CN214146218U - Shielding structure of diffuser frame mounting bolt - Google Patents

Abstract

The utility model discloses a shielding structure of a mounting bolt of a diffuser frame, which comprises a diffuser frame body, wherein annular slots are arranged around the upper surface of the diffuser frame body, a plurality of screw holes which run through the bottom surface of the diffuser frame body and the bottom surface of the annular slots are respectively arranged on the diffuser frame body, and bolts for connecting the diffuser frame body and a diffuser are respectively screwed in the plurality of screw holes; a plurality of barrier strips are respectively inserted in the annular open groove, and the bottom surfaces of the barrier strips are respectively and correspondingly abutted against the top ends of the bolts to compress and shield the bolts. The utility model discloses simple structure sets up the annular fluting on the diffuser frame, adopts the bolt to be connected the diffuser frame with the diffuser and accomplishes the back, with a plurality of blend stop cartridge to the annular fluting in, compression bolt shields it completely, makes it can not expose in CVD base plate deposit cavity, has avoided the bolt to take place to drop and the tip of bolt takes place the electric arc breakdown to the normal operating of CVD equipment has been guaranteed.

Description

Shielding structure of diffuser frame mounting bolt

Technical Field

The utility model relates to a TFT-LCD (thin film transistor liquid crystal display) makes technical field, specifically is a structure that shields of diffuser frame construction bolt.

Background

In the field of TFT-LCD (thin film transistor liquid crystal display) manufacturing, a film deposition (PECVD) process is a process that uses a chemical reaction mode to generate a reactant (gas) into a solid product and deposits the solid product on a substrate surface, and uses the activity of plasma to promote the reaction so that the chemical reaction can be performed at a relatively low temperature.

Diffusers are devices that uniformly diffuse PROCESS gases and Radio Frequency (RF) energy into a CVD substrate deposition CHAMBER (PROCESS CHAMBER), and typically diffuser frames are bolted to the diffuser, are consumable components, and require periodic replacement for maintenance and management. The conventional diffuser frame is provided with bolt mounting holes uniformly distributed around the diffuser frame, and the diffuser frame and the diffuser are fixedly connected through bolts, wherein the bolts of the structure are usually directly exposed in the CVD substrate deposition chamber.

Therefore, in the actual operation process of CVD equipment, on the one hand because bolt and diffuser frame are the easy wearing and tearing of aluminium material, and the screw hole can the grow lead to connecting not hard up after periodic maintenance, can appear the bolt and take place the condition that drops, on the other hand because the tip of bolt is most more sharp, takes place the condition that arc puncture easily. Once the above problems occur, the equipment fails and must be shut down for replacement, thereby affecting the production efficiency of the equipment and shortening the maintenance period.

SUMMERY OF THE UTILITY MODEL

The utility model aims at overcoming the defect and not enough that prior art exists, provide a structure of shielding of diffuser frame construction bolt to compress tightly the bolt that is used for connecting diffuser frame and diffuser and shield it completely, make it can not expose in CVD base plate deposit cavity, avoid the bolt to take place to drop and the tip of bolt takes place the arc breakdown.

In order to achieve the above object, the utility model provides a following technical scheme:

a shielding structure of a mounting bolt of a diffuser frame comprises a diffuser frame body and is characterized in that: the diffuser frame body is provided with a plurality of annular slots along the periphery of the upper surface of the diffuser frame body, the diffuser frame body is respectively provided with a plurality of screw holes penetrating through the bottom surface of the diffuser frame body and the bottom surface of the annular slots, and the plurality of screw holes are respectively screwed with bolts for connecting the diffuser frame body and the diffuser; and a plurality of barrier strips are respectively inserted in the annular open groove, the bottom surfaces of the barrier strips are respectively corresponding to and abutted against the top end of the bolt, and the bolt is compressed and shielded.

Furthermore, the cross sections of the annular groove and the plurality of barrier strips are in an inverted T shape.

Furthermore, the plurality of barrier strips all adopt aluminum strips.

Further, the total height of each lower half part of the barrier strip and the part of the bolt in the annular groove is equal to the depth of the lower half part of the annular groove.

Furthermore, each corner of the upper surface of the diffuser frame body is provided with an extension groove communicated with the annular groove.

Furthermore, one end of the extension groove is communicated with the annular groove, the other end of the extension groove is open, and the cross section of the extension groove is in an inverted T shape.

Furthermore, a plugging block is inserted at the open end of the extension groove.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model discloses simple structure sets up annular fluting (shape of falling T) on the diffuser frame, adopts the bolt to be connected diffuser frame and diffuser and accomplishes the back, with a plurality of blend stop (shape of falling T) cartridge to the annular fluting in, compression bolt shields it completely, makes it can not expose in CVD base plate deposit cavity, has avoided the bolt to take place to drop and the tip of bolt takes place the electric arc and punctures to the normal operating of CVD equipment has been guaranteed.

Drawings

Fig. 1 is a structural sectional view of the present invention.

Fig. 2 is a top view of the diffuser frame body according to the present invention.

Fig. 3 is an enlarged view of a portion a in fig. 2.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, a shielding structure for mounting bolts of a diffuser frame comprises a diffuser frame body 1, wherein an annular slot 2 is arranged along the periphery of the upper surface of the diffuser frame body 1, a plurality of screw holes penetrating through the bottom surface of the diffuser frame body 1 and the bottom surface of the annular slot 2 are respectively arranged on the diffuser frame body, and bolts 3 for connecting the diffuser frame body 1 and a diffuser are respectively screwed in the plurality of screw holes; a plurality of barrier strips 4 are respectively inserted in the annular open groove 2, and the bottom surfaces of the barrier strips 4 are respectively and correspondingly abutted against the top end of the bolt 3, so that the bolt 3 is compressed and shielded.

The utility model discloses in, the cross-section of annular fluting 2 and a plurality of blend stop 4 all is the shape of falling T. Therefore, the plurality of barrier strips 4 are conveniently inserted into the annular groove 2, and looseness cannot occur.

Correspondingly, a plurality of barrier strips 4 are all aluminum strips. Thereby, the plurality of barrier ribs 4 are made to conform to the material of the diffuser frame and the diffuser (both aluminum members) to accommodate a film-coating (PECVD) process performed during TFT-LCD (thin film transistor liquid crystal display) manufacturing.

The utility model discloses in, every blend stop the latter half (broad part) and bolt 3 are at the total height of the part (bolt cap part) that lies in annular fluting 2, equal the degree of depth of annular fluting 2 the latter half (broad part). From this, can guarantee that the bottom surface of a plurality of blend stop 4 corresponds respectively and contradicts with the top of bolt 3, realize compressing tightly and shielding bolt 3.

Accordingly, the height of the upper half (narrower part) of each bar is equal to the depth of the upper half (narrower part) of the annular slot 2. Therefore, the upper surfaces of the plurality of baffle strips 4 which are inserted in place can be ensured to be flush with the upper surface of the diffuser frame body 1.

The utility model discloses in, each corner of 1 upper surface of diffuser frame body is equipped with respectively and slots 2 communicating extension grooves 5 with the annular.

Correspondingly, one end of the extension groove 5 is communicated with the annular groove, the other end of the extension groove is open, and the cross section of the extension groove 5 is in an inverted T shape and is matched with the annular groove 2 (the inverted T shape).

From this, can correspond respectively along the extension groove 5 of each corner of diffuser frame body 1 upper surface, insert each straightway part of annular fluting 2 with a plurality of blend stop 4, realize that the cartridge of a plurality of blend stop 4 targets in place.

Correspondingly, the open end of the extension slot 5 is inserted with a plugging block (not shown in the figure, the same applies below). Thus, after the plurality of barrier strips 4 are inserted in place, the plugging block is inserted into the extension groove 5 to close the same.

The invention is further described below with reference to the accompanying drawings:

adopt bolt 3 to be connected diffuser frame body 1 and diffuser and accomplish the back, correspond respectively along the extension groove 5 of each corner of diffuser frame body 1 upper surface, insert each straightway part of annular fluting 2 with a plurality of blend stop 4, the cartridge targets in place the back, the bottom surface of a plurality of blend stop 4 corresponds respectively and is inconsistent with the top of bolt 3, clamp bolt 3 covers it completely, make it can not expose in CVD base plate deposit chamber, can avoid bolt 3 to take place to drop and the tip of bolt 3 to take place the arc breakdown. And finally, inserting a plugging block into the open end of the extension groove 5 for plugging.

It should be noted that two adjacent barrier strips can be mutually butted or contacted so as not to leave a gap; in addition, on the basis of not exposing the bolt, also can keep reasonable interval.

Although the present description is described in terms of embodiments, not every embodiment includes only a single embodiment, and such description is for clarity only, and those skilled in the art should be able to integrate the description as a whole, and the embodiments can be appropriately combined to form other embodiments as will be understood by those skilled in the art.

Therefore, the above description is only a preferred embodiment of the present application, and is not intended to limit the scope of the present application; all changes which come within the meaning and range of equivalency of the claims are to be embraced within their scope.

Claims (7)

1. A shielding structure of a mounting bolt of a diffuser frame comprises a diffuser frame body and is characterized in that: the diffuser frame body is provided with a plurality of annular slots along the periphery of the upper surface of the diffuser frame body, the diffuser frame body is respectively provided with a plurality of screw holes penetrating through the bottom surface of the diffuser frame body and the bottom surface of the annular slots, and the plurality of screw holes are respectively screwed with bolts for connecting the diffuser frame body and the diffuser; and a plurality of barrier strips are respectively inserted in the annular open groove, the bottom surfaces of the barrier strips are respectively corresponding to and abutted against the top end of the bolt, and the bolt is compressed and shielded.

2. The screen structure of a diffuser frame mounting bolt as set forth in claim 1, wherein: the cross sections of the annular groove and the plurality of barrier strips are in inverted T shapes.

3. A screening structure of a diffuser frame mounting bolt according to claim 1 or 2, wherein: the plurality of barrier strips are all aluminum strips.

4. The screen structure of a diffuser frame mounting bolt as set forth in claim 1, wherein: the total height of each barrier strip lower half part and the part of the bolt in the annular groove is equal to the depth of the annular groove lower half part.

5. The screen structure of a diffuser frame mounting bolt as set forth in claim 1, wherein: and extension grooves communicated with the annular grooves are respectively arranged at each corner of the upper surface of the diffuser frame body.

6. The screen structure of a diffuser frame mounting bolt as set forth in claim 5, wherein: one end of the extension groove is communicated with the annular open groove, the other end of the extension groove is open, and the cross section of the extension groove is in an inverted T shape.

7. The screen structure of a diffuser frame mounting bolt as set forth in claim 6, wherein: and a plugging block is inserted at the open end of the extension groove.

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