CN213749124U - Epitaxial process cooling blower's for cavity test fixing device - Google Patents
Epitaxial process cooling blower's for cavity test fixing device Download PDFInfo
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- CN213749124U CN213749124U CN202023253258.2U CN202023253258U CN213749124U CN 213749124 U CN213749124 U CN 213749124U CN 202023253258 U CN202023253258 U CN 202023253258U CN 213749124 U CN213749124 U CN 213749124U
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- cooling fan
- tested
- circulating air
- heat exchanger
- fixed
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Abstract
The utility model discloses a test fixing device of a cooling fan for an epitaxial process cavity, a base is fixed at the bottom of a bracket, a footstock is fixed at the top, a cooling fan to be tested, a heat exchanger and a controller are fixed on the footstock, a first circulating air duct is fixed on the base, a second circulating air duct and a third circulating air duct are respectively fixedly communicated with the two sides of the first circulating air duct in the length direction, the top of the second circulating air duct is connected with an air outlet of the cooling fan to be tested penetrating the footstock, the top of the third circulating air duct is connected with one side of the heat exchanger penetrating the footstock, the other side of the heat exchanger is connected with an air inlet of the cooling fan to be tested, a vibration sensor is arranged on the cooling fan to be tested, an air speed sensor and a wind pressure sensor are arranged at the air outlet of the cooling fan to be tested, a frequency converter is integrated in the controller, the frequency converter, the vibration sensor, the air speed sensor and the wind pressure sensor are all electrically connected with the controller, the frequency converter is electrically connected with the cooling fan to be tested.
Description
Technical Field
The utility model relates to a cooling blower technical field that epitaxial technology cavity was used especially relates to a cooling blower's for epitaxial technology cavity test fixing device.
Background
The semiconductor epitaxial process requires an extremely high temperature environment, and a cooling fan and an air-water heat exchanger are required to cool the shell of the process chamber and heat components in order to ensure the safety and continuity of production. The continuity of production and the repeated reliability require that the devices used must reach the necessary technical parameters.
In actual production maintenance, only when the spare cooling fan is replaced, the process production can be carried out, whether the spare cooling fan works normally or not can be judged through the reaction of process parameters and the data feedback of the real-time temperature control system, and when the spare cooling fan has defects, the production is interrupted, and the safety production of equipment can be endangered.
SUMMERY OF THE UTILITY MODEL
The utility model discloses problem and not enough to prior art exist provide a epitaxial process cooling blower's for cavity test fixing device.
The utility model discloses a solve above-mentioned technical problem through following technical scheme:
the utility model provides a test fixing device of a cooling fan for an epitaxial process cavity, which is characterized by comprising a bracket, wherein the bottom of the bracket is fixed with a base, the top is fixed with a footstock, the footstock is fixed with the cooling fan to be tested, a heat exchanger and a controller, the base is fixed with a first circulating air channel, the two sides of the first circulating air channel in the length direction are respectively fixedly communicated with a second circulating air channel and a third circulating air channel, the top of the second circulating air channel is connected with an air outlet of the cooling fan to be tested which is arranged on the footstock, the top of the third circulating air channel is connected with one side of the heat exchanger which is arranged on the footstock, the other side of the heat exchanger is connected with an air inlet of the cooling fan to be tested, the cooling fan to be tested is provided with a vibration sensor, the air outlet of the cooling fan to be tested is provided with an air speed sensor and a wind pressure sensor, the controller is internally integrated with a frequency converter, the vibration sensor, the wind speed sensor and the wind pressure sensor are electrically connected with the controller, and the frequency converter is electrically connected with a cooling fan to be measured.
Preferably, the top and bottom middle positions in the first circulating air duct are both provided with guide grooves, one side surface of the first circulating air duct is provided with guide holes, an air damper is embedded between the top and bottom guide grooves, and the guide holes are adjustably penetrated through by the air damper along the width direction of the first circulating air duct.
On the basis of the common knowledge in the field, the above preferred conditions can be combined at will to obtain the preferred embodiments of the present invention.
The utility model discloses an actively advance the effect and lie in:
through this test fixing device, faithfully reflect the technical parameter of spare fan, provide reliable means to the test of spare fan after the maintenance and the state aassessment of spare fan, reduce the production stagnation that the fan problem leads to provide technical data for quartz process cavity temperature control.
Drawings
Fig. 1 is a schematic structural view of a test fixture of a cooling fan for an epitaxial process chamber according to a preferred embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1, this embodiment provides a test fixing device for a cooling fan for an epitaxial process cavity, which includes a support 1, a base 2 is fixed at the bottom of the support 1, a top seat 3 is fixed at the top of the support 1, a cooling fan 4 to be tested, a heat exchanger 5 and a controller 6 are fixed on the top seat 3, a first circulating air duct 7 is fixed on the base 2, a second circulating air duct 8 and a third circulating air duct are respectively fixedly communicated with two sides of the length direction of the first circulating air duct 7, the top of the second circulating air duct 8 is connected with an air outlet of the cooling fan 4 to be tested penetrating through the top seat 3, the top of the third circulating air duct is connected with one side of the heat exchanger 5 penetrating through the top seat 3, the other side of the heat exchanger 5 is connected with an air inlet of the cooling fan 4 to be tested, a vibration sensor is arranged on the cooling fan 4 to be tested, an air outlet of the cooling fan 4 to be tested is provided with an air speed sensor and an air pressure sensor, the integrated converter that has in the controller 6, converter, shock transducer, air velocity transducer and wind pressure sensor all are connected with controller 6 electricity, the converter is connected with 4 electricity of cooling blower that await measuring.
Moreover, the guide way has all been seted up to top and bottom intermediate position department in the first circulation wind channel 7, the guiding hole has been seted up on a side of first circulation wind channel 7, it is equipped with air damper 9 to inlay between top and bottom guide way, air damper 9 wears to establish the guiding hole adjustably along first circulation wind channel width direction. The air quantity of the first circulating air duct 7 is adjusted by adjustably moving the air damper 9, so that the air quantity of the cooling fan 4 to be tested is controlled.
In order to test the performance of the standby fan and ensure the reliability of maintenance in actual production and maintenance, a quantifiable test platform is needed to obtain various technical indexes of the fan in advance, including working current, wind speed, wind pressure and vibration of the fan in operation. Whether the fan is used for process production or not can be judged through data comparison, and reference is provided for maintenance improvement of the fan.
The utility model discloses an integrated test fixing device provides the cooling blower to multiple model (motor operating voltage 208 ~ 480AC, rated frequency 50Hz or 60Hz) and tests.
The utility model discloses in, cooling blower 4, second circulation wind channel 8, first circulation wind channel 7, third circulation wind channel and the heat exchanger 5 that awaits measuring constitute and accomplish the route. The working conditions and parameters of the cooling fan 4 to be tested are set through the control panel, the controller 6 controls the frequency converter to drive the cooling fan 4 to be tested to run, the wind speed sensor detects the wind speed of the cooling fan 4 to be tested, the wind pressure sensor (such as a micro-pressure tester) detects the wind pressure of the cooling fan 4 to be tested, the vibration sensor (such as a balance vibration tester) detects the vibration conditions of the cooling fan 4 to be tested at different rotating speeds, and the controller 6 can provide working current readings of the motor of the cooling fan 4 to be tested at different working frequencies.
Through this test fixing device, faithfully reflect the technical parameter of spare fan, provide reliable means to the test of spare fan after the maintenance and the state aassessment of spare fan, reduce the production stagnation that the fan problem leads to provide technical data for quartz process cavity temperature control.
Although particular embodiments of the present invention have been described above, it will be appreciated by those skilled in the art that these are examples only and that the scope of the present invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the spirit and the principles of the present invention, and these changes and modifications are all within the scope of the present invention.
Claims (2)
1. The test fixing device of the cooling fan for the epitaxial process cavity is characterized by comprising a support, wherein a base and a top seat are fixed at the bottom and the top of the support, a cooling fan to be tested, a heat exchanger and a controller are fixed on the top seat, a first circulating air channel is fixed on the base, a second circulating air channel and a third circulating air channel are respectively and fixedly communicated with the two sides of the length direction of the first circulating air channel, the top of the second circulating air channel is connected with an air outlet of the cooling fan to be tested, which penetrates through the top seat, the top of the third circulating air channel is connected with one side of the heat exchanger, which penetrates through the top seat, the other side of the heat exchanger is connected with an air inlet of the cooling fan to be tested, a vibration sensor is arranged on the cooling fan to be tested, and an air speed sensor and a wind pressure sensor are arranged at the air outlet of the cooling fan to be tested, the controller is internally integrated with a frequency converter, the vibration sensor, the wind speed sensor and the wind pressure sensor are electrically connected with the controller, and the frequency converter is electrically connected with a cooling fan to be measured.
2. The apparatus as claimed in claim 1, wherein the first circulation duct has guide grooves at the middle positions of the top and the bottom, a side surface of the first circulation duct has guide holes, and a damper is inserted between the top and the bottom guide grooves and adjustably penetrates the guide holes along the width direction of the first circulation duct.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023253258.2U CN213749124U (en) | 2020-12-29 | 2020-12-29 | Epitaxial process cooling blower's for cavity test fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023253258.2U CN213749124U (en) | 2020-12-29 | 2020-12-29 | Epitaxial process cooling blower's for cavity test fixing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213749124U true CN213749124U (en) | 2021-07-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023253258.2U Active CN213749124U (en) | 2020-12-29 | 2020-12-29 | Epitaxial process cooling blower's for cavity test fixing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213749124U (en) |
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2020
- 2020-12-29 CN CN202023253258.2U patent/CN213749124U/en active Active
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