CN213899211U - Device for diluting corrosive gas pumped by vacuum pump - Google Patents
Device for diluting corrosive gas pumped by vacuum pump Download PDFInfo
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- CN213899211U CN213899211U CN202022914536.8U CN202022914536U CN213899211U CN 213899211 U CN213899211 U CN 213899211U CN 202022914536 U CN202022914536 U CN 202022914536U CN 213899211 U CN213899211 U CN 213899211U
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- vacuum pump
- gas
- corrosive gas
- nitrogen
- conveying pipeline
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Abstract
The utility model provides a device that dilutes is carried out to corrosive gas of vacuum pump suction, the end of giving vent to anger of a corrosive gas conveying line is connected with the import of a vacuum pump, the end of giving vent to anger of a nitrogen gas conveying line is connected with the import of this vacuum pump, the end of giving vent to anger of a corrosive gas-nitrogen gas mixture conveying line is connected with the export of this vacuum pump. This device that dilutes is carried out to corrosive gas of vacuum pump suction, owing to have nitrogen gas to get into in the vacuum pump, will get into the corrosive gas dilution in the vacuum pump, nitrogen gas belongs to inert gas, does not have corrosivity to reduce the corrosion that the internals of vacuum pump received, life obtains the extension.
Description
Technical Field
The utility model relates to a use of vacuum pump, specifically speaking relates to a device that dilutes the corrosive gas of vacuum pump suction.
Background
In the production and manufacturing process of electronic products, gases with special requirements are often used, and the gases are called electronic special gases and have extremely strong corrosiveness. In order to ensure the purity of the special electronic gas provided for electronic product manufacturing enterprises, before the cylinder containing the special electronic gas is refilled with the special electronic gas, the inner wall of the cylinder must be cleaned, and one step is to pump out the residual special electronic gas in the cylinder, which causes the corrosion of the internal parts of the vacuum pump used for pumping the residual special electronic gas by the special electronic gas and the reduction of the service life.
SUMMERY OF THE UTILITY MODEL
The utility model discloses solve the technical problem that the internals of vacuum pump is corroded by electron special gas, provide a device that dilutes the corrosive gas of vacuum pump suction.
The utility model discloses a device that dilutes is carried out to corrosive gas of vacuum pump suction, its characterized in that has:
a vacuum pump;
a corrosive gas delivery pipeline;
a nitrogen gas delivery line;
a mixed gas conveying pipeline of corrosive gas-nitrogen gas;
the air outlet end of the corrosive gas conveying pipeline is connected with the inlet of the vacuum pump, and a first pneumatic switch valve is installed on the corrosive gas conveying pipeline;
the air outlet end of the nitrogen conveying pipeline is connected with the inlet of the vacuum pump, and a first one-way valve, a self-operated pressure regulating valve and a second pneumatic switch valve are sequentially arranged on the nitrogen conveying pipeline from the air inlet end to the air outlet end;
the air inlet end of the corrosive gas-nitrogen gas mixed gas conveying pipeline is connected with the outlet of the vacuum pump, and a second one-way valve and a first manual diaphragm valve are sequentially arranged on the corrosive gas-nitrogen gas mixed gas conveying pipeline from the air inlet end to the air outlet end.
The utility model discloses a device that dilutes is carried out to corrosive gas of vacuum pump suction, owing to have nitrogen gas to get into in the vacuum pump, will get into the corrosive gas dilution in the vacuum pump, nitrogen gas belongs to inert gas, does not have corrosivity to reduced the inside part of vacuum pump and received the corruption, life obtains the extension.
The utility model discloses a device that dilutes is carried out to corrosive gas of vacuum pump suction, the manual diaphragm valve of installation second and a rotor flowmeter on this nitrogen gas conveying pipeline, the manual diaphragm valve of this second is located the upper reaches of this first check valve, and this rotor flowmeter is located the low reaches of this second pneumatic switch valve.
Drawings
Fig. 1 is a schematic view of an apparatus for diluting corrosive gas pumped by a vacuum pump according to the present invention.
Detailed Description
The following description will be made in conjunction with the accompanying drawings for further explaining the embodiment of the device for diluting corrosive gas pumped by a vacuum pump, and the features and advantages of the device for diluting corrosive gas pumped by a vacuum pump will become more apparent.
The utility model discloses a device that dilutes is carried out to corrosive gas of vacuum pump suction is shown in fig. 1, has one and remains electron special gas and carries main line 1, a low pressure nitrogen gas pipeline 2, the gas mixture pipeline 3 of electron special gas-nitrogen gas, a vacuum pump 4 and a rotor flowmeter 5.
The gas inlet end of the residual electronic special gas conveying main pipeline 1 is connected with the gas outlet ends of a plurality of residual electronic special gas conveying branch pipes (not shown), the gas inlet ends of the plurality of residual electronic special gas conveying branch pipes are respectively connected with outlets of a plurality of electronic special gas steel cylinders (not shown), and the gas outlet end of the residual electronic special gas conveying main pipeline 1 is connected with an inlet of a vacuum pump 4. A pneumatic switch valve 11 is arranged on the residual electronic special gas conveying main pipeline 1.
The inlet end of the low-pressure nitrogen gas conveying pipeline 2 is connected with a public engineering low-pressure nitrogen gas pipe network (not shown), and the outlet end is connected with the inlet of the vacuum pump 4. A manual diaphragm valve 21, a one-way valve 22, a self-operated pressure regulating valve 23, a pneumatic switch valve 24 and a rotor flow meter 5 are sequentially arranged on the low-pressure nitrogen conveying pipeline 2 from the air inlet end to the air outlet end.
The inlet end of the mixed gas conveying pipeline 3 of the special electronic gas-nitrogen is connected with the outlet of the vacuum pump 4, and the outlet end is connected with the bottom inlet short pipe of a gas washing tower (not shown). A one-way valve 31 and a manual diaphragm valve 32 are sequentially arranged on the electronic special gas-nitrogen mixed gas conveying pipeline 3 from the gas inlet end to the gas outlet end.
The utility model discloses a corrosive gas to vacuum pump suction carries out the concrete operation as follows of device that dilutes:
1. opening the manual diaphragm valve 21;
2. setting the pressure of the self-operated pressure regulating valve 23 to 2.5 PSIG;
3. opening the pneumatic on-off valve 24;
4. setting the flow rate of the rotameter 5 to 20 cubic centimeters per minute;
5. starting the vacuum pump 4;
6. and opening the pneumatic switch valve 11 and the manual diaphragm valve 32, sucking the electronic special gas and the nitrogen into the vacuum pump 4 from the gas outlet end of the residual electronic special gas conveying main pipeline 1 and the gas outlet end of the low-pressure nitrogen conveying pipeline 2 respectively, pressurizing by the vacuum pump 4, and then conveying into the gas washing tower through the electronic special gas-nitrogen mixed gas conveying pipeline 3. Because nitrogen enters the vacuum pump 4 to dilute the special electronic gas entering the vacuum pump 4, the nitrogen belongs to inert gas and is not corrosive, thereby reducing the corrosion of internal parts of the vacuum pump 4 and prolonging the service life.
Claims (2)
1. An apparatus for diluting a corrosive gas pumped by a vacuum pump, comprising:
a vacuum pump;
a corrosive gas delivery pipeline;
a nitrogen gas delivery line;
a mixed gas conveying pipeline of corrosive gas-nitrogen gas;
the air outlet end of the corrosive gas conveying pipeline is connected with the inlet of the vacuum pump, and a first pneumatic switch valve is installed on the corrosive gas conveying pipeline;
the air outlet end of the nitrogen conveying pipeline is connected with the inlet of the vacuum pump, and a first one-way valve, a self-operated pressure regulating valve and a second pneumatic switch valve are sequentially arranged on the nitrogen conveying pipeline from the air inlet end to the air outlet end;
the air inlet end of the corrosive gas-nitrogen gas mixed gas conveying pipeline is connected with the outlet of the vacuum pump, and a second one-way valve and a first manual diaphragm valve are sequentially arranged on the corrosive gas-nitrogen gas mixed gas conveying pipeline from the air inlet end to the air outlet end.
2. An apparatus for diluting corrosive gas pumped by a vacuum pump as claimed in claim 1, wherein said nitrogen delivery line is provided with a second manual diaphragm valve and a rotameter, said second manual diaphragm valve being located upstream of said first check valve, said rotameter being located downstream of said second pneumatic switch valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022914536.8U CN213899211U (en) | 2020-12-08 | 2020-12-08 | Device for diluting corrosive gas pumped by vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022914536.8U CN213899211U (en) | 2020-12-08 | 2020-12-08 | Device for diluting corrosive gas pumped by vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213899211U true CN213899211U (en) | 2021-08-06 |
Family
ID=77100922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022914536.8U Active CN213899211U (en) | 2020-12-08 | 2020-12-08 | Device for diluting corrosive gas pumped by vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213899211U (en) |
-
2020
- 2020-12-08 CN CN202022914536.8U patent/CN213899211U/en active Active
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