CN214261359U

CN214261359U - Borane gas mixture processing device

Info

Publication number: CN214261359U
Application number: CN202120014681.2U
Authority: CN
Inventors: 戴荣国
Original assignee: Jiangsu Anruisen Electronic Material Co ltd
Current assignee: Jiangsu Anruisen Electronic Material Co ltd
Priority date: 2021-01-05
Filing date: 2021-01-05
Publication date: 2021-09-24
Anticipated expiration: 2031-01-05

Abstract

The utility model discloses a borane mist processing device, including tail gas supply unit, tail gas supply unit output is equipped with the buffer tank, buffer tank one side bottom output is equipped with handles the case, it is connected with two puddlers to handle the incasement portion rotation, it is equipped with the case lid to handle the roof portion, case lid one side is equipped with the outlet duct, the outlet duct output is equipped with the absorption tower, absorption tower bottom output is equipped with circulating water pump, the circulating water pump output is equipped with the raceway. The utility model discloses a setting of buffer tank, tail gas treatment when can handling proruption a large amount of tail gas production is restricted in the throughput of device and directly discharges, the processing rate of the tail gas that also can be controlled simultaneously to can become intermittent type nature with reduction energy consumption, water consumption with tail gas treatment process, through the setting of handling the case, can handle most tail gas in the preliminary treatment case bucket, alleviate the processing pressure of absorption tower greatly.

Description

Borane gas mixture processing device

Technical Field

The utility model relates to a gas treatment technical field, concretely relates to borane mist processing treatment device.

Background

Diborane is also called as boron ethane and diborane, is an inorganic compound, is the simplest borane which can be separated at present, is colorless gas with unpleasant and unpleasant suffocating odor (vitamin B taste) at normal temperature and normal pressure, is not combusted in air dried at room temperature generally, but can be explosively combusted even at low temperature as long as being contacted with humid air to generate green flame, generate boron oxide and water and release a large amount of heat, the tail gas of the diborane can be discharged into the air after being treated by a tail gas treatment device, and the diborane is a starting material for preparing various other boron hydrides, can be used as a strong reducing agent of organic functional groups and is used for preparing high-purity single crystal boron. In the electronic industry, diborane is used as a gaseous impurity source, a doping agent for ion implantation and boron doping oxidation diffusion, and because boron and hydrogen have high combustion heat, a large amount of heat can be generated during the oxidation of borohydride, the heat released during the combustion is about twice of the calorific value of gasoline with the same weight, and the diborane can also be used as a high-energy fuel used by rockets or missiles.

However, in practical use, the existing borane has high chemical activity and is easy to react with various inorganic molecules and organic molecules, so that special attention needs to be paid in the processes of production, transportation, use and tail gas treatment, and in particular, when the tail gas is treated, potential risks such as explosion and the like are caused once improper operation is performed.

Therefore, it is necessary to develop a borane mixture processing device to solve the above problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a borane mist processing apparatus, setting through the buffer tank, tail gas treatment is restricted in the throughput of device and directly discharges when can handling proruption a large amount of tail gas production, the processing rate of tail gas also can be controlled simultaneously, and can become intermittent type nature with the tail gas treatment process in order to reduce the energy consumption, the water consumption, through the setting of handling the case, can handle most tail gas in the preliminary treatment case bucket, alleviate the processing pressure of absorption tower greatly, with the above-mentioned weak point in the solution technique.

In order to achieve the above object, the present invention provides the following technical solutions: a borane mixed gas processing device comprises a tail gas supply unit, wherein the output end of the tail gas supply unit is provided with a buffer tank, the output end of the bottom of one side of the buffer tank is provided with a processing box, the inside of the processing box is rotationally connected with two stirring rods, the top of the treatment box is provided with a box cover, one side of the box cover is provided with an air outlet pipe, the output end of the air outlet pipe is provided with an absorption tower, the output end of the bottom of the absorption tower is provided with a circulating water pump, the output end of the circulating water pump is provided with a water delivery pipe, one end of the water pipe extends to the inside of the absorption tower, one end of the water pipe is provided with a spray head, both sides of the inside of the absorption tower are provided with adsorption balls, the absorption tower is characterized in that the number of the absorption balls is set to be multiple, the absorption tower is internally provided with an absorption plate, the number of the absorption plates is set to be multiple and multiple, a plurality of through holes are formed in the absorption plates, and the output shaft of the circulating water pump is provided with a storage tank.

Preferably, the top of the box cover is provided with a cover handle, and the top of the buffer tank is provided with a lifting block.

Preferably, it is equipped with the supporting leg to handle the bottom half, supporting leg quantity sets up to a plurality ofly, and is a plurality of the supporting leg all is equipped with damping spring with handling the case junction.

Preferably, the number of the spray heads is set to be a plurality, and the plurality of spray heads are distributed at equal intervals along the horizontal direction of one end of the water conveying pipe.

Preferably, a sealing ring is arranged at the joint of the box cover and the treatment box, and an exhaust fan is arranged at the top of the absorption tower.

Preferably, the outer walls of the treatment box and the absorption tower are provided with observation windows, and the two observation windows are internally provided with glass.

Preferably, be equipped with the valve between buffer tank and the tail gas feed unit, valve quantity sets up to a plurality ofly, be equipped with the spark arrester between buffer tank and the processing case, spark arrester quantity sets up to two.

In the technical scheme, the utility model provides a technological effect and advantage:

1. through the arrangement of the buffer tank, the tail gas treatment can be directly discharged due to the treatment capacity of the device when a large amount of sudden tail gas is generated, the treatment rate of the tail gas can be controlled, the tail gas treatment process can be changed into intermittent to reduce energy consumption and water consumption, and most of the tail gas can be treated in the pretreatment tank barrel through the arrangement of the treatment tank, so that the treatment pressure of the absorption tower is greatly reduced;

2. through the setting of carrying the drawing piece, the buffer tank of being convenient for to take, setting through the case lid, can make things convenient for the change of interior borane treatment fluid of preliminary treatment bucket or the pouring of residue, set up through the damping spring transmission, be convenient for play the absorbing effect to whole box when handling incasement portion work, setting through the observation window, be convenient for observe inside behavior, accomplish real-time supervision's purpose, setting through the valve, be convenient for control the amount of inside processing at processing apparatus during operation, avoid inside overload and lead to the not good phenomenon of treatment effect to appear, can reduce through the spark arrester and appear behind the proruption as the absorption tower part, avoid the accident to stretch to production, use diborane's device, reduce accident risk.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings can be obtained by those skilled in the art according to these drawings.

FIG. 1 is a schematic view of a borane mixture processing apparatus according to the present invention;

FIG. 2 is a schematic view of the internal structure of the treatment tank of the present invention;

fig. 3 is a schematic diagram of the internal structure of the absorption tower of the present invention.

Description of reference numerals:

1. an exhaust gas supply unit; 2. a valve; 3. a buffer tank; 4. lifting the block; 5. a flame arrestor; 6. a treatment tank; 7. a stirring rod; 8. a box cover; 9. an air outlet pipe; 10. an absorption tower; 11. a water circulating pump; 12. a water delivery pipe; 13. a shower head; 14. an adsorption plate; 15. a through hole; 16. adsorbing the ball; 17. a storage tank; 18. a cover handle; 19. a seal ring; 20. a damping spring; 21. supporting legs; 22. an exhaust fan; 23. and (4) an observation window.

Detailed Description

In order to make the technical solution of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings.

The utility model provides a borane mixed gas processing device as shown in figures 1-3, which comprises a tail gas supply unit 1, wherein the output end of the tail gas supply unit 1 is provided with a buffer tank 3, the output end of the bottom of one side of the buffer tank 3 is provided with a processing box 6, two stirring rods 7 are rotatably connected inside the processing box 6, the top of the processing box 6 is provided with a box cover 8, one side of the box cover 8 is provided with an outlet pipe 9, the output end of the outlet pipe 9 is provided with an absorption tower 10, the output end of the bottom of the absorption tower 10 is provided with a circulating water pump 11, the output end of the circulating water pump 11 is provided with a water conveying pipe 12, one end of the water conveying pipe 12 extends into the absorption tower 10, one end of the water conveying pipe 12 is provided with a spray head 13, two sides inside the absorption tower 10 are respectively provided with an adsorption ball 16, the quantity of the adsorption balls 16 is set to be multiple, an adsorption plate 14 is arranged inside the absorption tower 10, the adsorption plates 14 are arranged in a plurality, a plurality of through holes 15 are formed in the adsorption plates 14, a storage tank 17 is arranged on an output shaft of the circulating water pump 11, firstly, tail gas is supplied to the unit 1, the valve 2 is opened, the tail gas can enter the buffer tank 3, the tail gas treatment can be directly discharged due to the treatment capacity of the device when a large amount of sudden tail gas is generated through the arrangement of the buffer tank 3, meanwhile, the treatment speed of the tail gas can be controlled, the tail gas treatment process can be changed into intermittent to reduce energy consumption and water consumption, most of the tail gas can be treated in the pretreatment tank barrel 6 through the arrangement of the treatment tank 6, the treatment pressure of the absorption tower 10 is greatly reduced, the tail gas can enter the treatment tank 6 through the buffer tank 3, treatment liquid is arranged in the treatment tank 6, the treatment liquid is stirred through the two stirring rods 7, and is stirred through the stirring rods 7, so that the tail gas can fully react with the treatment liquid, improve reaction efficiency, inside gas after the reaction can get into absorption tower 10 through outlet duct 9, gas can be because of adsorption plate 14 and adsorption ball 16 adsorb gas, and the gas that has handled can get into storage tank 17, accomplishes the processing.

Further, in above-mentioned technical scheme, 8 tops of case lid are equipped with the

lid

18, 3 tops of buffer tank are equipped with and carry and draw piece 4, through the setting of lid 18, are convenient for take case lid 8 and open and handle case 6, through the setting of carrying and drawing piece 4, are convenient for take buffer tank 3, through the setting of case lid 8, can make things convenient for the change of interior borane treatment fluid of preliminary treatment bucket or the pouring of residue.

Further, in above-mentioned technical scheme, it is equipped with supporting leg 21 to handle 6 bottoms, supporting leg 21 quantity sets up to a plurality ofly, and is a plurality of supporting leg 21 all is equipped with damping spring 20 with handling 6 junctions of case, through damping spring 20's setting, is convenient for play the absorbing effect of buffering to whole box when handling 6 inside workings in case.

Further, in the above technical solution, the number of the spray heads 13 is set to be plural, and the plural spray heads 13 are distributed at equal intervals along the horizontal direction of one end of the water pipe 12 and are set by the plural spray heads 13.

Further, in above-mentioned technical scheme, case lid 8 with handle case 6 junction and be equipped with sealing washer 19, absorption tower 10 top is equipped with exhaust fan 22, through sealing washer 19's setting, is convenient for guarantee to handle the stability of case 6 inside during operation, through exhaust fan 22's setting, is convenient for play the effect of exhaust to inside during operation.

Further, in above-mentioned technical scheme, handle case 6 and absorption tower 10 outer wall and all seted up observation window 23, two the inside glass that all is equipped with of observation window 23 through the setting of observation window 23, is convenient for observe inside behavior, accomplishes real-time supervision's purpose.

Further, in above-mentioned technical scheme, be equipped with valve 2 between buffer tank 3 and the tail gas supply unit 1, 2 quantity of valve set up to a plurality ofly, be equipped with spark arrester 5 between buffer tank 3 and the treatment box 6, spark arrester 5 quantity sets up to two, through the setting of valve 2, is convenient for control the inside volume of handling at processing apparatus at the during operation, avoids inside overload and leads to the not good phenomenon of treatment effect to appear, can reduce through spark arrester 5 and appear after the proruption situation when absorption tower 10 parts, avoids the accident to stretch to production, use diborane's device, reduces the risk of accident.

This practical theory of operation:

referring to the attached drawings 1-3 of the specification, when the device is used, firstly, tail gas is supplied to a tail gas supply unit 1, a valve 2 is opened, the tail gas can enter a buffer tank 3, the arrangement of the buffer tank 3 can deal with the direct emission of the tail gas treatment caused by the treatment capacity of the device when a large amount of sudden tail gas is generated, simultaneously, the treatment speed of the tail gas can be controlled, the tail gas treatment process can be changed into intermittent to reduce energy consumption and water consumption, most of the tail gas can be treated in a pretreatment tank barrel 6 through the arrangement of a treatment tank 6, the treatment pressure of an absorption tower 10 is greatly reduced, the tail gas can enter the treatment tank 6 through the buffer tank 3, treatment liquid is arranged in the treatment tank 6, the tail gas is stirred through two stirring rods 7 and is stirred through the stirring rods 7, the tail gas can be conveniently reacted with the treatment liquid, the reaction efficiency is improved, and the reacted gas can enter the absorption tower 10 through an air outlet pipe 9, the gas is adsorbed by the adsorption plate 14 and the adsorption balls 16, and the treated gas enters the storage tank 17 to complete the treatment;

referring to the attached drawings 1-3 of the specification, when using the device, through the setting of lifting block 4, buffer tank 3 convenient to take, through the setting of case lid 8, can make things convenient for the change of borane treatment fluid or the pouring out of residue in the preliminary treatment bucket, through the setting of damping spring 20, be convenient for play the effect of buffering shock attenuation to whole box when handling 6 internal work of case, through the setting of observation window 23, be convenient for observe inside behavior, accomplish real-time supervision's purpose, through the setting of valve 2, the volume of being convenient for control inside processing at processing apparatus during operation, avoid inside overload and lead to the not good phenomenon of treatment effect to appear, can reduce through back the spark arrester 5 when the proruption condition appears in absorption tower 10 part, avoid the accident to spread to production, use diborane's device, reduce the accident risk.

While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the present invention. Accordingly, the drawings and description are illustrative in nature and should not be construed as limiting the scope of the invention.

Claims

1. A borane gas mixture processing device comprises a tail gas supply unit (1), and is characterized in that: the tail gas supply unit is characterized in that the output end of the tail gas supply unit (1) is provided with a buffer tank (3), the output end of the bottom of one side of the buffer tank (3) is provided with a treatment box (6), the interior of the treatment box (6) is rotatably connected with two stirring rods (7), the top of the treatment box (6) is provided with a box cover (8), one side of the box cover (8) is provided with an air outlet pipe (9), the output end of the air outlet pipe (9) is provided with an absorption tower (10), the output end of the bottom of the absorption tower (10) is provided with a circulating water pump (11), the output end of the circulating water pump (11) is provided with a water conveying pipe (12), one end of the water conveying pipe (12) extends into the absorption tower (10), one end of the water conveying pipe (12) is provided with a spray header (13), the two sides of the interior of the absorption tower (10) are provided with adsorption balls (16), the number of the adsorption balls (16) is set to be multiple, and an adsorption plate (14) is arranged in the absorption tower (10), the quantity of adsorption plate (14) sets up to a plurality ofly, and is a plurality of adsorption plate (14) are inside all seted up a plurality of through-holes (15), circulating water pump (11) output shaft is equipped with storage tank (17).

2. A borane mixture processing apparatus according to claim 1, wherein: the top of the box cover (8) is provided with a cover handle (18), and the top of the buffer tank (3) is provided with a lifting block (4).

3. A borane mixture processing apparatus according to claim 1, wherein: handle case (6) bottom and be equipped with supporting leg (21), supporting leg (21) quantity sets up to a plurality ofly, and is a plurality of supporting leg (21) all are equipped with damping spring (20) with handling case (6) junction.

4. A borane mixture processing apparatus according to claim 1, wherein: the number of the spray heads (13) is set to be a plurality, and the spray heads (13) are distributed at equal intervals along the horizontal direction of one end of the water conveying pipe (12).

5. A borane mixture processing apparatus according to claim 1, wherein: and a sealing ring (19) is arranged at the joint of the box cover (8) and the treatment box (6), and an exhaust fan (22) is arranged at the top of the absorption tower (10).

6. A borane mixture processing apparatus according to claim 1, wherein: handle case (6) and absorption tower (10) outer wall and all seted up observation window (23), two observation window (23) inside all is equipped with glass.

7. A borane mixture processing apparatus according to claim 1, wherein: be equipped with valve (2) between buffer tank (3) and tail gas supply unit (1), valve (2) quantity sets up to a plurality of, be equipped with spark arrester (5) between buffer tank (3) and processing case (6), spark arrester (5) quantity sets up to two.