CN214011288U

CN214011288U - Scanning tunnel penetration and crack junction measuring device based on motion control mode

Info

Publication number: CN214011288U
Application number: CN202022945819.9U
Authority: CN
Inventors: 洪文晶; 王海川; 朱奕轩; 谭志冰; 师佳
Original assignee: Xiamen University
Current assignee: Xiamen University
Priority date: 2020-12-10
Filing date: 2020-12-10
Publication date: 2021-08-20
Anticipated expiration: 2030-12-10

Abstract

The utility model relates to a scanning tunnel is worn and is split knot measuring device based on motion control mode, include: the STM-BJ framework is fixedly arranged, the STM-BJ framework is fixedly provided with a stepping motor, and a stroke screw rod of the stepping motor can extend to the upper end face of the STM-BJ framework; the base is arranged on a stroke screw rod of the stepping motor and moves along with the stroke screw rod; the probe is fixedly arranged above the STM-BJ skeleton and faces the substrate; and the control system is used for controlling the stroke screw rod of the stepping motor to stretch. The utility model discloses a mutually supporting of fixed probe and mobilizable basement adopts the motor to drive the basement towards the probe motion from making progress down, can leave wide operating space and observation space for the instrument. The utility model discloses a cooperation of dead lever and connecting seat can realize that the probe freely removes and dismantles on the dead lever, and the length of dead lever can design according to actual need.

Description

Scanning tunnel penetration and crack junction measuring device based on motion control mode

Technical Field

The utility model relates to a scanning tunnel is worn and is split knot measuring device field specifically indicates to have a scanning tunnel is worn and is split knot measuring device based on motion control mode.

Background

Integrated circuits have continued to develop along moore's law over the past several decades and the integration of transistors on a chip has continued to increase. The pursuit of reduced cost and reduced power consumption has driven the size of transistors to decrease from the first micron scale to the current 7nm, and the feature size of transistors in integrated circuits will shrink to the size of only tens of atoms or even a single molecule over the foreseeable years. How to realize the electrical property research of single molecule puts forward a rigorous requirement on the development of instruments with the functions of realizing the accurate control of nano-scale displacement, the detection of pico-ampere current and the stable and repeated construction of a large number of single molecule junctions. For the current international research on single molecules, the mainstream dynamic split junction technology mainly includes a Scanning Tunneling Splitting (STM) technology, a mechanical controlled split junction technology and an Atomic Force Microscope (AFM) technology.

At present, in STM-BJ scientific instruments, the motion control mode is that a motor is stepped from top to bottom, which brings the following inconvenience. On the one hand, it is limited to make instrument bottom operating space, the complexity of device installation has been increased to a certain extent, in addition, narrow and small operating space is unfavorable for adding the target molecule of waiting to study, be unfavorable for the realization of acid-base experiment, be unfavorable for optical path system's fixing, also be unfavorable for the regulation and control of three electrode electrochemistry experiment, more be unfavorable for the observation of above-mentioned multiple experimental phenomena, on the other hand, from the walking pattern of step-by-step down, the fixed mode of basement has been injectd, rely on magnet magnetism and instrument skeleton connection at present, there is great fluctuation at the nanoscale, consequently, the stability that leads to the instrument is powerful inadequately, the repeatability is outstanding inadequately.

To the problem design one kind based on the scanning tunnel of foretell prior art existence wears to split knot measuring device is the utility model discloses the purpose of research.

SUMMERY OF THE UTILITY MODEL

To the problem that above-mentioned prior art exists, the utility model provides a scanning tunnel is worn to split and is connect measuring device based on motion control mode can effectively solve the problem that above-mentioned prior art exists.

The technical scheme of the utility model is that:

a scanning tunneling junction-penetrating measuring device based on a motion control mode, comprising:

the STM-BJ framework is fixedly arranged, the STM-BJ framework is fixedly provided with a stepping motor, and a stroke screw rod of the stepping motor can extend to the upper end face of the STM-BJ framework; and

the base is arranged on a stroke screw rod of the stepping motor and moves along with the stroke screw rod; and

the probe is fixedly arranged above the STM-BJ skeleton and faces the substrate; and

and the control system is used for controlling the stroke screw rod of the stepping motor to stretch.

Furthermore, the upper end face of the STM-BJ skeleton is provided with a plurality of fixing rods, connecting seats are arranged among the fixing rods and are locked by corresponding locking devices, and the connecting seats are provided with the probes.

Furthermore, the connecting seat is provided with a plurality of locking holes, the locking holes are in threaded connection with bolts, and the connecting seat is locked and arranged through the bolts and the fixing rods in a matched mode.

Furthermore, piezoelectric ceramics are arranged between the probe and the connecting seat and connected to the control system.

Further, the up end downside of STM-BJ skeleton is provided with the step motor standing groove, step motor fixed set up in the step motor standing groove, the up end of STM-BJ skeleton is provided with the intercommunicating pore, step motor's stroke lead screw can pass the intercommunicating pore extends to the up end of STM-BJ skeleton.

Furthermore, a silicon wafer is arranged on the upper end face of the substrate, and the silicon wafer is plated with gold on the surface layer of the silicon wafer.

Furthermore, a gold sheet or a liquid pool is detachably arranged on the upper end surface of the silicon wafer.

The utility model has the advantages that:

the utility model discloses a mutually supporting of fixed probe and mobilizable basement adopts the motor to drive the basement towards the probe motion from making progress down, can leave wide operating space and observation space for the instrument. The utility model discloses a cooperation of dead lever and connecting seat can realize that the probe freely removes and dismantles on the dead lever, and the length of dead lever can design according to actual need.

The utility model discloses a mutually supporting of fixed probe and mobilizable basement has stopped the in-process that traditional probe removed and has produced the condition such as shake, can give the more stable environment of probe, obtains required molecule knot more easily.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Detailed Description

To facilitate understanding of those skilled in the art, the structure of the present invention will now be described in further detail with reference to the following examples:

example one

Referring to fig. 1, a scanning tunneling junction measuring device based on a motion control mode includes:

the STM-BJ framework 1 is fixedly arranged, the STM-BJ framework 1 is fixedly provided with a stepping motor 2, and a stroke screw rod of the stepping motor 2 can extend to the upper end face of the STM-BJ framework 1; and

the base 3 is arranged on a stroke screw rod of the stepping motor 2 and moves along with the stroke screw rod; and

a probe 4 fixedly arranged above the STM-BJ skeleton 1 and facing the substrate 3, wherein the probe is in the prior art, and the structure of the probe is not described in detail; and

and the control system (not shown) is used for controlling the stroke screw rod of the stepping motor 2 to stretch.

Further, the upper end face of STM-BJ skeleton 1 sets up a plurality of dead levers 5, be provided with connecting seat 6 between the dead lever 5, connecting seat 6 sets up through corresponding locking device locking, connecting seat 6 sets up probe 4. In this way, the probe 3 can be freely moved and detached on the fixing rod 5, and the length of the fixing rod 5 can be designed according to actual needs, so that the detachable probe 4 leaves a wide operating space for the instrument.

Further, the connecting seat 6 is provided with a plurality of locking holes, the locking holes are in threaded connection with bolts, and the connecting seat 6 is locked and arranged through the bolts and the fixing rods 5 in a matched mode.

Further, a piezoelectric ceramic (not shown) is arranged between the probe 4 and the connecting seat 6, and the piezoelectric ceramic is connected to the control system. The piezoelectric ceramics are used for sensing the pressure applied to the probe 4 and transmitting the pressure to the control system, and the control system controls the stepping motor 2 to move according to the pressure signal so that the sample to be detected approaches the probe 4.

Further, the up end downside of STM-BJ skeleton 1 is provided with the step motor standing groove, step motor 2 fixed set up in the step motor standing groove, the up end of STM-BJ skeleton 1 is provided with the intercommunicating pore, step motor 2's stroke lead screw can pass the intercommunicating pore extends to the up end of STM-BJ skeleton 1.

The utility model discloses a jointly use the piezoelectric ceramics who has the step motor of big step and nanometer displacement, can realize approaching of probe 4 and basement 3 fast accurate, form nanometer clearance until unimolecule, monatomic yardstick.

Further, a silicon wafer is arranged on the upper end face of the substrate 3, and the silicon wafer is plated with gold on the surface layer of the silicon wafer.

Furthermore, a gold sheet 7 or a liquid pool is detachably arranged on the upper end surface of the silicon wafer. Only the gold flakes 7 are shown in the drawings of this embodiment. The gold sheet 7 is used for providing a gold substrate, and can form a gold-gold junction with a sample to be detected and a probe. The principle of the liquid bath is similar to that described above.

Furthermore, the utility model discloses be provided with the shielded cell in the periphery. The shielding box is arranged on the desktop of the optical platform, plays a role of secondary vibration isolation, and simultaneously isolates other external molecules to prevent the shielding box from generating cross contamination on a target molecule solution to be researched.

The above is only the preferred embodiment of the present invention, and all the equivalent changes and modifications made within the scope of the claims of the present invention should belong to the scope of the present invention.

Claims

1. The utility model provides a scanning tunnel pierces and splits knot measuring device based on motion control mode which characterized in that: the method comprises the following steps:

2. The device of claim 1, wherein the device comprises: the STM-BJ framework comprises a STM-BJ framework and is characterized in that a plurality of fixing rods are arranged on the upper end face of the STM-BJ framework, connecting seats are arranged among the fixing rods and are locked by corresponding locking devices, and the probes are arranged on the connecting seats.

3. The device of claim 2, wherein the device comprises: the connecting seat is provided with a plurality of locking holes, the locking holes are in threaded connection with bolts, and the connecting seat is locked and arranged through the matching of the bolts and the fixing rods.

4. The device of claim 2, wherein the device comprises: piezoelectric ceramics are arranged between the probe and the connecting seat and connected to the control system.

5. The device of claim 1, wherein the device comprises: the up end downside of STM-BJ skeleton is provided with the step motor standing groove, step motor fixed set up in the step motor standing groove, the up end of STM-BJ skeleton is provided with the intercommunicating pore, step motor's stroke lead screw can pass the intercommunicating pore extends to the up end of STM-BJ skeleton.

6. The device of claim 1, wherein the device comprises: and a silicon wafer is arranged on the upper end face of the substrate, and the surface layer of the silicon wafer is plated with gold.

7. The device of claim 6, wherein the device comprises: the upper end surface of the silicon chip is detachably provided with a gold sheet or a liquid pool.