CN213801843U

CN213801843U - Feeding device

Info

Publication number: CN213801843U
Application number: CN202021508427.XU
Authority: CN
Inventors: 许玉斌
Original assignee: Xiamen Tongfu Microelectronics Co ltd
Current assignee: Xiamen Tongfu Microelectronics Co ltd
Priority date: 2020-07-27
Filing date: 2020-07-27
Publication date: 2021-07-27
Anticipated expiration: 2030-07-27

Abstract

The application discloses a feeding device, which comprises a carrying device arranged in a horizontal sliding mode, wherein a feeding area and a working area are adjacently arranged in the sliding direction of the carrying device, and the carrying device is positioned above the feeding area and the working area; the conveying device is arranged in a lifting manner or the feeding area and the working area are arranged in a lifting manner, and the conveying device is used for conveying materials from the feeding area to the working area; can place the magazine in hanging the basket automatically through loading attachment, reduce personnel's operational risk, increase wafer security.

Description

Feeding device

Technical Field

The invention relates to the field of semiconductor manufacturing, in particular to a feeding device.

Background

Among the semiconductor manufacturing equipment, need set up the product in the magazine, set up the magazine in hanging the basket again, then will hang the basket setting and process inside the equipment, when the magazine setting that will hold the product at present is hanging the basket in, adopt manual operation, need artifical both hands to embrace to get the magazine and place in hanging the basket, because hang between basket and the magazine space limited, collide with or the magazine drops when getting easily, make the product impaired, and artifical intensity of labour is big.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned drawbacks and deficiencies of the prior art, it would be desirable to provide a loading device.

In a first aspect, the utility model provides a feeding device, which comprises a carrying device arranged in a horizontal sliding manner, wherein a feeding area and a working area are adjacently arranged along the sliding direction of the carrying device, and the carrying device is positioned above the feeding area and the working area; the conveying device is arranged in a lifting mode or the feeding area and the working area are arranged in a lifting mode, and the conveying device is used for conveying materials to the working area from the feeding area.

Further, the feeding area is provided with a first sensing device, the working area is provided with a second sensing device, and the first sensing device and the second sensing device are used for sensing whether materials are placed in the feeding area and the working area.

Furthermore, the first induction devices and the second induction devices are at least two, and the at least two first induction devices are arranged from the edge of the feeding area to the central area at intervals; to detect materials of different sizes;

at least two second induction devices are arranged from the edge of the working area to the central area at intervals; to detect different sized materials.

Furthermore, the first sensing device and the second sensing device both comprise a travel switch and a photoelectric switch.

The carrying device comprises a first guide piece and a support frame, wherein the first guide piece is horizontally arranged, the support frame is slidably arranged on the first guide piece, the support frame comprises a vertical beam and a cross beam, the vertical beam is slidably arranged on the first guide piece, the cross beam extends to the feeding area and the working area, and the carrying device is arranged below the cross beam; the carrying device slides horizontally on the first guide together with the support frame.

Furthermore, a lifting device is arranged below the cross beam, the carrying device is connected to the lifting device, and the lifting device can drive the carrying device to move in the vertical direction.

Further, the lifting device comprises a pneumatic cylinder and a hydraulic cylinder.

Further, the vertical beam is provided with a guide part vertically arranged, a sliding part arranged on the guide part in a sliding way, and a driving device capable of driving the sliding part to slide along the guide part; the cross beam is fixedly connected with the sliding piece.

Furthermore, the carrying device is a clamping jaw device, the clamping jaw comprises a horizontally arranged guide part, two clamping jaws arranged on the guide part in a relatively sliding manner, and a first driving device arranged between the two clamping jaws, and the first driving device can drive the two clamping jaws to slide along the guide part.

The direction adjusting device comprises a rotating shaft vertically penetrating through the cross beam and a second driving device which is in driving connection with the rotating shaft and is used for driving the rotating shaft to rotate; the upper end of the rotating shaft is provided with a first positioning surface, and the first positioning surface is in clearance fit with the cross beam; the rotating shaft is provided with a connecting part extending out of the lower surface of the cross beam, and the carrying device or the lifting device is connected to the connecting part.

Advantageous effects

The application discloses a feeding device, which comprises a carrying device arranged in a horizontal sliding mode, wherein a feeding area and a working area are adjacently arranged in the sliding direction of the carrying device, and the carrying device is positioned above the feeding area and the working area; the carrying device is arranged in a lifting mode or the feeding area and the working area are arranged in a lifting mode, the carrying device is used for carrying materials from the feeding area to the working area, the material box can be automatically placed in the hanging basket through the feeding device, operation risks of personnel are reduced, and wafer safety is improved.

Drawings

Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:

fig. 1 is a schematic structural view of the feeding device of the present invention;

FIG. 2 is a schematic structural view of one embodiment of a support frame;

FIG. 3 is a schematic view of the structure of the adjusting device;

fig. 4 is a schematic structural view of the jaw device.

Detailed Description

The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and are not limiting of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.

Referring to fig. 1, in a first aspect, the utility model provides a loading device, handling device 10 including the horizontal slip setting is followed the gliding direction of handling device 10 is adjacent to be provided with material loading district 20 and workspace 30, handling device 10 is located the top of material loading district 20, workspace 30, handling device is liftable set up or material loading district, workspace are liftable set up, handling device 10 is used for with the material by material loading district 20 carry extremely workspace 30.

Specifically, the feeding device provided by the application can be used for a groove type etching machine, the working area 30 is a working area inside the groove type etching machine, when the groove type etching machine works, a wafer needs to be placed in a material box, the material box is placed in a hanging basket, the hanging basket is arranged in the working area 30 fixed inside the groove type etching machine, the application arranges a horizontally movable carrying device 10 above the working area 30, a feeding area 20 is arranged adjacent to the working area 30 in the sliding direction of the carrying device 10, and the feeding area 20 can be arranged inside the etching machine or outside the etching machine; the whole work of the feeding device becomes: the hanging basket is arranged in the feeding area 20, at the moment, the feeding area 20 rises or the carrying device 10 descends, the carrying device 10 is made to contact with the hanging basket, the hanging basket is fixed, then the carrying device 10 rises or the feeding area 20 descends, the hanging basket is separated from the feeding area 20, the carrying device 10 horizontally slides to the working area 30, at the moment, the carrying device 10 descends or the working area 30 rises, the hanging basket is placed in the working area 30, and the carrying device 10 loosens the hanging basket, so that the hanging basket is placed in the working area 30; then place the magazine that will place the wafer in material loading district 20, repeat above-mentioned step, place the magazine in hanging the basket, set up the magazine in hanging the basket through loading attachment to will hang the basket and carry to the inside of equipment, saved the manpower, also avoided placing the risk that the magazine brought because of the manual work.

Referring to fig. 1, further, the feeding area 20 is provided with a first sensing device 21, the working area 30 is provided with a second sensing device 31, and the first sensing device 21 and the second sensing device 31 are used for sensing whether materials are placed in the feeding area 20 and the working area 30.

Specifically, the first sensing device 21 and the second sensing device 31 are arranged for detection, so that the feeding device can automatically identify, and further, the material can be automatically conveyed.

Referring to fig. 1, further, at least two first induction devices 21 and at least two second induction devices 31 are arranged, and the at least two first induction devices 21 are arranged at intervals from the edge of the feeding area 20 to the central area; to detect materials of different sizes;

at least two second induction devices 3 are arranged from the edge of the working area 30 to the central area at intervals; to detect different sized materials.

Specifically, the arrangement mode of the at least two first induction devices 21 and the at least two second induction devices 31 can be set according to the sizes of the cradle and the magazine, when the magazine is placed in the feeding area, the first induction devices 21 located in the middle area can be triggered, and when the cradle is placed in the feeding area 20, all the first induction devices 21 or the first induction devices 21 located near the edge position can be triggered, so that the type of a product can be automatically identified, and the magazine and the cradle can be automatically identified; the working principle of the second sensing device 31 is similar to that of the first sensing device, and is not described in detail here.

Further, the first sensing device 21 and the second sensing device 22 each include a travel switch and a photoelectric switch.

Referring to fig. 1, further, the carrying device 10 includes a first guide 51 horizontally disposed, and a supporting frame 40 slidably disposed on the first guide, the carrying device 10 is disposed on the supporting frame 40, and the carrying device 10 and the supporting frame 40 horizontally slide on the first guide 51.

Specifically, the feeding device comprises a guide rail 31 horizontally arranged on one side of the feeding area 20 and the working area 30, a sliding block 511 is arranged on the guide rail 31 in a sliding manner, a screw rod 52 arranged in parallel with the guide rail 31, a screw rod nut 521 matched with the screw rod 52, and a connecting plate 53 fixedly connected with the screw rod nut 521 and the sliding block 511, the supporting frame 42 is fixedly arranged on the connecting plate 53, and during operation, the servo motor 54 drives the screw rod 52 to rotate so as to drive the supporting frame 42 to slide along the guide rail 51.

Referring to fig. 1, further, the supporting frame 40 has a cross beam 41 extending to the loading area 20 and the working area 30, a lifting device 60 is disposed below the cross beam 41, the carrying device 10 is connected to the lifting device 60, and the lifting device 60 can drive the carrying device 10 to move in a vertical direction.

As a preferred embodiment, the carrying device 10 is configured to be liftable, and is specifically configured to be provided with a lifting device 60 below the cross beam 41, the carrying device 10 is provided below the lifting device 60, and the carrying device 10 is driven to move vertically by the lifting device 60.

Further, the lifting device 60 includes a pneumatic cylinder and a hydraulic cylinder.

Referring to fig. 2, the supporting frame 40 includes a vertical beam 42 slidably disposed on the first guiding member 51, and a cross beam 41 extending to the loading area 20 and the working area 30, and the carrying device 10 is disposed below the cross beam;

the vertical beam 42 has a vertically arranged guide portion 421, the guide portion 421 is slidably provided with a sliding member 422, and a driving device 423 capable of driving the sliding member 422 to slide along the guide portion 421, and the cross beam 41 is fixedly connected to the sliding member 422.

As another way to realize the above, the vertical movement of the carrying device 10 can be realized by providing the guide portion 421 on the vertical beam 42, specifically, the guide portion 421 can be a guide plate or a linear guide rail, and the driving device can be a pneumatic cylinder, a hydraulic cylinder, or a servo motor.

Referring to fig. 4, further, the carrying device 10 is a clamping jaw device, the clamping jaw includes a horizontally disposed guide 12, two clamping jaws 11 disposed on the guide 12 in a relatively sliding manner, and a first driving device 13 disposed between the two clamping jaws 11, the first driving device 13 can drive the two clamping jaws 11 to slide along the guide 12, and the clamping jaws 11 are driven by the first driving device 13 to achieve the purpose of clamping the magazine and hanging the basket.

Referring to fig. 3, further, the clamping device further includes a direction adjusting device 70, the direction adjusting device 70 is used for adjusting the clamping direction of the clamping jaw device, and the direction adjusting device 70 includes a rotating shaft 71 vertically penetrating through the cross beam 41, and a second driving device 72 in driving connection with the rotating shaft 71 and used for driving the rotating shaft 71 to rotate; the upper end of the rotating shaft 71 is provided with a first positioning surface 711, and the first positioning surface 711 is in clearance fit with the cross beam 41; the rotating shaft 71 has a connecting portion 712 extending out of the lower surface of the cross beam 41, the carrying device 10 or the lifting device 60 is connected to the connecting portion 712, specifically, the rotating shaft 71 is driven to rotate by the second driving device 72 to drive the rotating shaft 71 to rotate, the rotating shaft 71 drives the clamping jaw device 10 to rotate, so as to adjust the clamping direction of the clamping jaw device 10, the second driving device 72 can be selected from a servo motor, an output shaft of the servo motor can be directly connected with the rotating shaft 71 to realize driving, or can be arranged on the cross beam 41 to drive the rotating shaft 71 to rotate by a transmission device, the transmission device can be a timing belt, a gear transmission mechanism, etc., as an optional implementation mode, referring to fig. 3, the rotating shaft 71 is a step shaft, a step surface 711 of the step shaft abuts against the upper surface of the cross beam 41 to form a disengagement-prevention fit, and the connecting portion 712 of the rotating shaft 71 is connected with a gear 74, the driving device 72 is disposed on the beam 41, an output shaft thereof is provided with a driving gear 73, the driving gear 73 is in meshing transmission with the gear 74, and the clamping jaw device 10 or the lifting device 60 is connected with the connecting part 712 through the gear 74.

The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by those skilled in the art that the scope of the invention herein disclosed is not limited to the particular combination of features described above, but also encompasses other arrangements formed by any combination of features described above or equivalents thereof without departing from the inventive concept. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.

Claims

1. A feeding device is characterized by comprising a carrying device arranged in a horizontal sliding mode, wherein a feeding area and a working area are adjacently arranged along the sliding direction of the carrying device, and the carrying device is positioned above the feeding area and the working area; the conveying device is arranged in a lifting mode or the feeding area and the working area are arranged in a lifting mode, and the conveying device is used for conveying materials to the working area from the feeding area.

2. The feeding device as claimed in claim 1, wherein the feeding area is provided with a first sensing device, the working area is provided with a second sensing device, and the first sensing device and the second sensing device are used for sensing whether materials are placed in the feeding area and the working area.

3. The feeding device according to claim 2, wherein at least two first induction devices are arranged, and the at least two first induction devices are arranged from the edge of the feeding area to the central area at intervals; to detect materials of different sizes;

4. The feeding device as claimed in claim 3, wherein the first and second sensing devices each comprise a travel switch and a photoelectric switch.

5. A loading device as claimed in claim 3 or 4, characterized by comprising a first guide member arranged horizontally, a support frame arranged on the first guide member in a sliding manner, wherein the support frame comprises a vertical beam arranged on the first guide member in a sliding manner, and a cross beam extending to the loading area and the working area, and the carrying device is arranged below the cross beam; the carrying device slides horizontally on the first guide together with the support frame.

6. A loading device as claimed in claim 5, wherein a lifting device is arranged below the cross beam, the carrying device is connected to the lifting device, and the lifting device can drive the carrying device to move in the vertical direction.

7. A loading device according to claim 6, wherein said lifting means comprises a pneumatic cylinder, a hydraulic cylinder.

8. The loading device according to claim 5, wherein the vertical beam is provided with a vertically arranged guide part, a sliding part arranged on the guide part in a sliding way, and a driving device capable of driving the sliding part to slide along the guide part; the cross beam is fixedly connected with the sliding piece.

9. A loading device according to claim 5, wherein said carrying device is a jaw device, said jaws comprise a horizontally arranged guide, two jaws slidably arranged on said guide, and a first driving device arranged between said two jaws, said first driving device driving said two jaws to slide along said guide.

10. The feeding device according to claim 5, further comprising a direction adjusting device, wherein the direction adjusting device comprises a rotating shaft penetrating through the cross beam, and a second driving device in driving connection with the rotating shaft and used for driving the rotating shaft to rotate; the upper end of the rotating shaft is provided with a first positioning surface, and the first positioning surface is in clearance fit with the cross beam; the rotating shaft is provided with a connecting part extending out of the lower surface of the cross beam, and the carrying device or the lifting device is connected to the connecting part.