CN214131294U

CN214131294U - Electronic stripping cleaning liquid treatment equipment

Info

Publication number: CN214131294U
Application number: CN202023238317.9U
Authority: CN
Inventors: 赵士帅
Original assignee: DANDONG ANSHUN MICROELECTRONICS CO LTD
Current assignee: DANDONG ANSHUN MICROELECTRONICS CO LTD
Priority date: 2020-12-29
Filing date: 2020-12-29
Publication date: 2021-09-07
Anticipated expiration: 2030-12-29

Abstract

The utility model discloses an electronic stripping cleaning liquid treatment device, which comprises a solution treatment barrel and a water injection tank, wherein the top of the solution treatment barrel is provided with a water injection port, the water injection port is fixedly connected with a water injection pipeline, the middle section of the water injection pipeline is fixedly provided with a first electric valve, one end of the water injection pipeline is fixedly connected with the water injection tank, the bottom of the water injection tank is fixedly connected with a support frame, one side of the top of the solution treatment barrel is provided with a mixed liquid injection port, the mixed liquid injection port is fixedly provided with an injection pipeline, the middle section of the injection pipeline is fixedly provided with a metering pump, one side of the metering pump is connected with a tapping pipeline, the bottom of the tapping pipeline is fixedly provided with a control valve, the two ends of the tapping pipeline are respectively connected with a raw liquid barrel, the top of the raw liquid barrel is provided with a liquid injection port, the outer surface of the tank body of the solution treatment tank is coated with the anticorrosive coating layer, and the inner wall of the tank body is provided with the rubber lining layer, so that the corrosion resistance of the solution treatment tank is greatly improved.

Description

Electronic stripping cleaning liquid treatment equipment

Technical Field

The utility model relates to a washing liquid technical field specifically is a washing liquid treatment facility is peeled off to electron.

Background

A cleaning process is indispensable in the manufacturing process of semiconductor devices. Such a cleaning process is intended to remove residues, but this may unintentionally damage an active region such as a semiconductor pattern or a circuit pattern (e.g., a metal film pattern). This can be attributed to the fact that the cleaning liquid containing sulfuric acid or hydrofluoric acid causes corrosion or oxidation of the metal film. In addition, such cleaning solutions can cause environmental pollution. Therefore, it would be beneficial to develop a new cleaning solution that is capable of cleaning while preventing and/or reducing such damage to the semiconductor pattern and/or the metal pattern. As the generation of semiconductor technology continues to increase, the development of environmentally friendly cleaning solutions that prevent and/or reduce damage to semiconductor patterns and/or metal patterns will contribute to the advancement of the industry as the number of semiconductor processes increases and the number of subsequent cleaning processes also increases. Therefore, we improve this and propose an electron-stripping cleaning solution processing apparatus.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a following technical scheme:

the utility model relates to an electron is peeled off washing liquid treatment facility, including solution treatment bucket and water injection case, the water filling port has been seted up at solution treatment bucket top, water filling port fixedly connected with water injection pipeline, water injection pipeline middle section fixed mounting has first electric valve, water injection pipeline one end fixedly connected with water injection case, water injection bottom of the case portion fixedly connected with support frame, solution treatment bucket top one side has seted up mixed liquid filling opening, mixed liquid filling opening fixed mounting has the injection pipeline, injection pipeline middle section fixed mounting has the measuring pump, measuring pump one side pipe connection has the shunting pipeline, shunting pipeline bottom fixed mounting has control flap, shunting pipeline both ends are connected with the stoste bucket respectively, the stoste bucket top has been seted up and has been annotated the liquid mouth.

As an optimal technical scheme of the utility model, the outlet conduit has been seted up to solution treatment bucket one side, outlet conduit top fixed mounting has second electric valve.

As an optimal technical scheme of the utility model, solution treatment barrel head fixed mounting has the processing layer, the inside fixed mounting of processing layer has agitating unit.

As the utility model discloses an optimized technical scheme, agitating unit comprises driving motor and puddler, puddler fixed connection is in driving motor pivot one side, puddler fixed surface installs the stirring leaf, the stirring leaf is installed inside the solution treatment bucket.

As an optimized technical scheme of the utility model, inside concentration detector and the liquid level meter of being provided with of solution treatment bucket, the liquid level meter is the magnetism board level gauge that turns over.

As an optimal technical scheme of the utility model, the box of solution treatment bucket is made by the stainless steel, the coating of solution treatment bucket surface has anticorrosive coating layer, and solution treatment bucket box inner wall is equipped with the rubber backing layer.

As an optimal technical scheme of the utility model, solution treatment barrel one side fixed mounting has control module, control module and first electric valve, measuring pump, second electric valve, agitating unit, concentration detector and position counter electric connection.

The utility model has the advantages that: the utility model discloses, be different from current technique, and is rational in infrastructure, high durability and convenient use, and is simple in operation, can let the user simply clear understanding theory of operation, handle barrel case surface coating anticorrosive coating layer at solution, set up the rubber lining layer at the box inner wall, very big improvement the corrosion resistance of solution treatment bucket, agitating unit's (mixing) shaft and impeller are made by the carbon steel anticorrosive material that corrosion resisting property is good in the solution treatment bucket, (mixing) shaft and impeller are effectively prevented to be corroded by chemical agent, the life of equipment has been prolonged, the first electric valve of setting, measuring pump and second electric valve, the stoste that can quantitative control pour into and the dose of water, guarantee the rationality that the electron peeled off the washing liquid, personnel's operation has also been made things convenient for simultaneously.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic view of the overall structure of an electronic stripping cleaning solution treatment apparatus of the present invention;

FIG. 2 is a schematic view of the internal structure of a solution treatment tank of the electronic stripping cleaning solution treatment apparatus of the present invention;

FIG. 3 is a schematic view of the section of FIG. 1A.

In the figure: 1. a solution treatment barrel; 2. a water injection tank; 3. a water injection port; 4. a water injection pipeline; 5. a first electrically operated valve; 6. a support frame; 7. a mixed liquid injection port; 8. an injection pipe; 9. a metering pump; 10. tapping a pipeline; 11. a control valve; 12. a stock solution barrel; 13. a water outlet pipeline; 14. a second electrically operated valve; 15. a stirring device; 16. a concentration detector; 17. a liquid level meter; 18. and a control module.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

As shown in fig. 1-3, the utility model relates to an electron is peeled off washing liquid treatment facility, including solution treatment bucket 1 and water injection case 2, water filling port 3 has been seted up at solution treatment bucket 1 top, water filling port 3 fixedly connected with water injection pipeline 4, 4 middle section fixed mounting of water injection pipeline has first electric valve 5, 4 one end fixedly connected with water injection case 2 of water injection pipeline, 2 bottom fixedly connected with support frame 6 of water injection case, solution treatment bucket 1 top one side has been seted up and has been mixed liquid filling opening 7, it has injection pipeline 8 to mix liquid filling opening 7 fixed mounting, 8 middle section fixed mounting of injection pipeline has measuring

pump

9, 9 one side pipe connection of measuring pump has shunting pipeline 10, shunting pipeline 10 bottom fixed mounting has control flap 11, shunting pipeline 10 both ends are connected with stoste bucket 12 respectively, the liquid mouth has been seted up at stoste bucket 12 top.

Wherein, outlet conduit 13 has been seted up to solution treatment barrel 1 one side, and outlet conduit 13 top fixed mounting has second electric valve 14, through outlet conduit 13 and the second electric valve 14 that sets up, can conveniently peel off the washing liquid with the electron of solution treatment barrel 1 inside and discharge.

Wherein, 1 bottom fixed mounting of solution treatment bucket has the processing layer, and processing layer inside fixed mounting has agitating unit 15, through the processing layer that sets up, can make things convenient for agitating unit 15's installation.

Wherein, agitating unit 15 comprises driving motor and puddler, puddler fixed connection in driving motor pivot one side, and puddler fixed surface installs the stirring leaf, and the stirring leaf is installed inside solution treatment bucket 1, and through agitating unit 15 who sets up, can peel off the washing liquid to the electron of solution treatment bucket 1 inside and stir the processing.

Wherein, the solution processing barrel 1 is internally provided with a concentration detector 16 and a liquid level meter 17, the liquid level meter 17 is a magnetic turning plate liquid level meter, and the electronic stripping cleaning liquid in the solution processing barrel 1 can be measured and the concentration can be detected through the arranged concentration detector 16 and the liquid level meter 17.

Wherein, solution treatment barrel 1's box is made by the stainless steel, and 1 surface coating of solution treatment barrel has anticorrosive coating layer, and 1 box inner wall of solution treatment barrel is equipped with the rubber backing layer, at 1 box surface coating anticorrosive coating layer of solution treatment barrel, sets up the rubber backing layer at the box inner wall, very big improvement solution treatment barrel 1's corrosion resistance.

Wherein, solution treatment barrel 1 one side fixed mounting has control module 18, control module 18 and first electric valve 5, measuring pump 9, second electric valve 14, agitating unit 15, concentration detector 16 and liquid level counter 17 electric connection, through the control module 18 who sets up to with control module 18 and first electric valve 5, measuring pump 9, second electric valve 14, concentration detector 16 and liquid level counter 17 electric connection, can make things convenient for operating personnel's operation.

The working principle is as follows: during operation, whether the device is normal is firstly checked, whether each part is connected stably is checked, whether the connection of the control module 18 and the first electric valve 5, the metering pump 9, the second electric valve 14, the stirring device 15, the concentration detector 16 and the liquid level meter 17 is checked normally, whether the water leakage condition exists in the solution treatment barrel 1, the water injection tank 2 and the stock solution barrel 12 is checked, and the device is started to be used after the checking is finished. The method comprises the steps of firstly, injecting stock solution to be treated into a stock solution barrel 12, inputting the dosage of the stock solution to be sucked into a solution treatment barrel 1 through a control module 18 after the injection is finished, injecting the stock solution into the solution treatment barrel 1 through a tapping pipeline 10 and an injection pipeline 8, stirring the stock solution in the solution treatment barrel 1 through a stirring device 15, simultaneously injecting water or other liquid, and stopping stirring after a concentration detector 16 detects that the concentration meets the technological requirements. Finally, the electronic stripping cleaning liquid in the solution treatment barrel 1 is discharged through the arranged water outlet pipeline 13 and the second electric valve 14. At 1 box surface coating anticorrosive paint layer of solution treatment bucket, set up the rubber lining layer at the box inner wall, very big improvement solution treatment bucket 1's corrosion resistance, stirring shaft and the impeller of agitating unit 15 in the solution treatment bucket 1 are made by the carbon steel anticorrosive material that corrosion resisting property is good, prevent effectively that stirring shaft and impeller from being corroded by chemical, have prolonged the life of equipment.

Finally, it should be noted that: in the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides an electron is peeled off washing liquid treatment facility, includes solution treatment bucket (1) and water injection tank (2), its characterized in that, water filling port (3) have been seted up at solution treatment bucket (1) top, water filling port (3) fixedly connected with water injection pipeline (4), water injection pipeline (4) middle section fixed mounting has first electric valve (5), water injection pipeline (4) one end fixedly connected with water injection tank (2), water injection tank (2) bottom fixedly connected with support frame (6), mixed liquid filling opening (7) have been seted up to solution treatment bucket (1) top one side, mixed liquid filling opening (7) fixed mounting has injection pipeline (8), injection pipeline (8) middle section fixed mounting has measuring pump (9), pipe connection has shunting pipeline (10) in one side of measuring pump (9), shunting pipeline (10) bottom fixed mounting has control flap (11), and two ends of the tapping pipeline (10) are respectively connected with a raw liquid barrel (12), and the top of the raw liquid barrel (12) is provided with a liquid injection port.

2. The electronic stripping cleaning solution treatment equipment as claimed in claim 1, characterized in that a water outlet pipe (13) is opened at one side of the solution treatment barrel (1), and a second electric valve (14) is fixedly installed at the top of the water outlet pipe (13).

3. The electron stripping cleaning solution treatment equipment according to claim 1, characterized in that a treatment layer is fixedly arranged at the bottom of the solution treatment barrel (1), and a stirring device (15) is fixedly arranged in the treatment layer.

4. The electron stripping cleaning solution treatment equipment according to claim 3, characterized in that the stirring device (15) is composed of a driving motor and a stirring rod, the stirring rod is fixedly connected to one side of the rotating shaft of the driving motor, the surface of the stirring rod is fixedly provided with a stirring blade, and the stirring blade is arranged inside the solution treatment barrel (1).

5. The apparatus for treating an electron stripping cleaning solution according to claim 1, characterized in that a concentration detector (16) and a liquid level meter (17) are arranged inside the solution treatment barrel (1), and the liquid level meter (17) is a magnetic turn-over plate liquid level meter.

6. The electron stripping cleaning solution treatment equipment according to claim 1, characterized in that the tank of the solution treatment tank (1) is made of stainless steel, the outer surface of the solution treatment tank (1) is coated with an anticorrosive coating layer, and the inner wall of the tank of the solution treatment tank (1) is provided with a rubber lining layer.

7. The electronic stripping cleaning solution treatment equipment as claimed in claim 1, characterized in that a control module (18) is fixedly installed on one side of the solution treatment barrel (1), and the control module (18) is electrically connected with the first electric valve (5), the metering pump (9), the second electric valve (14), the stirring device (15), the concentration detector (16) and the liquid level meter (17).