CN214218836U - Full-automatic vertical film coating machine capable of being quickly assembled and disassembled with partition plates - Google Patents
Full-automatic vertical film coating machine capable of being quickly assembled and disassembled with partition plates Download PDFInfo
- Publication number
- CN214218836U CN214218836U CN202022706408.4U CN202022706408U CN214218836U CN 214218836 U CN214218836 U CN 214218836U CN 202022706408 U CN202022706408 U CN 202022706408U CN 214218836 U CN214218836 U CN 214218836U
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- China
- Prior art keywords
- coating machine
- full
- disassembled
- automatic vertical
- machine capable
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005192 partition Methods 0.000 title claims description 32
- 239000007888 film coating Substances 0.000 title claims description 10
- 238000009501 film coating Methods 0.000 title claims description 10
- 239000011248 coating agent Substances 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 9
- 238000009434 installation Methods 0.000 claims abstract description 7
- 230000008878 coupling Effects 0.000 abstract description 6
- 238000010168 coupling process Methods 0.000 abstract description 6
- 238000005859 coupling reaction Methods 0.000 abstract description 6
- 238000007747 plating Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Abstract
The utility model provides a can install full-automatic vertical coating machine of dismantling baffle fast, including coating machine, real empty room roof and baffle, the below of real empty room roof is equipped with the spout, fixed connection stop gear in the spout, symmetry fixed connection coupling assembling on the real empty room roof, the utility model relates to a science, the structure is succinct practical, and is spacing to the baffle that is difficult to install through stop gear for screw on the baffle just to coupling assembling, only needs to assemble the installation dismantlement that just can realize the baffle with coupling assembling.
Description
Technical Field
The utility model mainly relates to the technical field of coating machines, in particular to a full-automatic vertical coating machine capable of quickly mounting and dismounting a partition plate.
Background
The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to divide into evaporation and sputtering.
When the existing film plating machine is used for installing the partition plate of the important component part, the partition plate is generally lifted, the relative positions of a screw hole on the partition plate and a connecting piece on the top wall of a vacuum chamber are slowly adjusted, and finally the partition plate is connected with the top wall of the vacuum chamber.
However, the existing installation mode of the partition plate is troublesome, and particularly, the relative position of the installation screw hole and the connecting piece on the top wall of the vacuum chamber is not easy to adjust for the large partition plate.
SUMMERY OF THE UTILITY MODEL
The utility model mainly provides a full-automatic vertical film coating machine capable of rapidly mounting and dismounting a partition plate, which is used for solving the technical problem provided in the background technology.
The utility model provides a technical scheme that above-mentioned technical problem adopted does:
the full-automatic vertical coating machine capable of quickly mounting and dismounting the partition plate comprises a coating machine, a vacuum chamber top wall and the partition plate, wherein a sliding groove is arranged below the vacuum chamber top wall, a limiting mechanism is fixedly connected in the sliding groove, and connecting components are symmetrically and fixedly connected to the vacuum chamber top wall.
Further, stop gear includes the spacing unit of two symmetries, spacing unit includes first spacing groove, a plurality of second spacing grooves of bottom fixed connection of first spacing groove, the equal fixed connection spring in the second spacing groove, the other end fixed connection of spring removes the hemisphere, remove hemisphere sliding connection in the inner wall of second spacing groove, remove a plurality of carriage release levers of opposite side fixed connection of hemisphere, it is a plurality of the equal fixed connection in movable plate of opposite side of carriage release lever, movable plate sliding connection in the spout.
Furthermore, a guide plate is fixedly connected to the lower portion of the moving plate, and the guide plate is obliquely arranged.
Furthermore, coupling assembling includes the fixed unit of two symmetries, the below of fixed unit is equipped with the screw, special-shaped bolt is connected in the interlock in the screw.
Furthermore, the special-shaped bolt comprises a bolt head and a screw rod, a placing rod is fixedly connected below the screw rod, and the placing rod is movably connected with a movable block.
Further, the diameter of the placing rod is smaller than that of the screw.
Further, the movable block is a hollow cylinder.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses a stop gear carries on spacingly to the baffle that is difficult to install for screw on the baffle just to coupling assembling, only needs to assemble the installation and the dismantlement that just can realize the baffle with coupling assembling.
The present invention will be explained in detail with reference to the drawings and specific embodiments.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the limiting mechanism of the present invention;
FIG. 3 is an enlarged schematic view of the utility model at A;
fig. 4 is a schematic view of the special-shaped bolt of the present invention;
fig. 5 is a schematic view of the structure of the placing rod of the present invention.
In the figure: the device comprises a film coating machine 1, a vacuum chamber 2, a top wall of a vacuum chamber 3, a partition plate 21, a sliding chute, a limiting mechanism 4, a limiting unit 41, a first limiting groove 411, a second limiting groove 412, a spring 413, a moving hemisphere 414, a moving rod 415, a moving plate 416, a guide plate 4161, a connecting assembly 5, a fixing unit 51, a special-shaped bolt 52, a bolt head 521, a bolt 522, a placing rod 523 and a moving block 524.
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described more fully with reference to the accompanying drawings, in which several embodiments of the present invention are shown, but the present invention can be implemented in different forms, and is not limited to the embodiments described in the text, but rather, these embodiments are provided to make the disclosure of the present invention more thorough and comprehensive.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may be present, and when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present, as the terms "vertical", "horizontal", "left", "right" and the like are used herein for descriptive purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, and the use of the term knowledge in the specification of the present invention is for the purpose of describing particular embodiments and is not intended to limit the present invention, and the term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Please refer to fig. 1-5 in greater detail, a full-automatic vertical film plating machine capable of rapidly assembling and disassembling a partition board comprises a film plating machine 1, a vacuum chamber top wall 2 and a partition board 3, a sliding groove 21 is arranged below the vacuum chamber top wall 2, a limiting mechanism 4 is fixedly connected in the sliding groove 21, and a connecting component 5 is symmetrically and fixedly connected on the vacuum chamber top wall 2.
Please refer to fig. 1-3, the limiting mechanism 4 includes two symmetrical limiting units 41, the limiting unit 41 includes a first limiting groove 411, the bottom of the first limiting groove 411 is fixedly connected to a plurality of second limiting grooves 412, the second limiting grooves 412 are fixedly connected to springs 413, the other ends of the springs 413 are fixedly connected to a movable hemisphere 414, the movable hemisphere 414 is slidably connected to the inner wall of the second limiting groove 412, the other side of the movable hemisphere 414 is fixedly connected to a plurality of movable rods 415, the other sides of the movable rods 415 are fixedly connected to a movable plate 416, and the movable plate 416 is slidably connected to the sliding groove 21. The relative position of the screw hole on the partition plate 3 and the connecting assembly 5 is adjusted through the limiting mechanism 4, and the installation is convenient.
Referring to fig. 2-4 again, a guide plate 4161 is fixedly connected to the lower portion of the moving plate 416, and the guide plate 4161 is disposed in an inclined manner; the connecting assembly 5 comprises two symmetrical fixing units 51, a screw hole 511 is arranged below each fixing unit 51, and the screw hole 511 is internally engaged with a special-shaped bolt 5; the special-shaped bolt 52 comprises a bolt head 521 and a screw rod 522, a placing rod 523 is fixedly connected below the screw rod 522, and a movable block 524 is movably connected on the placing rod 523; the diameter of the placing rod 523 is smaller than that of the screw 522; the movable block 524 is a hollow cylinder; the partition plate 3 is clamped by the movement of the movable block 524 for quick installation and removal.
The utility model discloses a concrete operation as follows: the partition board 3 is lifted, the two sides of the partition board 3 are opposite to the guide plates 4161 of the two limiting units 41, when the partition board 3 is lifted, the guide plates 4161 move towards the two sides, the extrusion moving plate 416 moves towards the two sides, meanwhile, the moving rod 415 extrudes the moving hemisphere 414 to move towards the second limiting groove 412, in the process, the partition board 3 is adjusted, the screw hole in the partition board 3 is located right in front of the fixed unit 51, then the moving block 524 is slightly lifted to be attached to the periphery of the screw hole, the special-shaped bolt 52 is screwed in, the moving block 524 comes out from the other end of the screw hole and falls down to clamp the partition board 3, then the nut is screwed in to clamp the partition board 3, when the partition board is disassembled, the nut is only required to be screwed out, the moving block 524 is slightly lifted, the special-shaped bolt 52 is screwed out, and the partition board 3 is disassembled.
The present invention has been described above with reference to the accompanying drawings, and it is obvious that the present invention is not limited by the above-mentioned manner, if the method and the technical solution of the present invention are adopted, the present invention can be directly applied to other occasions without substantial improvement, and the present invention is within the protection scope of the present invention.
Claims (7)
1. The utility model provides a but full-automatic vertical coating machine of baffle is dismantled in quick installation, includes coating machine (1), real empty room roof (2) and baffle (3), its characterized in that: the vacuum chamber top wall (2) is provided with a sliding groove (21) below, the sliding groove (21) is internally and fixedly connected with a limiting mechanism (4), and the vacuum chamber top wall (2) is symmetrically and fixedly connected with a connecting assembly (5).
2. The full-automatic vertical film coating machine capable of being rapidly assembled and disassembled with the partition plate as claimed in claim 1, is characterized in that: stop gear (4) include two symmetrical spacing units (41), spacing unit (41) include first spacing groove (411), a plurality of second spacing grooves (412) of bottom fixed connection of first spacing groove (411), equal fixed connection spring (413) in second spacing groove (412), the other end fixed connection of spring (413) removes hemisphere (414), remove hemisphere (414) sliding connection in the inner wall of second spacing groove (412), remove a plurality of carriage release levers (415) of the opposite side fixed connection of hemisphere (414), it is a plurality of the equal fixed connection in movable plate (416) of opposite side of carriage release lever (415), movable plate (416) sliding connection in spout (21).
3. The full-automatic vertical film coating machine capable of being rapidly assembled and disassembled with the partition plate as claimed in claim 2, is characterized in that: and a guide plate (4161) is fixedly connected below the moving plate (416), and the guide plate (4161) is obliquely arranged.
4. The full-automatic vertical film coating machine capable of being rapidly assembled and disassembled with the partition plate as claimed in claim 1, is characterized in that: the connecting assembly (5) comprises two symmetrical fixing units (51), a screw hole (511) is formed in the lower portion of each fixing unit (51), and the screw hole (511) is internally meshed with a special-shaped bolt (52).
5. The full-automatic vertical film coating machine capable of being rapidly assembled and disassembled with the partition plate as claimed in claim 4, is characterized in that: the special-shaped bolt (52) comprises a bolt head (521) and a screw rod (522), a placing rod (523) is fixedly connected to the lower portion of the screw rod (522), and a movable block (524) is movably connected to the placing rod (523).
6. The full-automatic vertical film coating machine capable of being rapidly assembled and disassembled with the partition plate as claimed in claim 5, is characterized in that: the diameter of the placing rod (523) is smaller than that of the screw (522).
7. The full-automatic vertical film coating machine capable of being rapidly assembled and disassembled with the partition plate as claimed in claim 5, is characterized in that: the movable block (524) is a hollow cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022706408.4U CN214218836U (en) | 2020-11-20 | 2020-11-20 | Full-automatic vertical film coating machine capable of being quickly assembled and disassembled with partition plates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022706408.4U CN214218836U (en) | 2020-11-20 | 2020-11-20 | Full-automatic vertical film coating machine capable of being quickly assembled and disassembled with partition plates |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214218836U true CN214218836U (en) | 2021-09-17 |
Family
ID=77698334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022706408.4U Expired - Fee Related CN214218836U (en) | 2020-11-20 | 2020-11-20 | Full-automatic vertical film coating machine capable of being quickly assembled and disassembled with partition plates |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214218836U (en) |
-
2020
- 2020-11-20 CN CN202022706408.4U patent/CN214218836U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210917 |