CN213765549U - Large-stroke single-degree-of-freedom positioning platform - Google Patents

Large-stroke single-degree-of-freedom positioning platform Download PDF

Info

Publication number
CN213765549U
CN213765549U CN202022598649.1U CN202022598649U CN213765549U CN 213765549 U CN213765549 U CN 213765549U CN 202022598649 U CN202022598649 U CN 202022598649U CN 213765549 U CN213765549 U CN 213765549U
Authority
CN
China
Prior art keywords
displacement output
platform
output platform
degree
outer frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202022598649.1U
Other languages
Chinese (zh)
Inventor
尹自强
翁川
柴宁
段彬
彭坤
孟松涛
姚建华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong University of Technology
Original Assignee
Guangdong University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong University of Technology filed Critical Guangdong University of Technology
Priority to CN202022598649.1U priority Critical patent/CN213765549U/en
Application granted granted Critical
Publication of CN213765549U publication Critical patent/CN213765549U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The application discloses a large-stroke single-degree-of-freedom positioning platform, which comprises a flexible hinge, a displacement output platform, a driving device and a feedback device; the flexible hinge comprises at least four outer frames and at least eight flexible plates; the displacement output platform is arranged in the outer frame, and at least four connecting stations circumferentially distributed around the central axis of the displacement output platform are arranged on the outer peripheral wall of the displacement output platform; each connecting station is connected with the outer frame through at least two flexible plates; the output end of the driving device is connected with the displacement output platform; the fixed end of the driving device is connected with the outer frame; the feedback device is arranged on the displacement output platform and used for feeding back the stroke distance of the displacement output platform. The positioning platform can guarantee that the positioning platform has a large working stroke, and meanwhile, the natural frequency and the rigidity of the positioning platform in the non-movement direction are effectively improved.

Description

Large-stroke single-degree-of-freedom positioning platform
Technical Field
The application relates to the field of ultra-precision machining positioning platforms, in particular to a large-stroke single-degree-of-freedom positioning platform.
Background
With the continuous development of science and technology, ultra-precision machining and measurement are more and more emphasized by people. Meanwhile, in many fields of ultra-precision machining, the positioning is required to be high in precision and repeatability; the flexible mechanism is widely applied to positioning of various ultra-precision machining and measurement due to the outstanding advantages in this respect.
At present, the high-precision positioning platform has many driving types, such as a voice coil motor type, a piezoelectric type, an electromagnetic type and the like, and also has various structures, such as a parallel four-edge type, a multi-stage amplification type and the like. However, these positioning platforms are complex in structure, or it is difficult to achieve a large movement range while having high rigidity and high natural frequency in a non-movement direction.
SUMMERY OF THE UTILITY MODEL
In view of the above, an object of the present invention is to provide a large-stroke single-degree-of-freedom positioning platform, which can achieve a large working stroke and has high natural frequency and stiffness in the non-motion direction.
In order to achieve the technical purpose, the application provides a large-stroke single-degree-of-freedom positioning platform which comprises a flexible hinge, a displacement output platform, a driving device and a feedback device;
the flexible hinge comprises at least four outer frames and at least eight flexible plates;
the displacement output platform is arranged in the outer frame, and at least four connecting stations which are circumferentially distributed around the central axis of the displacement output platform are arranged on the outer peripheral wall of the displacement output platform;
each connecting station is connected with the outer frame through at least two flexible plates;
the output end of the driving device is connected with the displacement output platform;
the fixed end of the driving device is connected with the outer frame;
the feedback device is arranged on the displacement output platform and used for feeding back the stroke distance of the displacement output platform.
Preferably, the feedback device comprises a first base plate, a second base plate, a grating ruler reading head and a grating ruler body;
the grating ruler body is arranged on the displacement output platform;
the grating ruler reading head is arranged on the second base plate and is positioned in the reading range of the grating ruler body;
the second base plate is fixedly connected with the outer frame through the first base plate.
Preferably, the displacement output platform is specifically provided with four connecting stations.
Preferably, the four connecting stations are uniformly distributed around the displacement output platform in a cross-shaped circumference.
Preferably, the flexible hinge specifically comprises four outer frames and eight flexible plates;
each outer frame is connected with the displacement output platform through two flexible plates arranged at intervals.
Preferably, the two flexible boards connected to each outer frame are respectively disposed at two end portions of the displacement output platform.
Preferably, the driving device comprises a motor and a coil fixing plate;
the motor is connected with the displacement output platform through the coil fixing plate.
Preferably, the motor is embodied as a voice coil motor.
Preferably, the tool also comprises a tool rest;
the tool rest is arranged on the displacement output platform.
Preferably, the output ends of the tool rest and the driving device are respectively and correspondingly connected to two symmetrical ends of the displacement output platform.
According to the technical scheme, the displacement output platform comprises at least four outer frames and at least eight flexible plates, and at least four connecting stations circumferentially distributed around the central axis of the displacement output platform are arranged on the displacement output platform; the outer frame is connected with the displacement output platform through the flexible plate, and meanwhile, the end part of the outer frame is fixedly connected with the non-output end of the driving device, so that the positioning platform can be ensured to have a larger working stroke, the inherent frequency and the rigidity of the positioning platform in the non-movement direction can be effectively improved, and the resonance hazard of the positioning platform in the high-frequency reciprocating motion can be effectively reduced; the positioning platform is also provided with a feedback device, so that the stroke distance of the displacement output platform can be fed back to the control system in time, and the output position data of the displacement output platform can be conveniently and timely adjusted.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise.
Fig. 1 is a schematic view of an overall structure of a large-stroke single-degree-of-freedom positioning platform provided in an embodiment of the present application;
FIG. 2 is a schematic diagram of a flexible hinge structure in a large-stroke single-degree-of-freedom positioning platform provided in an embodiment of the present application;
in the figure: 1. a flexible hinge; 2. a motor fixing plate; 3. a motor; 4. a first backing plate; 5. a second backing plate; 6. a grating ruler reading head; 7. a grating ruler body; 8. a tool holder; 9. a flexible board; 10. a displacement output platform; 11. and (4) an outer frame.
Detailed Description
The technical solutions of the embodiments of the present application will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are some, but not all embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the scope of the present claims.
In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the embodiments of the present application and simplifying the description, but do not indicate or imply that the referred devices or elements must have specific orientations, be configured in specific orientations, and operate, and thus, should not be construed as limiting the embodiments of the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present application, it should be noted that the terms "mounted," "connected," and "connected" are used broadly and are defined as, for example, a fixed connection, an exchangeable connection, an integrated connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection through an intermediate medium, and a communication between two elements, unless otherwise explicitly stated or limited. Specific meanings of the above terms in the embodiments of the present application can be understood in specific cases by those of ordinary skill in the art.
The embodiment of the application discloses a large-stroke single-degree-of-freedom positioning platform.
Referring to fig. 1 to 2, a large-stroke single-degree-of-freedom positioning platform provided in the embodiment of the present application includes a flexible hinge 1, a displacement output platform 10, a driving device, and a feedback device; the flexible hinge 1 comprises at least four outer frames 11 and at least eight flexible plates 9; the displacement output platform 10 is arranged in the outer frame 11, and at least four connecting stations which are uniformly distributed around the circumference of the central axis of the displacement output platform are arranged on the outer peripheral wall of the displacement output platform; each connecting station is connected with the outer frame 11 through at least two flexible plates 9; the output end of the driving device is connected with the displacement output platform 10; the fixed end of the driving device is connected with the outer frame 11; the feedback device is installed on the displacement output platform 10 and used for feeding back the stroke distance of the displacement output platform 10.
Specifically, the displacement output platform 10 is installed at the output end of the driving device, and the outer frames 11 are fixedly connected to the non-output end, i.e. the fixed end, of the driving device, for example, in this embodiment, a plurality of outer frames 11 are connected to the same fixed plate, and the fixed plate is connected to the motor housing of the driving device, so that when the driving device transmits the driving force to the output platform, the flexible hinge 1 formed by the outer frames 11 and the flexible plate 9 can improve the natural frequency and the rigidity of the positioning platform in the non-movement direction; and the plurality of pairs of outer frames 11 and flexible hinges are distributed around the circumference of the displacement output platform 10, so that the rigidity and the natural frequency of the platform in the non-motion direction are further improved.
Wherein, the driving device can be a linear motor, a voice coil motor and the like; the feedback device may be a position sensor such as a capacitance sensor or a laser interferometer, and is not particularly limited.
The above is the first embodiment provided in the present application, and the following is the second embodiment provided in the present application, please refer to fig. 1 to fig. 2 specifically.
A large-stroke, single degree of freedom positioning platform comprising: the flexible hinge 1, the displacement output platform 10, the driving device and the feedback device; the flexible hinge 1 comprises at least four outer frames 11 and at least eight flexible plates 9; the displacement output platform 10 is arranged in the outer frame 11, and at least four connecting stations which are uniformly distributed around the circumference of the central axis of the displacement output platform are arranged on the outer peripheral wall of the displacement output platform; each connecting station is connected with the outer frame 11 through at least two flexible plates 9; the output end of the driving device is connected with the displacement output platform 10; the fixed end of the driving device is connected with the outer frame 11; the feedback device is installed on the displacement output platform 10 and used for feeding back the stroke distance of the displacement output platform 10.
Further, in this embodiment, the feedback device is a grating ruler, and specifically includes a first backing plate 4, a second backing plate 5, a grating ruler reading head 6, and a grating ruler body 7; the ruler body 7 of the grating ruler is arranged on the displacement output platform 10; the grating ruler reading head 6 is arranged on the second base plate 5 and is positioned in the reading range of the grating ruler body 7; the second pad 5 is fixedly connected with an outer frame 11 through the first pad 4.
Specifically, the positioning platform includes at least four outer frames, and a feedback device connected to the displacement output platform 10 or the tool rest 8 may be disposed on each outer frame 11. In this embodiment, the feedback device is one, wherein the first pad 4 and the second pad 5 are provided to facilitate the fixed connection of the grating ruler reading head 6 and the outer frame 11, and only one pad may be used in actual operation, specifically, the grating ruler reading head 6 may be fixedly mounted on the outer frame 11; the ruler body 7 of the grating ruler transmits the stroke distance of the tool rest 8 to the controller in real time through a data line.
Further, in the present embodiment, the displacement output platform 10 is specifically provided with four connecting stations. The four connecting stations are uniformly distributed around the displacement output platform in a cross-shaped circumference. Each outer frame 11 is connected with the displacement output platform 10 through two flexible plates 9 arranged at intervals. Two flexible boards 9 connected to each outer frame 11 are respectively disposed at two end positions of the displacement output platform 10.
Specifically, please refer to the following table one, the frequency conditions of each direction, in which only two connection stations are arranged and distributed in a straight line around the displacement output platform 10, are compared with the simulation data of the frequency conditions of each direction, in which four connection stations are arranged and distributed in a circumferential cross shape and symmetrically around the displacement output platform 10 in this embodiment:
Figure DEST_PATH_GDA0003108132270000051
watch 1
Referring to fig. 2, the direction indicated by the arrow in fig. 2 is the horizontal movement direction of the displacement output platform 10; it can be seen from the simulation comparison data in table one that the natural frequency of the cross-shaped flexible hinge in the present embodiment, in which the four connection stations are symmetrically distributed in a circumferential cross shape around the displacement output platform 10, i.e., in the non-moving direction, is significantly improved compared to the case where only two connection stations are in a straight shape.
Specifically, in the present embodiment, the displacement output platform includes four outer frames 11 and eight flexible boards 9, and each outer frame 11 is connected to two flexible boards 9 disposed near two ends of the displacement output platform 10; in practical applications, the stiffness and natural frequency of the system can be further increased by increasing the number of flexible plates.
Further, the driving device comprises a motor 3 and a coil fixing plate 2; the motor 3 is connected with the displacement output platform 10 through the coil fixing plate 2.
Further, in the present embodiment, the motor 3 is specifically a voice coil motor.
Further, the output ends of the tool post 8 and the driving device are respectively and correspondingly connected to two symmetrical ends of the displacement output platform 10.
It should be noted that the above-mentioned embodiments are only preferred embodiments of the present application, and not intended to limit the present invention, and although the present application has been described in detail with reference to the examples, it will be apparent to those skilled in the art that modifications can be made to the technical solutions described in the foregoing examples, or equivalent substitutions of some technical features can be made, any modifications, equivalents, improvements, etc. within the spirit and principle of the present application shall be included in the scope of the present application.

Claims (8)

1. A large-stroke single-degree-of-freedom positioning platform is characterized by comprising a flexible hinge, a displacement output platform, a driving device and a feedback device;
the flexible hinge comprises at least four outer frames and at least eight flexible plates;
the displacement output platform is arranged in the outer frame, and at least four connecting stations which are circumferentially distributed around the central axis of the displacement output platform are arranged on the outer peripheral wall of the displacement output platform;
each connecting station is connected with the outer frame through at least two flexible plates;
the output end of the driving device is connected with the displacement output platform;
the fixed end of the driving device is connected with the outer frame;
the feedback device is arranged on the displacement output platform and used for feeding back the stroke distance of the displacement output platform.
2. The large-stroke single-degree-of-freedom positioning platform according to claim 1, wherein the displacement output platform is provided with four connecting stations;
the flexible hinge specifically comprises four outer frames and eight flexible plates;
the four connecting stations are uniformly distributed around the displacement output platform in a cross-shaped circumference.
3. The large-stroke single-degree-of-freedom positioning platform according to claim 2, wherein the two flexible plates connected to each outer frame are respectively disposed at two end positions of the displacement output platform.
4. The large-stroke single-degree-of-freedom positioning platform according to claim 1, wherein the feedback device comprises a first base plate, a second base plate, a grating scale reading head and a grating scale body;
the grating ruler body is arranged on the displacement output platform;
the grating ruler reading head is arranged on the second base plate and is positioned in the reading range of the grating ruler body;
the second base plate is fixedly connected with the outer frame through the first base plate.
5. The large-stroke single-degree-of-freedom positioning platform according to claim 1, wherein the driving device comprises a motor and a coil fixing plate;
the motor is connected with the displacement output platform through the coil fixing plate.
6. The large-stroke single-degree-of-freedom positioning platform according to claim 5, wherein the motor is a voice coil motor or a linear motor.
7. The large-stroke single-degree-of-freedom positioning platform according to claim 1, further comprising a tool post;
the tool rest is arranged on the displacement output platform.
8. The large-stroke single-degree-of-freedom positioning platform according to claim 7, wherein the tool rest and the output end of the driving device are respectively and correspondingly connected to two symmetrical ends of the displacement output platform.
CN202022598649.1U 2020-11-11 2020-11-11 Large-stroke single-degree-of-freedom positioning platform Active CN213765549U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022598649.1U CN213765549U (en) 2020-11-11 2020-11-11 Large-stroke single-degree-of-freedom positioning platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022598649.1U CN213765549U (en) 2020-11-11 2020-11-11 Large-stroke single-degree-of-freedom positioning platform

Publications (1)

Publication Number Publication Date
CN213765549U true CN213765549U (en) 2021-07-23

Family

ID=76915313

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022598649.1U Active CN213765549U (en) 2020-11-11 2020-11-11 Large-stroke single-degree-of-freedom positioning platform

Country Status (1)

Country Link
CN (1) CN213765549U (en)

Similar Documents

Publication Publication Date Title
JP2019522186A (en) Small 6-axis force sensor and torque sensor
CN101807010A (en) Nano-precision six-freedom-degree magnetic suspension jiggle station and application
CN102880013B (en) Reticle stage worktable
CN107393599A (en) Integrate the quick deflection platform of two dimension and method of sensing unit and confinement element
CN111900896A (en) Air-float motion platform
CN213765549U (en) Large-stroke single-degree-of-freedom positioning platform
CN113059537A (en) Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench
CN112247920A (en) Large-stroke single-degree-of-freedom positioning platform
CN219394957U (en) Novel motor lower spring plate structure
EP1612921A1 (en) Ultrasonic float-up device
JP2002022867A (en) X-y stage
CN113175871B (en) Positioning platform equipment
CN111490642A (en) Displacement device based on Hall effect sensor and planar motor
KR20170129046A (en) A Stage Device
CN219733933U (en) Multifunctional flexible hinge
JP2005150615A (en) Stage and method of controlling stage
CN107818813B (en) Two-dimensional nanometer flexible motion platform
CN101956762B (en) II-type gas static pressure guide rail for horizontal use
CN217157074U (en) Balance mass system
CN106644340B (en) A kind of angle vibration table
CN218169500U (en) Positioning device for automobile parts
CN110370228B (en) Large-stroke flexible hinge platform
CN219575604U (en) Two-degree-of-freedom motion platform based on flexible hinge
CN113867106B (en) Mask table vibration isolation device of lithography machine
CN212371537U (en) Positioning mechanism and machining device

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant