CN214244226U - Air blowing device for inner wall of zone-melting quartz tube - Google Patents
Air blowing device for inner wall of zone-melting quartz tube Download PDFInfo
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- CN214244226U CN214244226U CN202023269449.8U CN202023269449U CN214244226U CN 214244226 U CN214244226 U CN 214244226U CN 202023269449 U CN202023269449 U CN 202023269449U CN 214244226 U CN214244226 U CN 214244226U
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Abstract
The utility model discloses an air blowing device for the inner wall of a zone-melting quartz tube, which comprises an air tube, a fixed sleeve and a telescopic component, wherein an air blowing nozzle is arranged at one end of the air tube, the end of the air tube with the air blowing nozzle can extend into the quartz tube to blow air on the inner wall of the quartz tube, the air blowing nozzle is of a cylindrical structure, and a plurality of air blowing holes are uniformly distributed on the outer wall of the air blowing nozzle; the fixing sleeve comprises a supporting plate, a hoop and a plurality of fixing rods for connecting the supporting plate and the hoop, and an air pipe through hole for the air pipe to pass through is formed in the center of the supporting plate; the telescopic assembly is fixedly arranged on the supporting plate and used for driving the air pipe to move back and forth along the normal direction of the supporting plate. Compared with the prior art, the utility model discloses a zone-melting quartz capsule inner wall air-blowing device can guarantee that all directions homoenergetic carries out the air-blowing to the quartz capsule inner wall to and can guarantee that each position homoenergetic of quartz capsule is blown, consequently, can realize good air-blowing effect.
Description
Technical Field
The utility model relates to a high-purity semiconductor material preparation technical field especially relates to a zone-melting quartz capsule inner wall air-blowing device.
Background
The production of high-purity semiconductor materials, such as high-purity germanium, requires zone-melting purification, in which the raw materials are placed in a quartz tube. In order to prevent impurities in the quartz tube from polluting the material, the quartz tube needs to be acid-washed. After the pickling, a lot of moisture adheres to the inner wall, and the moisture becomes impurities additionally introduced in the zone-melting process, so that the inner wall needs to be dried by high-purity gas.
Because the quartz tube is very clean after being pickled, in order to avoid the air blowing device from touching the inner wall of the quartz tube, the air blowing nozzle can not extend into the quartz tube, and only air can be blown at the opening of the quartz tube. This blowing method is time consuming and very wasteful of gas, increasing production costs. When the length of the quartz tube is longer, the remaining small water drops in the deep part of the inner wall can be adsorbed on the tube wall, the flow rate of the gas at the position is smaller, the water is difficult to be thoroughly dried, and in the subsequent zone-melting experiment, the water remained in the quartz tube can be subjected to chemical reaction with the raw material to form new impurities, so that the purification effect is difficult to achieve the expectation.
Disclosure of Invention
The utility model aims to solve the technical problem that a zone-melting quartz capsule inner wall air-blowing device that can realize good air-blowing effect is provided.
In order to solve the technical problem, the utility model discloses a as follows technical scheme:
an air blowing device for the inner wall of a zone-melting quartz tube comprises an air tube, a fixed sleeve and a telescopic assembly, wherein an air blowing nozzle is installed at one end of the air tube, one end of the air tube with the air blowing nozzle can extend into the quartz tube to blow air on the inner wall of the quartz tube, the air blowing nozzle is of a cylindrical structure, and a plurality of air blowing holes are uniformly distributed in the outer wall of the air blowing nozzle; the fixing sleeve comprises a supporting plate, a hoop and a plurality of fixing rods for connecting the supporting plate and the hoop, and an air pipe through hole for the air pipe to pass through is formed in the center of the supporting plate; the telescopic assembly is fixedly arranged on the supporting plate and used for driving the air pipe to move back and forth along the normal direction of the supporting plate.
Preferably, the gas blowing device for the inner wall of the zone-melting quartz tube comprises a heating assembly for heating the gas in the gas tube.
Preferably, the inner wall air blowing device of the zone-melting quartz tube comprises a control end, and the control end is respectively connected with the telescopic component and the heating component to control the telescopic component and the heating component to work.
Preferably, the clamping band adopts a clamping band with adjustable diameter so as to adapt to quartz tubes with different diameters.
Preferably, the telescopic assembly adopts a telescopic cylinder which drives the air pipe to move back and forth along the normal direction of the supporting plate.
Preferably, the fixing sleeve comprises at least 3 fixing rods.
Preferably, the heating assembly employs a heating wire which is spirally wound around the outer wall of the air tube.
The utility model has the advantages of: according to the air blowing device for the inner wall of the zone-melting quartz tube, the air blowing nozzle is of a cylindrical structure, and the plurality of air blowing holes are uniformly distributed on the outer wall of the air blowing nozzle, so that air flow enters from the air tube and is sprayed out from the plurality of air blowing holes of the air blowing nozzle, and the inner wall of the quartz tube can be blown in all directions; in addition, flexible subassembly can drive the normal direction back and forth movement of gas tube edge backup pad to drive the normal direction back and forth movement of air-blowing nozzle edge backup pad, can guarantee that each position homoenergetic of quartz capsule is blown, to sum up, the utility model discloses a zone-melting quartz capsule inner wall air-blowing device can realize the good air-blowing effect to the quartz capsule inner wall.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic view of the whole structure of the inner wall air-blowing device of the zone-melting quartz tube of the present invention;
fig. 2 is a schematic structural view of the fixing sleeve of the present invention.
Detailed Description
To make the objects, technical solutions and advantages of the present invention more clearly understood by those skilled in the art, the present invention will be further described with reference to the accompanying drawings and examples. Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present patent and are not to be construed as limiting the present patent.
As shown in fig. 1 and 2, in an embodiment of the present invention, the air blowing device for the inner wall of the zone-melting quartz tube includes an air tube 5, a fixed sleeve 6 and a telescopic assembly 3, an air blowing nozzle 1 is installed at one end of the air tube 5, one end of the air tube 5 with the air blowing nozzle 1 can extend into the quartz tube to blow air on the inner wall of the quartz tube, the air blowing nozzle 1 is a cylindrical structure, and a plurality of air blowing holes are uniformly distributed on the outer wall of the air blowing nozzle; the fixing sleeve 6 comprises a supporting plate 10, a hoop 7 and a plurality of fixing rods 8 for connecting the supporting plate 10 and the hoop 7, a gas pipe through hole 9 for the gas pipe 5 to pass through is formed in the center of the supporting plate 10, and the inner diameter of the gas pipe through hole 9 is consistent with the outer diameter of the gas pipe 5; the telescopic assembly 3 is fixedly arranged on the supporting plate 10 and used for driving the air pipe 5 to move back and forth along the normal direction of the supporting plate 10.
During the use, cup joint fixed sleeve 6 earlier on the quartz capsule outer wall, adjust clamp 7 and make clamp 7 chucking on the quartz capsule outer wall, clamp 7 matches with the quartz capsule external diameter, can ensure that whole zone-melting quartz capsule inner wall air-blowing device is concentric with the quartz capsule, and the contact inner wall causes the pollution when avoiding trachea 5 to stretch into the quartz capsule. After the clamp 7 is matched with the outer diameter of the quartz tube, airflow enters from the air tube 5 and is sprayed out of the plurality of air blowing holes of the air blowing nozzle 1 to blow air to the inner wall of the quartz tube.
In the air blowing device for the inner wall of the zone-melting quartz tube in the embodiment, the air blowing nozzle 1 is of a cylindrical structure, and the plurality of air blowing holes are uniformly distributed on the outer wall of the air blowing nozzle 1, so that air flow enters from the air tube 5 and is sprayed out from the plurality of air blowing holes of the air blowing nozzle 1, and the inner wall of the quartz tube can be blown in all directions; in addition, the telescopic assembly 3 can drive the air pipe 5 to move back and forth along the normal direction of the supporting plate 10, so that the air blowing nozzle 1 is driven to move back and forth along the normal direction of the supporting plate 10, and all positions of the quartz tube can be blown.
In a preferred embodiment of the present invention, the inner wall gas blowing device of the zone-melting quartz tube comprises a heating assembly 2 for heating the gas in the gas tube 5. In this embodiment, the heating assembly 2 employs a heating wire spirally wound around the outer wall of the air tube 5. When the air blowing nozzle is used, air flow enters from the air pipe 5, is heated by the heating component 2 and then is sprayed out from the plurality of air blowing holes of the air blowing nozzle 1. The zone-melting quartz tube inner wall air blowing device can heat and dry the inner wall of the quartz tube on the basis of air blowing on the inner wall of the quartz tube, so that moisture on the inner wall of the quartz tube can be dried more effectively, and the moisture removal efficiency is improved.
In a preferred embodiment of the present invention, the clamp 7 is a clamp with an adjustable diameter, which can be adapted to quartz tubes with different diameters. The tightness of the clamp 7 is adjusted according to the size of the quartz tube, so that the quartz tubes with different diameters can be matched.
In a preferred embodiment of the present invention, the fixing sleeve 6 comprises at least 3 fixing rods 8, and the clamp 7 is connected to the supporting plate 10 through more than 3 fixing rods 8, so as to ensure the structural stability of the fixing sleeve 6, and further ensure the concentricity of the whole zone-melting quartz tube inner wall air-blowing device and the quartz tube.
In a preferred embodiment of the present invention, the telescopic assembly 3 is a telescopic cylinder, which drives the air pipe 5 to move back and forth along the normal direction of the supporting plate 10.
In a preferred embodiment of the present invention, the inner wall air blowing device of the zone-melting quartz tube further comprises a control end 4, and the control end 4 is respectively connected to the telescopic assembly 3 and the heating assembly 2 to control the telescopic assembly 3 and the heating assembly 2 to operate. The heating power of the heating component 2 is controlled through the control end 4, the position of the air blowing nozzle 1 in the quartz tube is adjusted, and air blowing is repeated for multiple times according to a certain sequence until the moisture in the quartz tube is completely dried.
The foregoing is considered as illustrative of the preferred embodiments of the invention and is not intended to limit the invention in any way. Various equivalent changes and modifications can be made on the basis of the above embodiments by those skilled in the art, and all equivalent changes and modifications within the scope of the claims should fall within the protection scope of the present invention.
Claims (7)
1. The air blowing device for the inner wall of the zone-melting quartz tube is characterized by comprising the following components in parts by weight:
the gas blowing nozzle is arranged at one end of the gas pipe, the end of the gas pipe with the gas blowing nozzle can extend into the quartz pipe to blow gas to the inner wall of the quartz pipe, the gas blowing nozzle is of a cylindrical structure, and a plurality of gas blowing holes are uniformly distributed on the outer wall of the gas blowing nozzle;
the fixing sleeve comprises a supporting plate, a hoop and a plurality of fixing rods for connecting the supporting plate and the hoop, and an air pipe through hole for the air pipe to pass through is formed in the center of the supporting plate;
and the telescopic assembly is fixedly arranged on the supporting plate and is used for driving the air pipe to move back and forth along the normal direction of the supporting plate.
2. The apparatus of claim 1, wherein the apparatus comprises a heating element for heating the gas in the tube.
3. The apparatus of claim 2, wherein the apparatus comprises a control end connected to the telescopic assembly and the heating assembly respectively for controlling the operation of the telescopic assembly and the heating assembly.
4. The apparatus of claim 1, wherein the clamp is a clamp with an adjustable diameter.
5. The apparatus of claim 1, wherein the telescopic assembly comprises a telescopic cylinder, and the telescopic cylinder drives the gas tube to move back and forth along the normal direction of the support plate.
6. The apparatus of claim 1, wherein the retaining sleeve comprises at least 3 retaining rods.
7. The apparatus for gas-blowing the inner wall of the float-zone quartz tube as claimed in claim 2, wherein said heating means employs a heating wire spirally wound around the outer wall of said gas tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023269449.8U CN214244226U (en) | 2020-12-30 | 2020-12-30 | Air blowing device for inner wall of zone-melting quartz tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023269449.8U CN214244226U (en) | 2020-12-30 | 2020-12-30 | Air blowing device for inner wall of zone-melting quartz tube |
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| Publication Number | Publication Date |
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| CN214244226U true CN214244226U (en) | 2021-09-21 |
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| CN202023269449.8U Active CN214244226U (en) | 2020-12-30 | 2020-12-30 | Air blowing device for inner wall of zone-melting quartz tube |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112624630A (en) * | 2020-12-30 | 2021-04-09 | 深圳大学 | Air blowing device for inner wall of zone-melting quartz tube |
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- 2020-12-30 CN CN202023269449.8U patent/CN214244226U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112624630A (en) * | 2020-12-30 | 2021-04-09 | 深圳大学 | Air blowing device for inner wall of zone-melting quartz tube |
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