CN214201830U - Two-dimensional closed surface wave photonic crystal structure - Google Patents
Two-dimensional closed surface wave photonic crystal structure Download PDFInfo
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- CN214201830U CN214201830U CN202120299661.4U CN202120299661U CN214201830U CN 214201830 U CN214201830 U CN 214201830U CN 202120299661 U CN202120299661 U CN 202120299661U CN 214201830 U CN214201830 U CN 214201830U
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Abstract
The utility model provides a two-dimensional closed surface wave photonic crystal structure, which comprises a first metal plate, a second metal plate, metal columns and defect metal columns, wherein the first metal plate and the second metal plate are correspondingly arranged, the metal columns are two-dimensional and periodically arranged between the first metal plate and the second metal plate, and the two opposite ends of the metal columns are respectively contacted with the first metal plate and the second metal plate to form a metal column array; the defective metal pillar is located in the metal pillar array, and the height of the defective metal pillar is smaller than that of the surrounding metal pillars. The utility model discloses on surface wave photonic crystal structure's basis, through combining the metal sheet, can integrate the closed surface wave photonic crystal structure of two dimension including surface wave photonic crystal structure and metal-insulator-metal structure to a closed surface wave photonic crystal structure of two dimension that interference immunity is stronger, the integrated level is higher is provided.
Description
Technical Field
The utility model belongs to the integrated optics field relates to a closed surface wave photonic crystal structure of two dimension.
Background
In 1969, doctor Miller, bell laboratories, proposed the concept of integrated optics. Integrated optics has been primarily aimed at integrating bulky free-space optical systems onto the same substrate. The size of the integrated optical device changes with different frequency bands, for example, the millimeter wave frequency band is generally in millimeter level, and the terahertz (THz) frequency band is mainly in micrometer level. The integrated optical device has the advantages of low power consumption and small volume, and is in a relatively closed environment after being integrated, so that the interference of external electromagnetic radiation is small. Under the background that the integrated circuit is constrained by moore's law and the prospect is limited, the photoelectronic technology shows great advantages: the speed of photons in an integrated optical circuit is much greater than the speed of electrons in an integrated circuit, and has greater information capacity.
In recent decades, with the rapid development of integrated optical circuit technology, photonic crystals called "optical semiconductors" have attracted considerable attention. The photonic crystal is a novel optical microstructure material with dielectric constant changing with space periodicity, and can be divided into three categories of one-dimensional photonic crystal, two-dimensional photonic crystal and three-dimensional photonic crystal according to the periodicity difference of the photonic crystal in three dimensions, wherein the two-dimensional photonic crystal can be subdivided into a hole-shaped flat-plate type photonic crystal, a dielectric column type photonic crystal, a current leading-edge quasi-photonic crystal and the like according to the structural characteristics of the two-dimensional photonic crystal. The photonic crystal has two characteristics of photon forbidden band and photon local area, and the most fundamental characteristic is that the photonic crystal has the photon forbidden band.
In nature, surface plasmons are collective oscillation modes of free electrons-photons formed by interaction of electromagnetic waves and free electrons on the surface of a metal. The surface plasmons can exist only at material interfaces with opposite real part of dielectric constant signs, such as interfaces between metal and air, and can be divided into two types, one is surface plasmon polaritons transmitted on the metal and dielectric medium interfaces, and the other is local surface plasmons limited on the surfaces of metal nanoparticles. In 2004, j.b. pendry et al, in order to realize Surface Plasmon polaritons in the microwave millimeter wave band, etching periodically arranged air holes in a metal cube realizes Surface Plasmon Polariton (SPP) transmission in the microwave millimeter wave band, and such a structure is called as an artificial Surface Plasmon Polariton (SSPP). In 2005, Hibbins et al, university of Eckcet, published experimental research results of SSPP in Science, and later, research on SSPP appeared in large quantities, but in the existing research techniques, SSPP was strongly interfered by external factors.
Therefore, it is necessary to provide a novel surface wave photonic crystal structure.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a two-dimensional closed surface wave photonic crystal structure for solving the problem that the artificial surface plasmon is easily interfered by external factors in the prior art.
To achieve the above and other related objects, the present invention provides a two-dimensional closed surface wave photonic crystal structure, comprising:
the first metal plate and the second metal plate are arranged correspondingly;
the metal posts are periodically arranged between the first metal plate and the second metal plate in a two-dimensional manner, and two opposite ends of the metal posts are respectively contacted with the first metal plate and the second metal plate to form a metal post array;
a defective metal pillar located in the array of metal pillars and having a height less than a height of the surrounding metal pillars.
Optionally, the metal posts are arranged at equal intervals.
Optionally, the metal pillars have the same cross-sectional area, and the cross-sectional morphology of the metal pillars includes circular, square, or elliptical.
Optionally, the defective metal pillars are arranged at equal intervals.
Optionally, the defective metal pillars have the same cross-sectional area, and the cross-sectional morphology of the defective metal pillars includes a circle, a square, or an ellipse.
Optionally, the metal pillar has the same cross-sectional morphology as the defective metal pillar.
Optionally, the metal pillars and the defective metal pillars are arranged at equal intervals.
Optionally, the defective metal pillars have the same height.
Optionally, the shape of the structure surrounded by the defective metal pillars includes one of a straight line type, a bent type and a T shape.
Optionally, the first metal plate, the second metal plate, the metal pillar, and the defect metal pillar are made of the same material, wherein the material includes one of gold metal, silver metal, copper metal, and aluminum metal.
As described above, the two-dimensional closed surface wave photonic crystal structure of the present invention includes the first metal plate, the second metal plate, the metal posts and the defective metal posts, wherein the first metal plate and the second metal plate are disposed correspondingly, the metal posts are two-dimensionally and periodically arranged between the first metal plate and the second metal plate, and two opposite ends of the metal posts are respectively in contact with the first metal plate and the second metal plate to form a metal post array; the defective metal pillar is located in the metal pillar array, and the height of the defective metal pillar is smaller than the height of the surrounding metal pillars. The utility model discloses a first metal sheet, metal column and defect metal column constitute surface wave photonic crystal structure, and are in on the basis of surface wave photonic crystal structure, through combining the second metal sheet to integrateable include surface wave photonic crystal structure and metal-insulator-metal construction's the closed surface wave photonic crystal structure of two dimension to provide the closed surface wave photonic crystal structure of two dimension that interference immunity is stronger, the integrated level is higher.
Drawings
Fig. 1 is a schematic perspective view of a surface wave photonic crystal structure according to a comparative example of the present invention.
Fig. 2 is a schematic view showing a cross-sectional structure taken along a-a' in fig. 1.
Fig. 3 is a schematic representation of the waveguide transmission coefficient for the surface wave photonic crystal structure of fig. 1.
FIG. 4 is a schematic representation of the passband versus field distribution of the surface wave photonic crystal structure of FIG. 1.
Fig. 5 is a schematic diagram showing the electric field local distribution corresponding to the transmission peak of the forbidden band of the surface wave photonic crystal structure in fig. 1.
Fig. 6 is a schematic dispersion curve of the surface wave photonic crystal structure of fig. 1.
Fig. 7 is a schematic perspective view of a two-dimensional closed surface wave photonic crystal structure according to an embodiment of the present invention.
Fig. 8 shows the exploded structure of fig. 7.
Fig. 9 is a schematic view showing a cross-sectional structure taken along line C-C' in fig. 7.
Fig. 10a to 10c are schematic structural views showing the surface wave photonic crystal structure of fig. 7.
Fig. 11 is a schematic diagram of a band guided mode of the surface wave photonic crystal structure of fig. 7.
Fig. 12 is a schematic diagram showing the transmission coefficient of the waveguide in fig. 7.
FIG. 13 is a schematic diagram of the local distribution of electric field in FIG. 7.
Description of the element reference numerals
100. 10 first metal plate
200 second metal plate
300. 30 metal column
400. 40 defective metal pillar
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.
As in the detailed description of the embodiments of the present invention, the cross-sectional views illustrating the device structure are not partially enlarged in general scale for convenience of illustration, and the schematic views are only examples, which should not limit the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in the actual fabrication.
For convenience in description, spatial relational terms such as "below," "beneath," "below," "under," "over," "upper," and the like may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that these terms of spatial relationship are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the figures. Further, when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present. As used herein, "between … …" is meant to include both endpoints.
In the context of this application, a structure described as having a first feature "on" a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed in between the first and second features, such that the first and second features may not be in direct contact.
It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and only the components related to the present invention are shown in the drawings rather than being drawn according to the number, shape and size of the components in actual implementation, and the form, amount and ratio of the components in actual implementation may be changed at will, and the layout of the components may be more complicated.
As shown in fig. 7 to 9, the present embodiment provides a two-dimensional closed surface wave photonic crystal structure, which includes a first metal plate 100, a second metal plate 200, metal pillars 300 and defective metal pillars 400, wherein the first metal plate 100 and the second metal plate 200 are disposed correspondingly, the metal pillars 300 are two-dimensionally and periodically arranged between the first metal plate 100 and the second metal plate 200, and two opposite ends of the metal pillars 300 are respectively in contact with the first metal plate 100 and the second metal plate 200 to form a metal pillar array; the defective metal pillar 400 is located in the metal pillar array, and the height H of the defective metal pillar 400 is less than the height H of the surrounding metal pillar 300.
In the present embodiment, the surface wave photonic crystal structure shown in fig. 10a to 10c is formed by the first metal plate 100, the metal posts 300 and the defect metal posts 400, and the two-dimensional closed surface wave photonic crystal structure including the surface wave photonic crystal structure and the metal-insulator-metal structure can be integrated by combining the second metal plate 200 shown in fig. 7 to 9 on the basis of the surface wave photonic crystal structure, so as to provide a two-dimensional closed surface wave photonic crystal structure with high interference immunity and high integration level.
For example, the metal pillars 300 are arranged at equal intervals a, but not limited thereto, and the metal pillars 300 may also be arranged at unequal intervals as needed, which is not limited herein.
As an example, the metal pillars 300 have the same cross-sectional area, and the cross-sectional profile of the metal pillars 300 may include a circular shape, a square shape, or an oval shape.
Specifically, in the present embodiment, the metal pillars 300 have the same cross-sectional area and have a circular cross-sectional shape, that is, the metal pillars 300 have a cylindrical shape with the same radius R, but the shape of the metal pillars 300 is not limited thereto, and the metal pillars 300 may also have a square shape, an oval shape or any combination of a circular shape, a square shape and an oval shape as required, and the sizes of the metal pillars 300 are not limited to the same.
As an example, the defective metal pillars 400 are arranged at equal intervals a (not shown), but not limited thereto, and the defective metal pillars 400 may be arranged at unequal intervals as needed, which is not limited herein.
As an example, the defective metal pillars 400 have the same cross-sectional area, and the cross-sectional profile of the defective metal pillars 400 may include a circular shape, a square shape, or an oval shape.
Specifically, in the present embodiment, the defective metal pillar 400 has the same cross-sectional area and a circular cross-sectional shape, that is, the defective metal pillar 400 has a cylindrical shape with the same radius r, but the shape of the defective metal pillar 400 is not limited thereto, and the defective metal pillar 400 may also have a square shape, an oval shape, or any combination of a circular shape, a square shape, and an oval shape, as required.
As an example, the metal pillar 300 has the same cross-sectional profile as the defective metal pillar 400.
Specifically, in this embodiment, the metal pillar 300 and the defective metal pillar 400 preferably have the same cross-sectional profile, that is, the radius R of the metal pillar 300 and the radius R of the defective metal pillar 400 preferably have the same size, but are not limited thereto.
As an example, the metal pillars 300 and the defective metal pillars 400 are arranged at equal intervals.
Specifically, in this embodiment, the metal pillars 300 and the defective metal pillars 400 are preferably arranged at equal intervals, that is, the interval a between the metal pillars 300 and the interval a between the defective metal pillars 400 are preferably the same size, and the interval between the metal pillars 300 and the defective metal pillars 400 is also the interval a, but the present invention is not limited thereto.
By way of example, the defective metal pillars 400 have the same height h, but are not limited thereto and may be specifically disposed as needed.
By way of example, the shape of the structure surrounded by the defective metal pillar 400 includes one of a straight line type, a bent type, and a T-shape.
Specifically, three surface wave photonic crystal structures in the present embodiment are illustrated with reference to fig. 10a to 10c, wherein fig. 10a illustrates a surface wave photonic crystal structure having a linear distribution of the defective metal pillars 400, fig. 10b illustrates a surface wave photonic crystal structure having a curved distribution of the defective metal pillars 400, and fig. 10c illustrates a surface wave photonic crystal structure having a T-shaped distribution of the defective metal pillars 400, but the distribution morphology of the defective metal pillars 400 is not limited thereto.
As an example, the first metal plate 100, the second metal plate 200, the metal pillar 300 and the defect metal pillar 400 are made of the same material, wherein the material may include one of gold metal, silver metal, copper metal and aluminum metal, and the specific material may be selected according to the requirement, which is not limited herein.
The design of the two-dimensional closed surface wave photonic crystal structure is described below with reference to experiments, wherein the selection of specific dimensions, morphology, materials, etc. of the two-dimensional closed surface wave photonic crystal structure is not limited herein, and changes in the operating frequency band, dispersion curve, and other results caused by changing any geometric parameters are within the scope of this patent.
Referring to fig. 1 to 5, comparative examples and experimental results thereof are provided, which specifically include:
as shown in fig. 1, a surface wave photonic crystal structure is provided which is comprised of two parts, a lower layer of a first metal 10 and an upper layer of a square array of metal posts 30 (using metal cylinders) and defect posts 40 (using metal cylinders). When operating at 0.1THz, the distance a 'between the metal posts 30 is equal to the distance a' (not shown) between the defect posts 40, i.e., a '═ a' is 0.5mm, the radius R '═ 0.25A' of the metal posts 30, i.e., R '═ 0.125mm, the height H' ═ 0.5mm of the metal posts 30, the radius R '═ 0.25A' of the defect posts 40, i.e., R '═ 0.125mm, and the height H' ═ 0.83H of the defect posts 40 is 0.415 mm.
After the defect column 40 is introduced, a photonic crystal waveguide can be constructed according to the photonic forbidden band and the photonic local characteristics of the photonic crystal, the transmission coefficient of the waveguide is shown in fig. 3, the transmission coefficient comprises two parts of a passband frequency band and a forbidden band frequency band, the passband frequency band (100GHz for example) corresponds to the electric field distribution as shown in fig. 4, the forbidden band transmission peak (135GHz) corresponds to the electric field distribution as shown in fig. 5, it can be seen that the structure is limited by the passband and can only work at the frequency corresponding to the forbidden band transmission peak, the 100GHz dispersion curve is shown in fig. 6, and the forbidden band range of the surface wave photonic crystal is 126 GHz-278 GHz. Meanwhile, since it mainly works on the surface of the metal cylinder, which is exposed to the external environment, it is very vulnerable to the interference of external factors.
Referring to fig. 7 to 13, embodiments and experimental results thereof are provided, which specifically include:
referring to fig. 7 to 9, in this embodiment, a second metal plate is added on the basis of the above comparative example to form a novel two-dimensional closed surface wave photonic crystal structure, which specifically includes an upper layer, a middle layer and a lower layer, where the upper layer and the lower layer are metal plates, the middle layer is a metal pillar and a defect metal pillar that are two-dimensionally and periodically arranged, and the three layers are made of metal commonly used in waveguides, such as silver metal. As shown in fig. 9, the height of the metal pillar 300 is H, the height of the defective metal pillar 400 is H, the distance between two adjacent metal pillars 300 is a, the distance between the defective pillars 400 is a (not shown), the radius of the metal pillar 300 is R, and the radius of the defective pillar 400 is R, wherein the values of H, a, R, and R are all the same as those of the comparative example.
In this embodiment, a novel two-dimensional closed surface wave photonic crystal structure is constructed, a waveguide mode of the structure is shown in fig. 11, a transmission coefficient of the structure is shown in fig. 12, an operating frequency of the waveguide mode is 84.2GHz to 125.3GHz, and is obviously located below a lower limit of a forbidden band frequency of the two-dimensional surface wave photonic crystal in the comparative example, and a near field distribution diagram corresponding to a 100GHz frequency point is shown in fig. 13. This demonstrates that: in the same surface wave photonic crystal structure, the working frequency can be skillfully moved to a low frequency direction by adding a metal plate at the top, and meanwhile, the forbidden band limit of the photonic crystal structure can be broken through, so that the integration level of the photonic crystal integrated optical circuit can be greatly increased. Meanwhile, due to the shielding effect of the upper and lower metal plates, the structure can almost completely shield the transmission frequencies corresponding to a first-order mode and a second-order mode in the dispersion curve of the photonic crystal, so that only the frequency corresponding to a waveguide mode introduced by a defect is allowed to pass through, and other frequency points except the waveguide frequency are shielded corresponding to the transmission curve in fig. 12, so that the anti-interference performance of the photonic crystal is extremely high. In fact, because the microwave millimeter wave terahertz waveband metal is equivalent to a total reflection mirror, the metal plate at the top can serve as a mirror, so that the function that the current surface wave photonic crystal structure size can be realized only when being increased by 2 times is realized by using a mirror image method.
To further illustrate the technical solution of the present invention, practical calculation is performed in a 4.3THz frequency band, where the size H of the two-dimensional closed surface wave photonic crystal structure in the 4.3THz frequency band is 11.64 μm, H of the two-dimensional closed surface wave photonic crystal structure is 9.66 μm, the distance a of the two-dimensional closed surface wave photonic crystal structure is 11.64 μm, and R of the two-dimensional closed surface wave photonic crystal structure is 2.91 μm, the photonic band gap range is 5.36THz to 8.60THz without a top metal plate, after the top metal plate is introduced, the operating frequency of the waveguide structure is 3.50THz to 5.14THz, obviously, after a metal plate is applied on the top, a waveguide mode can be introduced out of the photonic band gap, and a mirror experiment is performed in the 4.3THz frequency band, and it has been successfully verified that the size of the surface wave photonic crystal structure can be increased by 2 times.
To sum up, the two-dimensional closed surface wave photonic crystal structure of the present invention includes a first metal plate, a second metal plate, metal pillars and defect metal pillars, wherein the first metal plate and the second metal plate are correspondingly disposed, the metal pillars are two-dimensionally and periodically arranged between the first metal plate and the second metal plate, and two opposite ends of the metal pillars are respectively in contact with the first metal plate and the second metal plate to form a metal pillar array; the defective metal pillar is located in the metal pillar array, and the height of the defective metal pillar is smaller than the height of the surrounding metal pillars. The utility model discloses a first metal sheet, metal column and defect metal column constitute surface wave photonic crystal structure, and are in on the basis of surface wave photonic crystal structure, through combining the second metal sheet to integrateable include surface wave photonic crystal structure and metal-insulator-metal construction's the closed surface wave photonic crystal structure of two dimension to provide the closed surface wave photonic crystal structure of two dimension that interference immunity is stronger, the integrated level is higher.
The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. A two-dimensional closed surface wave photonic crystal structure, comprising:
the first metal plate and the second metal plate are arranged correspondingly;
the metal posts are periodically arranged between the first metal plate and the second metal plate in a two-dimensional manner, and two opposite ends of the metal posts are respectively contacted with the first metal plate and the second metal plate to form a metal post array;
a defective metal pillar located in the array of metal pillars and having a height less than a height of the surrounding metal pillars.
2. The two-dimensional closed surface wave photonic crystal structure of claim 1, wherein: the metal columns are arranged at equal intervals.
3. The two-dimensional closed surface wave photonic crystal structure of claim 1, wherein: the metal columns have the same cross-sectional area, and the cross-sectional morphology of the metal columns comprises a circle, a square or an ellipse.
4. The two-dimensional closed surface wave photonic crystal structure of claim 1, wherein: the defective metal columns are arranged at equal intervals.
5. The two-dimensional closed surface wave photonic crystal structure of claim 1, wherein: the defect metal columns have the same cross-sectional area, and the cross-sectional morphology of the defect metal columns comprises a circle, a square or an ellipse.
6. The two-dimensional closed surface wave photonic crystal structure of claim 1, wherein: the metal pillar and the defect metal pillar have the same cross-sectional morphology.
7. The two-dimensional closed surface wave photonic crystal structure of claim 1, wherein: the metal columns and the defect metal columns are arranged at equal intervals.
8. The two-dimensional closed surface wave photonic crystal structure of claim 1, wherein: the defective metal posts have the same height.
9. The two-dimensional closed surface wave photonic crystal structure of claim 1, wherein: the shape of the structure surrounded by the defective metal columns comprises one of a linear type, a bending type and a T shape.
10. The two-dimensional closed surface wave photonic crystal structure of claim 1, wherein: the first metal plate, the second metal plate, the metal column and the defect metal column are made of the same material, wherein the material comprises one of gold metal, silver metal, copper metal and aluminum metal.
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| CN114839717A (en) * | 2021-02-02 | 2022-08-02 | 中国科学院上海微系统与信息技术研究所 | Two-dimensional closed surface wave photonic crystal structure |
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