CN214078265U - Cleaning system for cold plate - Google Patents
Cleaning system for cold plate Download PDFInfo
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- CN214078265U CN214078265U CN202023054648.7U CN202023054648U CN214078265U CN 214078265 U CN214078265 U CN 214078265U CN 202023054648 U CN202023054648 U CN 202023054648U CN 214078265 U CN214078265 U CN 214078265U
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- pneumatic valve
- pipeline
- cold plate
- inlet pipeline
- waste liquid
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Abstract
The utility model discloses a cleaning system for a cold plate, which comprises a cooling pipeline, wherein a first pneumatic valve, a cold plate and a second pneumatic valve are arranged on the cooling pipeline, and the first pneumatic valve and the second pneumatic valve are respectively arranged at two ends of the cold plate; the liquid inlet pipeline is connected with the solution barrel, a pneumatic valve IV is arranged on the liquid inlet pipeline, the solution barrel is connected with an air inlet pipeline, and a pneumatic valve III is arranged on the air inlet pipeline; the waste liquid pipeline is connected with the waste liquid barrel, and the waste liquid pipeline is provided with a pneumatic valve V. The utility model discloses a clean system can realize the regular cleanness to the inside incrustation scale of cooling tube in the cold dish, when improving cold dish stability, reduces personnel's work load.
Description
Technical Field
The utility model relates to a clean system for cold dish.
Background
The PSS (Patterned Sapphire Substrate) process comprises cleaning/brushing, gluing, photoetching, developing, etching and the like; and after the incoming material product is brushed or developed, carrying out appearance detection on an appearance automatic detection machine. In the gluing/developing process, the baked sapphire wafer needs to be cooled through a cold plate, and the cooling pipeline of the cold plate is blocked by a pipeline, so that manual dredging is frequently required to be removed, and the workload is large.
Disclosure of Invention
To the problems that exist in the prior art, the utility model provides a cleaning system for cold dish.
In order to achieve the purpose, the utility model discloses a cleaning system for a cold plate, including the cooling line, pneumatic valve one, cold plate and pneumatic valve two are installed on the cooling line, pneumatic valve one and pneumatic valve two are installed respectively at the both ends of cold plate, still include liquid inlet pipeline and waste liquid pipeline connected on the cooling line;
the liquid inlet pipeline is connected with the solution barrel, a pneumatic valve IV is arranged on the liquid inlet pipeline, the solution barrel is connected with an air inlet pipeline, and a pneumatic valve III is arranged on the air inlet pipeline;
the waste liquid pipeline is connected with the waste liquid barrel, and the waste liquid pipeline is provided with a pneumatic valve V.
Further, the end of the liquid inlet pipeline extends to the bottom of the solution barrel.
Further, the air inlet pipeline is connected to the upper end of the solution barrel.
Further, the air inlet pipeline is connected with N2And (4) connecting.
Compared with the prior art, the utility model discloses a clean system can realize the regular cleanness to the inside incrustation scale of cooling tube in the cold dish, when improving cold dish stability, reduces personnel's work load.
Drawings
Fig. 1 is a schematic structural view of the present invention;
in the figure: 1. the cooling pipeline, 2, pneumatic valve one, 3, cold plate, 4, pneumatic valve two, 5, air inlet pipeline, 6, pneumatic valve three, 7, solution bucket, 8, advance liquid pipeline, 9, pneumatic valve four, 10, pneumatic valve five, 11, waste liquid pipeline, 12, waste liquid bucket.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clear, the present invention is further described in detail below. It should be understood, however, that the description herein of specific embodiments is only intended to illustrate the invention and not to limit the scope of the invention.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, and the terms used herein in the specification of the present invention are for the purpose of describing particular embodiments only and are not intended to limit the present invention.
As shown in fig. 1, a cleaning system for a cold plate comprises a cooling pipeline 1, a first pneumatic valve 2, a cold plate 3 and a second pneumatic valve 4 are mounted on the cooling pipeline 1, the first pneumatic valve 2 and the second pneumatic valve 4 are respectively mounted at two ends of the cold plate 3, and a liquid inlet pipeline 8 and a waste liquid pipeline 11 are connected to the cooling pipeline 1;
the liquid inlet pipeline 8 is connected with the solution barrel 7, a pneumatic valve IV 9 is installed on the liquid inlet pipeline 8, the solution barrel 7 is connected with a gas inlet pipeline 5, and a pneumatic valve III 6 is installed on the gas inlet pipeline 5;
the waste liquid pipeline 11 is connected with the waste liquid barrel 12, and the waste liquid pipeline 11 is provided with a five pneumatic valve 10.
As a modification of the embodiment, the end of the liquid inlet pipeline 8 extends to the bottom of the solution barrel 7, the gas inlet pipeline 5 is connected to the upper end of the solution barrel 7, and the gas inlet pipeline 5 and N are connected2Connection to ensure when N is introduced into the air inlet pipeline 52When is at N2Under the pressure action of the solution barrelThe cleaning liquid in 7 flows into the cooling circuit 1 through the liquid inlet circuit 8.
When the cold plate works normally, the pneumatic valve I2 and the pneumatic valve II 4 are kept in a normally open state; the pneumatic valve III 6, the pneumatic valve IV 9 and the pneumatic valve V10 are in a normally closed state; at the moment, process cooling water flows through the cooling pipeline 1 from the pneumatic valve I2 and then flows out from the pneumatic valve II 4, and the cold plate 3 works normally;
when the cold plate 3 is cleaned of scale inside: the first pneumatic valve 2 and the second pneumatic valve 4 are kept in a normally closed state; and opening the third air valve 6, the fourth air valve 9 and the fifth air valve 10 in sequence. At this time, the scale cleaning liquid flows from the solution barrel 7 through the cooling pipeline 1 and flows into the waste liquid barrel 12, so that the scale inside the cold plate 3 is cleaned. After the cleaning is finished, the third pneumatic valve 6 and the fourth pneumatic valve 9 are sequentially closed, the opening state of the fifth pneumatic valve 10 is kept, the first pneumatic valve 2 is opened, process cooling water flows into the waste liquid barrel 12 from the first pneumatic valve 2 after flowing through the cooling pipeline 1, and the residual scale cleaning solution in the cooling pipeline 1 is flushed for 3 minutes. And finally, closing the pneumatic valve five 10, keeping the pneumatic valve two 4 in an open state, and simultaneously opening the pneumatic valve one 2 to enable the cold plate 3 to recover to a normal working state.
The utility model discloses a clean system can realize the regular cleanness to the inside incrustation scale of cooling tube in the cold dish, when improving cold dish stability, reduces personnel's work load.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modification, equivalent replacement or improvement made within the spirit and principle of the present invention should be included in the present invention.
Claims (4)
1. A cleaning system for a cold plate comprises a cooling pipeline (1), wherein a first pneumatic valve (2), a cold plate (3) and a second pneumatic valve (4) are mounted on the cooling pipeline (1), and the first pneumatic valve (2) and the second pneumatic valve (4) are respectively mounted at two ends of the cold plate (3), and is characterized by further comprising a liquid inlet pipeline (8) and a waste liquid pipeline (11) which are connected to the cooling pipeline (1);
the liquid inlet pipeline (8) is connected with the solution barrel (7), a pneumatic valve IV (9) is installed on the liquid inlet pipeline (8), the solution barrel (7) is connected with a gas inlet pipeline (5), and a pneumatic valve III (6) is installed on the gas inlet pipeline (5);
the waste liquid pipeline (11) is connected with the waste liquid barrel (12), and a pneumatic valve five (10) is installed on the waste liquid pipeline (11).
2. A cleaning system for cold plates, according to claim 1, characterized in that the end of the liquid inlet pipe (8) extends to the bottom of the solution vat (7).
3. A cleaning system for cold plates, according to claim 2, characterized in that the air inlet duct (5) is connected to the upper end of the solution tank (7).
4. A cleaning system for cold plates, according to claim 1 or 3, characterized in that said air intake duct (5) is connected to N2And (4) connecting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023054648.7U CN214078265U (en) | 2020-12-17 | 2020-12-17 | Cleaning system for cold plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023054648.7U CN214078265U (en) | 2020-12-17 | 2020-12-17 | Cleaning system for cold plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214078265U true CN214078265U (en) | 2021-08-31 |
Family
ID=77428585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023054648.7U Active CN214078265U (en) | 2020-12-17 | 2020-12-17 | Cleaning system for cold plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214078265U (en) |
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2020
- 2020-12-17 CN CN202023054648.7U patent/CN214078265U/en active Active
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