CN214242731U

CN214242731U - Conveyor for semiconductor processing

Info

Publication number: CN214242731U
Application number: CN202022832674.1U
Authority: CN
Inventors: 吴灿煌; 黄宏隆; 张孝仁
Original assignee: Hefei Core Semiconductor Co Ltd
Current assignee: Hefei Core Semiconductor Co Ltd
Priority date: 2020-11-30
Filing date: 2020-11-30
Publication date: 2021-09-21
Anticipated expiration: 2030-11-30

Abstract

The utility model relates to a semiconductor processing technology field just discloses a conveyor for semiconductor processing, which comprises a carriage body, the bottom of automobile body is equipped with the universal wheel, the top of automobile body is rotated and is connected with drive screw, the top fixedly connected with longitudinal sliding rod of automobile body. This conveyor for semiconductor processing, through setting up driving motor, the apparatus further comprises a rotating shaft, the commentaries on classics board, the storage tank, the swivel mount, connect the material frame, the pull rod, slide and spring, IC at first drops to and stops and the gathering in connecing the material frame, avoid the in-process of unloading to take place the skew, after certain quantity is gathered to IC, the staff can pull the pull rod, the spring continues the shrink, under the effect of slide, connect the material frame by jack-up and take place the slope, IC begins to link the board through the top and fall in a storage tank of below, it just stacks storing the frame to have solved current transport shallow, easily appear tipping in transportation process, and the lower problem of transport volume.

Description

Conveyor for semiconductor processing

Technical Field

The utility model relates to a semiconductor processing technology field specifically is a conveyor for semiconductor processing.

Background

An IC chip is a chip formed by placing an integrated circuit formed by a large number of microelectronic components (transistors, resistors, capacitors, etc.) on a plastic substrate. The IC chip comprises a wafer chip and a packaging chip, and the corresponding IC chip production line consists of a wafer production line and a packaging production line.

The current IC is required to be transferred from a production line after production is finished, the current conveying cart only stacks the storage frames, the problem of tipping easily occurs in the conveying process, and the conveying amount is low.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model provides a not enough to prior art, the utility model provides a conveyor for semiconductor processing possesses when carrying that the product is deposited steadily, and the more advantage of quantity has been carried to the single, has solved current transport shallow and will only store the frame and stack, appears tumbling easily in transportation process, and the lower problem of delivery volume.

(II) technical scheme

For the material deposits steadily when realizing above-mentioned transport, the more purpose of quantity is carried to the single, the utility model provides a following technical scheme: the utility model provides a conveyor for semiconductor processing, includes the automobile body, the bottom of automobile body is equipped with the universal wheel, the top of automobile body is rotated and is connected with drive screw, the vertical slide bar of top fixedly connected with of automobile body, the quantity of vertical slide bar is two, the top fixedly connected with top baffle of vertical slide bar, the top fixedly connected with elevator motor of top baffle, the bottom of top baffle is run through on drive screw's top and the baffle that extends out, drive screw's top and elevator motor's output fixed connection, drive screw's side surface is connected with the inside rotation of top baffle, drive screw's side surface transmission is connected with the lifter plate.

The right side of the lifting plate is fixedly connected with a supporting bottom plate, a driving groove is formed in the supporting bottom plate, a driving motor is fixedly connected in the driving groove, a rotating plate is arranged at the top of the supporting bottom plate, a rotating shaft is fixedly connected at the bottom of the rotating plate, the bottom end of the rotating shaft is fixedly connected with the output end of the driving motor, the side surface of the rotating shaft is rotatably connected with the inner top wall of the driving groove, storage boxes are fixedly connected in the rotating plate, the number of the storage boxes is three, a supporting rod is fixedly connected at the left side of the lifting plate, a top connecting plate is fixedly connected at the top of the supporting rod, a swivel base is fixedly connected at the top of the top connecting plate, a material receiving frame is hinged in the swivel base, the bottom of the material receiving frame is arranged in a cambered surface manner, a top sliding groove is formed in the top of the top connecting plate, and a sliding plate is arranged in the top sliding groove, the top of slide is the cambered surface setting, and the top of slide and the bottom laminating of connecing the material frame, the left side fixedly connected with pull rod of slide, the left side of slide is equipped with the spring, the spring cup joints with the pull rod activity, the spring supports with the slide and holds.

Preferably, the three storage tanks are circumferentially distributed by taking the center of the rotating plate as a circle center, and the angle between every two adjacent storage tanks is the same.

Preferably, the bottom of the storage box is hinged with a box door, the left side of the box door is in threaded connection with a lock rod, and the lock rod is in threaded connection with the side surface of the storage box.

Preferably, the front side inner wall and the rear side inner wall of top spout all are equipped with the side slide, the front and the protruding slider of back fixedly connected with of slide, protruding slider and side slide sliding connection.

Preferably, a through groove is formed in the top connecting plate, and the through groove is located right above the motion tracks of the three storage boxes.

Preferably, the left end of the pull rod penetrates through the inner wall of the left side of the top sliding groove and extends out of the top connecting plate, the left end of the pull rod is fixedly connected with a pull handle, and the pull rod is connected with the inner wall of the left side of the top sliding groove in a sliding mode.

Compared with the prior art, the utility model provides a conveyor for semiconductor processing possesses following beneficial effect:

1. this conveyor for semiconductor processing, through setting up driving motor, the apparatus further comprises a rotating shaft, the commentaries on classics board, the storage tank, the swivel mount, connect the material frame, the pull rod, slide and spring, IC at first drops to and stops and gathers in connecing the material frame, avoid the in-process of unloading to take place the skew, after certain quantity is gathered to IC, the staff can pull the pull rod, the spring continues to shrink, under the effect of slide, connect the material frame by jack-up and take place the slope, IC begins to link the board through the jack-up and fall to a storage tank of below, after a storage tank is filled with, start driving motor, make the commentaries on classics board rotatory, change empty storage tank to the position of preceding storage tank and continue to feed, until three storage tank is filled with, solved current transport shallow and only stacked the storage frame, easily appear tipping in transportation process, and the lower problem of delivery volume.

2. This conveyor for semiconductor processing through setting up top baffle, elevator motor, drive screw and lifter plate, starts elevator motor, and the lifter plate can reciprocate for connect the material frame and change the height between the board and keeping unchangeable under the circumstances, can rise simultaneously and reduce, satisfy the IC dress of different production lines and get the demand to a certain extent.

Drawings

FIG. 1 is a sectional view of the front view structure of the present invention;

fig. 2 is a top view of the rotating plate structure of the present invention;

fig. 3 is an enlarged view of a portion of a in fig. 1 according to the present invention.

Wherein: 1. a vehicle body; 2. a universal wheel; 3. a longitudinal slide bar; 4. a top baffle; 5. a lifting motor; 6. a drive screw; 7. a lifting plate; 8. a support base plate; 9. a drive slot; 10. a drive motor; 11. a rotating shaft; 12. rotating the plate; 13. a storage tank; 14. a box door; 15. a lock lever; 16. a support bar; 17. a top connecting plate; 18. rotating; 19. a material receiving frame; 20. a top chute; 21. a pull rod; 22. a slide plate; 23. a spring.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a conveying device for semiconductor processing, including a vehicle body 1, a universal wheel 2 is disposed at the bottom of the vehicle body 1, the universal wheel 2 includes a wheel carrier and a roller, the roller is rotatably connected with the wheel carrier, the wheel carrier is rotatably connected with the bottom of the vehicle body 1, a driving screw 6 is rotatably connected with the top of the vehicle body 1, two longitudinal sliding rods 3 are fixedly connected with the top of the vehicle body 1, the number of the longitudinal sliding rods 3 is two, the two longitudinal sliding rods 3 are symmetrically distributed about the driving screw 6, a top baffle 4 is fixedly connected with the top end of the longitudinal sliding rod 3, a lifting motor 5 is fixedly connected with the top of the top baffle 4, the top end of the driving screw 6 penetrates through the bottom of the top baffle 4 and extends out of the top baffle 4, the top end of the driving screw 6 is fixedly connected with the output end of the lifting motor 5, the side surface of the driving screw 6 is rotatably connected with the inside of the top baffle 4, the side surface of the driving screw 6 is in transmission connection with a lifting plate 7.

The right side of the lifting plate 7 is fixedly connected with a supporting bottom plate 8, a driving groove 9 is formed in the supporting bottom plate 8, a driving motor 10 is fixedly connected in the driving groove 9, a rotating plate 12 is arranged at the top of the supporting bottom plate 8, a rotating shaft 11 is fixedly connected at the bottom of the rotating plate 12, the bottom end of the rotating shaft 11 is fixedly connected with the output end of the driving motor 10, the side surface of the rotating shaft 11 is rotatably connected with the inner top wall of the driving groove 9, storage boxes 13 are fixedly connected in the rotating plate 12, the number of the storage boxes 13 is three, the three storage boxes 13 are circumferentially distributed by taking the center of the rotating plate 12 as the circle center, the angle between every two adjacent storage boxes 13 is the same, after one storage box 13 is filled, the driving motor 10 is started to rotate the rotating plate 12, the empty storage box 13 is rotated to the position of the previous storage box 13 to continue to be filled until the three storage boxes 13 are filled, and the bottoms of the storage boxes 13 are hinged with box doors 14, the left side of the box door 14 is in threaded connection with a lock rod 15, the lock rod 15 is in threaded connection with the side surface of the storage box 13, the left side of the lifting plate 7 is fixedly connected with a support rod 16, the top of the support rod 16 is fixedly connected with a top connecting plate 17, the top of the top connecting plate 17 is fixedly connected with a swivel mount 18, the interior of the swivel mount 18 is hinged with a receiving frame 19, an IC firstly falls into the receiving frame 19 to be stopped and gathered, so that the situation that blanking is deviated due to overhigh blanking height is avoided, the bottom of the receiving frame 19 is arranged in a cambered surface shape, a through groove is formed in the top connecting plate 17 and used for IC falling, the through groove is positioned right above the motion tracks of the three storage boxes 13 and can also be used as a reference object, the storage boxes 13 are conveniently positioned in the rotating process, the receiving frame 19 directly blanks the through groove, the blanking accuracy is facilitated, the top connecting plate 17 is provided with a top sliding groove 20, the lifting motor 5 is started, the lifting plate 7 can move up and down, so that the height between the receiving frame 19 and the rotating plate 12 is kept unchanged, can be lifted and lowered simultaneously, can meet the IC assembling and taking requirements of different production lines to a certain extent, a sliding plate 22 is arranged inside the top sliding chute 20, side sliding ways are arranged on the inner wall of the front side and the inner wall of the rear side of the top sliding chute 20, convex sliding blocks are fixedly connected to the front side and the back side of the sliding plate 22 and are in sliding connection with the side sliding ways, the top of the sliding plate 22 is arranged in a cambered surface, and the top of slide 22 and the bottom of receiving the material frame 19 are laminated, the left side fixedly connected with pull rod 21 of slide 22, the left side of slide 22 is equipped with spring 23, spring 23 and pull rod 21 activity cup joint, spring 23 and slide 22 support and hold, the left end of pull rod 21 runs through the left side inner wall of top spout 20 and extends out and pushes up even board 17, the left end fixedly connected with of pull rod 21 draws the handle, pull rod 21 and the left side inner wall sliding connection of top spout 20.

When the trolley is used, the trolley body 1 is pushed to the tail end of a production line, the ICs firstly fall into the material receiving frame 19 to be stopped and gathered, after the ICs are gathered to a certain amount, a worker can pull the pull rod 21, the spring 23 continues to contract, the material receiving frame 19 is jacked up and inclined under the action of the sliding plate 22, the ICs begin to pass through the top connecting plate 17 and fall into the storage boxes 13 below the top connecting plate to be stacked, after one storage box 13 is filled, the driving motor 10 is started, the rotating plate 12 is rotated, and the empty storage box 13 is rotated to the position of the previous storage box 13 to be continuously filled with the ICs until the three storage boxes 13 are filled.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A conveyor for semiconductor processing, includes automobile body (1), its characterized in that: the trolley is characterized in that universal wheels (2) are arranged at the bottom of the trolley body (1), the top of the trolley body (1) is rotatably connected with a driving screw (6), the top of the trolley body (1) is fixedly connected with longitudinal slide rods (3), the number of the longitudinal slide rods (3) is two, the top end of each longitudinal slide rod (3) is fixedly connected with a top baffle (4), the top of each top baffle (4) is fixedly connected with a lifting motor (5), the top end of each driving screw (6) penetrates through the bottom of each top baffle (4) and extends out of each top baffle (4), the top end of each driving screw (6) is fixedly connected with the output end of each lifting motor (5), the side surface of each driving screw (6) is rotatably connected with the inside of each top baffle (4), and the side surface of each driving screw (6) is in transmission connection with a lifting plate (7);

the right side of the lifting plate (7) is fixedly connected with a supporting bottom plate (8), a driving groove (9) is formed in the supporting bottom plate (8), a driving motor (10) is fixedly connected to the inside of the driving groove (9), a rotating plate (12) is arranged at the top of the supporting bottom plate (8), a rotating shaft (11) is fixedly connected to the bottom of the rotating plate (12), the bottom end of the rotating shaft (11) is fixedly connected with the output end of the driving motor (10), the side surface of the rotating shaft (11) is rotatably connected with the inner top wall of the driving groove (9), a storage box (13) is fixedly connected to the inside of the rotating plate (12), the number of the storage boxes (13) is three, a supporting rod (16) is fixedly connected to the left side of the lifting plate (7), a top connecting plate (17) is fixedly connected to the top of the supporting rod (16), and a swivel base (18) is fixedly connected to the top of the top connecting plate (17), the inside of swivel mount (18) articulates there is material receiving frame (19), the bottom that connects material receiving frame (19) sets up for the cambered surface, top spout (20) have been seted up at the top of top even board (17), the inside of top spout (20) is equipped with slide (22), the top of slide (22) sets up for the cambered surface, and the top of slide (22) and the bottom laminating of material receiving frame (19), the left side fixedly connected with pull rod (21) of slide (22), the left side of slide (22) is equipped with spring (23), spring (23) and pull rod (21) activity are cup jointed, spring (23) support with slide (22) and hold.

2. The conveying apparatus for semiconductor processing according to claim 1, wherein: the three storage tanks (13) are circumferentially distributed by taking the center of the rotating plate (12) as a circle center, and the angles between every two adjacent storage tanks (13) are the same.

3. The conveying apparatus for semiconductor processing according to claim 1, wherein: the bottom of the storage box (13) is hinged with a box door (14), the left side of the box door (14) is in threaded connection with a lock rod (15), and the lock rod (15) is in threaded connection with the side surface of the storage box (13).

4. The conveying apparatus for semiconductor processing according to claim 1, wherein: the front side inner wall and the rear side inner wall of top spout (20) all are equipped with the side slide, the front and the protruding slider of back fixedly connected with of slide (22), protruding slider and side slide sliding connection.

5. The conveying apparatus for semiconductor processing according to claim 1, wherein: and a through groove is formed in the top connecting plate (17), and is positioned right above the motion trail of the three storage boxes (13).

6. The conveying apparatus for semiconductor processing according to claim 1, wherein: the left end of pull rod (21) runs through the left side inner wall of top spout (20) and extends out top link plate (17), the left end fixedly connected with of pull rod (21) draws the handle, pull rod (21) and the left side inner wall sliding connection of top spout (20).