of mouth end.

It assembles shell 01 and includes at least bottom plate 011, side plate 012 and back plate 013, connecting plate 06 is securely fitted in 012 He of side plate In back plate 013, the first galvanometer motor 04, the second galvanometer motor 05, the first cooling block 07 and the equal fixing assembling of the second cooling block 08 On connecting plate 06, the side of connecting plate 06 is provided with convex block 063 (such as Fig. 4), the arrival end and second channel of first passage 061 062 outlet end offers inlay card through-hole on convex block 063 in back plate 013, connecting plate 06 is convex when being assemblied in back plate 013 Block 063 is in inlay card through-hole.

Specifically, in the present embodiment, the first galvanometer 02 is Y galvanometer, and the first galvanometer motor 04 is Y galvanometer motor, second Galvanometer 03 is X galvanometer, and the second galvanometer motor 05 is X galvanometer motor, and for the coolant liquid used in cooling system for water, coolant liquid is first right Y galvanometer and Y galvanometer motor are cooled down, then are cooled down to X galvanometer and X galvanometer motor.It is to be understood that the first galvanometer 02, the second galvanometer 03, the first galvanometer motor 04 and the second galvanometer motor 05 are not limited to the appellation in above-mentioned the present embodiment also not It is limited to the position that they are indicated in the accompanying drawings, for example, it may be: the first galvanometer 02 is X galvanometer, and the first galvanometer motor 04 is X vibration Mirror motor, the second galvanometer 03 are Y galvanometer, and the second galvanometer motor 05 is Y galvanometer motor, i.e., coolant liquid is first to X galvanometer and X galvanometer electricity Machine is cooled down, then is cooled down to Y galvanometer and Y galvanometer motor；In other embodiments, coolant liquid can also use aqueous solution Or water-free cooling, such as: glycol water, glycerin solution, cooling oil etc..

In the present embodiment, as shown in Figure 1-3, side plate 012 and back plate 013 be assemblied at the neighboring edge of bottom plate 011 and Vertical with the plate face of bottom plate 011, side plate 012 is fixedly connected with back plate 013, and connecting plate 06 is securely fitted in side plate 012 and back plate On 013, connecting plate 06 and bottom plate 011 are arranged in parallel, in conjunction with Fig. 4,062 company of being opened in of first passage 061 and second channel The inside of fishplate bar 06 and be straight channel, first passage 061 and second channel 062 are arranged in parallel, and convex block 063 protrudes from connecting plate On 06 side with the assembly of 013 phase of back plate, the protrusion length of convex block 063 and the consistency of thickness of back plate 013, therefore convex block 063 It is concordant with the trailing flank of back plate 013 to be embedded the end face of convex block 063 when in inlay card through-hole, first passage 061 and second channel 062 Direction it is consistent with the projected direction of convex block 063, the arrival end of first passage 061 and the outlet end of second channel 062 are respectively positioned on The endface of convex block 063, thus make first passage 061 arrival end and second channel 062 the first connecting conduit of outlet end when It can be operated from side behind back plate 013, more convenient, the equal position of arrival end of the outlet end and second channel 062 of first passage 061 In on the upper surface of connecting plate 06, the port of first passage 061 and second channel 062 matches with quick coupling.At other In embodiment, on the side with the assembly of 012 phase of side plate that convex block 063 can protrude from connecting plate 06, offered on side plate 012 with The matched inlay card through-hole of convex block 063, connecting plate 06 after the assembly is completed 063 inlay card of convex block in the inlay card through-hole on side plate 012；The One channel 061 and second channel 062 can be bending channel, as long as can pass through for coolant liquid；First passage 061 goes out The lateral position in connecting plate 06 can be set in the arrival end of mouth end and second channel 062.

Cooling system further includes the first fixed block 16 and the second fixed block 17, and the first fixed block 16 and the second fixed block 17 are It is securely fitted on connecting plate 06 by screw, the side of connecting plate 06 offers fitting opening 064, the assembly of the second fixed block 17 When on connecting plate 06 in fitting opening 064, so that the second fixed block 17 be made to assemble stable and accurate, the first fixed block 16 are assemblied in the downside plate face of connecting plate 06, also, the downside of the first fixed block 16 and bottom plate 011 connect by the way that screw is fixed It connects, so that 16 fixing-stable of the first fixed block, while connecting plate 06 can be also supported；First galvanometer 02 is assemblied in the first vibration The end of the power output shaft of mirror motor 04, the second galvanometer 03 are assemblied in the end of the power output shaft of the second galvanometer motor 05, Offer the through-hole passed through for the power output shaft of the first galvanometer motor 04 on first fixed block 16 and the first cooling block 07, second The through-hole passed through for the power output shaft of the second galvanometer motor 05, the first galvanometer are offered on fixed block 17 and the second cooling block 08 Motor 04 and the first cooling block 07 are securely fitted on the first fixed block 16 by screw, and the first cooling block 07 is located at first Between galvanometer motor 04 and the first fixed block 16, the power output shaft of the first galvanometer motor 04 is successively arranged in the first fixed block 16 In the through-hole of the first cooling block 07, the second galvanometer motor 05 and the second cooling block 08 are securely fitted in second by screw and fix On block 17, and the second cooling block 08 is between the second galvanometer motor 05 and the second fixed block 17, the second galvanometer motor 05 Power output shaft is successively arranged in the through-hole of the second fixed block 17 and the second cooling block 08.

In the present embodiment, in conjunction with Fig. 5-8, the first cooling block 07 and the second cooling block 08 include: cover board 14 and cooling Matrix 15, cover board 14 and the middle part for cooling down matrix 15 all have the circular through hole passed through for power output shaft, cool down on matrix 15 Cooling bath 151 is offered, cooling bath 151 is circumferentially positioned at outside the through-hole of cooling matrix 15, and cooling bath 151 is annular groove, setting Circularizing slot can make coolant liquid equably absorb heat, to keep the temperature inside galvanometer head uniform, avoid galvanometer head because of temperature not It deforms, the wall for enclosing cooling bath 151 is respectively inner wall 152 and outer wall 153, and the height of inner wall 152 is lower than the height of outer wall 153 Degree, the end surface side of inner wall 152 and the end surface side of outer wall 153 offer interior seal groove 1521 and external seal slot 1531 respectively, interior close Sealing groove 1521 and external seal slot 1531 are ring-type, are embedded with inner seal ring respectively on interior seal groove 1521 and external seal slot 1531 (not shown) and exterior seal ring (not shown), inner seal ring and exterior seal ring can be made of rubber material or silica gel material； Cover board 14 matches with cooling matrix 15, and the lid of cover board 14 seals cooling bath 151 to form first when being located on cooling matrix 15 Cooling chamber or the second cooling chamber, specifically, the plate face side of cover board 14 assembled with cooling 15 phase of matrix has annular projection 141, When the lid of cover board 14 closes on cooling matrix 15, annular projection 141 is chimeric with the medial surface of outer wall 153, the end of annular projection 141 Face is supported on the end face of inner seal ring and inner wall 152, and cover board 14 is supported on the end face of exterior seal ring and outer wall 153, thus Reach good sealing effect, coolant liquid is avoided to flow out.

Inlet and liquid outlet are offered on the side of cooling matrix 15, inlet and liquid outlet connect with cooling bath 151 Logical, in the present embodiment, there are two lugs 154 for setting on the side of cooling matrix 15, and two lugs 154 are relative to cooling matrix 15 are located at opposite side, and the inlet and liquid outlet of cooling matrix 15 are separately positioned on two lugs 154, in order to stablize cover board 14 It is assemblied on cooling matrix 15, pilot hole is offered on lug 154, offer pilot hole on the end face of inner wall 152, on cover board 14 Also corresponding pilot hole is offered, cover board 14 is securely fitted on cooling matrix 15 by screw.

As shown in Figure 1-3, laser equipment further includes field flattening lens 13, field flattening lens 13 are by threaded engagement in bottom plate 011 Downside, cooling system further includes the second connecting conduit 12, has third cooling chamber (not shown) in field flattening lens 13, and third is cold But chamber is the annular chamber coaxial with field flattening lens, is absorbed heat more uniform, is offered on the side of field flattening lens 13 cooling with third The liquid outlet and inlet of chamber connection, the second connecting conduit 12 is connected to the inlet and outlet tube 11 of third cooling chamber, in this reality It applies in example, the second connecting conduit 12 connects the outlet end of second channel 062 and the inlet of field flattening lens 13, and coolant liquid is from second It is flowed out after flowing out followed by the second connecting conduit 12 and third cooling chamber and from the liquid outlet of field flattening lens 13 in channel 062.It is cold But liquid can be flowed into the third cooling chamber of field flattening lens 13 by the second connecting conduit 12, thus by field flattening lens 13 Heat takes away, and so that the temperature of field flattening lens 13 is maintained preference temperature, further ensure that processing quality and efficiency.

In the present embodiment, the end of inlet tube 09, the first connecting conduit 10, outlet tube 11 and the second connecting conduit 12 is equal It is provided with quick coupling, is provided with the interface being adapted to quick coupling on the corresponding position for the component being connected with each pipe, each pipe is adopted It can be improved assembly efficiency with quick coupling connection.

The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model Protection scope within.

Claims (10)

1. a kind of cooling system is applied to laser equipment, the laser equipment includes apparatus body, galvanometer motor and galvanometer, shakes Mirror motor is arranged on apparatus body, and the galvanometer is connected on the power output shaft of the galvanometer motor, which is characterized in that

The cooling system includes: cooling block, inlet tube and outlet tube, and the cooling block is made from a material that be thermally conductive, the cooling Block is mounted between the galvanometer motor and the galvanometer, and the cooling block and the power output shaft thermal contact conductance, described Cooling block has cooling chamber, and the cooling block is equipped with the inlet and liquid outlet being connected to the cooling chamber, the inlet tube It is connected with the inlet of the cooling block, the outlet tube is connected with the liquid outlet of the cooling block, and coolant liquid is from described Inlet tube flows out after flowing through the cooling block and the outlet tube.

2. cooling system as described in claim 1, which is characterized in that the galvanometer includes the first galvanometer and the second galvanometer, institute Stating galvanometer motor includes the first galvanometer motor and the second galvanometer motor, and first galvanometer is connected to first galvanometer motor On power output shaft, second galvanometer is connected on the power output shaft of second galvanometer motor；

The cooling block includes the first cooling block and the second cooling block, and the cooling system further includes the first connecting conduit, described There is the first cooling chamber in first cooling block, there is the second cooling chamber, first cooling chamber and institute in second cooling block It states the second cooling chamber to be connected by first connecting conduit, the inlet tube is connected with first cooling chamber, described Outlet tube is connected with second cooling chamber.

3. cooling system as claimed in claim 2, which is characterized in that the cooling system further includes connecting plate, the connection Plate is arranged on the apparatus body, and first galvanometer and second galvanometer are both connected on the connecting plate, the company First passage and second channel are offered on fishplate bar, one end of the inlet tube is connected with the outlet end of the first passage, One end of the outlet tube is connected with the arrival end of the second channel.

4. cooling system according to claim 3, which is characterized in that first cooling block and second cooling block are equal Include: cover board and cooling matrix, all has through-hole in the middle part of the cover board and the cooling matrix, opened up on the cooling matrix There is cooling bath, the cooling bath is circumferentially positioned at outside the through-hole, and the cover board matches with the cooling matrix, the cover board The cooling bath is sealed to form first cooling chamber or second cooling chamber when lid is located on the cooling matrix.

5. cooling system according to claim 4, which is characterized in that enclose the cooling bath wall be respectively inner wall and Outer wall, the height of the inner wall are lower than the height of the outer wall, and the end surface side of the inner wall offers interior seal groove, the outer wall End surface side offer external seal slot, the interior seal groove and the external seal slot are ring-type, and the interior seal groove is embedded with Inner seal ring, the external seal slot are embedded with exterior seal ring；

The plate face side of the cover board mutually assembled with the cooling matrix has annular projection, when the cover plate lid is closed described cold When but on matrix, the annular projection is chimeric with the medial surface of the outer wall, and the end face of the annular projection is supported described interior On sealing ring, the edge of the cover board is supported on the exterior seal ring.

6. cooling system according to any one of claim 3 to 5, which is characterized in that the laser equipment also has flat Field lens head, the cooling system further include the second connecting conduit, have third cooling chamber, the flat field mirror in the field flattening lens The liquid outlet and inlet be connected to the third cooling chamber are offered on the side of head, described in second connecting conduit connects The inlet of the outlet end of second channel and the field flattening lens.

7. cooling system according to claim 6, which is characterized in that the inlet tube, first connecting conduit, described The end of outlet tube and second connecting conduit is provided with quick coupling.

8. cooling system according to claim 6, which is characterized in that the cooling system further includes the first fixed block and Two fixed blocks, first fixed block and second fixed block are securely fitted on the connecting plate, first galvanometer Motor and first cooling block are securely fitted on first fixed block, second galvanometer motor and second cooling Block is securely fitted on second fixed block.

9. a kind of laser equipment characterized by comprising apparatus body, galvanometer motor, galvanometer and cooling system, the galvanometer Motor is arranged on the apparatus body, and the galvanometer is connected on the power output shaft of the galvanometer motor, the cooling system System is the cooling system as described in any one of claim 1-8.

10. laser equipment according to claim 9, which is characterized in that the laser equipment further includes field flattening lens, described Cooling system further includes the second connecting conduit, has third cooling chamber in the field flattening lens, on the side of the field flattening lens The liquid outlet and inlet being connected to the third cooling chamber are offered, second connecting conduit is connected to the third cooling chamber Inlet and the outlet tube, coolant liquid is after outlet tube outflow followed by second connecting conduit and described the Three cooling chambers are simultaneously flowed out from the liquid outlet of the field flattening lens.