CN214043607U

CN214043607U - Manual wafer cleaning simulated shaking basket machine

Info

Publication number: CN214043607U
Application number: CN202023038121.5U
Authority: CN
Inventors: 张运
Original assignee: Jinan Zhuowei Electronics Co ltd
Current assignee: Jinan Zhuowei Electronics Co ltd
Priority date: 2020-12-17
Filing date: 2020-12-17
Publication date: 2021-08-24
Anticipated expiration: 2030-12-17

Abstract

The utility model discloses a shake basket machine simulating manual wafer cleaning, which comprises a swing mechanism, wherein the swing mechanism comprises a swing assembly and a rotating assembly, the swing assembly comprises a first motor, a roller is fixedly arranged at the output end of the first motor, a turntable is fixedly arranged at the other end of the roller, a connecting block is fixedly arranged at the position of the turntable deviating from the circle center, a fixing ring is sleeved on the connecting block, a swing rod is fixedly arranged outside the fixing ring, and the rotating assembly is fixedly arranged at the position of the fixing ring close to the lower end part; contain the mount among the runner assembly, first circular slot has been seted up to mount one side, the second circular slot has been seted up to the position that the swinging arms is close to the below, the inside movable mounting of second circular slot has the connecting axle, the connecting axle both ends all with first circular slot inner wall fixed connection, tip fixed mounting has the second motor under the mount, second motor output fixed mounting has the dwang.

Description

Manual wafer cleaning simulated shaking basket machine

Technical Field

The utility model relates to a semiconductor chip processing field especially relates to a abluent basket machine of shaking of manual wafer of simulation.

Background

The semiconductor refers to a material having a conductivity between a conductor and an insulator at normal temperature. When a semiconductor is processed, a semiconductor wafer needs to be put into a shaking basket and cleaned in an etching tank and a cleaning tank;

in the past, the flower shaking basket is shaken manually, the working mode is an up-down and rotating mode, and the flower shaking basket is tired due to the fact that the product specification is larger and larger; then, the automatic blue-light is used, and the blue-light can only move up and down or left and right, so that the shaking effect is poor.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model provides a simulate the abluent basket machine that shakes of manual wafer can reduce intensity of labour, improve product quality's technological effect.

In order to solve the technical problem, the utility model provides a following technical scheme: the swing mechanism comprises a swing assembly and a rotating assembly, the swing assembly comprises a first motor, a roller is fixedly mounted at the output end of the first motor, a turntable is fixedly mounted at the other end of the roller, a connecting block is fixedly mounted at the position of the turntable deviating from the circle center, a fixing ring is sleeved on the connecting block, a swing rod is fixedly mounted outside the fixing ring, the rotating assembly is fixedly mounted at the position of the fixing ring close to the lower end of the fixing ring, and a spherical block is fixedly mounted at one end of the connecting block;

contain the mount among the runner assembly, first circular slot has been seted up to mount one side, first circular slot runs through to the mount opposite side, the swing arm has been close to the position of below and has been seted up the second circular slot, the inside movable mounting of second circular slot has the connecting axle, the connecting axle both ends all with first circular slot inner wall fixed connection, tip fixed mounting has the second motor under the mount, second motor output fixed mounting has the dwang.

As an optimized technical scheme of the utility model, the dwang is close to the fixed position of below and has the lifting hook.

As an optimized technical scheme of the utility model, the wabbler mechanism below is provided with the washing tank, the basket of flowers has been cup jointed on the lifting hook, the basket of flowers is located inside the washing tank.

As an optimized technical scheme of the utility model, the mount is U font structure.

Compared with the prior art, the utility model discloses the beneficial effect that can reach is: according to the arrangement, the swinging mechanism is utilized to drive the flower basket to move up and down and rotate forward and backward, the rotation speed is adjusted according to the process requirements, and the rotation speed is two circles clockwise and two circles anticlockwise. The change is simple, the investment is small, the labor intensity and the cleaning effect of people are solved, the working efficiency is greatly improved, and the production cost is reduced.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the structure of the rotating assembly of the present invention;

FIG. 3 is a schematic structural view of the swing assembly of the present invention;

fig. 4 is a schematic diagram of the partial explosion structure of fig. 1 according to the present invention.

Wherein: 1. a rocking mechanism; 2. a swing assembly; 3. a rotating assembly; 4. a hook; 5. a first motor; 6. a turntable; 7. connecting blocks; 8. a spherical block; 9. a fixing ring; 10. a swing lever; 11. a fixed mount; 12. rotating the rod; 13. a first circular groove; 14. a second motor; 15. a connecting shaft; 16. a cleaning tank; 17. a flower basket.

Detailed Description

In order to make the technical means, the creation features, the achievement purposes and the functions of the invention easy to understand, the invention is further explained below with reference to the specific embodiments, but the following embodiments are only the preferred embodiments of the invention, not all. Based on the embodiments in the implementation, other embodiments obtained by those skilled in the art without any creative work belong to the protection scope of the present invention. The experimental methods in the following examples are conventional methods unless otherwise specified, and materials, reagents and the like used in the following examples are commercially available unless otherwise specified.

Example (b):

as shown in fig. 1, fig. 2 and fig. 3, the utility model provides a simulate manual wafer cleaning shake basket machine, including the wabbler mechanism 1, include swing subassembly 2 and rotating assembly 3 in the wabbler mechanism 1, include first motor 5 in the swing subassembly 2, first motor 5 output end fixed mounting has the roller bearing, the roller bearing other end fixed mounting has carousel 6, the position fixed mounting that the carousel 6 deviates from the centre of a circle has connecting block 7, cup jointed solid fixed ring 9 on the connecting block 7, gu fixed ring 9 outside fixed mounting has swinging arms 10, gu fixed ring 9 is close to the position fixed mounting of lower tip and has rotating assembly 3, and connecting block 7 one end fixed mounting has spherical block 8;

contain mount 11 in the runner assembly 3, first circular slot 13 has been seted up to mount 11 one side, and first circular slot 13 runs through to mount 11 opposite side, and the second circular slot has been seted up to the position that swinging arms 10 is close to the below, and the inside movable mounting of second circular slot has connecting

axle

15, and 15 both ends of connecting axle all with first circular slot 13 inner wall fixed connection, tip fixed mounting has second motor 14 under mount 11, and second motor 14 output end fixed mounting has dwang 12.

When wasing basket of flowers 17, fix basket of flowers 17 on lifting hook 4, later open two motors, wherein, first motor 5 can drive whole device and be rotary motion, and second motor 14 drives dwang 12 and is rotary motion, and then can drive basket of flowers 17 about and rotatory washing, this kind of setting utilizes wabbler mechanism 1 to drive basket of flowers 17 upper and lower action and just reversal, clockwise two circles, two anticlockwise circles, the rotational speed is according to the technological requirement speed governing. The change is simple, the investment is small, the labor intensity and the cleaning effect of people are solved, the working efficiency is greatly improved, and the production cost is reduced.

In another embodiment, as shown in fig. 2, the embodiment discloses that a hook 4 is fixedly installed at a position close to the lower part of the rotating rod 12;

in another embodiment, as shown in fig. 1 and 4, the embodiment discloses that a cleaning tank 16 is arranged below the swing mechanism 1, a flower basket 17 is sleeved on the hook 4, and the flower basket 17 is located inside the cleaning tank 16;

the basket 17 is washed inside the wash bowl 16 by the operation of the swing mechanism 1.

In another embodiment, as shown in fig. 1 and 2, the present embodiment discloses that the fixing frame 11 has a U-shaped structure.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a simulate manual wafer cleaning shake basket machine, includes the frame and fixes wabbler mechanism (1) in the frame, its characterized in that: the swing mechanism (1) comprises a swing assembly (2) and a rotating assembly (3), the swing assembly (2) comprises a first motor (5), a roller is fixedly mounted at the output end of the first motor (5), a turntable (6) is fixedly mounted at the other end of the roller, a connecting block (7) is fixedly mounted at the position, deviating from the circle center, of the turntable (6), a fixing ring (9) is sleeved on the connecting block (7), a swing rod (10) is fixedly mounted outside the fixing ring (9), the rotating assembly (3) is fixedly mounted at the position, close to the lower end, of the fixing ring (9), and a spherical block (8) is fixedly mounted at one end of the connecting block (7);

contain mount (11) in rotating assembly (3), first circular slot (13) have been seted up to mount (11) one side, first circular slot (13) run through to mount (11) opposite side, the second circular slot has been seted up to position that swinging arms (10) are close to the below, the inside movable mounting of second circular slot has connecting axle (15), connecting axle (15) both ends all with first circular slot (13) inner wall fixed connection, tip fixed mounting has second motor (14) under mount (11), second motor (14) output end fixed mounting has dwang (12).

2. A basket shaking machine simulating manual wafer cleaning according to claim 1, wherein: the position fixed mounting that dwang (12) is close to the below has lifting hook (4).

3. A basket shaking machine simulating manual wafer cleaning according to claim 2, characterized in that: swing mechanism (1) below is provided with washing tank (16), cup jointed basket of flowers (17) on lifting hook (4), basket of flowers (17) are located inside washing tank (16).

4. A basket shaking machine simulating manual wafer cleaning according to claim 1, wherein: the fixing frame (11) is of a U-shaped structure.