CN213878025U

CN213878025U - Wafer platform expanding structure

Info

Publication number: CN213878025U
Application number: CN202022843792.2U
Authority: CN
Inventors: 王慧; 蔡奇陵
Original assignee: CYG Semiconductor Equipment Zhuhai Co Ltd
Current assignee: CYG Semiconductor Equipment Zhuhai Co Ltd
Priority date: 2020-11-30
Filing date: 2020-11-30
Publication date: 2021-08-03
Anticipated expiration: 2030-11-30

Abstract

The utility model discloses a crystal round platform expanding structure, the on-line screen storage device comprises a base, the expansion ring, the driving piece, transmission assembly and two expansion subassemblies, two expansion subassemblies are installed in the both sides of expansion ring, the driving piece is fixed in the base, each expansion subassembly includes the lead screw, nut and slider, nut and lead screw cooperation, the slider is fixed in the nut, slider slidable mounting is in the base, the expansion ring is installed on the slider, the driving piece drives the lead screw through transmission assembly and rotates, the lead screw drives the relative base of expansion ring through the nut and reciprocates, through the above-mentioned design, a driving piece just can drive two expansion subassemblies, the distance and the speed that the accurate control expansion ring reciprocated, and simple structure, light in weight.

Description

Wafer platform expanding structure

Technical Field

The utility model relates to a wafer especially relates to a wafer platform expansion structure.

Background

In the whole packaging process of the wafer, the back surface of the whole wafer is pasted with the blue film, and the blue film needs to be processed subsequently to expand the blue film. In the prior art, the expansion ring is generally driven by a cylinder or a double motor, but the cylinder cannot control the up-and-down movement distance and speed of the expansion ring; the double motors have a heavy weight and a high cost.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model aims to provide a wafer stage expansion structure which can accurately control the distance and the speed of the expansion ring moving up and down and has simple structure and light weight.

The purpose of the utility model is realized by adopting the following technical scheme:

the utility model provides a crystal round platform expanding structure, includes base, expansion ring, driving piece, drive assembly and two expansion assembly, two expansion assembly install in expansion ring's both sides, the driving piece is fixed in the base, each expansion assembly includes lead screw, nut and slider, the nut with the lead screw cooperation, the slider is fixed in the nut, slider slidable mounting in the base, expansion ring install in on the slider, the driving piece passes through drive assembly drives the lead screw rotates, the lead screw passes through the nut drives expansion ring is relative the base reciprocates.

Further, the expansion assembly further comprises a connecting wheel, the end part of the screw rod is fixed to the connecting wheel, the transmission assembly comprises a belt, and the belt is sleeved on the connecting wheel and the output end of the driving piece.

Further, the expansion assembly further comprises a rotating wheel, the rotating wheel is rotatably mounted on the base, the output end of the driving piece is in belt transmission with the rotating wheel, and the connecting wheel is in belt transmission with the rotating wheel.

Further, the rotating wheel, the output end of the driving member and the connecting wheel are not in the same line.

Furthermore, the straight line where the output ends of the rotating wheel and the driving piece are located is perpendicular to the straight line where the rotating wheel and the connecting wheel are located.

Further, the driving member is a motor.

Further, the base is provided with a slide rail, and the slide block is slidably mounted on the slide rail.

Further, the expansion ring is annular.

Further, wafer platform expanding structure still includes the mounting panel, the mounting panel is fixed in the base, the driving piece is fixed in the mounting panel.

Compared with the prior art, the utility model discloses wafer platform expanding structure still includes drive assembly and two expansion subassemblies, two expansion subassemblies are installed in the both sides of expansion ring, the driving piece is fixed in the base, each expansion subassembly includes the lead screw, nut and slider, nut and lead screw cooperation, the slider is fixed in the nut, slider slidable mounting is in the base, the expansion ring is installed on the slider, the driving piece drives the lead screw through drive assembly and rotates, the lead screw drives the relative base of expansion ring through the nut and reciprocates, through the aforesaid design, a driving piece just can drive two expansion subassemblies, the distance and the speed that the accurate control expansion ring reciprocated, and simple structure, light in weight.

Drawings

Fig. 1 is a perspective view of the wafer table expanding structure of the present invention;

FIG. 2 is another perspective view of the wafer table of FIG. 1 in an expanded configuration;

fig. 3 is another perspective view of the wafer table expanding structure of fig. 1.

In the figure: 10. a base; 11. a slide rail; 20. an expansion ring; 30. a drive member; 40. mounting a plate; 50. a transmission assembly; 51. a belt; 52. a rotating wheel; 60. an expansion assembly; 61. a connecting wheel; 62. a screw rod; 63. a nut; 64. a slide block.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present, secured by intervening elements. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When an element is referred to as being "disposed on" another element, it can be directly disposed on the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1 to 3, the wafer stage expanding structure of the present invention includes a base 10, an expanding ring 20, a driving member 30, a mounting plate 40, a transmission assembly 50 and two expanding assemblies 60.

The base 10 is provided with two slide rails 11. The two slide rails 11 are respectively located at two opposite sides of the base 10.

The stent ring 20 has a ring shape.

The drive member 30 includes an output end. In the present embodiment, the driving member 30 is a motor.

The transmission assembly 50 includes a belt 51 and a rotating wheel 52. The number of the belts 51 and the rotating wheels 52 is set according to actual requirements.

Each expansion assembly 60 includes a coupling wheel 61, a lead screw 62, a nut 63, and a slider 64. The connecting wheel 61 is fixed on the end of the screw 62, and the nut 63 is matched with the screw 62. The slider 64 is fixedly connected with the nut 63.

When the wafer stage expansion structure is assembled, the mounting plate 40 is fixed to the base 10. The driving member 30 is fixed to the mounting plate 40. The rotating wheel 52 is rotatably mounted to the base 10. The lead screws 62 of the two expansion assemblies 60 are rotatably mounted to the base 10. The turning wheel 52, the output end of the driving member 30 and the connecting wheel 61 are not in the same straight line. The straight line of the output ends of the rotating wheel 52 and the driving member 30 is perpendicular to the straight line of the rotating wheel 52 and the connecting wheel 61. An engaging wheel 61 of an expansion unit 60 is driven by a belt 51 to the output end of the driving member 30. The connecting wheel 61 of the other expansion assembly 60 is in transmission with the rotating wheel 52 through the belt 51. The rotating wheel 52 is in transmission with the output end of the driving member 30 through the belt 51. The sliding blocks 64 of the two expansion assemblies 60 are slidably connected with the two sliding rails 11 of the base 10 respectively. The stent ring 20 is mounted on the slider blocks 64 of the two stent assemblies 60.

When the wafer stage expanding structure is used, the output shaft of the driving member 30 rotates, and the output shaft of the driving member 30 simultaneously drives the lead screws 62 of the two expanding assemblies 60 to rotate through the transmission assembly 50. The screw 62 moves the slider 64 up and down by the nut 63. Since the ring stent 20 is mounted on the two sliding blocks 64, the two sliding blocks 64 act synchronously, and the ring stent 20 moves up and down along with the two sliding blocks 64.

Through the design, one driving member 30 can drive the two expansion assemblies 60, the two expansion assemblies 60 act synchronously, the up-and-down movement distance and speed of the expansion ring 20 are accurately controlled, and the expansion ring expanding device is simple in structure and light in weight.

Various other modifications and changes may be made by those skilled in the art based on the above-described technical solutions and concepts, and all such modifications and changes are intended to fall within the scope of the claims.

Claims

1. The utility model provides a wafer platform expanding structure, includes base and expansion ring, its characterized in that: wafer platform expanding structure still includes driving piece, drive assembly and two expansion subassemblies, two expansion subassembly install in the both sides of expansion ring, the driving piece is fixed in the base, each expansion subassembly includes lead screw, nut and slider, the nut with the lead screw cooperation, the slider is fixed in the nut, slider slidable mounting in the base, the expansion ring install in on the slider, the driving piece passes through drive assembly drives the lead screw rotates, the lead screw passes through the nut drives the expansion ring is relative the base reciprocates.

2. The wafer table expanding structure of claim 1, wherein: the expansion assembly further comprises a connecting wheel, the end portion of the screw rod is fixed to the connecting wheel, the transmission assembly comprises a belt, and the belt is sleeved on the connecting wheel and the output end of the driving piece.

3. The wafer table expanding structure of claim 2, wherein: the expansion assembly further comprises a rotating wheel, the rotating wheel is rotatably mounted on the base, the output end of the driving piece is in belt transmission with the rotating wheel, and the connecting wheel is in belt transmission with the rotating wheel.

4. The wafer table expanding structure of claim 3, wherein: the rotating wheel, the output end of the driving piece and the connecting wheel are not in the same straight line.

5. The wafer table expanding structure of claim 4, wherein: the straight line where the output ends of the rotating wheel and the driving piece are located is perpendicular to the straight line where the rotating wheel and the connecting wheel are located.

6. The wafer table expanding structure of claim 1, wherein: the driving member is a motor.

7. The wafer table expanding structure of claim 1, wherein: the base is provided with a slide rail, and the slide block is slidably mounted on the slide rail.

8. The wafer table expanding structure of claim 1, wherein: the expansion ring is in a ring shape.

9. The wafer table expanding structure of claim 1, wherein: the wafer platform expanding structure further comprises a mounting plate, the mounting plate is fixed on the base, and the driving piece is fixed on the mounting plate.