CN214244588U - Nano-coating probe - Google Patents

Nano-coating probe Download PDF

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Publication number
CN214244588U
CN214244588U CN202023126219.6U CN202023126219U CN214244588U CN 214244588 U CN214244588 U CN 214244588U CN 202023126219 U CN202023126219 U CN 202023126219U CN 214244588 U CN214244588 U CN 214244588U
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coating
probe
nano
insulating
nanometer
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郭红建
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Zhuhai Toyon Electron Co ltd
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Zhuhai Toyon Electron Co ltd
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Abstract

The utility model provides a nanometer coating probe, including probe main part, nanometer coating and insulating coating, nanometer coating cladding in probe main part surface, the probe main part includes test section, connecting portion and fixed part, insulating coating locates on the nanometer coating that probe main part connecting portion correspond, nanometer coating is the nanostructure. The utility model discloses a at probe main part surface cladding one deck nanometer coating, this nanometer coating has the nanostructure, can be nanometer titanium nitride coating or nanometer diamond-like carbon coating, effectively improves the hardness and the wear resistance of probe, increases the life of probe, reduces test cost, improves efficiency of software testing.

Description

Nano-coating probe
Technical Field
The utility model belongs to the technical field of the electronic equipment test, especially, relate to a nanometer coating probe.
Background
In the field of testing of integrated circuits of electronic devices, contact test probes are widely used. The existing probe is generally made of rhenium tungsten, tungsten steel, piano steel and the like, wherein the tungsten steel is the hardest and most wear-resistant material, the service life of the tungsten steel can reach 100 ten thousand times generally, and the service life of the probe made of other materials is 40-80 ten thousand times generally. Because the probe constantly needs to contact with the testing board in the use, causes very big wearing and tearing to probe itself, so when the probe reaches certain wearing and tearing degree, just need change the probe. In addition, the outer surface of the probe is generally plated with nickel or gold, and both nickel and gold are easily worn, which is not favorable for prolonging the service life of the probe. Therefore, in the testing field, because the existing probe has low hardness and poor wear resistance, the probe needs to be frequently replaced, so that the testing cost is high, and the testing efficiency is low.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome the not enough of above-mentioned prior art existence, provide a nanometer coating probe, solved the not high, the poor problem of wear resistance of probe hardness among the prior art, overcome the defect that test cost is high, efficiency of software testing is low.
The utility model provides a nanometer coating probe, including probe main part, nanometer coating and insulating coating, nanometer coating cladding in probe main part surface, the probe main part includes test section, connecting portion and fixed part, insulating coating locates on the nanometer coating that probe main part connecting portion correspond, nanometer coating is the nanostructure.
Further, the nano-coating is a nano-titanium nitride coating comprising nano-titanium nitride particles.
Further, the thickness of the nano titanium nitride coating is 2-3 mu m.
Further, the nano-coating is a nano-diamond like coating comprising nano-diamond like particles.
Further, the thickness of the nano diamond-like carbon coating is 1-3 mu m.
Further, the probe body is made of one of rhenium tungsten, tungsten steel and piano steel.
The probe body further comprises a metal coating, the metal coating is coated on the outer surface of the nano coating, and the insulating coating is arranged on the metal coating corresponding to the connecting part of the probe body.
Further, the metal plating layer is a nickel plating layer or a gold plating layer.
Further, the insulating coating is a polyurethane layer.
Further, the insulating coating has a certain thickness, the insulating coating forms a first insulating layer cross section and a second insulating layer cross section on the probe main body, the first insulating layer cross section is close to the test portion, the second insulating layer cross section is close to the fixing portion, a distance between an end of the test portion and the first insulating layer cross section is a first distance, a distance between an end of the fixing portion and the second insulating layer cross section is a second distance, and the first distance is the same as the second distance in length.
The utility model has the advantages that:
the utility model provides a nanometer coating probe, at probe main part surface cladding one deck nanometer coating, this nanometer coating has the nanostructure, can be for nanometer titanium nitride coating or nanometer diamond-like carbon coating, effectively improves the hardness and the wear resistance of probe, increases the life of probe, reduces test cost, improves efficiency of software testing.
Drawings
The present invention is further explained by using the drawings, but the embodiments in the drawings do not constitute any limitation to the present invention, and for those skilled in the art, other drawings can be obtained according to the following drawings without any inventive work.
FIG. 1 is a cross-sectional view of a portion of the structure of a nano-coated probe of example 1, in one embodiment.
FIG. 2 is a cross-sectional view of a partial structure of a nano-coated probe of example 1 in another embodiment.
FIG. 3 is a cross-sectional view of the center of the overall structure of one embodiment of a nano-coated probe of example 1.
FIG. 4 is a cross-sectional view of the center of the overall structure of another embodiment of a nano-coated probe of example 1.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Example 1:
referring to fig. 1, 3 and 4, embodiment 1 provides a nano-coating probe, including a probe main body 1, a nano-coating 2 and an insulating coating 3, where the nano-coating 2 covers an outer surface of the probe main body 1, the probe main body 1 includes a testing portion 11, a connecting portion 12 and a fixing portion 13, the insulating coating 3 is disposed on the nano-coating 2 corresponding to the connecting portion 12 of the probe main body 1, and the nano-coating 2 is a nano-structure.
It should be noted that, a layer of nano coating 2 is directly added on the probe main body 1, the nano coating 2 can improve the hardness of the probe main body 1 by 3-5 times, and the service life by more than 3 times, so as to greatly improve the hardness and wear resistance of the probe, and further improve the service life of the probe, and then an insulating coating 3 is arranged on the nano coating 2 corresponding to the connecting part 12 of the probe main body 1, so as to ensure the insulating property of the connecting part 12.
As an embodiment, the nano-coating 2 is a nano-titanium nitride coating, which comprises nano-titanium nitride particles. Preferably, the thickness of the nano titanium nitride coating is 2-3 μm. The addition of a nano titanium nitride coating to the probe body 1 can increase the hardness of the probe body 1 to 2000HV or more, and the outer surface of the probe body 1 turns golden yellow with a friction coefficient of less than 0.23.
As another embodiment, the nano-coating 2 is a nano-diamond like coating comprising nano-diamond like particles. Preferably, the thickness of the nano diamond-like coating is 1-3 μm. The hardness of the probe body 1 can be increased to 3000HV or more by adding a nano diamond-like carbon coating on the probe body 1, the outer surface of the probe body 1 is bright black, and the friction coefficient is lower than 0.1.
In the present embodiment, the probe body 1 is made of one of rhenium tungsten, tungsten steel, and piano steel.
Referring to fig. 2, as another embodiment, the probe further includes a metal plating layer 4, the metal plating layer 4 covers the outer surface of the nano coating layer 2, the insulating coating 3 is disposed on the metal plating layer 4 corresponding to the connecting portion 12 of the probe body 1, and the metal plating layer 4 is a nickel plating layer or a gold plating layer.
It should be noted that, for the conventional probe, only nickel plating or gold plating is needed to be performed on the probe body, and then the insulating coating 3 is coated, so that the manufacturing can be completed. However, after the nanocoating 2 is applied, a step of plating nickel or gold may be optionally applied.
When nickel plating or gold plating is needed, the process is that a nano coating 2 is coated on the probe body, then nickel plating or gold plating is carried out on the nano coating 2, and finally an insulating coating 3 is coated, so that the appearance color of the probe in the structural form is unchanged, and the probe is more easily accepted by customers.
When nickel plating or gold plating is not needed, the process flow is that the probe body is coated with the nano coating 2 firstly, and then coated with the insulating coating 3, and the quality of the probe can be greatly improved under the condition that the total cost is almost unchanged due to the reduction of the process steps of nickel plating or gold plating.
As a preferred mode, the insulating coating 3 is a polyurethane layer.
Referring to fig. 3, as a preferable mode, since the insulating coating 3 has a certain thickness, that is, a height difference is formed on the probe body 1, the insulating coating 3 forms a first insulating layer section 31 and a second insulating layer section 32 on the probe body 1, the first insulating layer section 31 is adjacent to the test part 11, the second insulating layer section 32 is adjacent to the fixing part 13, a distance between an end of the test part 11 and the first insulating layer section 31 is a first distance, a distance between an end of the fixing part 13 and the second insulating layer section 32 is a second distance, the first distance and the second distance have the same length, and the probe body 1 is bilaterally symmetric. When the test part 11 is worn for a long time and reaches a scrapped state, the probe can be turned to one direction for installation, namely the test part 11 is used for fixing, the fixing part 13 is used for testing, and the relative wear condition of the fixing part 13 is not serious, so that the test function can be fully exerted, and the service life of the probe is effectively prolonged. And both ends of the probe can be used for fixed installation, so that the probe is convenient to maintain, and the test reliability and efficiency are improved.
Referring to fig. 4, as a preferable mode, the insulating coating 3 includes a first thickness insulating coating 301 and a second thickness insulating coating 302, the two layers of insulating coatings 3 are sequentially disposed on the probe body 1, and the length of the second thickness insulating coating 302 is shorter than that of the first thickness insulating coating 301, i.e., two steps are formed at both ends, the two steps are still disposed in bilateral symmetry, and the length of the first thickness insulating coating 301 exposed by the testing part 11 and the fixing part 13 is short. By arranging the two-stage step at one end, because the distance between the two probes is very small and is usually about 0.03mm in the test process, when the test part 11 is pushed to the direction of the tested plate, the second-stage step formed by the insulating coating 302 with the second thickness plays a limiting role, and when the second-stage step is subjected to resistance, the pushing of the test part 11 is proved to reach a set value; meanwhile, when the test portion 11 is powered on, in order to prevent discharge between two adjacent probes, the first-thickness insulating coating 301 plays a good insulating protection role, and the possibility of sparking is effectively reduced.
As for the specific preparation method of the nano-coated probe in example 1, the method comprises the following steps:
step S1: straightening, cutting and grinding the raw materials into a probe main body 1 with a set shape;
step S2: plating a nano coating 2 on the outer surface of the probe body 1 by using a PVD vacuum coating method;
step S3: and an insulating coating 3 is coated on the nano coating 2 corresponding to the connecting part 12 of the probe body 1.
The method comprises the steps of using one of rhenium tungsten, tungsten steel and piano steel as a raw material, straightening, cutting and grinding the raw material into a set shape to obtain a probe main body 1, plating a nano coating 2 on the outer surface of the probe main body 1 by using a PVD (physical vapor deposition) vacuum coating method in a physical vapor deposition mode, wherein the nano coating 2 is a nano titanium nitride coating or a nano diamond-like coating, and finally, coating an insulating coating 3 on the nano coating 2. Of course, after step S2 and before step S3, a metal plating layer 4, specifically a nickel plating layer or a gold plating layer, may be further plated on the nano-coating 2 to further improve the performance of the probe.
Thus, there are two complete manufacturing processes for probes, each comprising the following steps:
the first one is to include metal plating:
straightening the probe bar, and cutting out a bar with a proper length;
grinding two ends of the bar into a specified shape, and checking the overall appearance and shape of the probe;
plating a layer of nano coating 2 on the outer surface of the probe body 1;
inspecting the condition of the nano-coating;
aiming at the whole probe, firstly plating nickel, then plating gold or plating rhodium;
coating an insulating coating on the probe body;
and finally, checking the manufacturing condition and finishing production.
The second is to exclude the metal plating:
straightening the probe bar, and cutting out a bar with a proper length;
grinding two ends of the bar into a specified shape, and checking the overall appearance and shape of the probe;
plating a layer of nano coating 2 on the outer surface of the probe body 1;
inspecting the condition of the nano-coating;
coating an insulating coating on the probe body;
and finally, checking the manufacturing condition and finishing production.
In the case of two insulating coatings, in the process of coating the insulating coating, a first thickness insulating coating 301 may be coated on the needle body, and then a second thickness insulating coating 302 may be coated on the first thickness insulating coating 301; alternatively, the probe may be coated with a first thickness of insulating coating 301 on both ends and then coated with a second thickness of insulating coating 302 in the middle of the body. The above two modes can be interchanged.
As an embodiment, when the nano-coating 2 is a nano-titanium nitride coating, in step S2, the following steps are included:
step S201: cleaning and drying the probe body 1 by ultrasonic waves, placing the probe body in a reaction furnace, and vacuumizing the reaction furnace;
step S202: simultaneously turning on power supplies of the titanium target, the copper-based alloy target and the gold-based alloy target, filling nitrogen, and performing plasma modification on the probe body 1 by adopting radio frequency or intermediate frequency glow discharge;
step S203: the evaporated material and gas evaporated from the target are ionized, and the evaporated copper-based alloy, gold-based alloy, and titanium nitride, which is a reaction product of titanium and nitrogen, are deposited on the probe body 1 under the acceleration action of the electric field, thereby forming a nano titanium nitride coating.
The probe with the nano titanium nitride coating obtained by the method has the advantages of large binding force between the nano titanium nitride coating and the probe main body 1, high hardness, good wear resistance and corrosion resistance, good stability of the coating, self-lubricating property and low friction coefficient.
As another embodiment, when the nano-coating 2 is a nano-diamond like coating, in step S2, the following steps are included:
step S211: the probe body 1 is cleaned by ultrasonic wave and dried, then is placed in a reaction furnace, and is vacuumized, and the vacuum degree is kept at 3.8 multiplied by 10-3Pa~4.5×10-3Pa;
step S212: argon gas was injected into the reaction furnace to maintain the degree of vacuum at 3.8X 10-3Pa~4.3×10-3Starting an ion source under the working voltage of 2100-2400V for 40-60 min under Pa, generating a large amount of argon ions to bombard the surface of the probe main body 1, and activating the surface of the probe main body 1;
step S213: closing argon, loading negative bias between the probe body 1 and the reaction furnace, and starting a titanium arc source to deposit a titanium transition layer on the surface of the probe body 1;
step S214: introducing nitrogen into the reaction furnace, and maintaining the stable vacuum degree of 1.1 × 10-2Pa~1.2×10-2Pa, depositing a titanium nitride transition layer on the surface of the probe body 1;
step S215: starting pulse arc discharge with graphite as a cathode electrode, setting the initial discharge frequency to be 20Hz, properly increasing the discharge frequency by 2200-2800 pulses per discharge with a certain pulse number per discharge, increasing the discharge frequency by 10Hz, simultaneously introducing hydrocarbon gas into the reaction furnace, colliding carbon ions formed by the pulse discharge and high-energy neutral atoms of carbon with hydrocarbon gas molecules, and generating new carbon ions to fly to the surface of the probe body 1 to form the nano diamond-like coating.
The probe with the nano-diamond-like coating obtained by the method has the advantages of large binding force between the nano-diamond-like coating and the probe main body 1, high hardness, good wear resistance and corrosion resistance, good stability of the coating, self-lubricating property and low friction coefficient.
Compared with the prior art, the utility model provides a nanometer coating probe, at 1 surface cladding one deck nanometer coating 2 of probe main part, this nanometer coating 2 has the nanostructure, can be nanometer titanium nitride coating or nanometer diamond-like coating, effectively improves the hardness and the wear resistance of probe, increases the life of probe, reduces test cost, improves efficiency of software testing.
Finally, it should be emphasized that the present invention is not limited to the above-described embodiments, but only to the preferred embodiments of the invention, and is not limited to the embodiments, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included within the scope of the present invention.

Claims (10)

1. The utility model provides a nanometer coating probe which characterized in that, includes probe main part, nanometer coating and insulating coating, the nanometer coating cladding in probe main part surface, probe main part includes test portion, connecting portion and fixed part, insulating coating locates on the nanometer coating that probe main part connecting portion correspond, nanometer coating is the nanostructure.
2. The nanocoated probe of claim 1, wherein said nanocoating is a nanocoating of titanium nitride, said nanocoating of titanium nitride comprising nanocoating particles of titanium nitride.
3. The nano-coated probe according to claim 2, wherein the nano-titanium nitride coating has a thickness of 2 to 3 μm.
4. The nano-coated probe of claim 1, wherein the nano-coating is a nano-diamond like coating comprising nano-diamond like particles.
5. The nano-coated probe according to claim 4, wherein the nano-diamond like carbon coating has a thickness of 1 to 3 μm.
6. The nano-coated probe as claimed in any one of claims 1 to 5, wherein the probe body is made of one of rhenium tungsten, tungsten steel, piano steel.
7. The nano-coated probe as claimed in claim 6, further comprising a metal coating layer, wherein the metal coating layer is coated on the outer surface of the nano-coating layer, and the insulating coating layer is disposed on the metal coating layer corresponding to the probe body connecting portion.
8. The nano-coated probe of claim 7, wherein the metal plating is a nickel plating layer or a gold plating layer.
9. The nano-coated probe of claim 8, wherein the insulating coating is a polyurethane layer.
10. The nano-coated probe of claim 9, wherein the insulating coating has a thickness, the insulating coating forms a first insulating layer section and a second insulating layer section on the probe body, the first insulating layer section is adjacent to the test portion, the second insulating layer section is adjacent to the fixing portion, a distance between an end of the test portion and the first insulating layer section is a first distance, a distance between an end of the fixing portion and the second insulating layer section is a second distance, and the first distance and the second distance have the same length.
CN202023126219.6U 2020-12-22 2020-12-22 Nano-coating probe Active CN214244588U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112481582A (en) * 2020-12-22 2021-03-12 珠海拓优电子有限公司 Nano-coating probe and preparation method thereof
CN114774845A (en) * 2022-04-11 2022-07-22 渭南木王智能科技股份有限公司 Surface treatment process for probe needle head
CN117470635A (en) * 2023-11-14 2024-01-30 无锡佳健医疗器械股份有限公司 Detection device for PVD coating of color steel needle and PVD coating process

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112481582A (en) * 2020-12-22 2021-03-12 珠海拓优电子有限公司 Nano-coating probe and preparation method thereof
CN112481582B (en) * 2020-12-22 2024-04-05 珠海拓优电子有限公司 Nano-coating probe and preparation method thereof
CN114774845A (en) * 2022-04-11 2022-07-22 渭南木王智能科技股份有限公司 Surface treatment process for probe needle head
CN117470635A (en) * 2023-11-14 2024-01-30 无锡佳健医疗器械股份有限公司 Detection device for PVD coating of color steel needle and PVD coating process

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