CN214093442U

CN214093442U - Seamless anti-deformation accurate positioning semiconductor hard tube

Info

Publication number: CN214093442U
Application number: CN202022128540.1U
Authority: CN
Inventors: 陈攀
Original assignee: Zhejiang Weifu Technology Co ltd
Current assignee: Zhejiang Weifu Technology Co ltd
Priority date: 2020-09-24
Filing date: 2020-09-24
Publication date: 2021-08-31
Anticipated expiration: 2030-09-24

Abstract

A seamless deformation-preventing accurate positioning semiconductor hard tube comprises a tube body and a knife edge flange welded at the end part of the tube body, wherein one end of the inner wall of the knife edge flange is provided with an inner positioning step, the end part of the tube body is provided with a circular outer convex part inserted into the inner positioning step, the outer diameter of the circular outer convex part is smaller than the outer diameter of the tube body, the plane of the end part of the tube body is abutted against the end face of the end part of the knife edge flange provided with the inner positioning step, one end of the circular outer convex part, far away from the tube body, is connected with the knife edge flange in a vacuum sealing welding mode, the inner wall of the knife edge flange is flush with the inner wall of the circular outer convex part, the outer wall of the circular outer convex part is flush with the circumferential face of the inner positioning step, the end face of the circular outer convex part, far away from the tube body, is flush with the circular end face of the inner positioning step, and the axial lead of the knife edge flange is coincident with the axial lead of the tube body, the end face of one end of the knife edge flange, which is far away from the inner positioning step, is vertically distributed with the axial lead of the pipe body.

Description

Seamless anti-deformation accurate positioning semiconductor hard tube

Technical Field

The utility model relates to a seamless accurate location semiconductor hard tube of preapring for an unfavorable turn of events shape.

Background

The semiconductor hard tube can realize the transportation of gas with certain purity.

The structure of the semiconductor hard tube generally comprises a knife edge flange and a hard tube body, wherein a step is designed on the inner wall of the knife edge flange, then one end of the hard tube body is completely inserted into the step, and finally the knife edge flange and the hard tube body are fixed together by welding.

The above method has the following disadvantages: the axial lead of the hard pipe body and the axial lead of the knife edge flange have large deviation, and the outer end face of the knife edge flange and the perpendicularity of the axial lead of the knife edge flange have large deviation, so that secondary processing is needed, and the secondary processing needs secondary clamping, so that clamping damage and the like are caused.

SUMMERY OF THE UTILITY MODEL

The utility model aims at the above-mentioned problem, a seamless accurate location semiconductor hard tube of preapring for an unfavorable turn of events that can solve above-mentioned technical problem is provided.

In order to achieve the above purpose, the utility model adopts the following technical proposal:

the seamless deformation-preventing accurate positioning semiconductor hard tube comprises a tube body and a knife edge flange welded at the end part of the tube body, wherein one end of the inner wall of the knife edge flange is provided with an inner positioning step, the end part of the tube body is provided with a circular outer convex part inserted into the inner positioning step, the outer diameter of the circular outer convex part is smaller than the outer diameter of the tube body, the end surface of the end part of the tube body is abutted against the end surface of the end part of the inner positioning step arranged on the knife edge flange, one end of the circular outer convex part far away from the tube body is connected with the knife edge flange in a vacuum sealing welding mode, the inner wall of the knife edge flange is flush with the inner wall of the circular outer convex part, the outer wall of the circular outer convex part is flush with the circumferential surface of the inner positioning step, one end surface of the circular outer convex part far away from the tube body is flush with the end surface of the inner positioning step, and the axial lead of the knife edge flange is coincident with the axial lead of the tube body, the end face of one end of the knife edge flange, which is far away from the inner positioning step, is vertically distributed with the axial lead of the pipe body.

In the seamless anti-deformation accurate positioning semiconductor hard tube, the outer wall of the outer convex part of the circular ring and the end plane of the tube body form an angle of 90 degrees.

In the seamless anti-deformation accurate positioning semiconductor hard tube, the wall thickness of the single side of the outer convex part of the circular ring is 1/2 of the wall thickness of the tube body.

In the seamless anti-deformation accurate positioning semiconductor hard tube, the knife edge flange is provided with a conical step and a V-shaped groove which are sequentially arranged from inside to outside on the end face of one end far away from the inner positioning step, and a circular conical tip is formed between the conical step and the V-shaped groove.

Compared with the prior art, seamless shape accurate location semiconductor hard tube of preapring for an unfavorable turn of events's advantage lies in: can ensure the verticality and the concentricity to avoid the damage caused by secondary processing and invisibly improve the processing efficiency.

Drawings

Fig. 1 is a schematic structural diagram provided by the present invention.

In the figure, a pipe body 1, an annular outer convex part 10, a knife edge flange 2, an inner positioning step 20, a conical step 21, a V-shaped groove 22 and an annular conical tip 23.

Detailed Description

The following are specific embodiments of the present invention and the accompanying drawings are used to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

As shown in figure 1, the seamless anti-deformation accurate positioning semiconductor hard tube comprises a tube body 1 and a knife edge flange 2 welded at the end part of the tube body 1, wherein the knife edge flange 2 can be welded at one end of the tube body, and the knife edge flanges 2 can also be welded at the two ends of the tube body. The manufacturing is carried out according to the actual use requirement.

An inner positioning step 20 is arranged at one end of the inner wall of the knife edge flange 2, the inner positioning step 20 comprises a circumferential surface and a circular ring end surface, and the circumferential surface and the circular ring end surface are vertically connected to ensure positioning accuracy.

The end part of the pipe body 1 is provided with the circular ring outer convex part 10 inserted into the inner positioning step 20, the pipe body 1 and the circular ring outer convex part 10 are made of the same material and are connected into an integral structure, and the structural strength and the concentricity can be ensured, namely the axial lead of the pipe body 1 coincides with the axial lead of the circular ring outer convex part 10.

Furthermore, the thickness of one side of the annular outer convex part 10 is 1/2 of the thickness of the pipe body 1. To ensure structural strength.

The outer diameter of the circular ring outer convex part 10 is smaller than the outer diameter of the pipe body 1, the end surface of the pipe body 1 abuts against the end surface, provided with the inner positioning step 20, of the knife-edge flange 2, and the end surface, provided with the inner positioning step 20, of the knife-edge flange 2 is a plane so as to be matched with the end surface of the pipe body 1.

One end of the circular ring outer convex part 10, which is far away from the pipe body 1, is connected with the knife edge flange 2 in a vacuum sealing welding mode, and the inner wall of the knife edge flange 2 is flush with the inner wall of the circular ring outer convex part 10. The inner wall is flush with the inner wall, so that high-purity gas in the inner part can be ensured to smoothly pass through.

The inner wall of the circular ring outer convex part 10 is flush with the inner wall of the pipe body 1, and the inner wall is flush with the inner wall, so that high-purity gas in the pipe body can be ensured to smoothly pass through the pipe body. The outer wall of the outer circular convex part 10 is matched with the circumferential surface of the inner positioning step 20, and the end face, far away from the pipe body 1, of the outer circular convex part 10 is matched with the end face of the inner positioning step 20. The anastomosis can ensure the connection reliability and the structural strength, and meanwhile, the anastomosis can achieve the following advantages: the axial lead of the knife edge flange 2 is coincided with the axial lead of the pipe body 1, and the end face of one end of the knife edge flange 2, which is far away from the inner positioning step 20, is vertically distributed with the axial lead of the pipe body 1.

Namely, the perpendicularity and the concentricity can be ensured to avoid damage caused by secondary processing, and the processing efficiency is invisibly improved.

Preferably, the outer wall of the annular outer protrusion 10 forms an angle of 90 ° with the end plane of the tubular body 1.

In addition, a conical step 21 and a V-shaped groove 22 are sequentially arranged from inside to outside on the end face of the knife edge flange 2 far away from the inner positioning step 20, and a circular conical tip 23 is formed between the conical step 21 and the V-shaped groove 22. The conical tip 23 of the circular ring is used for connecting with a copper gasket.

The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described herein may be made by those skilled in the art without departing from the spirit of the invention or exceeding the scope of the invention as defined in the accompanying claims.

Claims

1. Seamless deformation-preventing accurate positioning semiconductor hard tube comprises a tube body (1) and a knife edge flange (2) welded at the end part of the tube body (1), and is characterized in that an inner wall one end of the knife edge flange (2) is provided with an inner positioning step (20), the end part of the tube body (1) is provided with a circular ring outer convex part (10) inserted into the inner positioning step (20), the outer diameter of the circular ring outer convex part (10) is smaller than the outer diameter of the tube body (1), the end plane of the tube body (1) is abutted against the end face of one end of the knife edge flange (2) provided with the inner positioning step (20), one end of the circular ring outer convex part (10) far away from the tube body (1) is connected with the knife edge flange (2) in a vacuum seal welding mode, the inner wall of the knife edge flange (2) is flushed with the inner wall of the circular ring outer convex part (10), and the inner wall of the circular ring outer convex part (10) is flushed with the inner wall of the tube body (1), the outer wall of the outer convex part (10) of the circular ring is matched with the circumferential surface of the inner positioning step (20), the end face, far away from the pipe body (1), of the outer convex part (10) of the circular ring is matched with the end face of the circular ring of the inner positioning step (20), the axial lead of the knife edge flange (2) is coincided with the axial lead of the pipe body (1), and the end face, far away from the inner positioning step (20), of the knife edge flange (2) is vertically distributed with the axial lead of the pipe body (1).

2. A seamless deformation-proof accurate positioning semiconductor hard tube as claimed in claim 1, wherein the outer wall of the ring outer convex part (10) and the end plane of the tube body (1) form an angle of 90 degrees.

3. The seamless deformation-preventing accurate positioning semiconductor hard tube as claimed in claim 1, wherein the single side wall thickness of the annular outer convex part (10) is 1/2 of the wall thickness of the tube body (1).

4. A seamless deformation-preventing accurately-positioned semiconductor hard tube as claimed in claim 1, wherein the knife-edge flange (2) is provided with a conical step (21) and a V-shaped groove (22) from inside to outside on the end face of one end far away from the inner positioning step (20), and an annular conical tip (23) is formed between the conical step (21) and the V-shaped groove (22).