CN210168276U - Welding seam-free plasma vacuum cavity - Google Patents
Welding seam-free plasma vacuum cavity Download PDFInfo
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- CN210168276U CN210168276U CN201920786788.1U CN201920786788U CN210168276U CN 210168276 U CN210168276 U CN 210168276U CN 201920786788 U CN201920786788 U CN 201920786788U CN 210168276 U CN210168276 U CN 210168276U
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Abstract
The utility model discloses a no welding seam plasma vacuum cavity, it includes the vacuum box, door plant before the vacuum box front side is equipped with, vacuum box rear side is equipped with the back door plant, the vacuum box is by preceding door plant, the back door plant, the inclosed no welding seam box all around that the welding formed between the polylith aluminum plate, and at the inside vacuum inner chamber that forms of vacuum box, vacuum inner chamber vertical direction is provided with the polylith electrode, back door plant and preceding door plant set up a set of face at the vacuum box, one side of preceding door plant is equipped with the processing window, the processing window sets up with preceding door plant is sealed, one side of back door plant is equipped with the vacuum and produces the mouth, the vacuum produces the air that the mouth is used for extracting vacuum inner chamber in. The utility model discloses an it is many to have set up a door, can be convenient carry out maintenance work to equipment to adopt the no welding seam technique to make vacuum cavity integrated into one piece, there is not the welding seam in the surface, convenient cleanness, reduction in production cost, the leakproofness is good, and the product percent of pass is high.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a plasma equipment technical field, it is specific, relate to a no welding seam plasma vacuum cavity.
[ background of the invention ]
At present, the cavity of the plasma machine on the market is processed by a manual welding mode, and the manual welding has the defects that: the temperature during welding can not be controlled by people, so that the penetration depth of the metal solution is not uniform; some points are thicker and some points are thinner; leaks are easily present after a period of use; the inside vacuum state that is of vacuum chamber, the outside is extruded by external atmospheric pressure, returns to producing deformation under certain vacuum, if the welding point is inhomogeneous, the fracture can appear in the welding spot thin-out, leads to the unable requirement that reaches the settlement of vacuum.
Moreover, the conventional vacuum plasma cavity is generally provided with only one door, the other 5 surfaces are sealed, and one surface is reserved with the door for loading and taking workpieces, but with the structure, a plurality of dead angles can be reserved in a deeper or narrower cavity, and the condition that the equipment is not maintained in place and cannot be maintained is caused because the treatment is not available in daily maintenance.
[ Utility model ] content
The utility model mainly aims at providing a no welding seam plasma vacuum cavity that simple structure, stability are strong, be convenient for maintenance, the seal is good.
In order to achieve the main purpose, the utility model provides a no welding seam plasma vacuum cavity includes the vacuum box, the vacuum box front side is equipped with the front door plant, the vacuum box rear side is equipped with the back door plant, the vacuum box is the airtight no welding seam box all around that is formed by welding between the front door plant, back door plant, polylith aluminum plate, and form the vacuum cavity in the vacuum box inside, the vacuum cavity vertical direction is provided with polylith electrode; the rear door plate and the front door plate are arranged opposite to each other in a group of the vacuum box body, a processing window is arranged on one side of the front door plate and is hermetically arranged with the front door plate, and a vacuum generating opening is arranged on one side of the rear door plate and is used for extracting air in the vacuum inner cavity to form a vacuum state.
In a further scheme, the front door plate and the vacuum box body are fixed through a door lock.
In a further scheme, the rear door plate is connected with the vacuum box body through a sealing ring to form a sealing state.
In a further scheme, the electrode is a weldless electrode formed by welding a plurality of aluminum electrode plates.
Further, two sides of the vacuum box body are provided with external reinforcing ribs.
The processing window is made of transparent glass, and the transparent glass is connected with the front door plate through a sealing ring to form a sealing state.
Therefore, the utility model provides a no welding seam plasma vacuum chamber has set up a door more to sealed the processing has been carried out to the door, can be convenient carry out maintenance work to equipment, for work save the time, reduced work load, improved the work quality, possess simple structure, be convenient for maintenance, advantage such as the seal is good.
And, adopt the no welding seam technique with vacuum chamber integrated into one piece make, solved the uneven phenomenon that reduces the fracture under operating condition of welding seam when the manual welding machine, the surface does not have the welding seam, very big improvement holistic aesthetic feeling, convenient clean simultaneously, reduction in production cost to guarantee welding quality's stability, the leakproofness is good, the product percent of pass is high.
[ description of the drawings ]
Fig. 1 is a schematic structural diagram of an embodiment of a weldless plasma vacuum chamber according to the present invention.
Fig. 2 is a top view of an embodiment of a weldless plasma vacuum chamber of the present invention.
Fig. 3 is a front view of an embodiment of a weldless plasma vacuum chamber of the present invention.
Fig. 4 is a rear view of an embodiment of a weldless plasma vacuum chamber of the present invention.
Fig. 5 is a schematic structural diagram of an electrode in an embodiment of a weldless plasma vacuum chamber according to the present invention.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention.
Referring to fig. 1 and 4, the utility model discloses a no welding seam plasma vacuum cavity includes the vacuum box, and door plant 1 before vacuum box front side is equipped with, and vacuum box rear side is equipped with back door plant 2, and the vacuum box is by the airtight no welding seam box all around that welds between preceding door plant 1, back door plant 2, the polylith aluminum plate and form to at the inside vacuum inner chamber that forms of vacuum box, the vacuum inner chamber vertical direction is provided with the polylith electrode.
Wherein, vacuum box top still is equipped with power and inserts mouth 8, inserts the radio frequency power supply that mouth 8 can external intermediate frequency through the power, for example 40 KHZ's radio frequency power supply.
Preferably, the front door panel 1 and the vacuum box are fixed by a door lock 6.
Preferably, external reinforcing ribs 7 are provided on both sides of the vacuum chamber body. Wherein, when outside strengthening rib 7 acted on vacuum operation, the outside can produce huge pressure and exert on every face of cavity, leads to the vacuum cavity to receive pressure and produce the deformation, and the time probably leads to the vacuum to reveal for a long time, is equipped with outside strengthening rib 7 and can effectively prevent to receive external pressure to warp in the both sides of vacuum box.
Preferably, the processing window 3 is made of transparent glass, and the transparent glass and the front door panel 1 are connected by a gasket to form a sealed state.
In the present embodiment, the electrode is a weldless electrode formed by welding a plurality of aluminum electrode plates. Specifically, referring to fig. 5, the weldless electrode includes an electrode main body, one end of the electrode main body close to the top 9 of the vacuum chamber has a first extension 21 and a second extension 22 extending along the longitudinal direction, the first extension 21 is provided with an electrode cooling water inlet 23 exposed to the vacuum chamber, and the second extension is provided with an electrode cooling water outlet 24 exposed to the vacuum chamber.
An accommodating chamber is arranged in the electrode main body, a plurality of ion penetrating grooves 25 are arranged at intervals in the accommodating chamber, and a water channel 26 for accommodating electrode cooling water to pass through is arranged between every two adjacent ion penetrating grooves 25; a first internal flow channel 27 is arranged on one side of the ion penetration groove 25 close to the first extension part 21, a second internal flow channel 28 is arranged on one side of the ion penetration groove 25 close to the second extension part 22, the first internal flow channel 27 is communicated with the first extension part 21, and the second internal flow channel 28 is communicated with the second extension part 22; the first plugs 29 with the preset number are arranged above the inner wall of the accommodating chamber at intervals, and the second plugs 30 with the preset number are arranged below the inner wall of the accommodating chamber at intervals.
In the present embodiment, the electrode cooling water flows to the electrode cooling water inlet 23, the first extension 21, the first internal flow passage 27, the water passage 26, the second internal flow passage 28, the second extension 22, and the electrode cooling water outlet 24 in sequence, wherein the first plug 29 and the second plug 30 are used for changing the flow direction of the up-down water flow of the electrode cooling water. Therefore, the cooling water supply system of the snake-shaped circulation loop is arranged in the electrode, so that the temperature in the vacuum box body can be controlled, and the cooling water can fully and completely exert the cooling effect.
Wherein, the outer side of the electrode main body is also provided with a power supply connection point 31. An intermediate frequency rf power source, such as a 40KHZ rf power source, can be connected to the power connection point 31.
Preferably, the weldless electrode further comprises an electrode fixing device 32, and the electrode fixing device 32 is positioned on the top 9 of the vacuum box body and fixedly connected with the first extension part 21 and the second extension part 22.
Therefore, the utility model provides a no welding seam plasma vacuum chamber has set up a door more to sealed the processing has been carried out to the door, can be convenient carry out maintenance work to equipment, for work save the time, reduced work load, improved the work quality, possess simple structure, be convenient for maintenance, advantage such as the seal is good.
In addition, the vacuum cavity is integrally formed by adopting a non-welding seam technology, so that the phenomena of uneven welding seams and cracking reduction in a working state during manual welding are solved, the vacuum leakage of the cavity is smaller, the electrode works in a closed vacuum environment, and cooling water is not allowed to leak a little; the welding seam is not present on the surface, the overall aesthetic feeling is greatly improved, the cleaning is convenient, the production cost is reduced, the stability of the welding quality is ensured, the sealing performance is good, and the product percent of pass is high.
It should be noted that the above is only the preferred embodiment of the present invention, but the design concept of the present invention is not limited thereto, and all the insubstantial modifications made by using the design concept of the present invention also fall within the protection scope of the present invention.
Claims (6)
1. A weldless plasma vacuum chamber, comprising:
the vacuum box body is a welding seam-free box body with the sealed periphery formed by welding the front door plate, the rear door plate and a plurality of aluminum plates, a vacuum inner cavity is formed in the vacuum box body, and a plurality of electrodes are arranged in the vacuum inner cavity in the vertical direction;
the rear door plate and the front door plate are arranged opposite to each other in a group of the vacuum box body, a processing window is arranged on one side of the front door plate and is hermetically arranged with the front door plate, and a vacuum generating opening is arranged on one side of the rear door plate and is used for extracting air in the vacuum inner cavity to form a vacuum state.
2. The weldless plasma vacuum chamber of claim 1, wherein:
the front door plate and the vacuum box body are fixed through a door lock.
3. The weldless plasma vacuum chamber of claim 1, wherein:
the rear door plate is connected with the vacuum box body through a sealing ring to form a sealing state.
4. The weldless plasma vacuum chamber of any of claims 1 to 3, wherein:
the electrode is a weldless electrode formed by welding a plurality of aluminum electrode plates.
5. The weldless plasma vacuum chamber of any of claims 1 to 3, wherein:
and external reinforcing ribs are arranged on two sides of the vacuum box body.
6. The weldless plasma vacuum chamber of any of claims 1 to 3, wherein:
the processing window is transparent glass, and the transparent glass is connected with the front door plate through a sealing ring to form a sealing state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920786788.1U CN210168276U (en) | 2019-05-29 | 2019-05-29 | Welding seam-free plasma vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920786788.1U CN210168276U (en) | 2019-05-29 | 2019-05-29 | Welding seam-free plasma vacuum cavity |
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| Publication Number | Publication Date |
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| CN210168276U true CN210168276U (en) | 2020-03-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920786788.1U Active CN210168276U (en) | 2019-05-29 | 2019-05-29 | Welding seam-free plasma vacuum cavity |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114987883A (en) * | 2022-06-29 | 2022-09-02 | 昆山微可诺新能源有限公司 | Aluminum alloy vacuum or plasma gas box body and manufacturing method thereof |
-
2019
- 2019-05-29 CN CN201920786788.1U patent/CN210168276U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114987883A (en) * | 2022-06-29 | 2022-09-02 | 昆山微可诺新能源有限公司 | Aluminum alloy vacuum or plasma gas box body and manufacturing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200720 Address after: Room 105-63474, No. 6, Baohua Road, Hengqin New District, Zhuhai City, Guangdong Province Patentee after: ZHUHAI HENGGE ELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 519000 Guangdong Province, Zhuhai city Xiangzhou District Nanping Technology Industrial Park West Road No. 1 screen five office building 1 floor A-1 District Patentee before: ZHUHAI BEILI HIGH-TECH Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 519000 room 105-63474, No.6 Baohua Road, Hengqin New District, Zhuhai City, Guangdong Province (centralized office area) Patentee after: Zhuhai Hengge microelectronics equipment Co.,Ltd. Address before: 519000 room 105-63474, No.6 Baohua Road, Hengqin New District, Zhuhai City, Guangdong Province (centralized office area) Patentee before: ZHUHAI HENGGE ELECTRONIC TECHNOLOGY Co.,Ltd. |