CN214251335U - Device for detecting rotation performance of rotating mechanism - Google Patents

Abstract

The utility model discloses a device for detecting the rotation performance of a rotating mechanism, which comprises a balance mechanism, a detected rotating mechanism, a supporting mechanism and a rotation driving mechanism which are in rotating connection in sequence, and a control module connected with the rotation driving mechanism, the balance mechanism is provided with a first rotating shaft, the support mechanism is provided with a second rotating shaft, the upper end of the first rotating shaft is rotationally fixed, the lower end of the first rotating shaft is arranged in the rotation center of the rotation mechanism in a penetrating way to form a central rotating shaft of the rotation mechanism, the lower end of the first rotating shaft also passes through the rotation mechanism to be coaxially and fixedly connected with the upper end of the second rotating shaft, the lower end of the second rotating shaft is rotationally connected with the rotation driving mechanism, the torque value or the load factor value from the rotary driving mechanism is obtained through the control module and is used as a basis for evaluating whether the rotary performance of the rotary mechanism is qualified or not, so that whether the rotary performance of the rotary mechanism after assembly and maintenance is qualified or not can be objectively detected.

Description

Device for detecting rotation performance of rotating mechanism

Technical Field

The utility model relates to a test equipment technical field especially relates to a device for detecting good and bad rotational performance of mechanical slewing mechanism.

Background

In the field of vacuum coating, for uniform coating of a plurality of products entering a coating vacuum cavity, a rotating mechanism (such as a planetary rotating bracket, which belongs to a product carrier) with a multistage transmission function is often required to be arranged on a working platform in the vacuum cavity, and the multistage transmission structure of the rotating mechanism drives a coating jig mounted on the rotating mechanism to revolve around the rotating center of the rotating mechanism, and simultaneously drives the coating jig to rotate on the rotating mechanism, so that uniform coating opportunities can be obtained on the surfaces, which need coating, of the products mounted on the coating jig, and the consistency of the coating thickness and the color of the coated products is ensured.

The multi-stage transmission of the rotating mechanism is usually realized by using a sun gear to drive a plurality of planetary gears meshed with the sun gear to rotate, and transmitting torque in a staged manner. Because the central gear needs to simultaneously drive a plurality of planetary gears to synchronously rotate, and each gear needs to be matched with a corresponding bearing through a rotating shaft, how to ensure the stability and reliability of the operation between the gears and between the rotating shaft of each gear and the bearing in the film coating process is very important. For a specific coating production process, the rotating resistance of the rotating mechanism changes along with the increase of the use frequency and the use time, such as the resistance becomes larger, the coating is stuck and the like, and even the coating is stuck.

At present, after the rotating mechanism is assembled and maintained, a reliable detection means is not available for prejudging the workability of the rotating mechanism, and whether the assembling and maintaining states of a gear and a bearing in the rotating mechanism are qualified or not and whether the rotation is smooth or not can be roughly judged only by a manual induction mode. However, the judgment method is lack of clear inspection standards, and cannot completely check whether the torque of the gear and the bearing in the rotating mechanism reaches the standard, so that accurate judgment cannot be made, and the problem that the rotating mechanism which is qualified in judgment is stuck even in practical work is often caused, so that the production yield is seriously influenced.

Therefore, there is a need in the art to provide a device for objectively detecting the rotation performance of a rotation mechanism, which effectively prevents the rotation mechanism from being jammed due to excessive resistance during actual operation.

Reference documents: planetary rotating bracket of CN201220026585.0 vacuum coating device

SUMMERY OF THE UTILITY MODEL

The utility model aims at overcoming the not enough of prior art, provide a device for detecting slewing mechanism rotation performance.

The utility model discloses a technical scheme who realizes above-mentioned purpose is:

the utility model provides a device for detecting the rotation performance of a rotating mechanism, which comprises a balance mechanism, a detected rotating mechanism, a supporting mechanism, a rotation driving mechanism and a control module, wherein the balance mechanism, the detected rotating mechanism, the supporting mechanism and the rotation driving mechanism are sequentially connected in a rotating way, and the control module is connected with the rotation driving mechanism; wherein

The balance mechanism is provided with a first rotating shaft, the support mechanism is provided with a second rotating shaft, the upper end of the first rotating shaft is rotationally fixed, the lower end of the first rotating shaft penetrates through the rotating center of the rotating mechanism to form a central rotating shaft of the rotating mechanism, meanwhile, the lower end of the first rotating shaft penetrates through the rotating mechanism to be coaxially and fixedly connected with the upper end of the second rotating shaft, and the lower end of the second rotating shaft is rotationally connected with the rotation driving mechanism;

and acquiring a torque value or a load factor value from the rotary driving mechanism through the control module, and using the torque value or the load factor value as a basis for evaluating whether the rotation performance of the rotary mechanism is qualified or not.

Furthermore, the balance mechanism is further provided with an upper cover and a cantilever, the upper end of the first rotating shaft is in rotating fit with the upper cover, and the upper cover and the rotation driving mechanism are kept relatively fixed through the cantilever.

Furthermore, the supporting mechanism is further provided with a hollow body, the second rotating shaft is arranged in the hollow inner part of the body in a penetrating mode in a matching mode, a shaft end groove is formed in the upper end of the second rotating shaft, the lower end of the first rotating shaft is contained in the shaft end groove in a matching mode and is fixedly connected with the upper end of the second rotating shaft in a coaxial mode, and the lower end of the second rotating shaft penetrates out of the lower end of the body and is connected with the rotating driving mechanism in a rotating mode through a coupler.

Furthermore, a shell is arranged outside the rotating mechanism, a fixed seat is arranged on the lower end face of the shell, a supporting seat is arranged on the upper end face of the body, the rotating mechanism is supported on the supporting mechanism through insertion type matching between the fixed seat and the supporting seat, and the first rotating shaft is further matched and penetrated in the fixed seat and the supporting seat.

Furthermore, the fixed seat and the supporting seat are in plug-in connection through up-down matching of a pin and a pin groove, the upper end of the second rotating shaft enters the supporting seat, and the shaft end groove is connected with the lower end of the first rotating shaft through a cylindrical pin.

Furthermore, the rotation driving mechanism is arranged on a base and fixed on the base through a support, the upper end of the cantilever is connected with the upper cover, and the lower end of the cantilever is fixed on the support.

Further, the rotation driving mechanism comprises a motor, and the motor is connected with the second rotating shaft through a transmission.

Further, the upper cover is horizontally connected with the cantilever, the upper end surface of the first rotating shaft is arc-shaped or plane, a bearing with an arc-shaped bottom surface groove or a bearing with a plane bottom surface groove is correspondingly arranged on the lower end surface of the upper cover, and the first rotating shaft abuts against the arc-shaped or plane bottom surface of the bearing groove of the upper cover through the arc-shaped or plane upper end surface of the first rotating shaft, so that the first rotating shaft and the upper cover are in running fit.

Furthermore, the upper cover is provided with a first horizontal part, a second horizontal part and a vertical part, the first horizontal part is arranged on one end of the second horizontal part in a protruding mode, the bearing is arranged on the lower end face of the first horizontal part, a horizontal fixing shaft is arranged on the side face of the vertical part, the other end of the second horizontal part is sleeved on the fixing shaft through a shaft hole and fixed with the vertical part through a clamp sleeved on the fixing shaft, a horizontal mounting plate is arranged at the upper end of the cantilever, the lower end of the vertical part penetrates through the mounting plate and fixed with the mounting plate through a nut, and a mass block is arranged on the upper cover.

Further, the control module comprises a servo driver and an upper computer, the servo driver is connected with the motor, and the upper computer acquires a torque value or a load rate value acquired by the servo driver and coming from the rotary driving mechanism and displays the torque value or the load rate value through a display.

Compared with the prior art, the utility model has the advantages of it is following:

(1) according to the corresponding relation between the rotating resistance of the rotating mechanism and the torque or the load rate of the motor, the rotating performance of the rotating mechanism is represented by collecting the torque value or the load rate value of the motor and comparing the torque value or the load rate value with the set torque value or the set load rate value, whether the rotating performance of the rotating mechanism after assembly and maintenance is qualified can be objectively detected, and the periodic rotating torque value and the normal maintenance period of the rotating mechanism can be effectively and quickly detected.

(2) The rotating working state of the rotating mechanism in the vacuum coating cavity can be simulated, and the torque value or load rate value data can be measured under the conditions of cold state and hot state before and after entering and exiting the furnace, so that the measured result is more effective.

(3) Through setting for overload protection, avoid causing the motor to transship because of slewing mechanism torsion is too big, have higher security.

(4) Through setting up balance mechanism, establish coaxial connection with slewing mechanism's center of rotation between, can effectively keep slewing mechanism's rotation steady, make balance mechanism, the slewing mechanism who is detected, supporting mechanism and the motor be in the operation under coaxial state all the time, improved the accuracy of testing result.

(5) The balance mechanism is provided with the combined upper cover structure with three-direction adjusting function, and the combined upper cover structure is matched with the first rotating shaft, the cantilever and the bracket, so that the verticality between the first rotating shaft and the rotating mechanism can be accurately adjusted, and the rotating centers of the first rotating shaft and the rotating mechanism and the motor are ensured to be in a coaxial state all the time; meanwhile, the mass block pressed on the upper cover can improve the stability of the upper cover when the bearing and the first rotating shaft are matched, and the first rotating shaft is prevented from shaking due to the influence of torsion in the rotating process.

(6) By arranging the supporting mechanism between the rotating mechanism and the motor, installing the rotating mechanism and the supporting mechanism in an up-down plug-in mode and fixing the rotating mechanism and the supporting mechanism through the bracket, not only can the gravity action of the rotating mechanism on the motor be avoided, but also the stability of the rotating mechanism during rotation can be kept, and the detection precision is effectively improved.

(7) The base is set to have a certain weight, so that the gravity center can be ensured to be stable during measurement; meanwhile, 4 foot cups arranged below the base and the leveling ruler arranged on the plane of the base or the plane of the bracket are utilized, and the horizontal state of the whole device can be simply and conveniently adjusted by adjusting the foot cups and observing the horizontal state of the leveling ruler.

Drawings

Fig. 1-2 are schematic structural diagrams of an apparatus for detecting rotation performance of a rotating mechanism according to a preferred embodiment of the present invention.

Fig. 3 is a schematic view of a bracket and a cantilever structure disposed on a base according to a preferred embodiment of the present invention.

Fig. 4 is a schematic view of an outline structure of a supporting mechanism according to a preferred embodiment of the present invention.

Fig. 5 is a schematic view of an installation structure between a supporting mechanism and a rotating mechanism according to a preferred embodiment of the present invention.

Fig. 6 is a schematic view of an upper cover according to a preferred embodiment of the present invention.

In the figure, 1, a base, 2, a support, 3, a coupling, 4, an observation window, 5, a supporting mechanism, 6, a rotating mechanism, 7, a first rotating shaft (connecting rod shaft), 8, an upper cover, 9, a cantilever, 10, a protective cover, 11, a control module, 12, a transmission (speed reducer), 13, a motor (rotating driving mechanism), 14, a protective shell, 15, a mounting plate, 16, a body, 17, a second rotating shaft, 18, a shaft end groove, 19, a cylindrical pin, 20, a supporting seat, 21, a fixed seat, 22, a fixed pin (pin), 23, a first horizontal part, 24, a mass block, 25, a clamp, 26, a fixed shaft, 27, a vertical part, 28, a nut, 29, a second horizontal part and 30 are included.

Detailed Description

In order to better understand the technical solution of the present invention, the following detailed description is made by using specific embodiments.

Please refer to fig. 1-2. The utility model discloses a device for detecting slewing mechanism rotation performance can be including forming in proper order to rotate the coupling balance mechanism 7, 8, 9, the slewing mechanism 6, the supporting mechanism 5 and the rotation actuating mechanism 13 that are detected to and connect the control module 11 that rotates actuating mechanism 13.

The balancing mechanism 7, 8, 9 is provided with a first rotating shaft (link shaft) 7 arranged in the vertical direction. Wherein, the upper end of the first rotating shaft 7 is in a rotatable and relatively fixed state; in particular, the upper end of the first shaft 7 may be relatively fixed by a rotatable engagement with a fixedly arranged upper cover 8 structure. The lower end of the first rotating shaft 7 is inserted into the center of rotation of the rotating mechanism 6 and forms the center axis of the rotating mechanism 6.

The rotating mechanism 6 may have a multistage transmission structure. Generally, the rotating mechanism 6 can use a plurality of planetary gears meshed with a sun gear to rotate, so as to realize the multi-stage transmission function in a stepped torque transmission manner. The central gear can synchronously drive a plurality of planetary gears to rotate, and each gear is matched with a corresponding bearing through a rotating shaft (gear shaft).

A specific structure form of the rotating mechanism can be referred to by the following documents: CN201220026585.0 vacuum coating device's planet rotation support, but this is not limiting.

The utility model discloses in to the first pivot 7 in the rotation center (the gear shaft of the sun gear of slewing mechanism 6) of wearing to locate slewing mechanism 6 replaces slewing mechanism 6's center pin (the gear shaft of the sun gear), thereby can guarantee the straightness that hangs down between slewing mechanism 6 and the first pivot 7, is in coaxial state between the rotation center of first pivot 7 and slewing mechanism 6 has both effectively been guaranteed, thereby can improve the accuracy that detects.

The first shaft 7 and the rotating mechanism 6, such as a central gear thereof, may be relatively fixed in a conventional manner so that the rotating mechanism 6 can synchronously transmit power (torque) in stages under the rotation of the first shaft 7.

Please refer to fig. 4-5. The support mechanism 5 is arranged between the detected rotating mechanism 6 and the rotation driving mechanism 13, is used for supporting the rotating mechanism 6 arranged on the support mechanism 5, and utilizes a certain mass of the support mechanism 5 to ensure the stability of the rotating mechanism 6 in horizontal operation and prevent the rotating mechanism 6 from shifting. The supporting mechanism 5 is provided with a hollow body 16 with an upper opening and a lower opening, the shell 30 is arranged outside the rotating mechanism 6, and the rotating mechanism 6 can be fixed on the upper end surface of the supporting mechanism 5 by the body 16 of the supporting mechanism 5 providing support for the lower end surface of the shell 30 of the rotating mechanism 6.

A hollow body 16 of the supporting mechanism 5 is provided with a second rotating shaft 17; the second rotating shaft 17 is disposed through the hollow interior of the body 16 and exposed from the upper and lower ends of the body 16. The second rotating shaft 17 may be disposed through the hollow interior of the body 16 by a bearing fit. In this case, a shaft end groove 18 can be formed in the upper end of the second rotary shaft 17, and the shaft end groove 18 can be, for example, a U-shaped groove structure. Meanwhile, the lower end of the first rotating shaft 7 is inserted into the U-shaped shaft end groove 18 to be matched with the second rotating shaft 17, and the shaft end groove 18 and the lower end of the first rotating shaft 7 can be fixedly connected through a cylindrical pin 19, so that the first rotating shaft 7 and the second rotating shaft 17 are coaxially connected.

The lower end of the second shaft 17 can extend out of the lower end of the body 16 and can be connected to the rotary drive 13 via a coupling 3.

Please refer to fig. 1-2. The rotational drive mechanism 13 may comprise a motor 13, which may be a servo motor 13, for example. The motor 13 may be connected to the coupling 3 through a transmission (reducer) 12, thereby forming a coaxial connection arranged in sequence between the motor 13 (motor 13 shaft), the transmission 12 (transmission shaft), the coupling 3, the second shaft 17 and the first shaft 7. The arrangement can improve the detection accuracy to the maximum extent.

Please refer to fig. 5. In a preferred embodiment, a fixing seat 21 can be installed on the lower end face of the housing 30 of the rotating mechanism 6; meanwhile, a supporting seat 20 matched with the fixed seat 21 can be arranged on the upper end surface of the body 16 of the supporting mechanism 5. The rotating means 6 is thus supported on the support means 5 by the mounting engagement between the fixed seat 21 and the bearing seat 20.

Furthermore, the fixing seat 21 and the supporting seat 20 (horseshoe structure) can be connected in an insertion manner through the vertical matching structure of the pin and the pin groove, for example, the vertical matching structure of the fixing pin 22 and the pin groove, so that the rotating mechanism 6 can be conveniently placed on the supporting mechanism 5 for detection, the rotating mechanism 6 can be conveniently detached from the supporting mechanism 5 after detection, and meanwhile, the detection precision can be guaranteed against being influenced by assembling and disassembling.

Passages are respectively arranged in the middle parts of the fixed seat 21 and the supporting seat 20, so that the lower end of the first rotating shaft 7 can extend and be matched and penetrated in the fixed seat 21 and the supporting seat 20. At the same time, the upper end of the second shaft 17 can also enter into the bearing block 20, so that it can be connected to the lower end of the first shaft 7 by means of the shaft end groove 18 and locked with the cylindrical pin 19. In a specific example, the main body of the first rotating shaft 7 may be in the shape of a hexagonal bar, the shaft end slot 18 has a cylindrical slot hole capable of receiving the hexagonal bar-shaped first rotating shaft 7, and the cylindrical pin 19 may be a cylindrical pin 19; the hexagonal-bar-shaped upper end of the first rotation shaft 7 is machined to be cylindrical and may have a circular-arc-shaped upper end surface or a flat upper end surface so as to form a rotating fit with the upper cover 8.

Please refer to fig. 3 in conjunction with fig. 1-2. The device of the utility model can be arranged on a base 1 and fixed by a bracket 2. Specifically, the motor 13 may be vertically installed on the base 1, and a rotation shaft of the motor 13 may be in a vertically upward state. The input end transmission shaft of the speed reducer 12 is coaxially connected with the rotating shaft of the motor 13, and the output end transmission shaft of the speed reducer 12 is in a vertical upward state. The housing of the speed reducer 12 is fixed to the bracket 2. The coupler 3 and the supporting mechanism 5 are sequentially arranged on the output end transmission shaft of the speed reducer 12, and the upper end of the body 16 of the supporting mechanism 5 can be fixedly arranged with the support 2 through a protective cover 10.

The protective case 14 may be attached to a side surface of the body 16 to protect the body 16 and the coupling 3, and may be attached and fixed to the bracket 2 through a lower end of the protective case 14.

The upper end of the supporting mechanism 5 (the body 16) penetrates out of the upper part of the protective cover 10, so that the detected rotating mechanism 6 can be directly installed with the body 16 in a plug-in mode.

The first rotating shaft 7 is inserted into the center of rotation of the rotating mechanism 6 and the lower end of the first rotating shaft 7 is dropped downward into the U-shaped shaft end groove 18 at the upper end of the second rotating shaft 17 in the support mechanism 5. Through the observation window 4 arranged on the side surface of the protective cover 10, the cylindrical pin is inserted into the U-shaped shaft end groove 18 and the mounting hole on the first rotating shaft 7 through the through hole on the side surface of the supporting seat 20, so that the first rotating shaft 7 and the second rotating shaft 17 are fixedly mounted. Further fixing the first rotating shaft 7 and the rotating mechanism 6.

A cantilever 9 is vertically arranged on the bracket 2, an upper cover 8 is arranged at the upper end of the cantilever 9, the upper cover 8 is buckled between the upper end of the first rotating shaft 7 and the upper end of the first rotating shaft 7 to form rotating fit, and therefore the upper end of the first rotating shaft 7 is kept relatively fixed with the motor 13 and the like through the upper cover 8 and the cantilever 9. The first rotary shaft 7, the upper cover 8 and the cantilever 9 are part of a balancing mechanism 7, 8, 9.

In a preferred embodiment, the upper cover 8 is horizontally connected with the cantilever 9, the upper end surface of the first rotating shaft 7 is in a circular arc shape, a bearing with a groove with a circular arc bottom surface is arranged on the lower end surface of the upper cover 8, and the circular arc upper end surface of the first rotating shaft 7 abuts against the circular arc bottom surface of the groove of the bearing of the upper cover 8, so that the first rotating shaft 7 and the upper cover 8 are in rotating fit. Alternatively, the upper end surface of the first rotating shaft 7 is a flat surface, the lower end surface of the upper cover 8 is provided with a bearing with a groove of a flat bottom surface, and the first rotating shaft 7 abuts against the flat bottom surface of the groove of the bearing of the upper cover 8 through the flat upper end surface, so that the first rotating shaft 7 and the upper cover 8 form a rotating fit.

Please refer to fig. 6 in conjunction with fig. 1-3. Further, the upper cover 8 is a combined structure provided with a first horizontal portion 23, a second horizontal portion 29, and a vertical portion 27. The first horizontal portion 23 is protruded from one end (left end in the figure) of the second horizontal portion 29, and a bearing having a circular arc-shaped groove is provided on a lower end surface of the first horizontal portion 23. A horizontal fixing shaft 26 is provided on a side surface of the vertical portion 27, and the other end (right end in the drawing) of the second horizontal portion 29 is fitted over the fixing shaft 26 through a shaft hole, so that the second horizontal portion 29 can rotate with respect to the vertical portion 27 and can be fixed to the vertical portion 27 by a clip 25 fitted over the fixing shaft 26. The upper end of the cantilever 9 is provided with a horizontal mounting plate 15, and the lower end of the vertical part 27 passes through the mounting plate 15 and can be fixed with the mounting plate 15 by a nut 28, so that the relative position between the upper cover 8 and the upper end of the first rotating shaft 7 can be adjusted by adjusting the insertion depth and the relative angle of the lower end of the vertical part 27 on the mounting plate 15. Like this, through set up the combination formula upper cover 8 structure that has three direction regulatory function on balance mechanism 7, 8, 9, with first pivot 7, cantilever 9 and support 2 cooperation, can be used for the straightness that hangs down between accurate adjustment first pivot 7 and the slewing mechanism 6, guarantee that first pivot 7 and slewing mechanism 6 rotation center, motor 13 are in coaxial state all the time.

In a preferred embodiment, a mass 24 is also provided on the upper cover 8. The mass block 24 pressed on the upper cover 8 can improve the stability of the matching between the bearing with the arc-shaped groove on the upper cover 8 and the first rotating shaft 7, and avoid the first rotating shaft 7 from shaking or separating from the constraint of the upper cover 8 due to the influence of torsion in the rotating process.

Please refer to fig. 1. In a preferred embodiment, the control module 11 may include a servo driver and an upper computer. The servo driver is connected with the motor 13, and the upper computer acquires a torque value or a load rate value from the motor 13 acquired by the servo driver and can display the torque value or the load rate value through the display.

The present invention also provides a method for detecting the rotation performance of the rotating mechanism, and can be implemented (but not limited thereto) by using the above-mentioned device for detecting the rotation performance of the rotating mechanism.

The utility model discloses a method for detecting slewing mechanism rotation performance can include:

driving the rotating mechanism 6 to rotate around the rotation center thereof from one side of the rotation center of the detected rotating mechanism 6 by using a rotating driving mechanism 13;

acquiring a torque value or a load factor value of the rotation driving mechanism 13 as a basis for evaluating whether the rotation performance of the rotation mechanism 6 is qualified; wherein

And judging whether the acquired torque value or load factor value of the rotary driving mechanism 13 is larger than a torque set value or a load factor set value, if not, judging that the rotary performance of the rotary mechanism 6 is qualified, and if so, judging that the rotary performance of the rotary mechanism 6 is unqualified.

For example, the rotational performance of the rotating mechanism 6 used in the vacuum chamber for plating can be detected by the above-described device for detecting the rotational performance of the rotating mechanism. After the rotating mechanism 6 is mounted on the device, the opening and closing of the motor 13 can be controlled and detected through the servo driver and the upper computer. The upper computer can acquire parameters such as rotating speed and current of the motor 13 during load operation through the servo driver, and obtains torque value or load rate value data of the motor 13 through calculation to be used as a basis for evaluating whether the rotating performance of the rotating mechanism 6 is qualified.

According to the corresponding relation between the rotating resistance of the rotating mechanism 6 and the torque or the load rate of the motor 13, the rotating performance of the rotating mechanism 6 is represented by collecting the torque value or the load rate value of the motor 13 and comparing the torque value or the load rate value with the torque set value or the load rate set value, whether the rotating performance of the rotating mechanism 6 after assembly and maintenance is qualified can be objectively detected, and the torque value and the normal maintenance period of the rotating mechanism 6 in periodic rotation can be effectively and quickly detected.

When the obtained torque value or load factor value of the rotation driving mechanism 13 is less than or equal to the torque set value or load factor set value, the upper computer can determine that the rotation performance of the rotation mechanism 6 is qualified, that is, the rotation resistance of the rotation mechanism 6 in this state is small. On the contrary, when the obtained torque value or load factor value of the rotation driving mechanism 13 is greater than the torque set value or load factor set value, the upper computer determines that the rotation performance of the rotation mechanism 6 is unqualified, that is, the rotation resistance of the rotation mechanism 6 in this state is large, and the problem of jamming or even jamming is easily caused in the actual work, and the upper computer can display the data and the determination result through the display.

The torque set point or the load factor set point may be determined based on empirical values obtained from accumulated sensed data and may be adjusted.

Moreover, the upper computer can set overload protection to avoid the overload of the motor 13 caused by the overlarge torsion of the rotating mechanism 6. For example, when the obtained torque value or load factor value of the rotation driving mechanism 13 is greater than a preset magnitude of the torque set value or load factor set value, the upper computer may execute stopping the rotation driving mechanism 13 and alarm through the servo driver.

Further, the preset amplitude may be set to be greater than 20% to 60% of the torque set value or the load factor set value, so that the detection has high safety.

The utility model discloses can simulate the actual rotation operating condition of slewing mechanism 6 in the vacuum coating cavity to can record torque value or load rate value data under the condition of business turn over stokehold back cold state and hot state, thereby make the result that records have more actual effect, be suitable for the popularization.

It should be understood by those skilled in the art that the above embodiments are only used for illustrating the present invention, and not used as a limitation of the present invention, and that the changes and modifications to the above embodiments are within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.

Claims (10)

1. A device for detecting the rotation performance of a rotating mechanism is characterized by comprising a balance mechanism, a detected rotating mechanism, a supporting mechanism, a rotation driving mechanism and a control module, wherein the balance mechanism, the detected rotating mechanism, the supporting mechanism and the rotation driving mechanism are sequentially in rotation connection; wherein

The balance mechanism is provided with a first rotating shaft, the support mechanism is provided with a second rotating shaft, the upper end of the first rotating shaft is rotationally fixed, the lower end of the first rotating shaft penetrates through the rotating center of the rotating mechanism to form a central rotating shaft of the rotating mechanism, meanwhile, the lower end of the first rotating shaft penetrates through the rotating mechanism to be coaxially and fixedly connected with the upper end of the second rotating shaft, and the lower end of the second rotating shaft is rotationally connected with the rotation driving mechanism;

and acquiring a torque value or a load factor value from the rotary driving mechanism through the control module, and using the torque value or the load factor value as a basis for evaluating whether the rotation performance of the rotary mechanism is qualified or not.

2. The apparatus according to claim 1, wherein the balancing mechanism further comprises an upper cover and a cantilever, the upper end of the first shaft is rotatably coupled to the upper cover, and the upper cover is fixed to the rotation driving mechanism via the cantilever.

3. The apparatus according to claim 1, wherein the supporting mechanism further comprises a hollow body, the second shaft is disposed in the hollow body, the upper end of the second shaft has a shaft end groove, the lower end of the first shaft is disposed in the shaft end groove, and is coaxially fixed to the upper end of the second shaft, and the lower end of the second shaft extends out of the lower end of the body and is rotatably connected to the rotation driving mechanism through a coupling.

4. The device for detecting the rotation performance of the rotating mechanism according to claim 3, wherein a housing is disposed outside the rotating mechanism, a fixed seat is disposed on a lower end surface of the housing, a supporting seat is disposed on an upper end surface of the body, the rotating mechanism is supported on the supporting mechanism through insertion-type engagement between the fixed seat and the supporting seat, and the first rotating shaft is further inserted into the fixed seat and the supporting seat in a fitting manner.

5. The device for detecting the rotation performance of the rotating mechanism according to claim 4, wherein the fixed seat and the supporting seat form a plug-in connection through the up-and-down matching of a pin and a pin groove, the upper end of the second rotating shaft further enters the supporting seat, and the shaft end groove is connected with the lower end of the first rotating shaft through a cylindrical pin.

6. The apparatus according to claim 2, wherein the rotation driving mechanism is disposed on a base and fixed to the base via a bracket, the upper end of the cantilever is connected to the upper cover, and the lower end of the cantilever is fixed to the bracket.

7. The apparatus of claim 1, wherein the rotational drive mechanism comprises an electric motor, and the electric motor is coupled to the second shaft via a transmission.

8. The apparatus according to claim 6, wherein the upper cover is horizontally connected to the suspension arm, an upper end surface of the first shaft is arc-shaped or flat, a bearing with an arc-shaped bottom surface groove or a bearing with a flat bottom surface groove is correspondingly disposed on a lower end surface of the upper cover, and the first shaft abuts against the arc-shaped or flat bottom surface of the bearing groove of the upper cover through the arc-shaped or flat upper end surface of the first shaft, so that a rotating fit is formed between the first shaft and the upper cover.

9. The apparatus according to claim 8, wherein the upper cover has a first horizontal portion, a second horizontal portion and a vertical portion, the first horizontal portion protrudes from one end of the second horizontal portion, the bearing is disposed on a lower end surface of the first horizontal portion, a horizontal fixing shaft is disposed on a side surface of the vertical portion, the other end of the second horizontal portion is sleeved on the fixing shaft through a shaft hole and fixed to the vertical portion through a clamp sleeved on the fixing shaft, a horizontal mounting plate is disposed at an upper end of the cantilever, a lower end of the vertical portion penetrates through the mounting plate and is fixed to the mounting plate through a nut, and a mass block is disposed on the upper cover.

10. The device for detecting the rotation performance of the rotating mechanism according to claim 7, wherein the control module comprises a servo driver and an upper computer, the servo driver is connected with the motor, and the upper computer acquires a torque value or a load factor value from the rotating driving mechanism, which is acquired by the servo driver, and displays the torque value or the load factor value through a display.

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