CN2142195Y - Stationary high accuracy flat plane scanning interferometer - Google Patents
Stationary high accuracy flat plane scanning interferometer Download PDFInfo
- Publication number
- CN2142195Y CN2142195Y CN 92234633 CN92234633U CN2142195Y CN 2142195 Y CN2142195 Y CN 2142195Y CN 92234633 CN92234633 CN 92234633 CN 92234633 U CN92234633 U CN 92234633U CN 2142195 Y CN2142195 Y CN 2142195Y
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- CN
- China
- Prior art keywords
- piezoelectric ceramics
- catoptrons
- scanning interferometer
- high precision
- parallel
- Prior art date
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- Expired - Fee Related
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Abstract
The utility model relates to a stationary high accuracy flat plane scanning interferometer which is composed of a press cap, a left and a right end seats, a protective barrel, cylindrical piezoelectric ceramics, a reflector and a protective cover. The reflector is a plane reflector whose two reflecting surfaces are mutually parallel with high accuracy, wherein, the positions of the two reflecting surfaces are fixed by a glass tube and the piezoelectric ceramics. The utility model has the advantages of high fine degree, wide spectral region, and no need of adjustment when in use, and can be applied to the mode spectrum detecting analysis of a laser, the spectral measurement with fine resolution, physics teaching, etc.
Description
The utility model relates to a kind of fixed high precision plane scanning interferometer.
Existing scanning interferometer is to utilize a tubular Piezoelectric Ceramic one spherical reflector to scan, and can obtain high-fineness and easy to use.But, the restriction that is subjected to curvature radius of spherical reflector limited its usable range owing to can not obtaining bigger free spectral range.In order to overcome this shortcoming, the mode that someone once utilized a sheet Piezoelectric Ceramic one plane mirror to scan, made the flat scanning interferometer, thereby obtained bigger free spectral range, but the shortcoming of this flat scanning interferometer is often to adjust its another catoptron, depth of parallelism event because of chip type piezoelectric pottery destructible two plane mirrors in alive concavo-convex motion simultaneously must monitor and adjust at any time, thereby has increased the difficulty of using.
Purpose of the present invention aims to provide a kind of novel flat scanning interferometer, makes it can obtain higher fineness, has wideer spectral range again, and does not need to adjust in using again.
Technical scheme of the present invention is that catoptron ［ 6 ］ is two plane mirrors that reflecting surface is parallel to each other, and the position of two catoptrons is fixing by glass tube ［ 5 ］ and tubular piezoelectric ceramics ［ 4 ］, and makes two reflecting surface high precision parallel.
Below technical scheme of the present invention is described further in conjunction with the accompanying drawings.
Figure one is a flat scanning interferometer assembly drawing.Also be embodiments of the invention.
Figure two is the device synoptic diagram that detect two plane reflection mirror-parallelisms in the interferometer assembling.
Two plane mirrors ［ 6 ］ grind through conventional optics cold machining process with high-quality fused quartz or high-quality optical glass and form.The inside surface flatness optics processing of every plate plane catoptron should reach more than 1/20 λ, and plates with the high inverse medium film in multilayer broadband, and its reflectivity should reach more than 99%.For the outside surface reflected light that makes level crossing can not disturb the interference fringe of two-supremes reverse side, between two surfaces of each plane mirror the one little angle of wedge should be arranged.
Two plane mirrors are sticked to two both ends of the surface respectively grind on the parallel glass tube ［ 5 ］, and two glass tubes are bonded at respectively on two alloy aluminum end seats ［ 2 ］ ［ 7 ］, an end of tubular piezoelectric ceramics ［ 4 ］ is bonded on one of them aluminium end seat.The length of noting two glass tubes is after the interferometer integral installation prepares, and the free spectral range that the spacing L that must guarantee two catoptrons meets the flat scanning interferometer requires (being that △ υ=(c)/(2L), c is the light velocity).In addition, the surfaces externally and internally of piezoelectric ceramics two-port will erode the silver layer of 1～2mm, and outside surface respectively welds a lead within it, so that add scanning voltage, also need make a call to two apertures on the alloy aluminum end seat, so that draw lead.
When debuging,, must put a short slightly protective sleeve in the piezoelectric ceramics outside for ease of grinding the other end of piezoelectric ceramics.Time spent is provided with a pick-up unit shown in figure two.Among the figure two, ［ 9 ］ are a small-sized He-Ne laser instrument, and ［ 10 ］ are a short focal length lens, laser beam datum are radiated on the aperture of paper screen ［ 11 ］ (being the light hurdle).When on the inside surface of interferometer two catoptrons ［ 6 ］ of the He-Ne laser beam irradiation that passes aperture in adjustment, two reflectings surface are with on the He-Ne laser beam reflected back ［ 11 ］.When adjusting to substantially parallel (in tens seconds), this two reflecting surface just can on screen ［ 11 ］, observe interference circle.Through careful grind adjust after, when the center and the screen of interference circle when upward aperture overlaps fully, illustrate that promptly the depth of parallelism of two mirror reflection surface of interferometer has reached requirement.
After reaching requirement, grinding can carry out whole fixedly bonding work.In the bonding, be to guarantee the accuracy of bonding, avoid destroying the quality of interference ring, interferometer need be fixed on the anchor clamps reliable and stable, easy to adjust because of the stress of adhesive glue, and observe interference ring simultaneously, go up aperture and overlap to guarantee interference ring center and screen.Deng removing anchor clamps after the viscose glue full solidification.
The utility model has the advantages that simple in structure, fineness is high, spectral region is wide, behind the high reflective mirror of coupling corresponding light spectral limit applicable to ultraviolet, visible, infrared range of spectrum. The mode spectrum that can be applicable to laser instrument detects analyzes high resolution spectral measuring and physics experiment teaching etc.
Description of drawings:
Figure one:
1. pressure cap 2. left end seats 3. are protected tube 4. piezoelectric ceramics 5. glass tubes 6. plane mirrors 7. right end bases 8. over caps
Figure two:
9.He-Ne laser instrument 10. short focal length lenses 11. pin holes shield 12. catoptrons, 13. interferometers
Claims (3)
1, fixed high precision plane scanning interferometer; by pressure cap [1] left end seat [2]; protection tube [3], tubular piezoelectric ceramics [4], glass tube [5]; catoptron [6]; right end base [7], over cap [8] constitutes, and it is characterized in that catoptron [6] is two plate plane catoptrons; the position of two catoptrons is fixing by glass tube [5] and tubular piezoelectric ceramics [4], and makes two reflecting surface high precision parallel.
2, flat scanning interferometer as claimed in claim 1, it is characterized in that two catoptrons ［ 6 ］ are bonded in respectively on two glass tubes ［ 5 ］, and link to each other with right end base ［ 7 ］ with left end seat ［ 2 ］ respectively by two glass tubes ［ 5 ］, one end of tubular piezoelectric ceramics ［ 4 ］ is bonded on left end seat ［ 2 ］ or the right end base ［ 7 ］, and the other end is bonded on another end seat when parallel through grind adjusting the reflecting surface high precision that makes two catoptrons.
3, as claim 1,2 described flat scanning interferometers, the parallel accuracy that it is characterized in that the reflecting surface of two catoptrons ［ 6 ］ is utilized He-Ne laser instrument ［ 9 ］, short focal length lens ［ 10 ］, pin hole screen ［ 11 ］, the pick-up unit that catoptron ［ 12 ］ constitutes detects, and grinds to adjust to reach high precision bonding is fixing when parallel by the not stiff end to piezoelectric ceramics and obtain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 92234633 CN2142195Y (en) | 1992-09-30 | 1992-09-30 | Stationary high accuracy flat plane scanning interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 92234633 CN2142195Y (en) | 1992-09-30 | 1992-09-30 | Stationary high accuracy flat plane scanning interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2142195Y true CN2142195Y (en) | 1993-09-15 |
Family
ID=33776642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 92234633 Expired - Fee Related CN2142195Y (en) | 1992-09-30 | 1992-09-30 | Stationary high accuracy flat plane scanning interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2142195Y (en) |
-
1992
- 1992-09-30 CN CN 92234633 patent/CN2142195Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |