CN214167626U - Device for generating low-resistivity ultrapure water - Google Patents
Device for generating low-resistivity ultrapure water Download PDFInfo
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- CN214167626U CN214167626U CN202023220606.6U CN202023220606U CN214167626U CN 214167626 U CN214167626 U CN 214167626U CN 202023220606 U CN202023220606 U CN 202023220606U CN 214167626 U CN214167626 U CN 214167626U
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Abstract
The utility model relates to a device of ultrapure water of generation low resistivity, including carbon dioxide supply line, ultrapure water supply line, carbon dioxide dissolving device, wherein, carbon dioxide dissolving device includes inclosed casing, sets up the fibre membrane pipe in the casing and sets up carbon dioxide import, carbon dioxide export, pure water import, the pure water export on the casing, carbon dioxide import and carbon dioxide export with the casing switches on, pure water import and pure water export with the both ends of fibre membrane pipe are connected respectively and are switched on, carbon dioxide supply line with the carbon dioxide import links to each other, ultrapure water supply line with the pure water import links to each other. The application can effectively dissolve carbon dioxide in ultrapure water, can accurately control the resistivity of ultrapure water, and ensures the high stability of the resistivity of ultrapure water, thereby ensuring the yield of final products.
Description
Technical Field
The utility model relates to a display panel processing equipment technical field especially relates to a device that generates low resistivity ultrapure water that is used for cleaning the panel.
Background
In the manufacturing process of the display panel, the surface of the product is often processed by using Ultra-Pure Water (UPW). However, in a specific process segment, such as a high-pressure water washing segment, a two-fluid water washing segment, an HPMJ segment, and even a common water washing unit, because the flow velocity of the water body in the pipeline is very fast, the water body and the pipeline generate a large amount of friction and generate static electricity, and because the ultrapure water has very high resistivity (the resistivity is greater than 18.0M omega. cm), the generated static electricity cannot be rapidly led out, and a scenic spot is sprayed to the surface of a product along with the ultrapure water, so that a series of abnormalities such as electrostatic adsorption pollution, electrostatic discharge damage and the like are caused to the product.
Therefore, how to reduce the resistivity of the ultrapure water is an important measure for improving the yield of the product in the manufacturing process of the display panel. The common method for reducing the resistivity of the ultrapure water in the market at present is to dissolve carbon dioxide in water through a jet device, but the dissolving efficiency is not high, and the resistivity of the ultrapure water cannot be accurately controlled.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a device of ultrapure water of generation low resistivity can dissolve carbon dioxide in ultrapure water effectively to can the ultrapure water's of accurate control resistivity, guarantee the high stability of ultrapure water resistivity, thereby ensure the yields of final products.
In order to achieve the above purpose, the utility model adopts the technical scheme that:
the utility model provides a device of ultrapure water of generation low resistivity, including carbon dioxide supply line, ultrapure water supply line, carbon dioxide dissolving device, wherein, carbon dioxide dissolving device includes inclosed casing, sets up the fibre membrane pipe in the casing and sets up carbon dioxide import, carbon dioxide export, pure water import, pure water export on the casing, carbon dioxide import and carbon dioxide export with the casing switches on, pure water import and pure water export with the both ends of fibre membrane pipe are connected respectively and are switched on, carbon dioxide supply line with the carbon dioxide import links to each other, ultrapure water supply line with the pure water import links to each other.
For the above technical solution, the applicant has further optimization measures.
Optionally, the carbon dioxide supply pipeline includes an air feed pipe, a manual ball valve, an ultramicro oil mist separator, a pressure regulating valve, and a digital pressure gauge, the manual ball valve is disposed at an air source inlet of the air feed pipe and is used for controlling the opening and closing of an air source, and the ultramicro oil mist separator, the pressure regulating valve, and the digital pressure gauge are sequentially disposed on the air feed pipe.
Optionally, the ultrapure water supply line comprises a liquid feeding pipe, a manual ball valve, a high-precision particle filter and a high-precision digital flow meter, wherein the manual ball valve is arranged at an air source inlet of the liquid feeding pipe and is used for controlling the opening and closing of an air source, and the high-precision particle filter and the high-precision digital flow meter are sequentially arranged on the liquid feeding pipe.
Optionally, a carbon dioxide pressure relief pipeline is connected to the carbon dioxide outlet.
Optionally, an ultrapure water outlet is arranged at the pure water outlet, and an electric conductivity meter is arranged in the ultrapure water outlet and connected with an on-site controller
Because of the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
the utility model discloses a device of ultrapure water of generation low resistivity sets up the fibre membrane pipe under the high pressure environment who is full of carbon dioxide, lets in the pure water in the fibre membrane pipe, thereby improves the dissolution rate of aquatic carbon dioxide to the osmotic pressure of pure water through carbon dioxide, and the accessible control carbon dioxide let in the concentration and the pressure of carbon dioxide in volume, the control housing, realizes the control to the pure water resistivity, guarantees the high stability of ultrapure water resistivity, and then realizes the guarantee to the final product yields.
Drawings
Some specific embodiments of the present invention will be described in detail hereinafter, by way of illustration and not by way of limitation, with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the drawings:
fig. 1 is a schematic structural view of an apparatus for generating low-resistivity ultrapure water according to an embodiment of the present invention.
Wherein the reference numerals are as follows:
1. a carbon dioxide supply pipeline 11, an air feed pipe 12, a first manual ball valve 13, an ultramicro oil mist separator 14, a pressure regulating valve 15 and a digital pressure gauge;
2. an ultrapure water supply line 21, a liquid feeding pipe 22, a second manual ball valve 23, a high-precision particle filter 24 and a high-precision digital flowmeter;
3. a carbon dioxide dissolving device 31, a shell 32 and a fiber membrane tube;
4. a carbon dioxide pressure relief pipeline;
5. ultrapure water delivery line 51, conductivity meter.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.
The embodiment describes a device for generating ultrapure water with low resistivity, as shown in fig. 1, comprising a carbon dioxide supply pipeline 1, an ultrapure water supply pipeline 2 and a carbon dioxide dissolving device 3, wherein the carbon dioxide dissolving device 3 comprises a sealed housing 31, a fiber membrane pipe 32 arranged in the housing 31, and a carbon dioxide inlet, a carbon dioxide outlet, a pure water inlet and a pure water outlet which are arranged on the housing 31, the carbon dioxide inlet and the carbon dioxide outlet are communicated with the housing 31, the pure water inlet and the pure water outlet are respectively communicated with two ends of the fiber membrane pipe 32, the carbon dioxide supply pipeline 1 is connected with the carbon dioxide inlet, and the ultrapure water supply pipeline 2 is connected with the pure water inlet.
It can be understood that ultrapure water flows through the fiber membrane tube 32 inside the carbon dioxide dissolving device 3, carbon dioxide gas is injected outside the membrane tube, carbon dioxide can dialyze and penetrate through the membrane surface to enter the fiber membrane tube 32, and under a certain pressure, part of carbon dioxide is dissolved in water to generate free hydrogen ions and carbonate ions, so that the resistivity of the pure water is reduced. The control of pure water resistivity is realized to the concentration and the pressure of carbon dioxide in accessible control carbon dioxide's the volume of letting in, the control casing 31, guarantees the high stability of ultrapure water resistivity, and then realizes the guarantee to the final product yields.
The carbon dioxide supply pipeline 1 comprises an air supply pipe 11, a first manual ball valve 12, an ultramicro oil mist separator 13, a pressure regulating valve 14 and a digital pressure gauge 15, wherein the first manual ball valve 12 is arranged at an air source inlet of the air supply pipe 11 and is used for controlling the opening and closing of an air source, and the ultramicro oil mist separator 13, the pressure regulating valve 14 and the digital pressure gauge 15 are sequentially arranged on the air supply pipe 11. Wherein the first manual ball valve 12: controlling the opening/closing of the air source; an ultrafine oil mist separator 13: particles in the carbon dioxide gas are filtered, oil mist is absorbed, and the cleanliness of the carbon dioxide is improved; pressure regulating valve 14: adjusting the use pressure of the carbon dioxide; the digital pressure gauge 15: and monitoring the use pressure of the carbon dioxide, feeding the use pressure back to the field controller, and monitoring the pressure change in real time.
The ultrapure water supply line 2 comprises a liquid feeding pipe 21, a second manual ball valve 22, a high-precision particle filter 23 and a high-precision digital flowmeter 24, wherein the second manual ball valve 22 is arranged at an air source inlet of the liquid feeding pipe 21 and is used for controlling the opening and closing of an air source, and the high-precision particle filter 23 and the high-precision digital flowmeter 24 are sequentially arranged on the liquid feeding pipe 21. Wherein the second manual ball valve 22: controlling the water source to be turned on/off; high-precision particulate filter 23: fine particles in the ultrapure water are filtered, and the cleanliness of the ultrapure water is improved; high-precision digital flowmeter 24: and detecting the use flow of the ultrapure water, feeding the use flow back to the field controller, and monitoring the flow change in real time.
Optionally, a carbon dioxide pressure relief pipeline 4 is connected to the carbon dioxide outlet. Since carbon dioxide cannot be completely dissolved in ultrapure water, a carbon dioxide pressure release line 4 is provided to maintain pressure balance inside the dissolution apparatus for dioxide.
Optionally, an ultrapure water outlet line 5 is arranged at the pure water outlet, an electric conductivity meter 51 is arranged in the ultrapure water outlet line 5, and the electric resistivity of the treated ultrapure water is monitored in real time, wherein the electric conductivity meter 51 is connected with an on-site controller. Monitoring the resistivity of the treated ultrapure water, and when the resistivity is higher than a preset value, automatically adjusting a pressure regulating valve 14 on the carbon dioxide supply pipeline 1 to increase the supply pressure of the carbon dioxide and enhance the dissolution of the carbon dioxide; when the resistivity is far lower than the preset value, the pH value of the ultrapure water is too low, and the process effect of the product is influenced, and at the moment, the pressure regulating valve 14 on the carbon dioxide supply pipeline 1 automatically adjusts, so that the supply pressure of the carbon dioxide is reduced, and the dissolution of the carbon dioxide is reduced.
By the device, pure water with the conventional resistivity of 18.0M omega cm can be reduced to 0.2M omega cm, the flow change is responded by zero delay, the high stability of the resistivity of the ultrapure water is ensured, the resistivity of the ultrapure water under the condition of low flow is accurately controlled, and the yield of products is ensured.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention, so as not to limit the protection scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.
Claims (5)
1. The device for generating the ultrapure water with the low resistivity is characterized by comprising a carbon dioxide supply pipeline, an ultrapure water supply pipeline and a carbon dioxide dissolving device, wherein the carbon dioxide dissolving device comprises a closed shell, a fiber membrane pipe arranged in the shell, and a carbon dioxide inlet, a carbon dioxide outlet, a pure water inlet and a pure water outlet which are arranged on the shell, the carbon dioxide inlet and the carbon dioxide outlet are communicated with the shell, the pure water inlet and the pure water outlet are respectively communicated with two ends of the fiber membrane pipe, the carbon dioxide supply pipeline is connected with the carbon dioxide inlet, and the ultrapure water supply pipeline is connected with the pure water inlet.
2. The apparatus for generating low-resistivity ultrapure water according to claim 1, wherein said carbon dioxide supply line comprises an air feed pipe, a manual ball valve, an ultra-fine oil mist separator, a pressure regulating valve, and a digital pressure gauge, said manual ball valve being disposed at an air source inlet of said air feed pipe for controlling the opening and closing of the air source, said ultra-fine oil mist separator, said pressure regulating valve, and said digital pressure gauge being disposed in sequence on said air feed pipe.
3. The apparatus for generating low resistivity ultrapure water according to claim 1, wherein the ultrapure water supply line comprises a liquid feed pipe, a manual ball valve provided at a gas source inlet of the liquid feed pipe for controlling opening and closing of a gas source, a high precision particle filter, and a high precision digital flow meter provided in this order on the liquid feed pipe.
4. A low resistivity ultrapure water generation device according to any one of claims 1 to 3 wherein a carbon dioxide pressure relief line is connected to the carbon dioxide outlet.
5. An apparatus for generating low resistivity ultrapure water according to any one of claims 1 to 3 wherein an ultrapure water supply line is provided at the pure water outlet and an electric conductivity meter is provided in the ultrapure water supply line, the electric conductivity meter being connected to an in-situ controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023220606.6U CN214167626U (en) | 2020-12-28 | 2020-12-28 | Device for generating low-resistivity ultrapure water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023220606.6U CN214167626U (en) | 2020-12-28 | 2020-12-28 | Device for generating low-resistivity ultrapure water |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214167626U true CN214167626U (en) | 2021-09-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023220606.6U Active CN214167626U (en) | 2020-12-28 | 2020-12-28 | Device for generating low-resistivity ultrapure water |
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| Country | Link |
|---|---|
| CN (1) | CN214167626U (en) |
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- 2020-12-28 CN CN202023220606.6U patent/CN214167626U/en active Active
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