CN214221460U - Pumping speed control device and vacuum preparation system - Google Patents
Pumping speed control device and vacuum preparation system Download PDFInfo
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- CN214221460U CN214221460U CN202022892583.7U CN202022892583U CN214221460U CN 214221460 U CN214221460 U CN 214221460U CN 202022892583 U CN202022892583 U CN 202022892583U CN 214221460 U CN214221460 U CN 214221460U
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Abstract
The application provides a pumping speed control device and vacuum preparation system, belongs to the vacuum preparation field. The pumping speed control device comprises a first throttling unit, a second throttling unit and a first tee joint. The first throttling unit is provided with an air inlet and an air outlet and is used for regulating the flow; the second throttling unit is provided with an air inlet and an air outlet and is used for regulating the flow; a first port of the first tee joint is communicated with the gas outlet of the first throttling unit, a second port of the first tee joint is communicated with the gas outlet of the second throttling unit, and a third port of the first tee joint is communicated with the vacuum pump; and the air inlet of the second throttling unit is used for being communicated with a system to be pumped. The scheme realizes the effect of continuously adjusting the pumping speed of the vacuum pump by adjusting the flow and flow resistance ratio of the first throttling unit and the second throttling unit. Because the flow of the first throttling unit and the flow of the second throttling unit can be adjusted according to the requirements of the first throttling unit and the second throttling unit, the same vacuum pump can meet different pumping speed requirements of different requirements of a system to be pumped.
Description
Technical Field
The application relates to the technical field of vacuum preparation, in particular to a pumping speed control device and a vacuum preparation system.
Background
In some production occasions in the fields of pharmaceutical and chemical industry, electronic technology, vacuum drying, refrigeration and the like, the operation of a process link needs to be carried out under a vacuum environment with dynamically changing vacuum degree, in order to smoothly carry out the operation, the time and the speed of change among different vacuum degrees in the vacuum environment need to be controlled besides the vacuum degree of the vacuum environment needs to be accurately controlled, and therefore, the pumping speed requirements of different rear-end pumped systems on a vacuum pump are different in different process links. The existing vacuum pump capable of adjusting the pumping speed is inconvenient for repeated adjustment and continuous adjustment, and the same vacuum pump is difficult to adapt to the pumping speed requirements of different rear-end pumped systems.
SUMMERY OF THE UTILITY MODEL
The application provides a pumping speed control device and a vacuum preparation system for solve the problem that the same vacuum pump is difficult to adapt to the pumping speed requirement of different rear end pumped systems.
In a first aspect, an embodiment of the present application provides a pumping speed control device, which includes a first throttling unit, a second throttling unit, and a first tee joint. The first throttling unit is provided with an air inlet and an air outlet and is used for adjusting the flow; the second throttling unit is provided with an air inlet and an air outlet and is used for regulating the flow; a first port of a first tee joint is communicated with a gas outlet of the first throttling unit, a second port of the first tee joint is communicated with a gas outlet of the second throttling unit, and a third port of the first tee joint is used for being communicated with a vacuum pump; and the air inlet of the second throttling unit is used for being communicated with a system to be pumped.
In the application, the first throttling unit is communicated with the second throttling unit by using the first tee joint, and the change speed of the vacuum degree of the system to be pumped is controlled by adjusting the flow rate and the flow resistance ratio of the first throttling unit and the second throttling unit, so that the effect of continuously adjusting the pumping speed of the vacuum pump is realized. Because the flow of the first throttling unit and the flow of the second throttling unit can be adjusted according to the requirements of the first throttling unit and the second throttling unit, the same vacuum pump can meet the requirements of different pumping speeds of different requirements of a system to be pumped.
In combination with the technical solution provided by the first aspect, in some possible implementation manners, the pumping speed control device further includes a buffer body with a hollow interior, where the buffer body has an air inlet and an air outlet, the air inlet of the buffer body is communicated with the air outlet of the first throttling unit, and the air outlet of the buffer body is communicated with the first port of the first tee joint.
In this application, set up the buffering body between first tee bend and first throttle unit, through the size that changes the volume of the buffering body, can regulate and control the steady state vacuum degree of waiting to take out the system. Under the same condition, the larger the volume of the buffer body is, the lower the steady state vacuum degree of the system to be pumped is; the smaller the volume of the buffer body is, the higher the steady state vacuum degree of the system to be pumped is. Therefore, the scheme can realize the adjustment of the steady-state vacuum degree of the system to be pumped.
In combination with the technical solution provided by the first aspect, in some possible implementations, the buffer body is provided with an adjusting device, and the adjusting device is used for adjusting the internal volume of the buffer body.
In this application, because the buffering body is provided with adjusting device, can change the volume of the buffering body through this adjusting device, make the regulation and control treat that the steady state vacuum of taking out the system is more convenient, swift.
With reference to the technical solution provided by the first aspect, in some possible implementation manners, a filtering device is disposed at one end of the first throttling unit serving as an air inlet, and the filtering device is used for filtering impurities in the air.
In the application, the filtering device is arranged at one end of the air inlet of the first throttling unit, so that impurities in air can be filtered, and particles in the air can be prevented from being attached to the inner walls of the first throttling unit and the second throttling unit to cause blockage; and impurities in the air which easily cause equipment oxidation or corrosion can be filtered, and the service life of the equipment is prolonged.
With reference to the technical solution provided by the first aspect, in some possible implementation manners, the pumping speed control device further includes a vacuum degree detection device and a second tee joint. The vacuum degree detection device is used for detecting the vacuum degree of the system to be pumped; and a first port of a second tee joint is communicated with an air inlet of the second throttling unit, a second port of the second tee joint is communicated with the vacuum degree detection device, and a third port of the second tee joint is used for being communicated with the system to be pumped.
In this application, vacuum detection device can detect treat the vacuum of taking out the system, according to the change speed of this vacuum detection device reading, can obtain the pumping speed that the system was treated to the vacuum pump, judges whether need adjust according to the pumping speed that obtains.
In a second aspect, an embodiment of the present application provides a vacuum preparation system, which includes a system to be pumped, a vacuum pump, and a pumping speed control device, wherein the pumping speed control device includes a first throttling unit, a second throttling unit, and a first tee. The first throttling unit is provided with an air inlet and an air outlet and is used for adjusting the flow; the second throttling unit is provided with an air inlet and an air outlet and is used for regulating the flow; a first port of a first tee joint is communicated with a gas outlet of the first throttling unit, a second port of the first tee joint is communicated with a gas outlet of the second throttling unit, and a third port of the first tee joint is used for being communicated with a vacuum pump; and the air inlet of the second throttling unit is used for being communicated with a system to be pumped.
In the application, the first throttling unit is communicated with the second throttling unit by using the first tee joint, and the change speed of the vacuum degree of the system to be pumped is controlled by adjusting the flow rate and the flow resistance ratio of the first throttling unit and the second throttling unit, so that the pumping speed of the vacuum pump is adjusted. Because the flow of the first throttling unit and the flow of the second throttling unit can be adjusted according to the requirements of the first throttling unit and the second throttling unit, the same vacuum pump can meet the requirements of different pumping speeds of different requirements of a system to be pumped.
In some possible implementation manners, the pumping speed control device further includes a buffer body with a hollow interior, where the buffer body has an air inlet and an air outlet, the air inlet of the buffer body is communicated with the air outlet of the first throttling unit, and the air outlet of the buffer body is communicated with the first port of the first tee joint.
In this application, set up the buffering body between first tee bend and first throttle unit, through the size that changes the volume of the buffering body, can regulate and control the steady state vacuum degree of waiting to take out the system. Under the same condition, the larger the volume of the buffer body is, the lower the steady state vacuum degree of the system to be pumped is; the smaller the volume of the buffer body is, the higher the steady state vacuum degree of the system to be pumped is. Therefore, the scheme can realize the adjustment of the steady-state vacuum degree of the system to be pumped.
In combination with the technical solution provided by the second aspect, in some possible implementations, the buffer body is provided with an adjusting device, and the adjusting device is used for adjusting the internal volume of the buffer body.
In this application, because the buffer body is provided with adjusting device, can change the volume of buffer body through this adjusting device. The steady state vacuum degree of the system to be pumped is more convenient and faster to regulate and control.
In combination with the technical solution provided by the second aspect, in some possible implementations, a filtering device is disposed at one end of the first throttling unit serving as the air inlet, and the filtering device is used for filtering impurities in the air.
In this application, through set up filter equipment in the one end of first throttling unit air inlet, can filter the impurity in the gas. By using different filtering devices, particles in the air can be prevented from being attached to the inner walls of the first throttling unit and the second throttling unit to cause blockage; and impurities in the air which easily cause equipment oxidation or corrosion can be filtered, and the service life of the equipment is prolonged.
With reference to the technical solution provided by the second aspect, in some possible implementation manners, the pumping speed control device further includes a vacuum degree detection device and a second tee joint. The vacuum degree detection device is used for detecting the vacuum degree of the system to be pumped; and a first port of a second tee joint is communicated with an air inlet of the second throttling unit, a second port of the second tee joint is communicated with the vacuum degree detection device, and a third port of the second tee joint is used for being communicated with the system to be pumped.
In this application, vacuum detection device can detect treat the vacuum of taking out the system, according to the change speed of this vacuum detection device reading, can obtain the pumping speed that the system was treated to the vacuum pump, judges whether need adjust according to the pumping speed that obtains. The vacuum degree detection device can measure the vacuum degree of the system to be pumped and can judge the current pumping speed based on the reading change speed.
Additional features and advantages of the present application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the embodiments of the invention. The objectives and other advantages of the application may be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
FIG. 1 is a schematic diagram of a pumping speed control device according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural diagram of another alternative pumping speed control device according to an embodiment of the present application;
FIG. 3 is a schematic structural diagram of another alternative pumping speed control device according to an embodiment of the present application;
fig. 4 is a schematic structural diagram of a vacuum preparation system according to an embodiment of the present disclosure.
Icon: 1-a vacuum preparation system; 10-a pumping speed control device; 11-a first throttling unit; 111-an air inlet; 112-air outlet; 12-a second throttling unit; 121-an air inlet; 122-gas outlet; 13-a first tee; 131-a first port; 132-a second port; 133-a third port; 14-a buffer; 141-an air inlet; 142-an air outlet; 15-a filtration device; 16-vacuum degree detection device; 17-a second tee; 171-a first port; 172-a second port; 173-third port; 18-a vacuum valve; 19-an interface; 20-a vacuum pump; 30-the system to be pumped.
Detailed Description
The terms "first," "second," "third," and the like are used for descriptive purposes only and not for purposes of indicating or implying relative importance, and do not denote any order or order.
In the description of the present application, it is to be noted that the terms "inside", "outside", and the like refer to orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships that are conventionally arranged when products of the application are used, and are used only for convenience in describing the application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the application.
In the description of the present application, unless otherwise expressly specified or limited, the terms "disposed," "mounted," "connected," and "communicating" are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements.
The technical solution of the present application will be clearly and completely described below with reference to the accompanying drawings.
The pumping speed of the existing vacuum pump is constant or not constant, or is inconvenient to repeatedly adjust and continuously adjust, and when facing a plurality of systems to be pumped with different pumping speed requirements, all the requirements of the systems to be pumped are often difficult to meet, so that a plurality of vacuum pumps with different pumping speeds are needed to face a plurality of systems to be pumped with different pumping speed requirements. This scheme provides a pumping speed controlling means, through this pumping speed controlling means, can adjust the pumping speed of vacuum pump, makes same vacuum pump can be applicable to a plurality of rear ends that require the difference to the pumping speed by pumping system.
Referring to fig. 1, fig. 1 is a structural diagram of a pumping speed control device 10 according to an embodiment of the present application. The pumping speed control device 10 comprises a first throttling unit 11, a second throttling unit 12 and a first tee joint 13. Wherein the first throttling unit 11 has an air inlet 111 and an air outlet 112, and the first throttling unit 11 is used for regulating the flow. The second throttling unit 12 has an air inlet 121 and an air outlet 122, and the second throttling unit 12 is used for regulating the flow rate. A first port 131 of the first tee joint 13 is communicated with the air outlet 112 of the first throttling unit 11, a second port 132 of the first tee joint 13 is communicated with the air outlet 122 of the second throttling unit 12, and a third port 133 of the first tee joint 13 is used for being communicated with a vacuum pump; and the air inlet 121 of the second throttling unit 12 is used for communicating with a system to be pumped. The change speed of the vacuum degree of the system to be pumped is controlled by adjusting the flow rate of the first throttling unit 11 and the second throttling unit 12, so that the effect of adjusting the pumping speed of the vacuum pump is achieved. Because the flow rates of the first throttling unit 11 and the second throttling unit 12 can be adjusted according to the self requirements, the same vacuum pump can adapt to different pumping speed requirements of different system to be pumped under the condition that the pumping speed upper limit of the vacuum pump is not exceeded.
In one embodiment, the gas inlet 111 of the first throttling unit 11 is communicated with the atmosphere, or the gas inlet 111 of the first throttling unit 11 is communicated with a device capable of supplying gas. The air outlet 112 of the first throttling unit 11 is communicated with the first port 131 of the first tee 13 through a hollow pipe, or the air outlet 112 of the first throttling unit 11 is directly communicated with the first port 131 of the first tee 13. Optionally, the air inlet 111 of the first throttling unit 11 is provided with a filtering device 15, and the filtering device 15 is used for filtering impurities in the air. Alternatively, the air inlet 111 of the first throttle unit 11 communicates with a chamber communicating with the atmosphere. The first throttling unit 11 may include a needle valve, a vacuum valve, a ball valve, and other valves, which may be used to adjust the amount of the gas flow, such as a straight pipe or a hollow pipe provided with a needle valve. The filter device 15 may be an air dust filter for filtering solid particles in the air and/or a chemical filter for filtering gaseous pollutants in the air.
In one embodiment, the air outlet 122 of the second throttling unit 12 is communicated with the second port 132 of the first tee 13 through a hollow tube, or the air outlet 122 of the second throttling unit 12 is directly communicated with the second port 132 of the first tee 13. The second throttling unit 12 may include a needle valve, a vacuum valve, a ball valve, and other valves, which may be used to adjust the amount of the gas flow, such as a straight pipe or a hollow pipe provided with a needle valve.
In one embodiment, the first tee 13 may be any communication member having three ports, and the three ports are communicated with each other, such as a Y-shaped glass tube, a metal tee joint, or the like, and having good air tightness. In another embodiment, the first tee 13 may also be a communicating member having more than three ports and all the ports communicating with each other, and by changing the communicating member, a plurality of vacuum pumps may be communicated to increase the pumping speed; or a plurality of systems to be pumped are communicated, so that the working efficiency is improved.
To improve the performance of the pumping speed control device 10, please refer to fig. 2, and fig. 2 is a structural diagram of another pumping speed control device 10 according to an embodiment of the present application. The pumping speed control device 10 comprises a first throttling unit 11, a second throttling unit 12, a first tee joint 13 and a buffer body 14 with a hollow interior. Wherein the first throttling unit 11 has an air inlet 111 and an air outlet 112, and the first throttling unit 11 is used for regulating the flow. The second throttling unit 12 has an air inlet 121 and an air outlet 122, and the second throttling unit 12 is used for regulating the flow rate. The buffer body 14 has an air inlet 141 and an air outlet 142. The air outlet 112 of the first throttling unit 11 is communicated with the air inlet 141 of the buffer body 14, the first port 131 of the first tee joint 13 is communicated with the air outlet 142 of the buffer body 14, the second port 132 of the first tee joint 13 is communicated with the air outlet 122 of the second throttling unit 12, and the third port 133 of the first tee joint 13 is used for being communicated with a vacuum pump; and the air inlet 121 of the second throttling unit 12 is used for communicating with a system to be pumped.
Wherein the interior of the buffer body 14 is hollow so as to be used for buffering the gas entering from the gas outlet 112 of the first throttling unit 11, and the gas inlet 141 and the gas outlet 142 of the buffer body 14 are communicated through the hollow portion of the interior of the buffer body 14. The buffer body 14 may be a hollow sphere, cylinder, or cone having two openings, and the specific shape of the buffer body 14 is not limited herein, for example, the buffer body 14 may be a hollow glass ball, and the glass ball is provided with two openings, and the two openings are both communicated with the hollow portion inside the glass ball.
In one embodiment, the air outlet 112 of the first throttling unit 11 is communicated with the air inlet 141 of the buffer 14 through a hollow pipe. In another embodiment, the first throttling unit 11 is directly disposed on the buffer 14, wherein the air outlet 112 of the first throttling unit 11 is disposed on the inner wall of the buffer 14, and the air inlet 111 of the first throttling unit 11 is disposed on the outer wall of the buffer 14.
Alternatively, the buffer body 14 may be any container having two ports communicating with each other, and the container is not deformed by the gas pressure, and the buffer body 14 has good airtightness after the gas inlet 141 and the gas outlet 142 of the buffer body 14 are blocked. The buffer body 14 may be a spherical or columnar glass container having two ports, or a spherical or columnar metal container having two ports.
Furthermore, the buffer body 14 is provided with an adjusting device for adjusting the internal volume of the buffer body 14. The steady-state vacuum degree of the system to be pumped can be regulated and controlled by changing the size of the internal volume of the buffer body 14, and the larger the internal volume of the buffer body 14 is and the larger the flow of the first throttling unit 11 is, the lower the steady-state vacuum degree of the system to be pumped is; the smaller the internal volume of the buffer body 14 and the smaller the flow rate of the first throttle unit 11, the higher the steady-state vacuum degree of the system to be pumped.
In one embodiment, a baffle is disposed in the buffer 14, and the baffle is in close contact with the inner wall of the buffer 14, so that gas cannot pass through the contact position between the baffle and the inner wall of the buffer 14, and the baffle can move in the buffer 14. The inner volume of the buffer body 14 can be changed by moving the baffle plate, wherein the gas can only flow through the gas inlet 141 and the gas outlet 142 of the buffer body 14. Alternatively, the buffer body 14 may be a cylindrical container having a movable bottom and/or top surface, and the inner volume of the buffer body 14 may be changed by the movement of the bottom and/or top surface, wherein the bottom and/or top surface of the buffer body 14 is in close contact with the inner wall of the buffer body 14, and gas cannot pass through the contact. In another embodiment, a solid or hollow object with a constant volume can be directly placed into the buffer body 14, wherein the volume of the object can be measured and the volume of the object is not changed due to the change of the air pressure. Because the volume in the buffer body 14 is fixed, when an article with a fixed volume is put in, the volume of the gas in the buffer body 14 is the difference between the volume of the buffer body 14 and the volume of the put article. The solid or hollow article with fixed volume can be glass blocks, metal blocks and the like with various shapes.
Referring to fig. 3, the pumping speed control device 10 further includes a vacuum degree detection device 16 and a second tee joint 17, wherein the vacuum degree detection device 16 is used for detecting the vacuum degree of the system to be pumped, which is communicated with the second throttling unit 12. The first port 171 of the second tee joint 17 is communicated with the air inlet 121 of the second throttling unit 12, the second port 172 of the second tee joint 17 is communicated with the vacuum degree detection device 16, the third port 173 of the second tee joint 17 is communicated with the system to be pumped, and the pumping speed of the vacuum pump to the system to be pumped is obtained based on the change rate of the reading of the vacuum degree detected by the vacuum degree detection device 16. In actual operation, the first throttling unit 11 and the second throttling unit 12 are opened first, and then the vacuum pump is started. And then, observing the reading descending speed of the vacuum degree detection device 16, calculating to obtain the pumping speed of the vacuum pump to the system to be pumped, and if the pumping speed is consistent with the pumping speed required by the system to be pumped, maintaining the first throttling unit 11 and the second throttling unit 12 unchanged. If the pumping speed of the system to be pumped by the vacuum pump is larger, reducing the flow rate of the second throttling unit 12 and/or increasing the flow rate of the first throttling unit 11; if the pumping speed of the system to be pumped by the vacuum pump is smaller, the flow rate of the first throttling unit 11 is reduced and/or the flow rate of the second throttling unit 12 is increased.
Alternatively, the second tee 17 may be a communication member having any three ports, and the three ports are communicated with each other, and having good air tightness in addition to the three ports, such as a Y-shaped glass tube, a metal tee joint, and the like. In another embodiment, the second tee 17 may also be a communicating member having more than three ports and all the ports communicating with each other, and by changing the communicating member, a plurality of vacuum pumps can be communicated to increase the pumping speed; or a plurality of systems to be pumped are communicated, so that the working efficiency is improved. The vacuum degree detection device 16 may be a vacuum gauge, a vacuum degree gauge, or the like.
Optionally, in an embodiment, a vacuum valve 18 is disposed between the second tee 17 and the second throttling unit 12. When the vacuum valve 18 is closed, the vacuum degree of the system to be pumped can be accurately measured by the vacuum degree detection device 16, and meanwhile, the air tightness of a later-stage system can be detected. If the reading of the vacuum detection device 16 drops faster within a set time after the vacuum valve 18 is closed, there is a greater possibility of air leakage in the later stage system. Wherein the vacuum valve 18 may be a vacuum ball valve, a vacuum regulating valve, a high vacuum diaphragm valve, or the like.
Optionally, the third port 173 of the second tee 17 is further provided with an interface 19, and the pumping speed control device 10 is communicated with the system to be pumped through the interface 19. In one embodiment, the air tightness at the interface 19 is ensured by replacing a different interface 19 in communication with a different system to be pumped. The interface 19 may be a flange joint, a small flange joint, or a large flange joint.
The application also provides a vacuum preparation system 1, and the vacuum preparation system 1 comprises a vacuum pump 20, a system to be pumped 30 and the pumping speed control device 10. When the pumping speed control device 10 has the structure shown in fig. 1, the pumping speed control device 10 is communicated with the vacuum pump 20 through the third port 133 of the first tee joint 13, and is communicated with the system to be pumped 30 through the air inlet 121 of the second throttling unit 12; when the pumping speed control device 10 has the structure shown in fig. 2, the pumping speed control device 10 is communicated with the vacuum pump 20 through the third port 133 of the first tee joint 13, and is communicated with the system to be pumped 30 through the air inlet 121 of the second throttling unit 12; when the pumping rate control device 10 has the structure shown in fig. 3, the pumping rate control device 10 communicates with the vacuum pump 20 through the third port 133 of the first tee joint 13, and communicates with the system-to-be-pumped 30 through the port 19 connected through the third port 173 of the second tee joint 17. For easy understanding, referring to fig. 4, fig. 4 is a schematic structural diagram of a vacuum preparation system 1 according to an embodiment of the present disclosure, which includes a vacuum pump 20, a system to be pumped 30, and a pumping speed control device 10 shown in fig. 3.
The pumping rate of the system to be pumped 30 is adjusted by the vacuum pump 20 through the pumping rate control device 10, wherein the detailed structure and function of the pumping rate control device 10 are described above and will not be described herein again. The vacuum pump 20 may be any type of vacuum pump.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. A pumping speed control device, comprising:
the first throttling unit is provided with an air inlet and an air outlet and is used for regulating the flow;
the second throttling unit is provided with an air inlet and an air outlet and is used for regulating the flow;
a first port of the first tee is communicated with the gas outlet of the first throttling unit, a second port of the first tee is communicated with the gas outlet of the second throttling unit, and a third port of the first tee is used for being communicated with a vacuum pump; and the air inlet of the second throttling unit is used for being communicated with a system to be pumped.
2. A device as claimed in claim 1, wherein the device further comprises:
the buffer body is hollow inside and is provided with an air inlet and an air outlet, wherein the air inlet of the buffer body is communicated with the air outlet of the first throttling unit, and the air outlet of the buffer body is communicated with the first port of the first tee joint.
3. A pump speed control device according to claim 2, wherein the damping body is provided with adjustment means for adjusting the internal volume of the damping body.
4. The pumping speed control device according to claim 1, wherein one end of the air inlet of the first throttle unit is provided with a filtering means for filtering impurities in the gas.
5. A device as claimed in claim 1, wherein the device further comprises:
the vacuum degree detection device is used for detecting the vacuum degree of the system to be pumped;
and a first port of the second tee is communicated with an air inlet of the second throttling unit, a second port of the second tee is communicated with the vacuum degree detection device, and a third port of the second tee is used for being communicated with the system to be pumped.
6. A vacuum preparation system, comprising:
a system to be pumped;
a vacuum pump;
a pumping speed control device comprising:
the first throttling unit is provided with an air inlet and an air outlet and is used for regulating the flow;
the second throttling unit is provided with an air inlet and an air outlet and is used for regulating the flow;
a first port of the first tee is communicated with the gas outlet of the first throttling unit, a second port of the first tee is communicated with the gas outlet of the second throttling unit, and a third port of the first tee is communicated with a vacuum pump; and the air inlet of the second throttling unit is used for being communicated with a system to be pumped.
7. The vacuum preparation system of claim 6, wherein said pumping speed control means further comprises:
the buffer body is hollow inside and is provided with an air inlet and an air outlet, wherein the air inlet of the buffer body is communicated with the air outlet of the first throttling unit, and the air outlet of the buffer body is communicated with the first port of the first tee joint.
8. A vacuum preparation system according to claim 7, wherein the buffer body is provided with adjustment means for adjusting the internal volume of the buffer body.
9. A vacuum preparation system according to claim 6, wherein one end of the air inlet of the first throttle unit is provided with a filtering device for filtering impurities in the air.
10. The vacuum preparation system of claim 6, wherein said pumping speed control means further comprises:
the vacuum degree detection device is used for detecting the vacuum degree of the system to be pumped;
and a first port of the second tee is communicated with an air inlet of the second throttling unit, a second port of the second tee is communicated with the vacuum degree detection device, and a third port of the second tee is used for being communicated with the system to be pumped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022892583.7U CN214221460U (en) | 2020-12-03 | 2020-12-03 | Pumping speed control device and vacuum preparation system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022892583.7U CN214221460U (en) | 2020-12-03 | 2020-12-03 | Pumping speed control device and vacuum preparation system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116624361A (en) * | 2023-04-11 | 2023-08-22 | 北京通嘉宏瑞科技有限公司 | Vacuum pump working method, device, computer equipment and storage medium |
| CN117167261A (en) * | 2023-11-03 | 2023-12-05 | 海门市海真真空设备有限公司 | Vacuum pump internal performance detection device based on reciprocating motion |
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2020
- 2020-12-03 CN CN202022892583.7U patent/CN214221460U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116624361A (en) * | 2023-04-11 | 2023-08-22 | 北京通嘉宏瑞科技有限公司 | Vacuum pump working method, device, computer equipment and storage medium |
| CN116624361B (en) * | 2023-04-11 | 2024-03-22 | 北京通嘉宏瑞科技有限公司 | Vacuum pump working method, device, computer equipment and storage medium |
| CN117167261A (en) * | 2023-11-03 | 2023-12-05 | 海门市海真真空设备有限公司 | Vacuum pump internal performance detection device based on reciprocating motion |
| CN117167261B (en) * | 2023-11-03 | 2023-12-26 | 海门市海真真空设备有限公司 | Vacuum pump internal performance detection device based on reciprocating motion |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
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| TR01 | Transfer of patent right |
Effective date of registration: 20221123 Address after: 212310 Workshop 7 #, Dezi Industrial Park, south of Liyao Road, Danyang Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu shiruidi photoelectric Co.,Ltd. Patentee after: NINGBO THREDIM OPTOELECTRONICS Co.,Ltd. Address before: 315000 No.58, Jingu Middle Road (West), Yinzhou District, Ningbo City, Zhejiang Province Patentee before: NINGBO THREDIM OPTOELECTRONICS Co.,Ltd. |