CN213739661U

CN213739661U - Fixing clamp on vacuum coating machine

Info

Publication number: CN213739661U
Application number: CN202022566650.6U
Authority: CN
Inventors: 王盛基
Original assignee: Tonglu Huaya Titanium Technology Co ltd
Current assignee: Tonglu Huaya Titanium Technology Co ltd
Priority date: 2020-11-09
Filing date: 2020-11-09
Publication date: 2021-07-20
Anticipated expiration: 2030-11-09

Abstract

The utility model discloses a mounting fixture on vacuum coating machine relates to coating equipment technical field, the on-line screen storage device comprises a base, department installs first motor in the middle of the bottom of base, the output of first motor is provided with the pivot, and the end of pivot is provided with the connecting plate, and the pivot is connected with two sets of mounting panels of symmetry through the connecting plate, and is two sets of the second motor is all installed to the inboard top of mounting panel and bottom. The utility model discloses during the use, place the base plate manually in fixture, later the screw rod of rotatory mount top and bottom simultaneously, again because of screw rod and mount threaded connection, thereby remove the mount pad to the base plate simultaneously, after fixed needle withstands the base plate, in slow rotatory screw rod a week, compress tightly the base plate, again because of the end of fixed needle is the hemisphere, and point-to-surface contact between fixed needle and the base plate, thereby when carrying out the coating film to it, do not influence and carry out the coating film to the substrate surface, thereby work efficiency has been improved greatly.

Description

Fixing clamp on vacuum coating machine

Technical Field

The utility model relates to a coating equipment technical field specifically is a mounting fixture on vacuum coating machine.

Background

The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like, and the main idea is divided into two types of evaporation and sputtering.

When clamping the substrate, the fixing clamp on the existing vacuum coating machine clamps the two sides of the substrate, so that a part of the substrate can be shielded without coating, secondary coating is required, and the working efficiency is greatly reduced.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a: in order to solve the problems that when a substrate is clamped in the prior art, the substrate is clamped on two sides of the substrate, so that a part of the substrate can be shielded without coating, secondary coating is needed, and the working efficiency is greatly reduced, a fixing clamp on a vacuum coating machine is provided.

In order to achieve the above object, the utility model provides a following technical scheme: a fixing clamp on a vacuum coating machine comprises a base, wherein a first motor is installed in the middle of the bottom of the base, a rotating shaft is arranged at the output end of the first motor, a connecting plate is arranged at the tail end of the rotating shaft, the rotating shaft is connected with two symmetrical mounting plates through the connecting plate, a second motor is installed at the top and the bottom of the inner sides of the two mounting plates, the output end of the second motor is provided with a turntable corresponding to the rotating shaft, the second motor is connected with a clamping mechanism corresponding to the second motor through threads through the turntable, the clamping mechanism comprises a fixing frame, a screw rod, a mounting seat and a fixing needle, the fixing frame is connected on the turntable through threads, the top and the bottom of the fixing frame are both connected with the symmetrical screw rod through threads, the tail end of the screw rod is connected with the mounting seat through a bearing, and a plurality of groups of fixing needles are sequentially arranged at the bottom of the mounting seat, and the tail end of the fixing needle is hemispherical.

Preferably, the inner side of the fixing frame is provided with sliding grooves matched with the mounting seat, and the outer side of the mounting seat is provided with limiting sliding blocks matched with the sliding grooves.

Preferably, the top of screw rod is provided with the nut, and the outside parcel of nut has the protection cotton.

Preferably, the top edge of base has seted up annular spout, and the bottom of two sets of mounting panels is equipped with the support slider who mutually supports with annular spout.

Preferably, the bottom of base all is provided with the supporting leg all around, and the bottom of supporting leg all is provided with the slipmat.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses during the use, place the base plate is manual in fixture, the screw rod of later rotatory fixed frame top and bottom simultaneously, again because of screw rod and mount threaded connection, thereby remove the mount pad to the base plate simultaneously, after fixed needle withstands the base plate, in slow rotatory screw rod a week, compress tightly the base plate, be the hemisphere because of the end of fixed needle again, and point-to-surface contact between fixed needle and the base plate, thereby when carrying out the coating film to it, do not influence and carry out the coating film to the base plate surface, avoid the centre gripping again, reprocessing, thereby work efficiency has been improved greatly.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of a part of the structure of the present invention;

fig. 3 is a schematic structural diagram of the clamping mechanism of the present invention.

In the figure: 1. a base; 2. a first motor; 3. a rotating shaft; 4. a connecting plate; 5. mounting a plate; 6. a second motor; 7. a turntable; 8. a clamping mechanism; 801. a fixed mount; 802. a screw; 803. a mounting seat; 804. a fixing pin; 805. a chute; 806. a limiting slide block; 807. a nut; 9. an annular chute; 10. a support slide block; 11. and (5) supporting legs.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "disposed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. The following describes an embodiment of the present invention according to its overall structure.

Referring to fig. 1-3, a fixing fixture on a vacuum coating machine comprises a base 1, a first motor 2 is installed in the middle of the bottom of the base 1, a rotating shaft 3 is installed at the output end of the first motor 2, a connecting plate 4 is installed at the end of the rotating shaft 3, the rotating shaft 3 is connected with two symmetrical sets of mounting plates 5 through the connecting plate 4, second motors 6 are installed at the top and the bottom of the inner sides of the two sets of mounting plates 5, a rotating disc 7 corresponding to the output end of the second motor 6 is installed at the output end of the second motor 6, the second motor 6 is connected with a clamping mechanism 8 corresponding to the second motor 6 through threads by the rotating disc 7, the clamping mechanism 8 comprises a fixing frame 801, a screw 802, a mounting seat 803 and a fixing pin 804, the fixing frame 801 is connected on the rotating disc 7 through threads, symmetrical screws 802 are connected at the top and the bottom of the fixing frame 801 through threads, the end of the screw 802 is connected with the mounting seat 803 through a bearing, the bottom of the mounting seat 803 is sequentially provided with a plurality of groups of fixing pins 804, and the tail ends of the fixing pins 804 are hemispherical.

The utility model discloses during the use, place the base plate manual in fixture 8, later the screw rod 802 of rotatory mount 801 top and bottom simultaneously, again because of screw rod 802 and mount 801 threaded connection, thereby remove mount pad 803 to the base plate simultaneously, after fixing needle 804 withstands the base plate, at the slow rotatory screw rod 802 a week, compress tightly the base plate, again be the hemisphere because of fixing needle 804's end, and point face contact between fixing needle 804 and the base plate, thereby when carrying out the coating film to it, do not influence and carry out the coating film to the base plate surface, avoid the centre gripping again, reprocess, thereby work efficiency has been improved greatly.

Please refer to fig. 3, the inner sides of the fixing frame 801 are all provided with sliding grooves 805 mutually matched with the mounting seat 803, and the outer side of the mounting seat 803 is provided with a limiting slider 806 mutually matched with the sliding grooves 805.

Please refer to fig. 3, the top of the screw 802 is provided with a nut 807, and the outside of the nut 807 is wrapped with a protective cotton, the present invention provides the above structure to better rotate the screw 802, so as to avoid the injury of the user.

Please refer to fig. 1 and fig. 2, the top edge of the base 1 is provided with an annular chute 9, and the bottom of the two sets of mounting plates 5 are provided with a supporting slider 10 mutually matched with the annular chute 9, the present invention provides the above structure, so as to facilitate better supporting and sliding the mounting plates 5, and to make them operate better.

Please refer to fig. 1 and fig. 2, the bottom of the base 1 is provided with the supporting legs 11 all around, and the bottom of the supporting legs 11 is provided with the non-slip mat, the present invention provides the above structure, so as to better support the base 1, and make it operate normally.

The working principle is as follows: when in use, a plurality of groups of substrates are manually and respectively placed in the corresponding clamping mechanisms 8, the clamping mechanisms 8 are sequentially fastened, in the process, the screws 802 at the top and the bottom of the fixing frame 801 are simultaneously rotated, the screws 802 are in threaded connection with the fixing frame 801, the mounting seats 803 are simultaneously removed towards the substrates along the direction of the sliding grooves 805, the mounting seats 803 are limited by the mutual matching of the sliding grooves 805 and the limiting sliding blocks 806 until the fixing pins 804 are pressed against the substrates, the screws 802 are slowly rotated for a circle to press the substrates, the tail ends of the fixing pins 804 are hemispherical and in point-surface contact with the substrates, so that the surfaces of the substrates are not affected to be coated when the substrates are coated, then the first motor 2 is started to drive the rotating shaft 3 to rotate, the connecting plate 4 and the mounting plate 5 to slowly rotate, and finally the plurality of groups of clamping mechanisms 8 are slowly rotated, and meanwhile, the second motor 6 is started to drive the turntable 7 to rotate, so that the clamping mechanism 8 slowly rotates along the axis direction of the second motor 6, and the film plated on the surface of the substrate is more uniform during film plating.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a mounting fixture on vacuum coating machine, includes base (1), its characterized in that: the automatic clamping device is characterized in that a first motor (2) is installed in the middle of the bottom of the base (1), the output end of the first motor (2) is provided with a rotating shaft (3), the tail end of the rotating shaft (3) is provided with a connecting plate (4), the rotating shaft (3) is connected with two symmetrical sets of mounting plates (5) through the connecting plate (4), the tops and bottoms of the inner sides of the two sets of mounting plates (5) are provided with second motors (6), the output end of each second motor (6) is provided with a rotating disc (7) corresponding to the second motor, each second motor (6) is connected with a clamping mechanism (8) corresponding to the second motor (6) through threads through the rotating disc (7), each clamping mechanism (8) comprises a fixing frame (801), a screw rod (802), a mounting seat (803) and a fixing needle (804), the fixing frame (801) is connected to the rotating disc (7) through threads, the tops and the bottoms of the fixing frame (801) are all connected with symmetrical screw rods (802) through threads, the tail end of the screw rod (802) is connected with a mounting seat (803) through a bearing, a plurality of groups of fixing needles (804) are sequentially arranged at the bottom of the mounting seat (803), and the tail end of each fixing needle (804) is hemispherical.

2. The fixing clamp of the vacuum coating machine of claim 1, wherein: the inner sides of the fixing frames (801) are all provided with sliding grooves (805) matched with the mounting seats (803), and the outer sides of the mounting seats (803) are provided with limiting sliding blocks (806) matched with the sliding grooves (805).

3. The fixing clamp of the vacuum coating machine of claim 1, wherein: the top of screw rod (802) is provided with nut (807), and the outside parcel of nut (807) has the protection cotton.

4. The fixing clamp of the vacuum coating machine of claim 1, wherein: annular sliding grooves (9) are formed in the top edge of the base (1), and supporting sliding blocks (10) matched with the annular sliding grooves (9) are arranged at the bottoms of the two groups of mounting plates (5).

5. The fixing clamp of the vacuum coating machine of claim 1, wherein: the bottom of base (1) all is provided with supporting leg (11) all around, and the bottom of supporting leg (11) all is provided with the slipmat.