CN213841712U - Mullite high-temperature-resistant jig for high-temperature baking of ceramic part of semiconductor equipment - Google Patents
Mullite high-temperature-resistant jig for high-temperature baking of ceramic part of semiconductor equipment Download PDFInfo
- Publication number
- CN213841712U CN213841712U CN202022609406.3U CN202022609406U CN213841712U CN 213841712 U CN213841712 U CN 213841712U CN 202022609406 U CN202022609406 U CN 202022609406U CN 213841712 U CN213841712 U CN 213841712U
- Authority
- CN
- China
- Prior art keywords
- supporting
- mullite
- temperature
- supporting block
- ceramic part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Furnace Charging Or Discharging (AREA)
Abstract
The utility model relates to the technical field of machinery. The mullite high-temperature-resistant jig for high-temperature baking of the ceramic part of the semiconductor equipment is characterized by comprising at least three supporting blocks which are arranged at equal intervals and angles; the outer side of each supporting block is in a step shape; the supporting blocks comprise at least three supporting surfaces which are arranged from top to bottom, each supporting surface is parallel to the other, and the longitudinal projection of the supporting surface positioned above is positioned at the inner side of the longitudinal projection of the supporting surface positioned below; the supporting block is made of mullite. This patent is convenient for be applicable to the high temperature operation of toasting temperature under the scope condition through selecting the mullite as the supporting shoe. When the ceramic baking oven is used, the supporting blocks with the same size are placed in a central radiation mode at equal intervals, the supporting blocks are horizontally placed in the pit type baking oven, the ceramic parts are placed from bottom to top according to the diameters from large to small, and high-temperature baking is completed. When the ceramic parts are taken out, the ceramic parts which finish the baking operation are taken out layer by layer from top to bottom.
Description
Technical Field
The utility model relates to the technical field of machinery, specifically toast and use tool.
Background
One of the baking steps is to process a semiconductor device.
Because for the semiconductor device of different structures, the circular or annular ceramic part of semiconductor device, because the diameter differs, the size differs obviously moreover, in order to guarantee breakable ceramic part's safety, often put ceramic part side by side in the high temperature oven, and 2 at most put simultaneously of ceramic part. The complete high-temperature baking operation needs 72 hours, and the conditions of low space utilization rate and low productivity of the shaft type baking oven exist in a single baking operation period.
SUMMERY OF THE UTILITY MODEL
To the problem that prior art exists, the utility model provides a ceramic part high temperature baking of semiconductor equipment is with resistant high temperature tool of mullite to solve above at least one technical problem.
In order to achieve the purpose, the utility model provides a mullite high-temperature resistant jig for high-temperature baking of a ceramic part of semiconductor equipment, which is characterized by comprising at least three supporting blocks which are arranged at equal intervals and angles;
the outer side of each supporting block is in a step shape, each supporting block comprises at least three supporting surfaces which are arranged from top to bottom, each supporting surface is parallel to each other, and the longitudinal projection of the supporting surface positioned above is positioned on the inner side of the longitudinal projection of the supporting surface positioned below;
the supporting block is made of mullite.
This patent is convenient for be applicable to the high temperature operation of toasting temperature under the scope condition through selecting the mullite as the supporting shoe.
When the ceramic baking oven is used, the supporting blocks with the same size are placed in a central radiation mode at equal intervals, the supporting blocks are horizontally placed in the pit type baking oven, the ceramic parts are placed from bottom to top according to the diameters from large to small, and high-temperature baking is completed. When the ceramic parts are taken out, the ceramic parts which finish the baking operation are taken out layer by layer from top to bottom.
Further preferably, the number of the supporting blocks is three.
As a preferred scheme, the device also comprises a supporting plate, wherein the supporting plate is made of mullite;
the supporting plate is provided with mounting columns which are arranged at equal intervals and angles;
the supporting block is provided with a jack which is longitudinally inserted with the mounting column.
The supporting blocks are arranged at equal intervals and angles conveniently.
Further preferably, the cross-sectional area of the mounting post is polygonal.
The single mounting column can realize the limiting of the supporting block angle conveniently.
As another preferred scheme, the device also comprises a supporting plate, wherein the supporting plate is made of mullite;
the supporting block is connected with the supporting plate in a sliding mode in the radial direction;
and the supporting plate is provided with a positioning identification line for positioning when the supporting block slides in the radial direction.
The supporting blocks which are arranged in the circumferential direction can slide to a uniform position at intervals from the center.
Preferably, the positioning mark lines are scale lines matched with the number of the supporting blocks, and the scale lines correspond to the supporting blocks one by one and are arranged adjacently;
the length direction of the scale mark is parallel to the length direction of the supporting block.
As another preferred scheme, the device also comprises a supporting plate, wherein the center of the supporting plate is rotatably connected with a rotating shaft;
the supporting block is connected with the supporting plate in a sliding mode in the radial direction;
the supporting block is hinged with one end of a first connecting rod, the other end of the first connecting rod is hinged with one end of a second connecting rod, and the other end of the second connecting rod is fixed on the periphery of the rotating shaft;
the longitudinal height of the rotating shaft is lower than that of the supporting block.
The uniformity of the radial positions of all the supporting blocks is convenient to realize.
Drawings
Fig. 1 is a schematic structural diagram of a supporting block according to embodiment 1 of the present invention;
fig. 2 is a top view of embodiment 1 of the present invention;
fig. 3 is a cross-sectional view of embodiment 2 of the present invention;
fig. 4 is a top view of embodiment 3 of the present invention;
fig. 5 is a top view of embodiment 4 of the present invention.
Wherein: 1 is the supporting shoe, 2 is the backup pad, 3 is the scale mark, 4 is the pivot, 5 is first connecting rod, 6 is the second connecting rod, 7 is the sign line, 21 is the erection column.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
Referring to fig. 1 and 2, embodiment 1: the mullite high-temperature-resistant jig for high-temperature baking of the ceramic part of the semiconductor equipment is characterized by comprising at least three supporting blocks 1 which are arranged at equal intervals and angles; the outer side of each supporting block 1 is in a step shape; the outer side of each supporting block 1 is in a step shape, each supporting block 1 comprises at least three supporting surfaces which are arranged from top to bottom, each supporting surface is parallel to each other, and the longitudinal projection of the supporting surface positioned above is positioned on the inner side of the longitudinal projection of the supporting surface positioned below; the material of the supporting block 1 is mullite. This patent is convenient for be applicable to the high temperature operation of toasting temperature under the scope condition through selecting mullite as supporting shoe 1. When the ceramic baking oven is used, the supporting blocks 1 with the same size are placed in a central radiation mode at equal intervals, the supporting blocks are horizontally placed in the well type baking oven, the ceramic parts are placed from bottom to top according to the diameters from large to small, and high-temperature baking is completed. When the ceramic parts are taken out, the ceramic parts which finish the baking operation are taken out layer by layer from top to bottom. Three supporting blocks 1 are arranged.
Referring to fig. 3, in embodiment 2, on the basis of embodiment 1, a support plate 2 is further included, and the support plate 2 is made of mullite; the supporting plate 2 is provided with mounting columns 21 which are arranged at equal intervals and angles; the supporting block 1 is provided with a jack which is longitudinally inserted with the mounting column. The equal-interval angular arrangement of the supporting blocks 1 is convenient to realize. The cross-sectional area of the mounting post 21 is polygonal. The single mounting column can realize the limiting of the angle of the supporting block 1 conveniently.
Referring to fig. 4, in embodiment 3, on the basis of embodiment 1, a support plate 2 is further included, and the support plate 2 is made of mullite; the supporting block 1 is connected with the supporting plate 2 in a sliding manner in the radial direction; the supporting plate 2 is provided with a positioning mark line for positioning when the supporting block 1 slides in the radial direction. The supporting blocks 1 which are arranged in the circumferential direction can slide to a uniform position at intervals from the center. The positioning mark lines are scale marks 3 matched with the number of the supporting blocks 1, and the scale marks 3 correspond to the supporting blocks 1 one by one and are arranged adjacently; the length direction of the scale mark 3 and the length direction of the supporting block 1 are parallel to each other.
Referring to fig. 5, embodiment 4, on the basis of embodiment 1, further includes a supporting plate 2, a center of the supporting plate 2 is rotatably connected to a rotating shaft 4; the supporting block 1 is connected with the supporting plate 2 in a sliding manner in the radial direction; the supporting block 1 is hinged with one end of a first connecting rod 5, the other end of the first connecting rod 5 is hinged with one end of a second connecting rod 6, and the other end of the second connecting rod 6 is fixed on the periphery of the rotating shaft 4; the longitudinal height of the rotating shaft 4 is lower than that of the supporting block 1. It is convenient to achieve uniformity of the radial positions of all the support blocks 1. The supporting plate can be also provided with marking lines adjacent to the supporting blocks. The supporting block can be conveniently adjusted according to the diameters of different parts.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (7)
1. The mullite high-temperature-resistant jig for high-temperature baking of the ceramic part of the semiconductor equipment is characterized by comprising at least three supporting blocks which are arranged at equal intervals and angles;
the outer side of each supporting block is in a step shape, each supporting block comprises at least three supporting surfaces which are arranged from top to bottom, each supporting surface is parallel to each other, and the longitudinal projection of the supporting surface positioned above is positioned on the inner side of the longitudinal projection of the supporting surface positioned below;
the supporting block is made of mullite.
2. The mullite high-temperature resistant jig for high-temperature baking of the ceramic part of the semiconductor device according to claim 1, wherein: the supporting shoe is equipped with three.
3. The mullite high-temperature resistant jig for high-temperature baking of the ceramic part of the semiconductor device according to claim 1, wherein: the support plate is made of mullite;
the supporting plate is provided with mounting columns which are arranged at equal intervals and angles;
the supporting block is provided with a jack which is longitudinally inserted with the mounting column.
4. The mullite high-temperature resistant jig for high-temperature baking of the ceramic part of the semiconductor device according to claim 3, wherein: the cross section area of the mounting column is polygonal.
5. The mullite high-temperature resistant jig for high-temperature baking of the ceramic part of the semiconductor device according to claim 1, wherein: the support plate is made of mullite;
the supporting block is connected with the supporting plate in a sliding mode in the radial direction;
and the supporting plate is provided with a positioning identification line for positioning when the supporting block slides in the radial direction.
6. The mullite high-temperature resistant jig for high-temperature baking of the ceramic part of the semiconductor device according to claim 5, wherein: the positioning mark lines are scale lines matched with the number of the supporting blocks, and the scale lines correspond to the supporting blocks one by one and are arranged adjacently;
the length direction of the scale mark is parallel to the length direction of the supporting block.
7. The mullite high-temperature resistant jig for high-temperature baking of the ceramic part of the semiconductor device according to claim 1, wherein: the center of the supporting plate is rotatably connected with a rotating shaft;
the supporting block is connected with the supporting plate in a sliding mode in the radial direction;
the supporting block is hinged with one end of a first connecting rod, the other end of the first connecting rod is hinged with one end of a second connecting rod, and the other end of the second connecting rod is fixed on the periphery of the rotating shaft;
the longitudinal height of the rotating shaft is lower than that of the supporting block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022609406.3U CN213841712U (en) | 2020-11-12 | 2020-11-12 | Mullite high-temperature-resistant jig for high-temperature baking of ceramic part of semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022609406.3U CN213841712U (en) | 2020-11-12 | 2020-11-12 | Mullite high-temperature-resistant jig for high-temperature baking of ceramic part of semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213841712U true CN213841712U (en) | 2021-07-30 |
Family
ID=77015675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022609406.3U Active CN213841712U (en) | 2020-11-12 | 2020-11-12 | Mullite high-temperature-resistant jig for high-temperature baking of ceramic part of semiconductor equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213841712U (en) |
-
2020
- 2020-11-12 CN CN202022609406.3U patent/CN213841712U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN213841712U (en) | Mullite high-temperature-resistant jig for high-temperature baking of ceramic part of semiconductor equipment | |
| CN213231446U (en) | Hydraulic lifting platform convenient to assemble and disassemble | |
| US3948594A (en) | Ceramic refractory setter | |
| CN103111783A (en) | Circular ring manufacturing tool | |
| CN207287961U (en) | A kind of dispensing tool fixture for being used to take ring with figuratum big glass sheet | |
| CN210335785U (en) | Product internal stay positioning die | |
| CN217781260U (en) | Gas nitriding tool suitable for different-diameter disc heat treatment products | |
| CN210064408U (en) | Rotation angle adjustable elevating system | |
| CN106424565A (en) | Clamp for repairing guider wax pattern | |
| CN108714863B (en) | Clamping device is used in mould processing convenient to connect | |
| CN103046733A (en) | Template supporting seat and supporting device with same | |
| CN201552316U (en) | Cylindrical workpiece radial equating-hole punching device | |
| CN212736329U (en) | Surface punching device for medical identification wrist strap | |
| CN211760330U (en) | Flange leveling machine | |
| CN211106645U (en) | Steel seal processing device | |
| CN210525033U (en) | Rotor support strutting arrangement | |
| CN111252360B (en) | Combined turnover device for building intelligent light and sound equipment construction | |
| CN211174146U (en) | Strutting arrangement is used in underground construction | |
| CN208917432U (en) | Circular knitting machine needle exchange collet chuck tool | |
| CN216003867U (en) | Novel container floor | |
| CN207564453U (en) | A kind of improved wood skin rack | |
| CN207534680U (en) | A kind of concentric clamping device of multi-work piece | |
| CN204159970U (en) | A kind of screw mandrel pin assembly for cutting machine | |
| CN211768600U (en) | Transfer chain revolving stage | |
| CN205254607U (en) | A frock for heat exchange tube trompil |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |