CN214224961U - Multi-dimensional image information acquisition system - Google Patents

Abstract

The utility model relates to a multidimensional image information acquisition system, which comprises a light source, an amplitude acquisition subsystem, a phase acquisition subsystem and a polarization acquisition subsystem; the light source is used for projecting imaging light rays to a target object; the amplitude obtaining subsystem is used for obtaining first image information of the target object according to the received amplitude information of the imaging light; the phase acquisition subsystem is used for acquiring second image information of the target object according to the received phase information of the imaging light; the polarization obtaining subsystem is used for obtaining third image information of the target object according to the received polarization information of the imaging light; the three image information can be transmitted to the corresponding controllers to form the fourth image information through controller fusion. The fourth image information acquired by the image information acquisition system can better reflect the real information of the target object, and when the image information acquisition system is applied to visual detection, the detection result can be more accurate.

Description

Multi-dimensional image information acquisition system

Technical Field

The utility model belongs to machine vision check out test set field especially relates to a multidimension degree image information acquisition system.

Background

Most of the existing machine vision detection uses an industrial camera to directly shoot a target object so as to obtain the gray level or RGB image of the target object, and then performs image analysis to realize a corresponding detection function. Because the gray scale or RGB image only contains the light intensity information in the light reflected by the target object, when the light intensities of the light reflected by the two target objects are similar, the reflected light intensities of the two target objects are also very similar in the image shot by the industrial camera, and the false detection can easily occur when the image is used for detection. For example, in semiconductor wafer inspection, the intensities of light reflected by both fine particles and micron-sized dust on the surface of a wafer are similar, so that the intensities of the light reflected by the fine particles and the micron-sized dust are also very similar in an image captured by an industrial camera, and thus the false inspection rate of the wafer inspection is high. Therefore, it is difficult to cope with the increasingly complex machine vision inspection by simply relying on the light intensity information of the light reflected by the target object to obtain the image information.

SUMMERY OF THE UTILITY MODEL

The utility model discloses the technical problem that will solve is: aiming at the problem that the existing industrial camera cannot meet the requirement of machine vision detection by imaging only depending on light intensity information, a multi-dimensional image information acquisition system is provided.

In order to solve the above technical problem, an embodiment of the present invention provides a multidimensional image information acquisition system, which includes a light source, an amplitude acquisition subsystem, a phase acquisition subsystem, a polarization acquisition subsystem, and a controller; the light source is used for projecting imaging light rays to a target object; the amplitude obtaining subsystem is used for receiving the imaging light reflected by the target object and obtaining first image information of the target object according to the amplitude information of the received imaging light; the phase acquisition subsystem is used for receiving the imaging light reflected by the target object and acquiring second image information of the target object according to the phase information of the received imaging light; the polarization obtaining subsystem is used for receiving the imaging light reflected by the target object and obtaining third image information of the target object according to the polarization information of the received imaging light; the controller is used for receiving the first image information, the second image information and the third image information and fusing the first image information, the second image information and the third image information to form fourth image information.

Optionally, the multi-dimensional image information acquiring system further includes a first beam splitter, a second beam splitter, and a third beam splitter; the first spectroscope is opposite to the amplitude acquisition subsystem and is used for performing light splitting processing on the imaging light reflected from the target object so as to enable a part of the imaging light reflected from the target object to enter the amplitude acquisition subsystem; the second spectroscope is opposite to the phase acquisition subsystem and is used for performing light splitting processing on the imaging light reflected from the target object so as to enable a part of the imaging light reflected from the target object to enter the phase acquisition subsystem; the third beam splitter is opposite to the polarization obtaining subsystem and is used for splitting the imaging light reflected from the target object so that a part of the imaging light reflected from the target object is emitted into the polarization obtaining subsystem.

Optionally, one of the first beam splitter, the second beam splitter and the third beam splitter, which is farthest from the light source, is a first one, one located between the first beam splitter and the second beam splitter is a second one, and one located closest to the light source is a third one; the first, the second and the third are arranged oppositely in sequence, so that imaging light reflected from a target object sequentially passes through the light splitting surface of the first and the light splitting surface of the second and then is transmitted to the light splitting surface of the third.

Optionally, the first is the first beam splitter, the second is the second beam splitter, and the third is the third beam splitter.

Optionally, an included angle of 45 degrees is formed between the splitting surface of the first beam splitter and the propagation direction of the imaging light emitted by the light source; the beam splitting surface of the second spectroscope and the propagation direction of the imaging light emitted by the light source form an included angle of 45 degrees; and the light splitting surface of the third light splitter and the propagation direction of the imaging light emitted by the light source form an included angle of 45 degrees.

Optionally, the polarization acquiring subsystem comprises C_2vA symmetric semiconductor two-dimensional electron gas; said C is_2vThe symmetrical semiconductor two-dimensional electron gas is used for receiving the imaging light reflected by the target object and acquiring third image information of the target object according to the polarization information of the received imaging light; the multi-dimensional image information acquisition system further comprises a supporting platform, wherein a supporting surface of the supporting platform is used for placing a target object, the light source is used for projecting imaging light rays to the target object placed on the supporting surface, and the propagation direction of the imaging light rays emitted by the light source is perpendicular to the supporting surface.

Optionally, the multi-dimensional image information acquiring system further includes an optical filter, where the optical filter is opposite to the light source, and the optical filter is used for screening imaging light projected by the light source to a target object.

Optionally, the light source is a supercontinuum laser, the multi-dimensional image information acquisition system further includes a turntable, the optical filters are provided in plurality, the ranges of the filtered wave bands of the optical filters are different, and the optical filters are all arranged on the turntable; the turntable can rotate relative to the light source, so that each optical filter can screen the imaging light projected to a target object by the light source.

Optionally, the multi-dimensional image information obtaining system further includes a light modulator, and the light modulator is configured to modulate imaging light projected by the light source to the target object.

Optionally, the multi-dimensional image information acquiring system further includes a projection lens group, the projection lens group is configured to adjust a projection range of the imaging light emitted by the light source, and the projection lens group is capable of moving relative to the light source along a first direction, where the first direction is parallel to a propagation direction of the imaging light emitted by the light source.

The embodiment of the utility model provides a fourth image information that multidimension degree image information acquisition system acquireed has assembled first image information, second image information and third image information three's advantage for fourth image information more can reflect the true information of target object, so utilize this multidimension degree image information acquisition system to carry out relevant when examining target object, can make the testing result more accurate. In addition, the multi-dimensional image information acquisition system can acquire the relevant image information of the target object by respectively utilizing the amplitude information, the phase information and the polarization information of the light, so that the multi-dimensional image information acquisition system has a wider application range. For example, in the semiconductor wafer inspection, although the characteristics of the fine particles and the micron-sized dust on the wafer surface are very similar in the first image information, the fine particles and the micron-sized dust on the wafer surface can be easily distinguished from each other in the third image information, so that the occurrence of the false inspection problem can be avoided.

Drawings

Fig. 1 is a schematic structural diagram of a multi-dimensional image information acquisition system according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of an image sensor of a multi-dimensional image information acquisition system according to an embodiment of the present invention.

The reference numerals in the specification are as follows:

1. a multi-dimensional image information acquisition system; 2. a target object; 10. a light source, 20, an amplitude acquisition subsystem; 201. a first lens group; 202. an area-array camera; a 30 phase acquisition subsystem; 301. a second lens group; 302. a wavefront sensor; 40. a polarization acquisition subsystem; 401. a third lens group; 402. an image sensor; 403. a photosensitive layer; 404. a translation layer; 405. a treatment layer; 406. a semiconductor unit; 407. an analog-to-digital conversion unit; 408. an image processing unit; 409. a storage unit; 50. a controller; 60a, a first spectroscope; 60b, a second spectroscope; 60c, a third spectroscope; 60d light splitting surface; 70 optical filter; 80. a turntable; 90. an optical modulator; 100. a projection lens group; 110. a support platform; 111. support surface

Detailed Description

In order to make the technical problem, technical solution and advantageous effects solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

As shown in fig. 1, in an embodiment, the multi-dimensional image information acquiring system 1 includes a light source 10, an amplitude acquiring subsystem 20, a phase acquiring subsystem 30, a polarization acquiring subsystem 40, and a controller 50, and the light source 10, the amplitude acquiring subsystem 20, the phase acquiring subsystem 30, and the polarization acquiring subsystem 40 may be connected in communication with the controller 50 through corresponding data lines, so as to control the operations of the light source 10, the amplitude acquiring subsystem 20, the phase acquiring subsystem 30, and the polarization acquiring subsystem 40 through the controller 50.

The light source 10 is used to project imaging light to the target object, and the imaging light projected to the target object is finally reflected by the target object. The amplitude obtaining subsystem 20 may receive the imaging light reflected by the target object, and obtain the image information of the target object with the imaging light, where the amplitude obtaining subsystem 20 is configured to obtain the first image information of the target object according to the amplitude information (i.e., the amplitude information is the light intensity information) of the received imaging light. The phase obtaining subsystem 30 may receive the imaging light reflected by the target object and obtain the image information of the target object with the imaging light, wherein the phase obtaining subsystem 30 is configured to obtain the second image information of the target object according to the received phase information of the imaging light. The polarization obtaining subsystem 40 may receive the imaging light reflected by the target object, and obtain the image information of the target object with the imaging light, wherein the polarization obtaining subsystem 40 is configured to obtain the third image information of the target object according to the polarization information of the received imaging light. Each subsystem transmits its own acquired image information about the target object to the controller 50, and the controller 50 fuses the first image information, the second image information, and the third image information according to a pre-stored algorithm to form fourth image information.

The fourth image information acquired by the multi-dimensional image information acquiring system 1 provided by this embodiment integrates the advantages of the first image information, the second image information, and the third image information, so that the fourth image information can better reflect the real information of the target object, and therefore, when the multi-dimensional image information acquiring system 1 is used to perform the related detection on the target object, the detection result can be more accurate. In addition, the multi-dimensional image information acquiring system 1 can acquire the image information of the target object by using the amplitude information, the phase information and the polarization information of the light respectively, so that the multi-dimensional image information acquiring system 1 has a wider application range. For example, in semiconductor wafer inspection, although the characteristics of the fine particles and the micron-sized dust on the wafer surface are very similar in the first image information, the fine particles and the micron-sized dust on the wafer surface can be easily distinguished from each other in the fourth image because the polarization information of the light is changed significantly when the light is reflected by different objects, so that the problem of false inspection can be avoided.

The method for fusing the first image information, the second image information and the third image information to form the fourth image information by the controller 50 may adopt a method of image fusion in the prior art, for example, in an embodiment, the method of image fusion is substantially as follows.

In step S1, the first image information, the second image information, and the third image information are converted into two-dimensional matrices having the same scale.

Step S2, the characteristic normalization operation is carried out on the characteristic values contained in the three two-dimensional matrixes, so that the characteristic value of each matrix meets the distribution rule that the mean value is 0 and the variance is 1, and the influence caused by the difference of units and scales among different optical information characteristics can be eliminated.

And step S3, fusing the three two-dimensional matrixes to generate a three-dimensional feature matrix of n x 3, and then performing pooling operation on the three-dimensional feature along the channel axis direction so as to compress the spatial dimension of the input feature map, thereby realizing the aggregation of the spatial information of three different image information. The pooling operation is to simultaneously adopt maximum pooling and average pooling for the three-dimensional characteristic matrix along the channel axis direction, the maximum pooling extracts the most significant part of the three image information, the average pooling extracts global statistical information of the three image information, and the two pooling modes are adopted simultaneously, so that the characteristic information of a defect target in the three different image information characteristic information can be effectively reserved and fused.

And step S4, performing convolution operation on the feature information obtained by the two pooling operations by using a convolution kernel, and realizing feature fusion to obtain fourth image information. When the target object is detected correspondingly, the fused feature information (i.e., the fourth image information) needs to be input into the convolutional neural network for feature extraction, and then the extracted feature is compared with the pre-stored feature, so as to determine whether the detected feature meets the requirement.

As shown in fig. 1, in an embodiment, the multi-dimensional image information acquiring system 1 further includes a first spectroscope 60a, a second spectroscope 60b, and a third spectroscope 60 c. The first beam splitter 60a is opposite to the amplitude obtaining subsystem 20, and is configured to split the imaging light reflected from the target object to change a propagation path of a portion of the imaging light reflected from the target object, and make the portion of the imaging light finally enter the amplitude obtaining subsystem 20, so that the amplitude obtaining subsystem 20 can obtain first image information of the target object. The second beam splitter 60b is opposite to the phase obtaining subsystem 30, and is configured to split the imaging light reflected from the target object to change a propagation path of a portion of the imaging light reflected from the target object, and make the portion of the imaging light finally enter the phase obtaining subsystem 30, so that the phase obtaining subsystem 30 can obtain second image information of the target object. The third beam splitter 60c is opposite to the polarization obtaining subsystem 40, and is configured to split the imaging light reflected from the target object to change a propagation path of a portion of the imaging light reflected from the target object, and make the portion of the imaging light finally enter the polarization obtaining subsystem 40, so that the polarization obtaining subsystem 40 can obtain third image information of the target object. The three spectroscopes can enable the subsystems to be dispersedly arranged at proper positions, and enable the sub-acquisition systems to shoot the target object from proper visual angles.

Assume that one of the three beam splitters farthest from the light source 10 is a first beam splitter, the other two beam splitters are located therebetween, and the other three beam splitters are located closest to the light source 10. In this embodiment, the first, the second and the third are sequentially and oppositely disposed, so that the imaging light reflected from the target object sequentially passes through the spectroscopic surfaces of the first and the second and then propagates to the spectroscopic surface of the third. The imaging light that propagates to the spectroscopic surface of the third person is the imaging light that passes through the spectroscopic surface of the second person, and the imaging light that propagates to the spectroscopic surface of the second person is the imaging light that passes through the spectroscopic surface of the first person.

When the imaging device works, imaging light reflected from a target object is transmitted to a first object, the imaging light reflected from the target object to the first object is defined as initial light, a first part of the initial light is reflected to a subsystem opposite to the first part of the initial light by a light splitting surface of the first object, and a second part of the initial light passes through the light splitting surface of the first object and is transmitted to a second object. The second part of light is also split after being transmitted to the second part of light, wherein one part of light (defined as a third part of light) is reflected to the subsystem opposite to the second part of light by the splitting surface of the second part of light, and the other part of light (defined as a fourth part of light) in the second part of light passes through the splitting surface of the second part of light and is transmitted to the third part of light. The fourth light beam is also split after propagating to the third party, wherein a part of the light beam (defined as the fifth light beam) is reflected to the subsystem opposite to the third party by the splitting surface of the third party, and another part of the light beam (defined as the sixth light beam) in the fourth light beam passes through the splitting surface of the third party.

By adopting the above arrangement, the three sub-acquisition systems can shoot the target object at the same viewing angle, so that when the controller 50 fuses the first image information, the second image information and the third image, the corresponding position of a certain region of the target object in the three image information can be acquired more easily, thereby facilitating the fusion of the three image information.

In addition, the requirements for the light intensity when the amplitude acquiring subsystem 20, the phase acquiring subsystem 30 and the polarization acquiring subsystem 40 acquire the image information of the target object are sequentially reduced, and the light intensity is attenuated after the light passes through the beam splitter, so in order to enable each acquiring subsystem to acquire the image information with high quality, in an embodiment, the first beam splitter 60a is the first one, the second beam splitter 60b is the second one, and the third beam splitter 60c is the third one.

In an actual product, the inclination angle of the splitting surface of each beam splitter can be set according to actual conditions, for example, as shown in fig. 1, in an embodiment, an included angle between the splitting surface 60d of each beam splitter and the propagation direction of the imaging light emitted by the light source 10 is 45 °. The direction of the imaging light emitted by the light source 10 is the outgoing direction of the imaging light, and the projection range of the imaging light emitted by the light source 10 is generally conical, and the outgoing direction of the imaging light is parallel to the axis of the cone.

As shown in fig. 1, in an embodiment, the multi-dimensional image information acquiring system 1 further includes a filter 70, where the filter 70 is opposite to the light source 10 and is used for screening the imaging light projected by the light source 10 to the target object. That is, the optical filter 70 can project the imaging light of a specific waveband to the target object, so as to reduce the influence of stray light on each subsystem and improve the quality of the image information acquired by each subsystem.

Since the same object has different reflection abilities for light with different wavelengths and different objects have different reflection abilities for light with the same wavelength, in order to make the multidimensional image information acquisition system 1 have a wider application range, in an embodiment, the light source 10 employs a supercontinuum laser, and meanwhile, as shown in fig. 1, the multidimensional image information acquisition system 1 is further provided with a turntable 80 that can rotate relative to the light source 10, in addition, a plurality of optical filters 70 are provided, and the ranges of the wavelength bands screened by the optical filters 70 are different, the optical filters 70 are respectively provided at different positions of the turntable 80, and when the turntable 80 rotates relative to the light source 10, each optical filter 70 can screen the imaging light projected by the light source 10 to the target object.

Thus, in practical use, the turntable 80 may be rotated by a certain angle to filter and screen the imaging light emitted from the light source 10 by the optical filter 70, so that the imaging light of the first waveband may be projected to the target object. After the multidimensional image information acquiring system 1 acquires a fourth image information according to the imaging light of the first wavelength band, the rotating disc 80 is rotated to make the other optical filter 70 opposite to the light source 10, so that the imaging light of the second wavelength band in the imaging light emitted by the light source 10 can be projected to the target object, and at this time, the multidimensional image information acquiring system 1 can acquire two fourth image information according to the imaging light of the second wavelength band. And then, by analogy, the image information obtaining system 100 can obtain corresponding fourth image information according to the imaging light rays screened by the optical filters 70, and finally, the controller 50 fuses the fourth image information again to obtain a fifth image.

As shown in fig. 1, in an embodiment, the multi-dimensional image information obtaining system 1 further includes a light modulator 90, where the light modulator 90 is opposite to the light source 10 and is used for modulating imaging light projected by the light source 10 to the target object, and the light modulator 90 may be a transmissive spatial light modulator. During detection, the amplitude, phase, polarization state, etc. of the laser beam may be initially adjusted (for example, the polarization state of the laser beam is adjusted to circular polarization) according to the approximate material shape characteristics of the target to be detected, so as to improve the quality of the acquired image information of the target object. In addition, as shown in fig. 1, in an embodiment, the light modulator 90 is disposed on a side of the optical filter 70 away from the light source 10, that is, imaging light emitted from the light source 10 is first filtered by the optical filter 70 and then modulated by the light modulator 90 before being projected onto the target object.

As shown in fig. 1, in an embodiment, the multi-dimensional image information acquiring system 1 further includes a projection lens assembly 100, and the projection lens assembly 100 is configured to adjust a projection range of the imaging light, so that the light source 10 can project a suitable area at the target object, thereby improving the imaging effect. For example, when the size of the target object is small, the projection range of the polarized imaging light can be narrowed by the projection lens group 70 so as to condense the imaging light, and the intensity of the light reflected from the target object can be increased. Of course, when the size of the target object is large, the projection range of the polarized imaging light can be expanded by the projection lens group 70, so that the projection range of the polarized imaging light can cover the target object. In practical applications, the projecting lens group 70 may be a condensing or an astigmatic projecting lens group. When the projection lens group 100 is a condenser lens group, the projection lens group 100 may include one, two, or more convex lenses; when the projection lens group 100 is a diverging lens group, the projection lens group 100 may include one, two, or more concave lenses.

In addition, in an embodiment, the projection lens group 100 moves relative to the light source 10 to be close to or far from the light source 10, wherein the moving direction of the projection lens group 100 relative to the light source 10 is parallel to the emitting direction of the imaging light, so that the projection range of the imaging light on the target object can be adjusted according to actual conditions. It is understood that the projection lens group 100 is generally disposed on the side closest to the target object in the exit direction of the imaging light rays. Specifically, as shown in fig. 1, in an embodiment, the light source 10, the optical filter 70, the light modulator 90, the third beam splitter 60c, the second beam splitter 60b, the first beam splitter 60a, and the projection lens assembly 100 are sequentially disposed from top to bottom.

In an actual product, the multi-dimensional image information acquiring system 1 further includes a machine, and the light source 10, the amplitude acquiring subsystem 20, the phase acquiring subsystem 30, the polarization acquiring subsystem 40, the controller 50, the beam splitters, the turntable 80, the light modulator 90, and the projection lens group 100 are all mounted on the machine. In addition, the multi-dimensional image information acquiring system 1 further includes a supporting platform 110, the supporting platform 110 is also disposed on the machine, the supporting platform 110 has a supporting surface 111, and the supporting surface 111 is opposite to the light source 10, so that the light source 10 can project imaging light to a target object placed on the supporting surface 111.

In one embodiment, the amplitude acquisition subsystem 20 includes a first lens group 201 and an area-array camera 202; the imaging light reflected from the target object is transmitted to the first lens group 201, focused by the first lens group 201, and then transmitted to the area array camera 202; the area-array camera 202 may acquire amplitude information of the focused imaging light of the first lens group 201 to obtain first image information of the target object.

In one embodiment, the phase acquisition subsystem 30 includes a second lens group 301 and a wavefront sensor 302; imaging light reflected from a target object is transmitted to the second lens group 301, focused by the second lens group 301 and then transmitted to the wavefront sensor 302; the wavefront sensor 302 may acquire phase information of the imaging light focused by the second lens group 301 to obtain second image information of the target object.

In one embodiment, the polarization acquisition subsystem 40 includes a third lens group 401 and an image sensor 402; imaging light reflected from a target object is transmitted to the third lens group 401, focused by the third lens group 401, and then transmitted to the image sensor 402; the image sensor 402 may acquire polarization information of the imaging light focused by the third lens group 401 to obtain third image information of the target object.

In an embodiment, the image sensor 402 is a polarization-based image sensor, and the image sensor can be used to obtain image information of a target object according to polarization information of circularly polarized light, as shown in fig. 2, the image sensor 402 includes a photosensitive layer 403, a conversion layer 404, and a processing layer 405, which are sequentially stacked, wherein the photosensitive layer 403 has semiconductor units 406 arranged in an array, and after receiving the circularly polarized light, the conductor units 406 generate corresponding current information due to a current effect caused by the circularly polarized light, and the current information is transmitted to the conversion layer 404. The conversion layer 404 includes a plurality of analog-to-digital conversion units 407, each mode conversion unit 407 corresponds to one semiconductor unit 406, the current information generated by the semiconductor units 406 is transmitted to the analog-to-digital conversion units 407, and the analog-to-digital conversion units 407 can convert the current signals generated by the semiconductor units 406 into digital signals. The digital signal generated by the analog-to-digital conversion unit 407 is finally transmitted to the processing layer 405, the processing layer 405 has a corresponding image processing unit 408, and the digital image information, which is the third image information, can be obtained by processing the digital signal generated by the analog-to-digital conversion unit 407 through the image processing unit 408.

In addition, when the semiconductor unit 406 is irradiated with circularly polarized light, a photon drawing effect is generated in addition to a circularly polarized light current effect. Since the photo-induced current effect and the photon pulling effect have similar dependence on the symmetry of the material structure, both will usually exist at the same time, thereby affecting the sensitivity of the image sensor 402. To address this issue, in one embodiment, the polarization-sensitive semiconductor unit 406 employs C_2vThe exit direction of the imaging light is vertical to the supporting surface 111. Because the included angle between the splitting surface 60d of the third splitter 60c and the emitting direction of the imaging light is 45 °, when no target object is placed on the supporting surface 111, the imaging light emitted by the light source 10 is reflected by the supporting surface 111 and split by the third splitter 60c, and then can be vertically incident to the image sensor 402. At this time, the polarization sensing semiconductor unit 406 may only generate the photon pulling effect due to the characteristics of the 2DEG itself and generate a corresponding macro current, digital information corresponding to the macro current may be stored in the storage unit 409 of the processing layer 405 as a reference value, and when the subsequent image sensor 402 normally operates, the difference between the actual measured value and the reference value may be calculated, so as to reduce the adverse effect of the photon pulling effect on the sensitivity of the image sensor 402.

It is understood that in other embodiments, the third beam splitter 60c may not be provided, and the polarization obtaining subsystem 40 may directly receive the imaging light from the second beam splitter 60b to obtain the corresponding image information of the target object.

The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims (10)

1. A multi-dimensional image information acquisition system is characterized by comprising a light source, an amplitude acquisition subsystem, a phase acquisition subsystem, a polarization acquisition subsystem and a controller;

the light source is used for projecting imaging light rays to a target object;

the amplitude obtaining subsystem is used for receiving the imaging light reflected by the target object and obtaining first image information of the target object according to the amplitude information of the received imaging light;

the phase acquisition subsystem is used for receiving the imaging light reflected by the target object and acquiring second image information of the target object according to the phase information of the received imaging light;

the polarization obtaining subsystem is used for receiving the imaging light reflected by the target object and obtaining third image information of the target object according to the polarization information of the received imaging light;

the controller is used for receiving the first image information, the second image information and the third image information and fusing the first image information, the second image information and the third image information to form fourth image information.

2. The multi-dimensional image information acquisition system according to claim 1, further comprising a first spectroscope, a second spectroscope, and a third spectroscope;

the first spectroscope is opposite to the amplitude acquisition subsystem and is used for performing light splitting processing on the imaging light reflected from the target object so as to enable a part of the imaging light reflected from the target object to enter the amplitude acquisition subsystem;

the second spectroscope is opposite to the phase acquisition subsystem and is used for performing light splitting processing on the imaging light reflected from the target object so as to enable a part of the imaging light reflected from the target object to enter the phase acquisition subsystem;

the third beam splitter is opposite to the polarization obtaining subsystem and is used for splitting the imaging light reflected from the target object so that a part of the imaging light reflected from the target object is emitted into the polarization obtaining subsystem.

3. The system according to claim 2, wherein one of the first beam splitter, the second beam splitter, and the third beam splitter, which is farthest from the light source, is a first one, one of the other two is a second one, and one of the other two is a third one, which is closest to the light source;

the first, the second and the third are arranged oppositely in sequence, so that imaging light reflected by the target object sequentially passes through the light splitting surface of the first and the light splitting surface of the second and then is transmitted to the light splitting surface of the third.

4. The multi-dimensional image information acquisition system according to claim 3, wherein the first is the first spectroscope, the second is the second spectroscope, and the third is the third spectroscope.

5. The multi-dimensional image information acquisition system according to claim 2, wherein the splitting surface of the first beam splitter makes an angle of 45 ° with a propagation direction of the imaging light emitted from the light source;

the beam splitting surface of the second spectroscope and the propagation direction of the imaging light emitted by the light source form an included angle of 45 degrees;

and the light splitting surface of the third light splitter and the propagation direction of the imaging light emitted by the light source form an included angle of 45 degrees.

6. The multi-dimensional image information acquisition system of claim 5, wherein the polarization acquisition subsystem comprises C_2vA symmetric semiconductor two-dimensional electron gas; said C is_2vThe symmetrical semiconductor two-dimensional electron gas is used for receiving the imaging light reflected by the target object and acquiring third image information of the target object according to the polarization information of the received imaging light;

the multi-dimensional image information acquisition system further comprises a supporting platform, wherein a supporting surface of the supporting platform is used for placing a target object, the light source is used for projecting imaging light rays to the target object placed on the supporting surface, and the propagation direction of the imaging light rays emitted by the light source is perpendicular to the supporting surface.

7. The multi-dimensional image information acquisition system according to claim 1, further comprising an optical filter, the optical filter being opposite to the light source, the optical filter being configured to filter imaging light projected by the light source to a target object.

8. The multi-dimensional image information acquisition system according to claim 7, wherein the light source is a supercontinuum laser, the multi-dimensional image information acquisition system further comprises a turntable, the optical filters are provided in plurality, the ranges of the filtered wave bands of the optical filters are different, and the optical filters are provided on the turntable; the turntable can rotate relative to the light source, so that each optical filter can screen the imaging light projected to a target object by the light source.

9. The multi-dimensional image information acquisition system according to claim 1, further comprising a light modulator for modulating imaging light projected by the light source toward a target object.

10. The multidimensional image information acquisition system according to claim 1, further comprising a projection lens group for adjusting a projection range of the imaging light emitted by the light source, the projection lens group being movable relative to the light source along a first direction, wherein the first direction is parallel to a propagation direction of the imaging light emitted by the light source.

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