CN114323311A - Interferometer for wavelength measurement - Google Patents
Interferometer for wavelength measurement Download PDFInfo
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- CN114323311A CN114323311A CN202110912187.2A CN202110912187A CN114323311A CN 114323311 A CN114323311 A CN 114323311A CN 202110912187 A CN202110912187 A CN 202110912187A CN 114323311 A CN114323311 A CN 114323311A
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- 238000005259 measurement Methods 0.000 title claims abstract description 33
- 239000005357 flat glass Substances 0.000 claims abstract description 114
- 230000003287 optical effect Effects 0.000 claims abstract description 25
- 238000002955 isolation Methods 0.000 claims abstract description 15
- 239000013307 optical fiber Substances 0.000 claims abstract description 8
- 238000002310 reflectometry Methods 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 abstract description 4
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 3
- 239000004568 cement Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
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Abstract
The invention discloses an interferometer for wavelength measurement, comprising: the optical fiber connector comprises an optical input port, a light shield, an off-axis parabolic reflector, a first flat glass, a second flat glass, at least 2 cylindrical lenses and at least 2 linear photodetectors, wherein an isolation frame with a hollow area at the center and a wedge angle is arranged between the first flat glass and the second flat glass, so that a sealed cavity is formed, and the front surface of the first flat glass and the rear surface of the second flat glass are oppositely arranged; at least one small flat glass with the thickness and positioned in the sealed cavity is arranged on one side of the front surface of the first flat glass, a first reflecting layer is arranged on the other side of the front surface, and a second reflecting layer is arranged on the rear surface of the second flat glass. The interferometer for wavelength measurement has wide detection spectral range and can accurately measure light wavelength light of various wavelength types simultaneously without increasing the size of a light path, thereby achieving pm-level measurement accuracy.
Description
Technical Field
The invention relates to an interference wavelength measuring instrument, and belongs to the technical field of optical wavelength detection.
Background
Techniques for achieving optical wavelength measurements in the optical domain include spectrometers and interferometers. The measurement precision of the spectrometer can reach about 0.02nm and the measurement precision of the interferometer can reach pm level or even smaller under the limitation of a measurement principle.
The existing interferometer for wavelength measurement adopts a reflection-type optical path, and the interference etalon is formed by bonding two pieces of flat glass and a spacer ring with a wedge angle by using an optical cement. The reflectivity of two plate glass-air interfaces is only about 4%, and the interference pattern obtained by the interference of two light beams generated by the reflected light beams of the two interfaces is a sine fringe with equal period. On one hand, in the prior art, an interferometer with a transmission light path is adopted, wherein an interference etalon is formed by bonding two pieces of plate glass and a space ring with a wedge angle by using optical cement, and different from the early research, a reflection film layer with larger reflectivity (reflectivity > 50%) to light waves is plated on the plate glass, light beams are reflected back and forth for multiple times between the reflection film layers so as to generate multi-beam interference of emergent light, and finally, a peak with higher brightness and sharper brightness than sinusoidal fringes is obtained.
On the other hand, the existing interference etalon is limited by factors such as transverse size, the number of pixels of the linear array photoelectric detector, signal noise, calculation accuracy and the like, and the pm-level and higher measurement accuracy is difficult to realize in a wide spectral range (hundreds of nanometers) by adopting one interference etalon. In order to solve the contradiction between the wide measurement range and the high measurement precision, it is important to develop an optical wavelength measurement device with a wide detection spectral range and high measurement precision for the development of the optical field.
Disclosure of Invention
The invention aims to provide an interferometer for wavelength measurement, which has a wide detection spectral range and can accurately measure light wavelength lights of various wavelength types simultaneously without increasing the size of an optical path, thereby achieving pm-level measurement precision and reducing the cost.
In order to achieve the purpose, the invention adopts the technical scheme that: an interferometer for wavelength measurement, comprising: the optical fiber connector comprises an optical input port, a light shield, an off-axis parabolic reflector, a first flat glass, a second flat glass, at least 2 cylindrical lenses and at least 2 linear photodetectors, wherein an isolation frame with a hollow area at the center and a wedge angle is arranged between the first flat glass and the second flat glass, so that a sealed cavity is formed, and the front surface of the first flat glass and the rear surface of the second flat glass are oppositely arranged;
at least one small flat glass with the thickness and positioned in the sealing cavity is arranged on one side of the front surface of the first flat glass, a first reflecting layer is arranged on the other side of the front surface of the first flat glass, the thickness of the small flat glass is smaller than that of the isolation frame, a second reflecting layer is arranged on the rear surface of the second flat glass, a third reflecting layer is arranged on the surface, opposite to the second flat glass, of the small flat glass, the light input port and the first flat glass are positioned on the same side of the off-axis parabolic reflector, and light from the light input port is reflected to the surface of the first flat glass through the off-axis parabolic reflector;
the light shield is arranged between the off-axis parabolic reflector and the first flat glass or between the second flat glass and at least 2 linear photodetectors.
The further improved scheme in the technical scheme is as follows:
1. in the scheme, the number of the small flat glass plates is 2, wherein the thickness of one small flat glass plate is larger than that of the other small flat glass plate.
2. In the above scheme, the optical input port is an optical fiber input port.
3. In the above scheme, the linear photodetector is a linear scanning image device.
4. In the above scheme, the reflectance of the first reflective layer, the second reflective layer and the third reflective layer is greater than 30%, and the transmittance is greater than 50%.
5. In the above scheme, the isolation frame is a microcrystalline glass isolation frame.
6. In the above scheme, the first plate glass and the second plate glass are microcrystalline plate glass.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
the invention relates to an interferometer for wavelength measurement, wherein one side of the front surface of a first plate glass is provided with at least one small plate glass which is provided with a thickness and is positioned in a sealed cavity, the other side of the front surface is provided with a first reflecting layer, the thickness of the small plate glass is smaller than that of an isolation frame, the rear surface of a second plate glass is provided with a second reflecting layer, the surface of the small plate glass, which is opposite to the second plate glass, is provided with a third reflecting layer, an optical input port and the first plate glass are positioned at the same side of an off-axis parabolic reflector, so that light from the optical input port is reflected to the surface of the first plate glass through the off-axis parabolic reflector, the detected spectral range is wide, the accurate measurement of light wavelength light of various wavelength types can be realized simultaneously without increasing the size of an optical path, the pm-level measurement accuracy is achieved, and the cost is also reduced.
Drawings
FIG. 1 is a schematic structural view of a Ferusso interferometric wavelength measuring apparatus according to embodiment 1 of the present invention;
FIG. 2 is a schematic partial optical path diagram of an interferometer for wavelength measurement according to the present invention;
FIG. 3 is an exploded view of the Fizeau interferometer of the present invention in accordance with embodiment 1;
FIG. 4 is an exploded view of the wavelength measuring apparatus of Fizeau interferometer of the present invention in embodiment 2.
In the above drawings: 1. an optical input port; 2. a light shield; 3. an off-axis parabolic mirror; 4. a first flat glass plate; 5. a second flat glass plate; 6. a cylindrical lens; 7. a linear photodetector; 8. an isolation frame; 9. small flat glass; 101. a first reflective layer; 102. a second reflective layer; 103. and a third reflective layer.
Detailed Description
In the description of this patent, it is noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The meaning of the above terms in this patent may be specifically understood by those of ordinary skill in the art.
Example 1: an interferometer for wavelength measurement, comprising: the optical fiber coupler comprises an optical input port 1, a light shield 2, an off-axis parabolic reflector 3, a first flat glass 4, a second flat glass 5, 2 cylindrical lenses 6 and 2 linear photodetectors 7, wherein a separation frame 8 which is provided with a hollow area at the center and a wedge angle is arranged between the first flat glass 4 and the second flat glass 5, so that a sealed cavity is formed, and the front surface of the first flat glass 4 and the rear surface of the second flat glass 5 are oppositely arranged;
a small flat glass 9 with a thickness and located in the sealed cavity is arranged on one side of the front surface of the first flat glass 4, a first reflecting layer 101 is arranged on the other side of the front surface, the thickness of the small flat glass 9 is smaller than that of the isolation frame 8, a second reflecting layer 102 is arranged on the rear surface of the second flat glass 5, a third reflecting layer 103 is arranged on the surface of the small flat glass 9 opposite to the second flat glass 5, the light input port 1 and the first flat glass 4 are located on the same side of the off-axis parabolic reflector 3, so that light from the light input port 1 is reflected to the surface of the first flat glass 4 through the off-axis parabolic reflector 3;
the light shield 2 is arranged between the off-axis parabolic reflector 3 and the first flat glass 4 or between the second flat glass 5 and at least 2 linear photodetectors 7.
The optical input port 1 is an optical fiber input port.
The above-described linear photodetector 7 is a linear scanning image device.
The first, second, and third reflective layers 101, 102, and 103 have a reflectance of more than 30% and a transmittance of more than 50%.
The first plate glass 4 and the second plate glass 5 are microcrystalline plate glasses.
Example 2: an interferometer for wavelength measurement, comprising: the optical fiber coupler comprises an optical input port 1, a light shield 2, an off-axis parabolic reflector 3, a first flat glass 4, a second flat glass 5, 2 cylindrical lenses 6 and 2 linear photodetectors 7, wherein a separation frame 8 which is provided with a hollow area at the center and a wedge angle is arranged between the first flat glass 4 and the second flat glass 5, so that a sealed cavity is formed, and the front surface of the first flat glass 4 and the rear surface of the second flat glass 5 are oppositely arranged;
two small flat glasses 9 with thicknesses and located in the sealed cavity are arranged on one side of the front surface of the first flat glass 4, a first reflecting layer 101 is arranged on the other side of the front surface, the thickness of each small flat glass 9 is smaller than that of the isolation frame 8, the thickness of one small flat glass 9 is larger than that of the other small flat glass 9, a second reflecting layer 102 is arranged on the rear surface of the second flat glass 5, a third reflecting layer 103 is arranged on the surface, opposite to the second flat glass 5, of each small flat glass 9, the light input port 1 and the first flat glass 4 are located on the same side of the off-axis parabolic reflector 3, and light from the light input port 1 is reflected to the surface of the first flat glass 4 through the off-axis parabolic reflector 3;
the light shield 2 is arranged between the off-axis parabolic reflector 3 and the first flat glass 4 or between the second flat glass 5 and at least 2 linear photodetectors 7.
The optical input port 1 is an optical fiber input port.
The above-described linear photodetector 7 is a linear scanning image device.
The first, second, and third reflective layers 101, 102, and 103 have a reflectance of more than 30% and a transmittance of more than 50%.
The isolation frame 8 is a glass ceramics isolation frame.
When the interferometer for wavelength measurement is adopted, one side of the front surface of the first flat glass is provided with at least one small flat glass with the thickness and positioned in the sealing cavity, the other side of the front surface is provided with a first reflecting layer, the thickness of the small flat glass is smaller than that of the isolation frame, the rear surface of the second flat glass is provided with a second reflecting layer, the opposite surfaces of the small flat glass and the second flat glass are provided with third reflecting layers, the optical input port and the first flat glass are positioned on the same side of the off-axis parabolic reflector, so that light from the optical input port is reflected to the surface of the first flat glass through the off-axis parabolic reflector, the detected spectral range is wide, the wavelength light of various wavelength types can be accurately measured at the same time without increasing the size of an optical path, pm-level measurement accuracy is achieved, and the cost is also reduced.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (7)
1. An interferometer for wavelength measurement, comprising: the method comprises the following steps: the photoelectric detector comprises a light input port (1), a light shield (2), an off-axis parabolic reflector (3), a first flat glass (4), a second flat glass (5), at least 2 cylindrical lenses (6) and at least 2 linear photodetectors (7), wherein a separation frame (8) with a hollow area in the center and a wedge angle is arranged between the first flat glass (4) and the second flat glass (5) so as to form a sealed cavity, and the front surface of the first flat glass (4) is opposite to the rear surface of the second flat glass (5);
at least one small flat glass (9) with the thickness and located in the sealed cavity is arranged on one side of the front surface of the first flat glass (4), a first reflecting layer (101) is arranged on the other side of the front surface of the first flat glass, the thickness of the small flat glass (9) is smaller than that of the isolation frame (8), a second reflecting layer (102) is arranged on the rear surface of the second flat glass (5), a third reflecting layer (103) is arranged on the surface, opposite to the second flat glass (5), of the small flat glass (9), the light input port (1) and the first flat glass (4) are located on the same side of the off-axis parabolic reflector (3), and light from the light input port (1) is reflected to the surface of the first flat glass (4) through the off-axis parabolic reflector (3);
the light shield (2) is arranged between the off-axis parabolic reflector (3) and the first plate glass (4) or between the second plate glass (5) and the at least 2 linear photoelectric detectors (7).
2. Interferometer apparatus for wavelength measurement according to claim 1, wherein: the number of the small flat glass (9) is 2, wherein the thickness of one small flat glass (9) is larger than that of the other small flat glass (9).
3. Interferometer apparatus for wavelength measurement according to claim 1, wherein: the optical input port (1) is an optical fiber input port.
4. Interferometer apparatus for wavelength measurement according to claim 1, wherein: the linear photodetector (7) is a linear scanning image device.
5. Interferometer apparatus for wavelength measurement according to claim 1, wherein: the reflectivity of the first reflecting layer (101), the second reflecting layer (102) and the third reflecting layer (103) is more than 30%, and the transmissivity is more than 50%.
6. Interferometer apparatus for wavelength measurement according to claim 1, wherein: the isolation frame (8) is a microcrystalline glass isolation frame.
7. Interferometer apparatus for wavelength measurement according to claim 1, wherein: the first plate glass (4) and the second plate glass (5) are microcrystalline plate glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110912187.2A CN114323311A (en) | 2021-08-10 | 2021-08-10 | Interferometer for wavelength measurement |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110912187.2A CN114323311A (en) | 2021-08-10 | 2021-08-10 | Interferometer for wavelength measurement |
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| Publication Number | Publication Date |
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| CN114323311A true CN114323311A (en) | 2022-04-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110912187.2A Pending CN114323311A (en) | 2021-08-10 | 2021-08-10 | Interferometer for wavelength measurement |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6016199A (en) * | 1994-08-24 | 2000-01-18 | Newton; William | Interferometric device for performing spectroscopic measurements with a stepped Fabry Perot |
| US10948356B1 (en) * | 2020-06-22 | 2021-03-16 | Quantum Valley Ideas Laboratories | Measuring wavelength of light |
-
2021
- 2021-08-10 CN CN202110912187.2A patent/CN114323311A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6016199A (en) * | 1994-08-24 | 2000-01-18 | Newton; William | Interferometric device for performing spectroscopic measurements with a stepped Fabry Perot |
| US10948356B1 (en) * | 2020-06-22 | 2021-03-16 | Quantum Valley Ideas Laboratories | Measuring wavelength of light |
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Address after: Building 5, No. 1508, Xiangjiang Road, Suzhou High-tech Zone, Suzhou City, Jiangsu Province 215129 Applicant after: Suzhou Lianxun Instrument Co.,Ltd. Address before: 215011 Building 5, no.1508 Xiangjiang Road, high tech Zone, Suzhou City, Jiangsu Province Applicant before: STELIGHT INSTRUMENT Inc. |