CN213739783U - Diffusion furnace with temperature monitoring function - Google Patents
Diffusion furnace with temperature monitoring function Download PDFInfo
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- CN213739783U CN213739783U CN202022319763.6U CN202022319763U CN213739783U CN 213739783 U CN213739783 U CN 213739783U CN 202022319763 U CN202022319763 U CN 202022319763U CN 213739783 U CN213739783 U CN 213739783U
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Abstract
The utility model provides a diffusion furnace with temperature monitoring function, which comprises a furnace body, a quartz tube, a heating component, a heating controller, a temperature detection module, a temperature transmission module and a control module, wherein the temperature detection module comprises a first thermocouple and a second thermocouple, and the temperature transmission module is connected with the first thermocouple and the second thermocouple and is connected with the control module; the control module is connected with the heating controller, and the heating controller is connected with the heating assembly. The real-time temperature of the wall of the quartz tube is detected by the first thermocouple, the real-time temperature of the inside of the quartz tube is detected by the second thermocouple, the real-time temperature of the wall and the inside of the quartz tube is transmitted to the control module by the temperature transmission module, and the control module controls the heating temperature of the heating assembly in the quartz tube through the heating controller according to the real-time temperature of the wall and the inside of the quartz tube, so that the real-time monitoring of the temperature of multiple positions inside and outside the quartz tube can be realized, the diffusion temperature can be controlled visually and accurately, the smooth proceeding of a diffusion process is ensured, and the product percent of pass is improved.
Description
Technical Field
The utility model relates to a semiconductor diffusion process equipment field especially relates to a diffusion furnace with temperature monitoring function.
Background
The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, and is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like. The current diffusion furnace has insufficient monitoring on the temperature in the furnace, and the actual temperature distribution condition in the furnace or the change of the monitored temperature in time cannot be known, so that the diffusion temperature control has deviation, and the diffusion process is adversely affected.
Disclosure of Invention
The utility model aims at solving the shortcoming that exists among the prior art, and the diffusion furnace that has a temperature monitoring function that proposes carries out real-time, accurate monitoring, convenient accurate control diffusion temperature to diffusion furnace temperature.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a diffusion furnace with a temperature monitoring function comprises a furnace body, a quartz tube, a heating assembly, a heating controller, a temperature detection module, a temperature transmission module and a control module.
The quartz tube is arranged inside the furnace body; the heating assembly is arranged on the inner wall of the furnace body and used for heating the inside of the quartz tube in a diffusion process; the heating controller is connected with the heating assembly and used for controlling the heating temperature of the heating assembly.
The temperature detection module comprises a first thermocouple for detecting the temperature of the wall of the tube and a second thermocouple for detecting the temperature in the tube, the first thermocouple is arranged on the furnace body through a first support, and a detection point of the first thermocouple is contacted with the outer wall of the quartz tube; the second thermocouple is arranged on the quartz tube through a second support, the second support is arranged on the outer wall of the tube tail of the quartz tube, the second thermocouple is parallel to the axis of the quartz tube, the second thermocouple extends into the quartz tube, and a plurality of detection points are arranged on the second thermocouple.
The temperature transmission module is respectively connected with the first thermocouple and the second thermocouple, is connected with the control module, and is used for transmitting the temperatures detected by the first thermocouple and the second thermocouple to the control module in real time.
The control module is connected with the heating controller and used for adjusting the heating temperature of the heating assembly according to the real-time temperature of the tube wall of the quartz tube and the real-time temperature in the tube.
Preferably, the number of the first thermocouples is three, the first thermocouples are respectively arranged at a furnace head, a furnace interior and a furnace tail of the furnace body and are used for detecting real-time temperatures of an outer wall pipe orifice of the quartz tube, a pipe interior and a pipe tail.
Preferably, the second thermocouple is provided with three detection points which are respectively used for detecting the real-time temperature of the inner pipe orifice, the pipe middle and the pipe tail of the quartz pipe.
Preferably, the temperature monitoring device further comprises a temperature alarm and a buzzer, wherein the temperature alarm and the buzzer are connected with the control module and used for sending out alarm signals when the temperature is monitored to be abnormal.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses utilize the real-time temperature of first thermocouple detection quartz capsule pipe wall, utilize the inside real-time temperature of second thermocouple detection quartz capsule, utilize temperature transfer module to send the control module with pipe wall and intraductal real-time temperature, control module carries out the comparison with the temperature of predetermineeing with pipe wall and intraductal real-time temperature and calculates, heating element is adjusted to the heating temperature in the quartz capsule to the rethread heating controller, thereby can carry out real-time supervision to the inside and outside temperature of quartz capsule, directly perceived, accurately control diffusion temperature, guarantee that diffusion technology smoothly goes on, improve the product percent of pass.
Drawings
Fig. 1 is a schematic structural diagram of a diffusion furnace with a temperature monitoring function according to an embodiment of the present invention;
in the figure, 10-furnace body, 20-quartz tube, 30-heating component, 40-heating controller, 51-first thermocouple, 52-second thermocouple, 53-first bracket, 54-second bracket, 60-temperature transmission module, 70-control module, 80-temperature alarm and 90-buzzer.
Detailed Description
In order to further understand the objects, structures, features and functions of the present invention, the following embodiments are described in detail.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a diffusion furnace with a temperature monitoring function according to an embodiment of the present invention; the utility model discloses a diffusion furnace with temperature monitoring function of embodiment, including furnace body 10, quartz capsule 20, heating element 30, heating controller 40, temperature detection module, temperature transfer module 60 and control module 70. The quartz tube 20 is arranged in the furnace body 10, and a quartz boat is loaded in the diffusion process; the heating assembly 30 is arranged on the inner wall of the furnace body 10 and used for heating the inside of the quartz tube 20 in the diffusion process; the heating controller 40 is connected to the heating assembly 30 for controlling the heating temperature of the heating assembly 30. In one embodiment, the heating element 30 is a ring-shaped heating wire uniformly distributed on the inner wall of the furnace body 10, and can uniformly heat the quartz tube 20.
The temperature detection module is used for detecting the wall of the quartz tube 20 and the real-time temperature in the quartz tube, the temperature detection module comprises a first thermocouple 51 for detecting the wall temperature of the quartz tube and a second thermocouple 52 for detecting the temperature in the quartz tube, the first thermocouple 51 is arranged on the furnace body 10 through a first support 53, and the detection point of the first thermocouple 51 is contacted with the outer wall of the quartz tube 20; the utility model discloses an in the embodiment, first thermocouple 51 has threely, locates furnace end, stove and the stove tail position of furnace body 10 respectively for detect the outer wall mouth of pipe, the intraductal real-time temperature at the intraductal tail position in quartz capsule 20. However, the present invention is not limited thereto, and in other embodiments, the number and the mounting position of the first thermocouples 51 may be set according to the diffusion process requirement and the temperature control accuracy requirement. For real-time temperature monitoring of the tube wall of the quartz tube 20, whether the diffusion temperature meets the requirement or not can be macroscopically detected, and the phenomenon of unqualified products caused by temperature deviation is reduced.
The second thermocouple 52 is installed on the quartz tube 20 through a second support 54, the second support 54 is arranged on the outer wall of the tube tail of the quartz tube 20, the second thermocouple 52 is parallel to the axis of the quartz tube 20, the second thermocouple 52 extends into the quartz tube 20, and a plurality of detection points are arranged on the second thermocouple 52. In an embodiment of the present invention, the second thermocouple 52 is provided with three detection points for detecting the real-time temperature of the inner pipe orifice, the pipe inside and the pipe end of the quartz tube 20. However, the present invention is not limited thereto, and in other embodiments, the type and the mounting position of the second thermocouple 52 may be set according to the diffusion process requirement and the temperature control accuracy requirement. For real-time temperature monitoring in the quartz tube 20, the temperature distribution condition in the tube can be accurately known in real time, whether the actual diffusion temperature meets the process requirements or not is checked, and the phenomenon of unqualified products caused by temperature deviation is reduced.
The temperature transmission module 60 is connected to the first thermocouple 51 and the second thermocouple 52, respectively, and is connected to the control module 70, and is configured to transmit the temperatures detected by the first thermocouple 51 and the second thermocouple 52 to the control module 70 in real time. In one embodiment, the temperature transmission module 60 includes a temperature acquisition unit for receiving real-time temperature data detected by the first thermocouple 51 and the second thermocouple 52, and a temperature transmission unit for transmitting the real-time temperature data to the control module 70.
The control module 70 is connected to the heating controller 40 for adjusting the heating temperature of the heating assembly 30 according to the real-time wall temperature of the quartz tube 20 and the real-time temperature inside the quartz tube. The control module 70 is preset with set temperature data, during the diffusion process, the control module 70 compares the real-time temperature data detected by the first thermocouple 51 and the second thermocouple 52 with the set temperature data, when the real-time temperature does not meet the process temperature requirement, the control module 70 sends an instruction to the heating controller 40, and the heating controller 40 adjusts the heating temperature of the heating assembly 30, so that the actual temperature meets the process requirement. In an embodiment, the control module 70 may adopt a PID closed-loop automatic control mode to automatically adjust the temperature, however, the present invention is not limited thereto, and in other embodiments, other reasonable control modes may be adopted to control the temperature.
Preferably, the utility model discloses a diffusion furnace with temperature monitoring function still includes temperature alarm 80 and bee calling organ 90, and temperature alarm 80, bee calling organ 90 are connected with control module 70 for send alarm signal when monitoring the temperature anomaly. The control module 70 is preset with a temperature control threshold range of each detection point, temperature abnormality refers to the condition that the actual temperature exceeds the temperature threshold range, when the control module 70 monitors the temperature abnormality, an instruction is sent to the temperature alarm 80 and the buzzer 90, and the temperature alarm 80 and the buzzer 90 send out alarm signals to remind an operator to process in time and eliminate obstacles.
The utility model discloses a diffusion furnace with temperature monitoring function temperature monitoring working process in diffusion technology as follows: the first thermocouple 51 detects the temperature of each position of the tube wall of the quartz tube 20, the second thermocouple 52 detects the temperature of each position in the quartz tube 20, the temperature transmission module 60 acquires real-time temperature data detected by the first thermocouple 51 and the second thermocouple 52 and transmits the real-time temperature data to the control module 70, the control module 70 compares and calculates the real-time temperature data with the set temperature data, and the heating temperature of the heating assembly 30 is adjusted through the heating controller 40; when the temperature is abnormal, the control module 70 controls the temperature alarm 80 and the buzzer 90 to send out alarm signals to remind an operator to deal with the abnormal conditions in time.
To sum up, the utility model provides a diffusion furnace with temperature monitoring function, utilize the real-time temperature of first thermocouple detection quartz capsule pipe wall, utilize the inside real-time temperature of second thermocouple detection quartz capsule, utilize temperature transfer module to send the control module with pipe wall and intraductal real-time temperature, control module carries out the comparison with the temperature of predetermineeing with the intraductal real-time temperature of pipe wall and pipe and calculates, rethread heating control ware adjusts the heating temperature of heating element in to the quartz capsule, thereby can carry out real-time supervision to the inside and outside temperature of quartz capsule, directly perceived, accurately control diffusion temperature, guarantee that diffusion technology smoothly goes on, improve the product percent of pass.
The present invention has been described in relation to the above embodiments, which are only examples for implementing the present invention. It should be noted that the disclosed embodiments do not limit the scope of the invention. On the contrary, all changes and modifications which do not depart from the spirit and scope of the present invention are deemed to fall within the scope of the present invention.
Claims (4)
1. A diffusion furnace with temperature monitoring function is characterized in that: the device comprises a furnace body, a quartz tube, a heating assembly, a heating controller, a temperature detection module, a temperature transmission module and a control module;
the quartz tube is arranged inside the furnace body; the heating assembly is arranged on the inner wall of the furnace body and used for heating the inside of the quartz tube in a diffusion process; the heating controller is connected with the heating assembly and is used for controlling the heating temperature of the heating assembly;
the temperature detection module comprises a first thermocouple for detecting the temperature of the wall of the tube and a second thermocouple for detecting the temperature in the tube, the first thermocouple is arranged on the furnace body through a first support, and a detection point of the first thermocouple is contacted with the outer wall of the quartz tube; the second thermocouple is arranged on the quartz tube through a second support, the second support is arranged on the outer wall of the tube tail of the quartz tube, the second thermocouple is parallel to the axis of the quartz tube and extends into the quartz tube, and a plurality of detection points are arranged on the second thermocouple;
the temperature transmission module is respectively connected with the first thermocouple and the second thermocouple, is connected with the control module, and is used for transmitting the temperatures detected by the first thermocouple and the second thermocouple to the control module in real time;
the control module is connected with the heating controller and used for adjusting the heating temperature of the heating assembly according to the real-time temperature of the tube wall of the quartz tube and the real-time temperature in the tube.
2. The diffusion furnace with temperature monitoring function according to claim 1, wherein: the number of the first thermocouples is three, the first thermocouples are respectively arranged at the furnace head, the furnace interior and the furnace tail of the furnace body and are used for detecting the real-time temperature of the orifice of the outer wall of the quartz tube, the pipe interior and the pipe tail.
3. The diffusion furnace with temperature monitoring function according to claim 1, wherein: and the second thermocouple is provided with three detection points which are respectively used for detecting the real-time temperature of the inner pipe orifice, the pipe middle and the pipe tail of the quartz pipe.
4. The diffusion furnace with temperature monitoring function according to claim 1, wherein: the temperature alarm is connected with the control module and used for sending out an alarm signal when the temperature is monitored to be abnormal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022319763.6U CN213739783U (en) | 2020-10-19 | 2020-10-19 | Diffusion furnace with temperature monitoring function |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022319763.6U CN213739783U (en) | 2020-10-19 | 2020-10-19 | Diffusion furnace with temperature monitoring function |
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| CN213739783U true CN213739783U (en) | 2021-07-20 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114112068A (en) * | 2021-12-23 | 2022-03-01 | 李忠义 | Fire observation monitoring device for industrial metallurgy sintering process |
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2020
- 2020-10-19 CN CN202022319763.6U patent/CN213739783U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114112068A (en) * | 2021-12-23 | 2022-03-01 | 李忠义 | Fire observation monitoring device for industrial metallurgy sintering process |
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Effective date of registration: 20230619 Address after: Building 2, No. 208 Benniuyun South West Road, Xinbei District, Changzhou City, Jiangsu Province, 213000 Patentee after: Touneng (Jiangsu) Quartz Technology Co.,Ltd. Address before: 214000 Qinxiang village, Luoshe Town, Huishan District, Wuxi City, Jiangsu Province Patentee before: Jiangsu wohong Equipment Co.,Ltd. |
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