CN213896062U - Double-tray material taking and placing device for silicon core furnace - Google Patents
Double-tray material taking and placing device for silicon core furnace Download PDFInfo
- Publication number
- CN213896062U CN213896062U CN202022290609.0U CN202022290609U CN213896062U CN 213896062 U CN213896062 U CN 213896062U CN 202022290609 U CN202022290609 U CN 202022290609U CN 213896062 U CN213896062 U CN 213896062U
- Authority
- CN
- China
- Prior art keywords
- tray
- silicon core
- double
- taking
- placing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a blowing device is got to double-charging-tray for silicon core stove, relates to intraocular lens preparation technical field, the utility model discloses a both sides at chuck lifting mechanism (12) set up charging tray (7) respectively, set up respectively on two charging trays and get material station (2) and blowing station (8), realized pulling the purpose of making more multiunit silicon core under the prerequisite that does not increase last furnace chamber (6) diameter, practiced thrift the manufacturing cost of silicon core stove promptly, reduced the use cost of silicon core stove again, still improved the degree of accuracy etc. that the manipulator snatched the chuck simultaneously, the utility model has the characteristics of simple structure, convenient operation etc. are fit for popularization and application on a large scale.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to an intraocular lens preparation technical field especially relates to a get and puts material device, concretely relates to a blowing device is got to two charging trays for silicon core furnace.
[ background of the invention ]
As is known, an existing silicon core furnace can simultaneously draw five silicon cores at a time, and draw three groups at a time, for a total of fifteen silicon cores, and the specific structure is as shown in fig. 1, a tray rotating motor is arranged on the upper end surface of an upper furnace chamber 6, a power output shaft of the tray rotating motor is connected with the upper end of a tray connecting shaft 1, the lower end of the tray connecting shaft 1 is connected with a tray 7, two material taking stations 2 are arranged on the left side of the tray 7, two material placing stations 8 are arranged on the right side of the tray 7, a flexible shaft 3 is arranged on the front portion of the tray 7, the upper end of the flexible shaft 3 is connected with a lifting mechanism arranged on the upper end surface of the upper furnace chamber 6, the lower end of the flexible shaft 3 is connected with a manipulator 4, and a seed chuck 5 is arranged below the manipulator 4. Before drawing, firstly placing two sets of seed crystal chucks 5 to be used on two material taking stations 2 on the left side of a material tray 7, placing the seed crystal chucks 5 below a mechanical arm 4, then starting to vacuumize a furnace chamber, fill argon gas, heat a raw material rod, draw a silicon core and the like, wherein the silicon core needs to be seeded by using seed crystals in the drawing process, and the silicon core is drawn after the seeding is finished; in the process, the seed crystal needs to be clamped by a seed crystal chuck, after the high-frequency coil partially melts the end of the raw material rod into liquid, the seed crystal chuck drives the seed crystal to descend until the seed crystal penetrates through a drawing hole of the high-frequency coil and is inserted into the solution at the upper end of the raw material rod, then the seed crystal is driven to ascend by the seed crystal chuck, and the seed crystal drives the solution to ascend and recrystallize to finally form a silicon core with the required length; after a group of silicon cores are drawn, the material tray 7 rotates, the drawn silicon cores are placed on the material placing station 8 on the right side of the material tray 7, then the material tray 7 is reversed, the manipulator 4 enables the material taking station 2 on the left side of the material tray 7 to grab a seed crystal chuck 5 to be used again, a new group of silicon cores is drawn, and the steps are repeated until the three groups of silicon cores are drawn.
However, if more groups of silicon cores need to be drawn in a furnace, the diameter of the material tray 7 needs to be increased, that is, more material taking stations 2 and material placing stations 8 are arranged on the material tray 7, the diameter of the furnace chamber needs to be increased by adopting the method, if the diameter of the furnace chamber is increased, the manufacturing cost of equipment is increased firstly, meanwhile, the consumption of argon is increased in the silicon core drawing process, the use cost is greatly increased, and the like, in order to solve the technical problems, the inventor has applied for a silicon core taking and placing device for a silicon core furnace with patent numbers of 201720888942.7 and publication numbers of CN207176114U on 7/21 th of 7 th month in 2017 under the name of Luoyang Jinnuo mechanical engineering Limited company, and the technical scheme disclosed by the device can solve the technical problems, but because a seed chuck placed on the material taking plate is heavy, the material taking plate is easy to deform, and the mechanical arm is difficult to grasp, and the like, therefore, in order to achieve the purpose of drawing more groups of silicon cores in one furnace, the development of a reasonable material taking and placing device for the silicon core furnace becomes a long-term technical demand of the technical personnel in the field.
[ summary of the invention ]
In order to realize the invention purpose, the utility model provides a blowing device is got to double-charging-tray for silicon core stove, the utility model discloses a set up the charging tray respectively in the both sides of chuck pull-up mechanism, realize the drawing of more multiunit silicon core under the prerequisite that does not increase the diameter of last furnace chamber, still improved the degree of accuracy etc. that the manipulator snatched the chuck simultaneously, the utility model has the characteristics of simple structure, convenient operation etc.
In order to achieve the purpose, the utility model adopts the following technical scheme:
the double-tray taking and placing device for the silicon core furnace comprises trays and a seed chuck lifting mechanism, wherein the seed chuck lifting mechanism is arranged in an upper furnace chamber, the two sides of the seed chuck lifting mechanism are respectively provided with the trays, the two trays are respectively arranged at the lower end of a tray connecting shaft, and the two trays are respectively provided with a plurality of taking stations and placing stations to form the double-tray taking and placing device for the silicon core furnace.
The center of the seed chuck lifting mechanism and the centers of the two material trays are positioned on the same straight line.
A blowing device is got to two charging trays for silicon core stove, be equipped with the perforation of charging tray connecting axle on the charging tray, the perforation of charging tray connecting axle cup joints the lower tip at the charging tray connecting axle, the charging tray rotary mechanism of setting at last furnace chamber up end is connected to the upper end of charging tray connecting axle.
The double-material-tray material taking and placing device for the silicon core furnace is characterized in that an arc-shaped notch is formed in the outer edge surface of the material tray, corresponding to the seed chuck lifting mechanism.
The double-material-disc material taking and placing device for the silicon core furnace is characterized in that a process platform is arranged on the outer edge surface of the material disc corresponding to the arc-shaped notch.
The double-tray material taking and placing device for the silicon core furnace is characterized in that arc-shaped grooves are respectively arranged at the upper part and the lower part of the tray, and a material taking station or a material placing station is respectively arranged on the two arc-shaped grooves.
The double-material-tray material taking and placing device for the silicon core furnace is characterized in that the center of the arc-shaped groove is concentric with the center of the material tray.
The radius of the arc-shaped groove is the same as the distance between the center of the charging tray and the center of the seed chuck lifting mechanism.
The double-tray material taking and placing device for the silicon core furnace is characterized in that a plurality of process holes penetrating to the lower end face are formed in the tray.
Due to the adoption of the technical scheme, the utility model discloses following beneficial effect has:
the utility model discloses a both sides at the seed chuck pull-up mechanism set up the charging tray respectively, set up respectively on two charging trays and get material station and blowing station, realized not increasing the purpose of drawing more multiunit silicon cores under the prerequisite of stove diameter, practiced thrift the manufacturing cost of silicon core stove promptly, reduced the use cost of silicon core stove again, still improved the degree of accuracy etc. that the manipulator snatched the seed chuck simultaneously, the utility model has the characteristics of simple structure, convenient operation etc. are fit for popularization and application on a large scale.
[ description of the drawings ]
FIG. 1 is a schematic perspective view of a conventional material taking and placing device;
fig. 2 is a schematic structural diagram of the present invention;
in the figure: 1. a material tray connecting shaft; 2. a material taking station; 3. a flexible shaft; 4. a manipulator; 5. a seed chuck; 6. an upper furnace chamber; 7. a material tray; 8. a material placing station; 9. an arc-shaped slot; 10. a process platform; 11. an arc-shaped notch; 12. a seed chuck lifting mechanism.
[ detailed description ] embodiments
The present invention will be explained in more detail by the following examples, which are intended to protect all the changes and improvements within the scope of the present invention, and are not limited to the following examples;
it should be noted that the directions and positional relationships indicated by "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. used in describing the structure of the present invention are only for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention.
The double-tray taking and placing device for the silicon core furnace comprises a tray 7 and a seed chuck lifting mechanism 12, wherein the seed chuck lifting mechanism 12 is not the key point for protection of the utility model, the inventor of the seed chuck has already reported a plurality of patents, so the specific structure is not described in a tired way, the seed chuck lifting mechanism 12 is arranged in an upper furnace chamber 6, circular trays 7 are respectively arranged at two sides of the seed chuck lifting mechanism 12, during implementation, the center of the seed chuck lifting mechanism 12 and the centers of the two trays 7 are positioned on the same straight line, the two trays 7 are respectively arranged at the lower end of a tray connecting shaft 1, during implementation, a tray connecting shaft through hole can be arranged on the tray 7, the tray connecting shaft through hole is sleeved at the lower end of the tray connecting shaft 1, the tray connecting shaft through hole is connected with the tray connecting shaft 1 through a flat key or a spline, the lower end head of the charging tray connecting shaft 1 is provided with an external thread, a locking nut is sleeved on the external thread, a charging tray 7 is fastened at the lower end head of the charging tray connecting shaft 1 through the locking nut, and the upper end of the charging tray connecting shaft 1 is connected with a charging tray rotating mechanism arranged on the upper end surface of the upper furnace chamber 6;
as shown in fig. 2, a plurality of material taking stations 2 and material placing stations 8 are respectively arranged on two trays 7, namely, one tray 7 is used for placing materials, the other tray is used for placing materials, then an arc-shaped notch 11 is arranged on the outer edge surface of the tray 7 corresponding to the seed chuck lifting mechanism 12, and the arc-shaped notch 11 is arranged so that when one tray rotates, the other tray does not interfere with the normal rotation of the other tray, namely, the outer edge surface of one tray 7 can pass through the arc-shaped notch 11 on the other tray 7; a process platform 10 for reducing weight is arranged on the outer edge surface of the material tray 7 corresponding to the arc-shaped notch 11, and the process platform can also be arranged into an arc-shaped recess;
as shown in fig. 2, the upper part and the lower part of the tray 7 are respectively provided with an arc-shaped groove 9, the arc-shaped grooves 9 are arranged for enabling a connecting rod on the seed chuck to smoothly enter a preset station, the two arc-shaped grooves 9 are respectively provided with a material taking station 2 or a material placing station 8, during specific implementation, the center of the arc-shaped groove 9 is concentric with the center of the tray 7, the radius of the arc-shaped groove 9 is the same as the distance between the center of the tray 7 and the center of the seed chuck lifting mechanism 12, and thus, the manipulator can be guaranteed to smoothly grab the seed chuck of the corresponding station.
In practice, a plurality of process holes penetrating to the lower end face and used for reducing the weight of the material tray can be arranged on the material tray 7, and the shape of the process holes can be circular, oval, triangular or polygonal.
The utility model discloses a concrete implementation process as follows:
firstly, respectively placing seed chucks to be used on the material taking stations 2 on the material tray 7, and placing the seed chucks below the manipulators on the seed chuck lifting mechanism 12;
secondly, closing each furnace door, vacuumizing the furnace chamber, filling argon and heating the raw material rod;
drawing a silicon core, after the end of the raw material rod is locally melted into liquid by the high-frequency coil, driving the seed crystal to descend by the seed crystal chuck until the seed crystal penetrates through a drawing hole of the high-frequency coil and is inserted into the solution at the upper end of the raw material rod, then driving the seed crystal to ascend by the seed crystal chuck, driving the solution to ascend by the seed crystal at the moment and recrystallizing to finally form the silicon core with the required length; after a group of silicon cores are drawn, the material tray 7 rotates, a seed chuck for drawing the silicon cores is placed on a material placing station 8 on the material tray 7, the material tray 7 is rotated and reset, then the other material tray 7 is rotated, when a preset station is reached, a manipulator grabs a new seed chuck, the material tray 7 is rotated and reset, the manipulator drives the seed chuck to start a new round of silicon core drawing, and the steps are repeated until a plurality of groups of silicon cores are drawn;
and fourthly, after the silicon core is drawn, closing the heating power supply and the argon gas, and opening the furnace door to take out the drawn silicon core after the raw material rod is cooled.
The details of the above are not described in detail since they are prior art.
The embodiments selected for the purpose of disclosing the invention are presently considered to be suitable, however, it should be understood that the invention is intended to cover all variations and modifications of the embodiments that fall within the scope of the inventive concept and invention.
Claims (9)
1. The utility model provides a blowing device is got to double-tray for silicon core stove, includes charging tray (7) and seedholder and draws mechanism (12), characterized by: the seed chuck lifting mechanism (12) is arranged in the upper furnace chamber (6), the two sides of the seed chuck lifting mechanism (12) are respectively provided with a material tray (7), the two material trays (7) are respectively arranged at the lower end of a material tray connecting shaft (1), and the two material trays (7) are respectively provided with a plurality of material taking stations (2) and material placing stations (8) to form the double-material-tray material taking and placing device for the silicon core furnace.
2. The double-tray taking and placing device for the silicon core furnace as claimed in claim 1, which is characterized in that: the center of the seed chuck lifting mechanism (12) and the centers of the two material trays (7) are positioned on the same straight line.
3. The double-tray taking and placing device for the silicon core furnace as claimed in claim 1, which is characterized in that: the material tray connecting shaft is arranged on the material tray (7) and is perforated, the material tray connecting shaft is sleeved at the lower end of the material tray connecting shaft (1) in a penetrating mode, and the upper end of the material tray connecting shaft (1) is connected with a material tray rotating mechanism arranged on the upper end face of the upper furnace chamber (6).
4. The double-tray taking and placing device for the silicon core furnace as claimed in claim 1, which is characterized in that: and an arc-shaped notch (11) is arranged on the outer edge surface of the material tray (7) corresponding to the seed crystal chuck lifting mechanism (12).
5. The double-tray taking and placing device for the silicon core furnace as claimed in claim 1, which is characterized in that: and a process platform (10) is arranged on the outer edge surface of the material tray (7) corresponding to the arc-shaped notch (11).
6. The double-tray taking and placing device for the silicon core furnace as claimed in claim 1, which is characterized in that: arc-shaped grooves (9) are respectively arranged at the upper part and the lower part of the material tray (7), and a material taking station (2) or a material placing station (8) is respectively arranged on the two arc-shaped grooves (9).
7. The double-tray taking and placing device for the silicon core furnace as claimed in claim 6, wherein: the center of the arc-shaped groove (9) is concentric with the center of the material tray (7).
8. The double-tray taking and placing device for the silicon core furnace as claimed in claim 6, wherein: the radius of the arc-shaped groove (9) is the same as the distance between the center of the material tray (7) and the center of the seed chuck lifting mechanism (12).
9. The double-tray taking and placing device for the silicon core furnace as claimed in claim 1, which is characterized in that: a plurality of process holes penetrating to the lower end face are formed in the material tray (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022290609.0U CN213896062U (en) | 2020-10-15 | 2020-10-15 | Double-tray material taking and placing device for silicon core furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022290609.0U CN213896062U (en) | 2020-10-15 | 2020-10-15 | Double-tray material taking and placing device for silicon core furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213896062U true CN213896062U (en) | 2021-08-06 |
Family
ID=77114348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022290609.0U Active CN213896062U (en) | 2020-10-15 | 2020-10-15 | Double-tray material taking and placing device for silicon core furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213896062U (en) |
-
2020
- 2020-10-15 CN CN202022290609.0U patent/CN213896062U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2021088314A1 (en) | Edge-defined film-fed growth-based sapphire crystal growth furnace capable of multiple replacement of seed crystals | |
| CN213896062U (en) | Double-tray material taking and placing device for silicon core furnace | |
| CN206428249U (en) | Culture dish is from dynamic circuit connector ware device | |
| CN206428232U (en) | Culture dish takes ware device automatically | |
| CN209987199U (en) | Crystal bar picking and placing vehicle | |
| CN113133339B (en) | Seedling supplementing method by utilizing end effector of cotyledon-stage vegetable seedling supplementing manipulator | |
| CN207164304U (en) | Realize rotating mechanism of the multicore fiber high accuracy to core welding | |
| CN213596459U (en) | Quick centering device for seed crystal holder | |
| CN215713513U (en) | Heating body in Bridgman method | |
| CN218436024U (en) | Multi-motor simultaneously driven seed chuck | |
| CN107234431A (en) | Battery modules crystal assembles equipment | |
| CN218345591U (en) | Seed crystal chuck for simultaneously drawing multiple crystals | |
| CN221020917U (en) | Fork truck arm maintenance device for mechanical engineering | |
| CN113983813B (en) | High-flux magnesium alloy smelting device and method | |
| WO2022052080A1 (en) | Edge-defined film-fed growth method-based sapphire crystal growth furnace capable of replacing seed crystals for multiple times | |
| CN216219101U (en) | Intelligent monitoring devices for cotton breeding | |
| CN220992585U (en) | Stamping die for triangular pin | |
| CN206375812U (en) | Equipment for producing quartz glass crucibles | |
| CN220877540U (en) | Supporting device for defibrillator | |
| CN219297377U (en) | Glass solution annealing furnace for glass production | |
| CN218776574U (en) | Prefabricated formula wallboard storage rack | |
| CN109793394A (en) | A kind of big reserves colour table management comprehensive cabinet | |
| CN220619185U (en) | Silicon carbide single crystal growth device | |
| CN114457420A (en) | Seed chuck for drawing artificial crystal | |
| CN217621824U (en) | PIN needle automatic feeding equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |