CN213887308U

CN213887308U - Cleaning device for efficient separation of wafers

Info

Publication number: CN213887308U
Application number: CN202022294491.9U
Authority: CN
Inventors: 韦胜; 卢凯; 盛育
Original assignee: Suzhou Baikejing Electronic Technology Co ltd
Current assignee: Baikejing Semiconductor Technology Suzhou Co ltd
Priority date: 2020-10-15
Filing date: 2020-10-15
Publication date: 2021-08-06
Anticipated expiration: 2030-10-15

Abstract

The utility model belongs to the technical field of wafer sorter equipment technique and specifically relates to a belt cleaning device that wafer high efficiency was selected separately, comprising a supporting seat, the bottom fixed mounting of supporting seat has a plurality of stabilizer blades, the top fixed mounting of supporting seat has the clean bench, a plurality of standing grooves have been seted up on the clean bench, the wiper mechanism is all installed to the both sides of clean bench, the wiper mechanism includes reciprocal screw rod, reciprocal screw rod rotates the outside of installing at the clean bench, second screw thread seat is installed to reciprocal screw rod last screw thread, the outside and the clean bench sliding connection of second screw thread seat, the top fixed mounting of second screw thread seat has the water spray seat, the entrance point fixed mounting of water spray seat has the water inlet hose, the exit end fixed mounting of water spray seat has the shower nozzle, the equal fixed mounting in outer end of two reciprocal screw rods has the sprocket, connect through chain drive between two sprockets. The utility model discloses a shower nozzle evenly sprays water on the clean bench to the standing groove sanitization on the clean bench, the clearance wide range, efficiency is higher.

Description

Cleaning device for efficient separation of wafers

Technical Field

The utility model relates to a wafer sorter equipment technical field especially relates to a belt cleaning device that wafer high efficiency was selected separately.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular, and various circuit element structures can be manufactured on the silicon wafer to form an IC product with a specific electrical function; the starting material for the wafer is silicon, while the crust surface has an inexhaustible amount of silicon dioxide. The silicon dioxide ore is refined by an electric arc furnace, chloridized by hydrochloric acid and distilled to prepare high-purity polysilicon with the purity as high as 99.99 percent. The wafer is made by purifying, melting and distilling silicon dioxide to prepare silicon crystal rods, and then taking the silicon crystal rods to grind, polish and slice the silicon crystal rods to obtain a wafer master slice.

The existing wafer sorting machine can generate more dust after being used for a long time, larger errors can be caused, efficient and quick cleaning can not be carried out, the service life can be shortened after the existing wafer sorting machine is used for a long time, and the existing wafer sorting requirement can not be met because the existing wafer sorting machine is difficult to adsorb and sort wafers.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem that the wafer sorting machine is easy to accumulate dust and inconvenient to clean in the prior art, and providing a cleaning device for high-efficiency sorting of wafers.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a cleaning device for efficiently sorting wafers is designed, which comprises a supporting seat, wherein a plurality of supporting legs are fixedly arranged at the bottom of the supporting seat, a cleaning table is fixedly arranged at the top of the supporting seat, a plurality of placing grooves are arranged on the cleaning table, the placing grooves are equidistantly distributed on the cleaning table, both sides of the cleaning table are provided with cleaning mechanisms, the cleaning mechanism comprises a reciprocating screw rod which is rotatably arranged at the outer side of the cleaning platform, a second thread seat is arranged on the reciprocating screw in a threaded manner, the outer side of the second thread seat is connected with the cleaning table in a sliding manner, the top of the second threaded seat is fixedly provided with a water spraying seat, the inlet end of the water spraying seat is fixedly provided with a water inlet hose, the outlet end of the water spraying seat is fixedly provided with a spray head, the outer ends of the two reciprocating screw rods are fixedly provided with chain wheels, and the two chain wheels are connected through a chain in a transmission way.

Preferably, the equal fixed mounting in both sides of supporting seat has the mounting bracket, the inboard at mounting bracket top is rotated and is installed the lead screw, the outside fixed mounting of mounting bracket has the motor, the output shaft and the lead screw fixed connection of motor.

Preferably, a first thread seat is installed on the screw rod in a threaded mode, the top end of the first thread seat is connected with the top wall of the mounting frame in a sliding mode, and a sliding groove matched with the first thread seat is formed in the top wall of the mounting frame.

Preferably, the top fixed mounting of first screw thread seat has a plurality of dead levers, the bottom fixed mounting of dead lever has the fixed plate, the top fixed mounting of fixed plate has the cylinder, the output fixed mounting of cylinder has the sucking disc.

Preferably, one end of the screw rod, which is far away from the motor, is fixedly provided with a second belt wheel, one end of the reciprocating screw rod, which is far away from the corresponding chain wheel, is fixedly provided with a first belt wheel, and the first belt wheel is in transmission connection with the second belt wheel through a belt.

The utility model provides a pair of belt cleaning device that wafer high efficiency was selected separately, beneficial effect lies in:

1. the two second threaded seats slide in a reciprocating manner on the outer side of the cleaning table through the rotation of the reciprocating screw rod, water flows are guided into the water spraying seats through the water inlet hose, and then the water flows are sprayed out through the spray head and evenly sprayed onto the cleaning table, so that the placing groove on the cleaning table is cleaned, the cleaning range is wide, and the efficiency is higher;

2. through the drive of motor, can be so that the lead screw rotates to make first screw thread seat can remove at the horizontal direction, and then the horizontal position of adjustment sucking disc, then the control cylinder makes the sucking disc move downwards or upwards in vertical direction, can adsorb the wafer in the standing groove like this and select separately the operation, but automatic operation reduces manual operation's the amount of labour completely.

Drawings

Fig. 1 is a schematic structural diagram of a cleaning device for efficiently sorting wafer sheets according to the present invention;

fig. 2 is a schematic structural diagram of a cleaning device for efficiently sorting wafer wafers according to the present invention;

fig. 3 is the structural schematic diagram of the cleaning mechanism of the cleaning device for high-efficiency separation of wafer.

In the figure: the cleaning machine comprises a supporting seat 1, supporting legs 2, a mounting frame 3, a screw rod 4, a motor 5, a first threaded seat 6, a fixing rod 7, a fixing plate 8, a cylinder 9, a suction cup 10, a cleaning table 11, a placing groove 111, a cleaning mechanism 12, a reciprocating screw rod 121, a second threaded seat 122, a water spraying seat 123, a water inlet hose 124, a spray head 125, a chain wheel 126, a first belt wheel 13 and a second belt wheel 14.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-3, a cleaning device for efficient wafer sorting comprises a supporting seat 1, wherein a plurality of supporting legs 2 are fixedly installed at the bottom of the supporting seat 1, a cleaning table 11 is fixedly installed at the top of the supporting seat 1, a plurality of placing grooves 111 are formed in the cleaning table 11, the placing grooves 111 are equidistantly distributed on the cleaning table 11, and the placing grooves 111 are used for placing wafers; wiper mechanism 12 is all installed to the both sides of clean bench 11, wiper mechanism 12 includes reciprocal screw rod 121, reciprocal screw rod 121 rotates the outside of installing at clean bench 11, second screw thread seat 122 is installed to reciprocal screw rod 121 goes up the screw thread, the outside and the clean bench 11 sliding connection of second screw thread seat 122, the top fixed mounting of second screw thread seat 122 has water spray seat 123, the entrance point fixed mounting of water spray seat 123 has water inlet hose 124, the exit end fixed mounting of water spray seat 123 has shower nozzle 125, the equal fixed mounting in outer end of two reciprocal screw rods 121 has sprocket 126, connect through chain drive between two sprocket 126.

Rotate through reciprocating screw 121 to make two second screw thread seats 122 at the outside reciprocating sliding of wash platform 11, intake hose 124 is to leading-in rivers in water spray seat 123, then through shower nozzle 125 blowout, and evenly spray on wash platform 11, thereby to the standing groove 111 sanitization on the wash platform 11, the clearance wide range, efficiency is higher.

The mounting frame 3 is fixedly mounted on two sides of the supporting seat 1, a lead screw 4 is rotatably mounted on the inner side of the top of the mounting frame 3, a motor 5 is fixedly mounted on the outer side of the mounting frame 3, an output shaft of the motor 5 is fixedly connected with the lead screw 4, a first thread seat 6 is mounted on the lead screw 4 in a threaded manner, the top end of the first thread seat 6 is slidably connected with the top wall of the mounting frame 3, a chute matched with the first thread seat 6 is formed in the top wall of the mounting frame 3, a plurality of fixing rods 7 are fixedly mounted at the top of the first thread seat 6, a fixing plate 8 is fixedly mounted at the bottoms of the fixing rods 7, an air cylinder 9 is fixedly mounted at the top of the fixing plate 8, and a sucker 10 is fixedly mounted at the output end of the air cylinder 9; the end of the screw rod 4 far away from the motor 5 is fixedly provided with a second belt wheel 14, one end of one reciprocating screw rod 121 far away from the corresponding chain wheel 126 is fixedly provided with a first belt wheel 13, and the first belt wheel 13 is in transmission connection with the second belt wheel 14 through a belt.

Through the drive of motor 5, can be so that lead screw 4 rotates to make first screw thread seat 6 can remove at the horizontal direction, and then adjust the horizontal position of sucking disc 10, then control cylinder 9 makes sucking disc 10 move downwards or rebound in vertical direction, can adsorb the wafer in standing groove 111 like this and carry out the operation of sorting, but automatic operation reduces manual operation's the amount of labour completely.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The cleaning device for efficient separation of the wafer comprises a supporting seat (1), wherein a plurality of support legs (2) are fixedly mounted at the bottom of the supporting seat (1), and is characterized in that a cleaning table (11) is fixedly mounted at the top of the supporting seat (1), a plurality of placing grooves (111) are formed in the cleaning table (11), the placing grooves (111) are equidistantly distributed in the cleaning table (11), cleaning mechanisms (12) are mounted on two sides of the cleaning table (11), each cleaning mechanism (12) comprises a reciprocating screw rod (121), the reciprocating screw rods (121) are rotatably mounted on the outer side of the cleaning table (11), second thread seats (122) are threadedly mounted on the reciprocating screw rods (121), the outer sides of the second thread seats (122) are slidably connected with the cleaning table (11), and water spraying seats (123) are fixedly mounted at the tops of the second thread seats (122), the inlet end of the water spraying seat (123) is fixedly provided with a water inlet hose (124), the outlet end of the water spraying seat (123) is fixedly provided with a spray head (125), the outer ends of the two reciprocating screw rods (121) are fixedly provided with chain wheels (126), and the two chain wheels (126) are connected through chain transmission.

2. The cleaning device for efficient wafer sorting according to claim 1, wherein mounting frames (3) are fixedly mounted on two sides of the supporting seat (1), a screw rod (4) is rotatably mounted on the inner side of the top of each mounting frame (3), a motor (5) is fixedly mounted on the outer side of each mounting frame (3), and an output shaft of each motor (5) is fixedly connected with the screw rod (4).

3. The cleaning device for efficient wafer sorting according to claim 2, wherein a first threaded seat (6) is threadedly mounted on the screw rod (4), the top end of the first threaded seat (6) is slidably connected with the top wall of the mounting frame (3), and the top wall of the mounting frame (3) is provided with a sliding groove matched with the first threaded seat (6).

4. The cleaning device for efficient wafer sorting according to claim 3, wherein a plurality of fixing rods (7) are fixedly installed at the top of the first threaded seat (6), a fixing plate (8) is fixedly installed at the bottom of each fixing rod (7), an air cylinder (9) is fixedly installed at the top of each fixing plate (8), and a sucking disc (10) is fixedly installed at the output end of each air cylinder (9).

5. The wafer efficient sorting and cleaning device as claimed in claim 4, wherein a second belt wheel (14) is fixedly mounted at one end of the screw rod (4) far away from the motor (5), a first belt wheel (13) is fixedly mounted at one end of one of the reciprocating screw rods (121) far away from the corresponding chain wheel (126), and the first belt wheel (13) is in belt transmission connection with the second belt wheel (14).