CN214254380U - Silicon chip basket of flowers memory device - Google Patents
Silicon chip basket of flowers memory device Download PDFInfo
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- CN214254380U CN214254380U CN202120533245.6U CN202120533245U CN214254380U CN 214254380 U CN214254380 U CN 214254380U CN 202120533245 U CN202120533245 U CN 202120533245U CN 214254380 U CN214254380 U CN 214254380U
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- belt
- silicon wafer
- jacking
- blocking
- basket
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Abstract
The utility model relates to a silicon chip makes technical field, discloses a silicon chip basket of flowers memory device, include: the silicon wafer basket with the silicon wafers can be placed on the conveying belt and conveyed downstream by the conveying belt; the blocking mechanism is arranged on the belt conveying mechanism and positioned between the two conveying belts, and is used for blocking the silicon wafer basket to a specified position; climbing mechanism, climbing mechanism include jacking board and jacking cylinder, and the jacking board is connected in the output of jacking cylinder and is located between two conveyer, and the jacking cylinder is installed on belt conveyer, and the jacking cylinder can be through jacking board with silicon chip basket of flowers from conveyer. Through the structure, the silicon wafer basket caching device can avoid friction between the basket and the belt, reduce pollution to the silicon wafer and improve the yield of the silicon wafer.
Description
Technical Field
The utility model relates to a silicon chip makes technical field, especially relates to a silicon chip basket of flowers memory device.
Background
In the process of manufacturing silicon wafers in a solar photovoltaic cell factory, the silicon wafers must be in a dust-free workshop with the constant temperature of 25 ℃, and the requirements on production equipment are extremely strict. During the operation process of the equipment, dust cannot be generated, the silicon wafer cannot be touched, otherwise, the silicon wafer can be polluted, the silicon wafer can be scratched, and the grade specification of the silicon wafer can be reduced.
The silicon wafer basket is used as a carrier of the silicon wafer, and generally comprises a dry basket and a wet basket, wherein the conveyed silicon wafers sequentially pass through process machines from front to back. According to the process requirements, the wet flower basket needs to pass through the following process flows: texturing, diffusing, laser SE, oxidizing, PSG removing, alkali polishing and annealing; the dried flower basket needs to be processed by the following process flow: annealing, backing film, front film, laser grooving and silk-screen printing. Although the silicon chip has the basket of flowers as the carrier, can make the silicon chip carry out the conveying through the friction with the belt in the fine direct contact of avoiding with equipment of in-process, but the basket of flowers is carried out the conveying, park the compactness in order to let a plurality of baskets of flowers, after the basket of flowers arrived assigned position, the belt still can rotate certain time and just stop, make and can take place the friction between basket of flowers and the belt, the wearing and tearing of basket of flowers have not only aggravated, still can cause the system fine hair cell body to pollute, the dust that the friction produced still pollutes the silicon chip easily and causes badly, improve the manufacturing cost of silicon chip.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a silicon chip basket of flowers memory device, this silicon chip basket of flowers memory device can avoid the friction between basket of flowers and the belt, reduces the pollution that the silicon chip receives, improves the yields of silicon chip.
To achieve the purpose, the utility model adopts the following technical proposal:
a silicon wafer basket cache device comprises: the silicon wafer basket with the silicon wafers can be placed on the conveying belt and conveyed downstream by the conveying belt; the blocking mechanism is arranged on the belt conveying mechanism and positioned between the two conveying belts, and is used for blocking the silicon wafer basket to a specified position; the jacking mechanism comprises a jacking plate and a jacking cylinder, the jacking plate is connected to the output end of the jacking cylinder and is located between two conveying belts, the jacking cylinder is installed on the belt conveying mechanism, and the jacking cylinder can lift the silicon wafer basket from the conveying belts through the jacking plate.
As a preferred scheme of the silicon wafer basket caching device, the blocking mechanism comprises a blocking plate and a blocking cylinder, the blocking plate is connected to the output end of the blocking cylinder, and the blocking cylinder is installed on the belt conveying mechanism.
As a preferred scheme of the silicon wafer basket caching device, the blocking mechanism further comprises a blocking mounting plate, and the blocking cylinder is mounted on the belt conveying mechanism through the blocking mounting plate.
As an optimal scheme of silicon chip basket of flowers memory device, climbing mechanism still includes the jacking mounting panel, the jacking mounting panel includes interconnect's bottom plate and curb plate, the curb plate connect in on the belt transport mechanism, jacking cylinder install in on the bottom plate.
As a preferred scheme of the silicon wafer basket caching device, the jacking mechanism further comprises a guide assembly, the guide assembly comprises a lifting guide pillar and a linear bearing, the linear bearing is mounted on the bottom plate, one end of the lifting guide pillar is connected to the jacking plate, and the other end of the lifting guide pillar is matched in the linear bearing.
As a preferred scheme of the silicon wafer basket caching device, the jacking mechanism further comprises a floating joint, and the output end of the jacking cylinder is connected to the jacking plate through the floating joint.
As a preferred scheme of silicon chip basket of flowers memory device, belt transport mechanism still includes conveying frame, driven shaft, driving shaft and driving motor, driving motor's output connect in the driving shaft, the driven shaft with the driving shaft all rotate connect in on the conveying frame, the driven shaft with all be equipped with the band pulley on the driving shaft, the band pulley is used for driving conveying belt removes.
As a preferred scheme of the silicon wafer basket cache device, the belt conveying mechanism further comprises a guide strip, the guide strip is installed on the conveying rack through a guide strip installation plate, and the guide strip is used for guiding the silicon wafer basket.
As an optimal scheme of the silicon wafer basket caching device, the belt conveying mechanism further comprises a tensioning adjusting plate, the tensioning adjusting plate is adjustably mounted on the conveying rack, and the driven shaft is mounted on the tensioning adjusting plate.
As a preferred scheme of the silicon wafer basket caching device, the belt conveying mechanism further comprises a belt shield, and the belt shield is mounted on the conveying rack and used for protecting the conveying belt.
The utility model has the advantages that:
the utility model provides a silicon chip basket of flowers memory device, this silicon chip basket of flowers memory device includes belt transport mechanism, stop mechanism and climbing mechanism, the silicon chip basket of flowers is arranged in on belt transport mechanism's the conveying belt, stop mechanism is used for blockking the silicon chip basket of flowers in the assigned position, it is compact to make the silicon chip basket of flowers park, climbing mechanism's jacking cylinder can be with the jacking board jacking in order to push up the silicon chip basket of flowers from conveyer, conveyer and silicon chip basket of flowers's friction has been avoided, silicon chip basket of flowers's wearing and tearing have not only been reduced, the production of dust has still been reduced, the pollution that the silicon chip received has been reduced, the yields of silicon chip has been improved.
Drawings
Fig. 1 is a schematic perspective view of a silicon wafer basket buffer device according to an embodiment of the present invention;
FIG. 2 is an enlarged view of a blocking mechanism of the silicon wafer basket buffer device according to an embodiment of the present invention;
fig. 3 is a schematic structural view of a viewing angle of a jacking mechanism of the silicon wafer basket cache device according to the embodiment of the present invention;
fig. 4 is a schematic structural diagram of another view angle of the jacking mechanism of the silicon wafer basket cache device according to the embodiment of the present invention.
In the figure:
11. a conveyor belt; 12. a conveyor frame; 13. a driven shaft; 14. a drive shaft; 15. a drive motor; 16. a guide strip; 17. a guide strip mounting plate; 18. tensioning the adjusting plate; 19. a belt guard;
2. a blocking mechanism; 21. a blocking plate; 22. a blocking cylinder; 23. blocking the mounting plate;
31. a jacking plate; 32. jacking a cylinder; 33. jacking the mounting plate; 34. a lifting guide post; 35. a linear bearing; 36. a floating joint;
100. and a silicon wafer flower basket.
Detailed Description
In order to make the technical problem solved by the present invention, the technical solutions adopted by the present invention and the technical effects achieved by the present invention clearer, the following will be described in further detail with reference to the accompanying drawings, and obviously, the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by the skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The technical solution of the silicon wafer basket buffer device provided by the present invention is further described by the specific embodiments with reference to the accompanying drawings.
The embodiment provides a silicon chip basket of flowers memory device, as shown in fig. 1, this silicon chip basket of flowers memory device includes belt transport mechanism, stop mechanism 2 and climbing mechanism, silicon chip basket of flowers 100 is arranged in on the belt transport mechanism, stop mechanism 2 is used for blockking silicon chip basket of flowers 100 in the assigned position, stop mechanism 2 can make silicon chip basket of flowers 100 park compactly, climbing mechanism can push up silicon chip basket of flowers 100 off belt transport mechanism, the friction between belt transport mechanism and silicon chip basket of flowers 100 has been avoided, silicon chip basket of flowers 100's wearing and tearing have not only been reduced, be favorable to prolonging silicon chip basket of flowers 100's life, can also reduce the production of dust, thereby reduce the pollution that the silicon chip received, improve the yields of silicon chip.
In this embodiment, the belt conveying mechanism further includes a conveying rack 12, a driven shaft 13, a driving shaft 14, a driving motor 15 and a conveying belt 11, an output end of the driving motor 15 is connected to the driving shaft 14, the driven shaft 13 and the driving shaft 14 are both rotatably connected to the conveying rack 12, the conveying belt 11 includes two belts arranged in parallel at intervals, belt pulleys are arranged at two ends of the driven shaft 13 and the driving shaft 14 and used for driving the two conveying belts 11 to move, and the silicon wafer basket 100 containing silicon wafers can be placed on the conveying belt 11 and conveyed downstream by the conveying belt 11.
Preferably, the belt conveying mechanism further comprises a guide bar 16, the guide bar 16 is mounted on the conveying rack 12 through a guide bar mounting plate 17, and the guide bar 16 is used for guiding the silicon wafer baskets 100 moving along the conveying belt 11, so that the silicon wafer baskets 100 can be prevented from falling off the conveying belt 11.
In this embodiment, the belt conveying mechanism further comprises a tension adjusting plate 18, the tension adjusting plate 18 is adjustably mounted on the conveying frame 12, and the driven shaft 13 is mounted on the tension adjusting plate 18 and can move along with the movement of the tension adjusting plate 18 to realize the tension or adjustment of the conveying belt 11.
Preferably, the belt transfer mechanism further comprises a belt guard 19, and the belt guard 19 is mounted on the transfer frame 12 to protect the transfer belt 11 from external components affecting the operation of the transfer belt 11.
In the present embodiment, the blocking mechanism 2 is mounted on the conveyor frame 12 and located between the two conveyor belts 11, and the blocking mechanism 2 is used for blocking the silicon wafer basket 100 to a specified position. As shown in fig. 2, the blocking mechanism 2 includes a blocking plate 21 and a blocking cylinder 22, the blocking plate 21 is connected to an output end of the blocking cylinder 22, the blocking cylinder 22 is installed on the conveying rack 12, and the blocking cylinder 22 can drive the blocking plate 21 to move to block the silicon wafer basket 100 to a designated position. Preferably, the blocking mechanism 2 further comprises a blocking mounting plate 23, and the blocking cylinder 22 is mounted on the conveyor frame 12 through the blocking mounting plate 23, so that the mounting of the blocking cylinder 22 is firm and reliable.
Preferably, as shown in fig. 3, the jacking mechanism includes jacking plate 31 and jacking cylinder 32, jacking plate 31 is connected in jacking cylinder 32's output and is located between two conveyer 11, jacking cylinder 32 installs on belt conveyer, jacking cylinder 32 can push up silicon chip basket of flowers 100 from conveyer 11 through jacking plate 31, avoid the friction between silicon chip basket of flowers 100 and conveyer 11, not only be favorable to prolonging the life of silicon chip basket of flowers 100, can also reduce the production of dust, thereby reduce the pollution that the silicon chip received, improve the yields of silicon chip.
In this embodiment, as shown in fig. 3, the jacking mechanism further includes a jacking mounting plate 33, the jacking mounting plate 33 includes a bottom plate and a side plate that are connected to each other, the side plate is connected to the conveying frame 12, and the jacking cylinder 32 is installed on the bottom plate, so that the jacking cylinder 32 is firmly installed.
Preferably, as shown in fig. 3, the jacking mechanism further includes a guiding assembly, the guiding assembly includes a lifting guide pillar 34 and a linear bearing 35, one end of the linear bearing 35 is mounted on the bottom plate, one end of the lifting guide pillar 34 is connected to the jacking plate 31, the other end of the lifting guide pillar 34 is fitted in the linear bearing 35, and the guiding assembly can lift the jacking plate 31 in a certain direction, so as to avoid the deviation of the lifting process.
Further, as shown in fig. 4, the jacking mechanism further includes a floating joint 36, the output end of the jacking cylinder 32 is connected to the jacking plate 31 through the floating joint 36, the floating joint 36 not only has buffering and vibration damping effects, but also can eliminate errors, protect the jacking cylinder 32 and the jacking plate 31 from running stably, and prolong the service life of the jacking cylinder and the jacking plate 31.
It is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Numerous obvious variations, rearrangements and substitutions will now occur to those skilled in the art without departing from the scope of the invention. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A silicon wafer basket cache device is characterized by comprising:
the silicon wafer basket conveyor comprises a belt conveying mechanism and a silicon wafer conveying mechanism, wherein the belt conveying mechanism comprises two conveying belts (11) which are arranged in parallel at intervals, and a silicon wafer basket (100) filled with silicon wafers can be placed on the conveying belts (11) and is conveyed to the downstream by the conveying belts (11);
the blocking mechanism (2) is installed on the belt conveying mechanism and located between the two conveying belts (11), and the blocking mechanism (2) is used for blocking the silicon wafer basket (100) to a specified position;
climbing mechanism, climbing mechanism includes jacking board (31) and jacking cylinder (32), jacking board (31) connect in the output of jacking cylinder (32) just is located two between conveyer (11), jacking cylinder (32) install in on the belt conveyer, jacking cylinder (32) can pass through jacking board (31) will silicon chip basket of flowers (100) top is left conveyer (11).
2. The silicon wafer basket cache device according to claim 1, wherein the blocking mechanism (2) comprises a blocking plate (21) and a blocking cylinder (22), the blocking plate (21) is connected to the output end of the blocking cylinder (22), and the blocking cylinder (22) is mounted on the belt conveying mechanism.
3. The silicon wafer basket buffer device according to claim 2, wherein the blocking mechanism (2) further comprises a blocking mounting plate (23), and the blocking cylinder (22) is mounted on the belt conveying mechanism through the blocking mounting plate (23).
4. The silicon wafer basket cache device according to claim 1, wherein the jacking mechanism further comprises a jacking mounting plate (33), the jacking mounting plate (33) comprises a bottom plate and a side plate which are connected with each other, the side plate is connected to the belt conveying mechanism, and the jacking cylinder (32) is mounted on the bottom plate.
5. The silicon wafer basket buffer device according to claim 4, wherein the lifting mechanism further comprises a guiding assembly, the guiding assembly comprises a lifting guide pillar (34) and a linear bearing (35), the linear bearing (35) is mounted on the bottom plate, one end of the lifting guide pillar (34) is connected to the lifting plate (31), and the other end of the lifting guide pillar (34) is fitted in the linear bearing (35).
6. The silicon wafer basket cache device according to claim 1, wherein the jacking mechanism further comprises a floating joint (36), and the output end of the jacking cylinder (32) is connected to the jacking plate (31) through the floating joint (36).
7. The silicon wafer basket cache device according to claim 1, wherein the belt transmission mechanism further comprises a transmission rack (12), a driven shaft (13), a driving shaft (14) and a driving motor (15), an output end of the driving motor (15) is connected to the driving shaft (14), the driven shaft (13) and the driving shaft (14) are both rotatably connected to the transmission rack (12), and belt pulleys are arranged on the driven shaft (13) and the driving shaft (14) and used for driving the transmission belt (11) to move.
8. The silicon wafer basket cache device according to claim 7, wherein the belt conveying mechanism further comprises a guide bar (16), the guide bar (16) is mounted on the conveying rack (12) through a guide bar mounting plate (17), and the guide bar (16) is used for guiding the silicon wafer basket (100).
9. The silicon wafer basket cache apparatus of claim 7, wherein the belt conveyor mechanism further comprises a tensioning adjustment plate (18), the tensioning adjustment plate (18) being adjustably mounted to the conveyor frame (12), the driven shaft (13) being mounted to the tensioning adjustment plate (18).
10. The silicon wafer basket cache device of claim 7, wherein the belt conveyor mechanism further comprises a belt shield (19), the belt shield (19) being mounted on the conveyor frame (12) for shielding the conveyor belt (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120533245.6U CN214254380U (en) | 2021-03-15 | 2021-03-15 | Silicon chip basket of flowers memory device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120533245.6U CN214254380U (en) | 2021-03-15 | 2021-03-15 | Silicon chip basket of flowers memory device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214254380U true CN214254380U (en) | 2021-09-21 |
Family
ID=77727887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120533245.6U Active CN214254380U (en) | 2021-03-15 | 2021-03-15 | Silicon chip basket of flowers memory device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214254380U (en) |
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2021
- 2021-03-15 CN CN202120533245.6U patent/CN214254380U/en active Active
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