CN214050481U

CN214050481U - High-efficiency ammonia evaporator

Info

Publication number: CN214050481U
Application number: CN202022297596.XU
Authority: CN
Inventors: 阮汝明
Original assignee: Jiangsu Denoir Technology Co ltd
Current assignee: Jiangsu Denoir Technology Co ltd
Priority date: 2020-10-15
Filing date: 2020-10-15
Publication date: 2021-08-27
Anticipated expiration: 2030-10-15

Abstract

The utility model discloses a high-efficient ammonia evaporator, include: the evaporator, the first heat medium pipeline and the second heat medium pipeline; the first heat medium pipeline and the second heat medium pipeline are independent pipelines respectively and are arranged in an inner cavity of the evaporator at the same time, and the inlets and the outlets of the first heat medium pipeline and the second heat medium pipeline extend out of the evaporator; and the second heat medium pipeline is communicated with a pipeline of the circulating absorption liquid of the ammonia gas absorption tower. The utility model discloses high-efficient ammonia evaporator can utilize the heat release that the combination of ammonia and water in the absorption tower produced to gasify liquid ammonia.

Description

High-efficiency ammonia evaporator

Technical Field

The utility model relates to an evaporimeter field especially relates to a high-efficient ammonia evaporator.

Background

The basic requirements for wet chemicals are ultra-clean and high purity. It is widely used in the microelectronic industry such as the manufacture of ultra-large scale integrated circuits, large-screen, ultra-thin and high-definition liquid crystal displays, and the preparation of solar cell silicon wafers. The cleaning agent has two effects of cleaning or etching in the processing of semiconductor chips, solar cell silicon wafers and liquid crystal display panels, and achieves the purposes of removing residual organic pollutants on the surfaces of wafers and reducing the residual quantity of metal impurities.

The ultra-clean high-purity ammonia water is used as a corrosive agent, is most applied in the manufacturing process of integrated circuits, and is mainly used for the production of the process technology of the ultra-large scale integrated circuits. A gas absorption method is adopted in the process of preparing the ultra-clean high-purity ammonia water, the heat release of the combination of ammonia and water is larger, the ice machine is adopted to provide cold energy to reduce the temperature and improve the absorption rate at present, and the heat is not effectively utilized.

SUMMERY OF THE UTILITY MODEL

The utility model discloses the technical problem of main solution provides a high-efficient ammonia evaporator, can utilize the heat release that the combination of ammonia and water produced in the absorption tower to gasify liquid ammonia.

In order to solve the technical problem, the utility model discloses a technical scheme be: provided is a high-efficiency ammonia evaporator comprising: the evaporator, the first heat medium pipeline and the second heat medium pipeline;

the evaporation tank comprises an internal cavity, a liquid ammonia feed port and a high-purity ammonia purification port, wherein the liquid ammonia feed port and the high-purity ammonia purification port are formed in a tank body of the evaporation tank;

the first heat medium pipeline and the second heat medium pipeline are independent pipelines respectively and are arranged in an inner cavity of the evaporator at the same time, and the inlets and the outlets of the first heat medium pipeline and the second heat medium pipeline extend out of the evaporator;

and the second heat medium pipeline is communicated with a pipeline of the circulating absorption liquid of the ammonia gas absorption tower.

In a preferred embodiment of the present invention, the outer wall of the second heating medium pipeline is a spiral fin structure, and the inner wall has an anti-dissolution coating.

In a preferred embodiment of the present invention, the dissolution-preventing coating is a perfluoroalkoxy resin coating.

In a preferred embodiment of the present invention, the outer wall of the first heat medium pipeline is a spiral fin structure.

In a preferred embodiment of the present invention, the high-efficiency ammonia evaporator further comprises a third heat medium pipeline relatively independent from the first heat medium pipeline and the second heat medium pipeline, and the third heat medium pipeline is communicated with a circulating water pipeline in a circulating water system.

In a preferred embodiment of the present invention, the first heat medium pipeline, the second heat medium pipeline and the third heat medium pipeline are located in the lower half of the cavity inside the evaporation tank.

The utility model discloses a preferred embodiment, the evaporating pot is still including seting up on the jar body on the scene manometer mouth, teletransmission manometer mouth, safety valve mouth, urgent drain, temperature monitoring mouth, drain, go up liquid level meter mouth, lower liquid level meter mouth and inspection manhole, high-purity ammonia purification mouth, scene manometer mouth, teletransmission manometer mouth, safety valve mouth, urgent drain, temperature monitoring mouth and inspection manhole are located the top of the evaporating pot jar body, the drain with the liquid ammonia feed inlet is located the bottom of the evaporating pot jar body, it is located with lower liquid level meter mouth to go up liquid level meter mouth the side of the evaporating pot jar body.

In a preferred embodiment of the present invention, the high-purity ammonia purification port is installed with a micro-oil mist filter.

In a preferred embodiment of the present invention, the high efficiency ammonia evaporator further comprises a temperature control system and a pressure control system.

The utility model has the advantages that: the utility model discloses high-efficient ammonia evaporator has following advantage:

1. and (3) reducing energy consumption: the circulating absorption liquid in the absorption tower is connected as a path of heating medium, the heat of the reaction of ammonia and water is fully utilized, and the purification energy consumption is reduced.

2. Higher safety factor: once the cycle is established, the first heating medium, which is a direct internal heating medium, can be omitted, causing an explosion if there is a leak.

3. The equipment is provided with a plurality of sets of heating medium pipelines, and integrates multiple purification equipment into a whole, thereby achieving high efficiency and low cost.

Drawings

FIG. 1 is a schematic structural view of a preferred embodiment of the high-efficiency ammonia vaporizer of the present invention;

the parts in the drawings are numbered as follows: the system comprises a 1-evaporating pot, a 2-first heat medium pipeline, a 3-second heat medium pipeline, a 4-third heat medium pipeline, an A-heat medium inlet, a B-first sewage discharge port, a C-liquid ammonia feed inlet, a D-second sewage discharge port, an E-ammonia water inlet, an F-ammonia water outlet, a G-heat medium outlet, an H-temperature control system interface, an I-upper liquid level meter port, a J-lower liquid level meter port, a K-high-purity ammonia purification port, an L-field pressure meter port, an M-remote transmission pressure meter port, an N-safety valve port, an O-emergency vent port, a P-temperature monitoring port, a Q-inspection manhole and an FF-high-precision micro oil mist filter.

Detailed Description

The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.

A high efficiency ammonia vaporizer, comprising: the system comprises an evaporator 1, a first heat medium pipeline 2, a second heat medium pipeline 3, a third heat medium pipeline 4 and a temperature control and pressure control system.

Evaporating pot 1 includes inside cavity, liquid ammonia feed inlet C, high-purity ammonia purification mouth K, on-the-spot manometer mouth L, teletransmission manometer mouth M, relief valve gate N, urgent drain O, temperature monitoring mouth P, first drain B, second drain D, goes up liquid level meter mouth I, lower liquid level meter mouth J, inspection manhole Q and temperature control system interface H, high-purity ammonia purification mouth K, on-the-spot manometer mouth L, teletransmission manometer mouth M, relief valve gate N, urgent drain O, temperature monitoring mouth P and inspection manhole Q are located the top of the 1 jar of body of evaporating pot, first drain B second drain D with liquid ammonia feed inlet C is located the bottom of the 1 jar of body of evaporating pot, go up liquid level meter mouth I, lower liquid level meter mouth J and temperature control system interface H is located the side of the 1 jar of body of evaporating pot. And a micro-oil mist filter FF is arranged at the high-purity ammonia purification port K.

First heat medium pipeline 2, second heat medium pipeline 3 and third heat medium pipeline 4 are independent pipeline respectively, install simultaneously in the inside cavity of evaporating pot 1, first heat medium pipeline 2, second heat medium pipeline 3 and third heat medium pipeline 4 exit stretch out the jar body of evaporating pot 1.

The first heat medium pipeline 2 is communicated with a first heat medium, and the first heat medium provides initial heat energy for the gasification of liquid ammonia in the evaporation tank 1. The second heat medium pipeline 3 is communicated with a pipeline of the circulating absorption liquid of the ammonia gas absorption tower, the circulating absorption liquid is used as a second heat medium, ammonia gas is a heat release process in the absorption tower through the circulating liquid absorption process, liquid ammonia gasification is a heat absorption process, and the circulating liquid is led into the second heat medium pipeline 3 to recycle heat, so that the consumption of the heat medium is reduced. The third heat medium pipeline 4 is used as a standby heat medium pipeline, the third heat medium can be introduced to provide heat energy for the gasification of liquid ammonia, preferably, the third heat medium pipeline is communicated with a circulating water pipeline in a circulating water system in summer, and circulating water is used as the third heat medium to provide cold energy for the circulating water system. Preferably, the first heating medium circuit 2, the second heating medium circuit 3 and the third heating medium circuit 4 are located at the lower half of the inner cavity of the evaporator 1.

In order to improve the heat exchange efficiency, the outer pipe wall of the second heating medium pipeline 3 is of a spiral fin structure, and the inner pipe wall is provided with an anti-dissolution coating. The anti-dissolution coating is a perfluoroalkoxy resin coating. The material can meet the requirement of extremely low dissolution of electronic chemicals so as to achieve high purity, and the thickness is 1-2 mm. Likewise, the outer pipe walls of the first heating medium pipe 2 and the third heating medium pipe 4 can also be in a spiral fin structure.

The temperature control and pressure control system monitors the temperature and pressure in the evaporation tank 1, and when the temperature and pressure exceed a certain degree, emergency stop and overpressure unloading can be achieved, and safety is improved.

The utility model discloses a method for using high-efficient ammonia evaporator does: first heat medium is introduced into the first heat medium pipeline 2, the first heat medium heats liquid ammonia to gasify the liquid ammonia, the gasified liquid ammonia passes through the high-purity ammonia purification port K to remove impurities, the purified ammonia is absorbed by the absorption tower, the circulating absorption liquid is introduced into the second heat medium pipeline 3, and after circulation is established, the first heat medium pipeline 2 can be closed.

The utility model has the advantages that: the utility model discloses high-efficient ammonia evaporator and application method thereof has following advantage:

2. Higher safety factor: first, once the cycle is established, the first heating medium, which is a direct internal heating medium, may be omitted, causing an explosion if there is a leak. Second, emergency shutdown and overpressure relief can be achieved through the associated temperature control and pressure systems.

4. High heat exchange efficiency: the outer pipe wall of the second heating medium pipeline is of a spiral fin structure, and the inner pipe wall is provided with an anti-dissolution coating, so that the heat exchange efficiency is effectively improved.

The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A high efficiency ammonia vaporizer, comprising: the evaporator, the first heat medium pipeline and the second heat medium pipeline;

2. The high-efficiency ammonia evaporator as recited in claim 1, wherein the outer pipe wall of the second heating medium pipeline has a spiral fin structure, and the inner pipe wall has an anti-stripping coating.

3. The high efficiency ammonia evaporator of claim 2, wherein the anti-dissolution coating is a perfluoroalkoxy resin coating.

4. The high efficiency ammonia evaporator as set forth in claim 2 wherein the outer tubular wall of the first heating medium circuit is of a spiral fin structure.

5. The high-efficiency ammonia evaporator as set forth in claim 1 further comprising a third heating medium circuit separate from the first and second heating medium circuits, the third heating medium circuit communicating with a circulating water circuit in a circulating water system.

6. The high efficiency ammonia evaporator of claim 5, wherein the first, second and third heating medium circuits are located in the lower half of the evaporator interior cavity.

7. The high-efficiency ammonia evaporator of claim 1, wherein the evaporator tank further comprises a field pressure gauge port, a remote transmission pressure gauge port, a safety valve port, an emergency vent, a temperature monitoring port, a drain outlet, an upper liquid level gauge port, a lower liquid level gauge port and an inspection manhole which are arranged on the tank body, wherein the high-purity ammonia purification port, the field pressure gauge port, the remote transmission pressure gauge port, the safety valve port, the emergency vent, the temperature monitoring port and the inspection manhole are arranged at the top of the evaporator tank body, the drain outlet and the liquid ammonia feed inlet are arranged at the bottom of the evaporator tank body, and the upper liquid level gauge port and the lower liquid level gauge port are arranged at the side surface of the evaporator tank body.

8. The high-efficiency ammonia evaporator as set forth in claim 1, wherein a micro-oil mist filter is installed at the high-purity ammonia purification port.

9. The high efficiency ammonia evaporator of claim 1, further comprising a temperature control system and a pressure control system.