CN213725802U

CN213725802U - Mix sour material filter equipment for system

Info

Publication number: CN213725802U
Application number: CN202022199883.7U
Authority: CN
Inventors: 苏富琨; 余光明; 戴荣昌
Original assignee: Fujian Yaxin Electronic Materials Co ltd
Current assignee: Fujian Yaxin Electronic Materials Co ltd
Priority date: 2020-09-30
Filing date: 2020-09-30
Publication date: 2021-07-20
Anticipated expiration: 2030-09-30

Abstract

The utility model discloses a mix sour material filter equipment for system relates to semiconductor production and processing and uses relevant equipment technical field. The utility model discloses a filtering component, filtering component includes the rose box, first nanometer membrane, the second nanometer membrane, third nanometer membrane and fourth nanometer membrane equidistance are connected inside the installation component that the middle part set up in the rose box in proper order, installation component includes the installation frame, slider and slide rail, gliding slider front end and first nanometer membrane in the middle part of the inboard middle part of slide rail in both sides in the installation frame, the second nanometer membrane, third nanometer membrane and fourth nanometer membrane are connected, first nanometer membrane, the second nanometer membrane, on third nanometer membrane and the fourth nanometer membrane middle part knot piece and the bottom of the sealed board between the catching groove of seting up at the bottom of the middle part lock joint be connected. The utility model discloses a set up installation component and filtering component structure, have the advantage that promotes semiconductor etching efficiency, the filter equipment dismouting of being convenient for is changed.

Description

Mix sour material filter equipment for system

Technical Field

The utility model belongs to the technical field of semiconductor production and processing are with relevant equipment, especially relate to a mix sour for system material filter equipment.

Background

The semiconductor refers to a material with electric conductivity between a conductor and an insulator at normal temperature, common semiconductor materials include silicon, germanium, gallium arsenide and the like, silicon is the most influential component in various semiconductor material applications, a mixed acid system is used for etching the semiconductor, and an acid material is an important component in the mixed acid system.

Disclosure of Invention

An object of the utility model is to provide an acid material filter equipment for mixed acid system through setting up filtering component and installation component, has solved the particle size that contains in the current acid material and must not exceed 200 nanometers, need filter the operation to it to realize the good etching operation of semiconductor, or the filter equipment who is used for acid material is difficult to overhaul the change operation, has not satisfied user demand's problem.

In order to solve the technical problem, the utility model discloses a realize through following technical scheme:

the utility model relates to an acid material filtering device for mixed acid system, which comprises a filtering component, wherein the filtering component comprises a filtering box, a first nanometer film, a second nanometer film, a third nanometer film and a fourth nanometer film, the first nanometer film, the second nanometer film, the third nanometer film and the fourth nanometer film are sequentially and equidistantly connected inside an installation component arranged at the middle part in the filtering box, the installation component comprises an installation frame, a slide block and a slide rail, the front end of the slide block sliding at the middle part inside the slide rail at the middle part of the two sides in the installation frame is connected with the first nanometer film, the second nanometer film, the third nanometer film and the fourth nanometer film, the upper part of the installation frame is arranged in a cavity, a middle buckling block on the first nanometer film, the second nanometer film, the third nanometer film and the fourth nanometer film is buckled and connected with a buckling groove arranged at the bottom middle part of a sealing plate, a sealing plate is clamped and connected inside an inlet and an outlet arranged at the middle part on the filtering box, the threads on the two sides of the sealing plate are connected with connecting bolts in a penetrating way.

Further, rose box fixed connection is in its below welding base upper end central position, and both sides are the setting of external arch on the base, and base bottom both sides middle part welded connection has the non slipping block, carries out structural support to the rose box by the base to by the contact connection between non slipping block and the ground, be used for improving base structure's stability.

Furthermore, the central positions of the two sides of the filter box are connected with external threaded pipes through screw threads, the outer ends of the external threaded pipes are connected with internal threaded pipes through screw threads, fastening bolts are connected to the outer sides of flanges at the outer ends of the internal threaded pipes at equal intervals, the screw holes, the internal threaded pipes and the external threaded pipes are connected through threads of end structures of the screw holes, the internal threaded pipes and the external threaded pipes, the external threaded pipes are used for guiding acid materials, and the flanges are used for connecting an external conveying pipeline and the filter box under the action of the fastening bolts, so that the acid materials can enter and exit from the interior of the filter box.

Furthermore, the middle part is inlayed in the opening that positive surface upper portion equidistance of rose box was seted up and is connected with the observation window, and the rose box is threaded connection between the positioning bolt and the installation frame that vertical setting was being presented through interior both sides equidistance, and positioning bolt one end equidistance sets up in the installation frame in the cavity one side middle part that both sides were seted up, is used for carrying out the inside look over of rose box in real time by the observation window to be used for installing the connection of frame structure by positioning bolt, provide positioning bolt's dismouting space by the cavity.

Further, opposite side middle part end threaded connection has spacing bolt in the cavity, spacing bolt inboard with the slider rear end surface conflict not be connected, lower extreme and installation frame, closing plate surface closely laminate the setting on the cavity, carry out structural connection to the slide rail by spacing bolt to with it not be connected with the slider contact, ensure that the slider slides the operation smoothly, realize filtering component's the maintenance of moving outward or change the operation, simultaneously, with the setting of closely laminating of lower extreme and installation frame, closing plate surface on the cavity, avoid the acid material to take place the seepage.

Further, draw-in groove has been seted up at both sides middle part in the installation frame, first nanometer membrane, second nanometer membrane, third nanometer membrane and fourth nanometer membrane both sides middle part welded fixture block joint are connected inside the draw-in groove, end screw thread through connection has fixing bolt about installation frame both sides middle part, be connected by the joint of structure between draw-in groove and the fixture block, carry out first nanometer membrane, second nanometer membrane, the preliminary connection of third nanometer membrane and fourth nanometer membrane structure to and be convenient for its fastening operation on next step, simultaneously, be used for carrying out the reconnection to it by fixing bolt and fix, ensure the stability of its structure.

The utility model discloses following beneficial effect has:

1. the utility model discloses a set up filtering component, it filters acid material step by step to have, promote the effect of semiconductor etching nature, the particle size that contains in having solved acid material must not exceed 200 nanometers, need filter the operation to it, in order to realize the problem of the good etching operation of semiconductor, a filtering component for filtering acid material includes the rose box, first nanometer membrane, second nanometer membrane, third nanometer membrane and fourth nanometer membrane, satisfy the user demand in order to realize its particle size through carrying out multiple filtration to acid material, and simultaneously, first nanometer membrane, second nanometer membrane, filtering diameter between third nanometer membrane and the fourth nanometer membrane is for steadilying decrease gradually and sets up, effectively avoid the granule to concentrate to filter in a department, cause filtering component's blocking, influence the result of use, facilitate the use.

2. The utility model discloses a set up the installation component, have the effect of being convenient for filter element change maintenance, it is difficult to overhaul the change operation to have solved the filter equipment who is used for sour material, the problem of user demand can not be satisfied, the first nanometer membrane that filter element includes, the second nanometer membrane, third nanometer membrane and fourth nanometer membrane are connected inside the installation frame, open the effect of opening the closing plate at connecting bolt, by applying ascending power to first nanometer membrane, the second nanometer membrane, the knot piece on third nanometer membrane and the fourth nanometer membrane, by the slider shifting up at the inboard middle part of slide rail, a nanometer membrane, the second nanometer membrane, third nanometer membrane and fourth nanometer membrane shift out by the rose box is inside, overhaul or change it, and convenient to use.

Of course, it is not necessary for any particular product to achieve all of the above-described advantages at the same time.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a front view of the present invention;

FIG. 2 is a schematic top view of the inside of the filtering box of the present invention;

FIG. 3 is an enlarged schematic view of the present invention at A in FIG. 2;

fig. 4 is a schematic view of the first nanomembrane and the mounting frame of the present invention.

In the drawings, the components represented by the respective reference numerals are listed below:

1. an internally threaded tube; 2. a flange plate; 3. fastening a bolt; 4. an anti-skid cushion block; 5. a base; 6. a filter assembly; 61. a filter box; 62. a first nanomembrane; 63. a second nanomembrane; 64. a third nanomembrane; 65. a fourth nanomembrane; 7. mounting the component; 71. a mounting frame; 72. a slide rail; 73. a slider; 74. a limit bolt; 75. a sealing plate; 76. an entrance and an exit; 77. buckling grooves; 78. a connecting bolt; 79. buckling blocks; 8. an observation window; 9. a port; 10. an externally threaded tube; 11. a screw hole; 12. a cavity; 13. positioning the bolt; 14. a card slot; 15. a clamping block; 16. and (5) fixing the bolt.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

Referring to fig. 1-4, the present invention relates to an acid filtering device for mixed acid system, which comprises a filtering assembly 6, wherein the filtering assembly 6 comprises a filtering box 61, a first nanometer membrane 62, a second nanometer membrane 63, a third nanometer membrane 64 and a fourth nanometer membrane 65, the first nanometer membrane 62, the second nanometer membrane 63, the third nanometer membrane 64 and the fourth nanometer membrane 65 are sequentially and equidistantly connected inside a mounting assembly 7 arranged at the middle part inside the filtering box 61, when filtering acid, the external acid is conveyed to one side inside the filtering box 61 from an external threaded pipe 10 at one side of the filtering box 61, and under the action of external pressure, the acid gradually passes through the first nanometer membrane 62, the second nanometer membrane 63, the third nanometer membrane 64 and the fourth nanometer membrane 65, at this time, the external threaded pipe 10 at the other side of the filtering box 61 is used for filtering acid, the mounting assembly 7 comprises an external discharge mounting frame 71, a sliding block 73 and a sliding rail 72, the front end of a sliding block 73 sliding on the middle part of the inner side of a middle sliding rail 72 on two sides in the mounting frame 71 is connected with a first nanometer film 62, a second nanometer film 63, a third nanometer film 64 and a fourth nanometer film 65, the upper part of the mounting frame 71 is arranged in a cavity, a middle buckling block 79 on the first nanometer film 62, the second nanometer film 63, the third nanometer film 64 and the fourth nanometer film 65 is buckled and connected with a buckling groove 77 arranged in the middle part of the bottom of a sealing plate 75, the sealing plate 75 is buckled and connected with the inside of an access 76 arranged in the middle part of the upper part of a filter box 61, a connecting bolt 78 is penetratingly connected with threads on two sides of the sealing plate 75, when an acid material is filtered for a long time or a filter assembly 6 is damaged, a counterclockwise force is applied to the connecting bolt 78 and an upward force is applied to the sealing plate 75, so that the buckling block 79 is separated from the buckling groove 77, and at the moment, the upward force is applied to the buckling block 79, and the sliding block 73 drives the first nanometer film 62, a second nanometer film 62, a third nanometer film 65, The second nanometer membrane 63, the third nanometer membrane 64 and the fourth nanometer membrane 65 move upwards in the middle of the inner side of the slide rail 72, and the first nanometer membrane 62, the second nanometer membrane 63, the third nanometer membrane 64 and the fourth nanometer membrane 65 move out of the interior of the filter box 61 and are repaired or replaced.

As shown in FIG. 1, the filter box 61 is fixedly connected to the central position of the upper end of the welding base 5 below the filter box 61, two sides of the base 5 are arranged in a protruding manner, the middle parts of two sides of the bottom end of the base 5 are welded with the anti-skid pad blocks 4, the filter box 61 is structurally supported by the middle parts of the upper end of the base 5 and is in interference connection with the ground through the anti-skid pad blocks 4, the base 5 is structurally supported, the structural stability of the filter box 61 is guaranteed, the outer protection of the lower part of the filter box 61 is realized, two sides of the base 5 are arranged in a protruding manner, the outer threaded pipe 10 is in threaded connection through the screw hole 11, the outer end of the outer threaded pipe 10 is in threaded connection with the inner threaded pipe 1, the outer end flange 2 of the inner threaded pipe 1 is connected with the fastening bolts 3 at equal intervals, clockwise force is applied to the outer threaded pipe 10, and the end of the outer threaded pipe is respectively connected with the screw hole 11, The threaded connection of structure between the internal thread pipe 1 for the connection of its structure is fixed, adopts threaded connection's mode, is convenient for carry out the structure dismouting to it, simultaneously, carries out by fastening bolt 3 through ring flange 2 to external screwed pipe 10 with external sour material pipeline between the structure be connected, be used for the business turn over of sour material filtration front and back.

As shown in fig. 1, 3 and 4, the filtering box 61 is connected with the observation window 8 by inserting in the middle of the through holes 9 formed at equal intervals on the upper part of the front surface of the filtering box 61, the filtering box 61 is connected with the installation frame 71 by the positioning bolts 13 vertically arranged at equal intervals on the inner two sides through the threaded connection, one end of the positioning bolt 13 is arranged at equal intervals in the middle of one side of the cavity 12 formed at the inner two sides of the installation frame 71, the observation window 8 is connected with the through holes 9, the real-time inspection of the filtering operation in the filtering box 61 is carried out through the observation window 8, and the clockwise force is applied to the positioning bolt 13 for the structural connection of the installation frame 71, meanwhile, the positioning bolt 13 is provided with the dismounting space through the cavity 12, the threaded connection is adopted, the dismounting maintenance or replacement of the structure of the installation frame 71 is convenient, the end part of the middle part of the other side in the cavity 12 is connected with the limiting bolt 74 through the threaded connection, the inner side of the limit bolt 74 is not in contact connection with the rear end surface of the sliding block 73, the upper end and the lower end of the cavity 12 are in close fit with the surfaces of the installation frame 71 and the sealing plate 75, clockwise force is applied to the limit bolt 74 for connection of the structure of the sliding rail 72, anticlockwise force is applied to the limit bolt for disassembly and maintenance of the structure, meanwhile, the inner side of the limit bolt 74 is not in contact connection with the rear end surface of the sliding block 73, the upper end and the lower end of the cavity 12 are in close fit with the surfaces of the installation frame 71 and the sealing plate 75 to ensure smooth sliding of the sliding block 73 and avoid leakage of acid materials, the middle parts of two sides in the installation frame 71 are provided with clamping grooves 14, clamping blocks 15 welded at the middle parts of two sides of the first nanometer film 62, the second nanometer film 63, the third nanometer film 64 and the fourth nanometer film 65 are clamped and connected inside the clamping grooves 14, and the upper end and lower end threads at the middle parts of two sides of the installation frame 71 are in a penetrating connection with fixing bolts 16, the first nanometer membrane 62, the second nanometer membrane 63, the third nanometer membrane 64 and the fourth nanometer membrane 65 are connected through clamping of the structures between the clamping block 15 and the clamping groove 14 by applying inward force, the primary connection of the structures is achieved, the next fastening operation is facilitated, at the moment, clockwise force is applied to the fixing bolt 16, the structures are connected again, and the stability of the structures is guaranteed.

The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed.

Claims

1. The utility model provides a mix sour material filter equipment for system, includes filtering component (6), its characterized in that: the filter assembly (6) comprises a filter box (61), a first nanometer membrane (62), a second nanometer membrane (63), a third nanometer membrane (64) and a fourth nanometer membrane (65), the first nanometer membrane (62), the second nanometer membrane (63), the third nanometer membrane (64) and the fourth nanometer membrane (65) are sequentially and equidistantly connected inside an installation assembly (7) arranged in the middle of the filter box (61), the installation assembly (7) comprises an installation frame (71), sliding blocks (73) and sliding rails (72), the front ends of the sliding blocks (73) sliding in the middle of the inner sides of the middle sliding rails (72) on the two sides in the installation frame (71) are connected with the first nanometer membrane (62), the second nanometer membrane (63), the third nanometer membrane (64) and the fourth nanometer membrane (65), the upper portion of the installation frame (71) is arranged in a cavity, and middle buckles (79) on the first nanometer membrane (62), the second nanometer membrane (63), the third nanometer membrane (64) and the fourth nanometer membrane (65) are connected with the middle of a sealing plate (75) The fastening connection is carried out between the arranged fastening grooves (77), the sealing plate (75) is connected to the inside of an access (76) arranged at the upper middle part of the filter box (61) in a clamping manner, and connecting bolts (78) are connected to the threads at the two sides of the sealing plate (75) in a penetrating manner.

2. The acid material filtering device for the acid mixing system according to claim 1, wherein the filtering box (61) is fixedly connected to the central position of the upper end of a welding base (5) below the filtering box, two sides of the base (5) are arranged in a protruding manner, and the middle parts of two sides of the bottom end of the base (5) are welded with anti-skid cushion blocks (4).

3. The acid material filtering device for the mixed acid system as claimed in claim 1, wherein the central positions of both sides of the filtering box (61) are connected with an external thread pipe (10) through screw holes (11) in a threaded manner, the outer end of the external thread pipe (10) is connected with an internal thread pipe (1) in a threaded manner, and fastening bolts (3) are connected to the outer side of a flange plate (2) at the outer end of the internal thread pipe (1) at equal intervals.

4. The acid material filtering device for the mixed acid system as claimed in claim 1, wherein the filtering box (61) is provided with the through holes (9) at equal intervals on the upper part of the front surface, the middle part of the inside of the through holes is connected with the observation window (8) in an embedded manner, the filtering box (61) is in threaded connection with the mounting frame (71) through the positioning bolts (13) which are vertically arranged at equal intervals on the two inner sides, and one end of each positioning bolt (13) is arranged at equal intervals on the middle part of one inner side of the cavity (12) arranged on the two inner sides of the mounting frame (71).

5. The acid material filtering device for the acid mixing system according to claim 4, wherein a limit bolt (74) is in threaded connection with the end part of the middle part of the other side in the cavity (12), the inner side of the limit bolt (74) is not in interference connection with the rear end surface of the sliding block (73), and the upper end and the lower end of the cavity (12) are tightly attached to the surfaces of the mounting frame (71) and the sealing plate (75).

6. The acid material filtering device for the acid mixing system according to claim 1, wherein clamping grooves (14) are formed in the middle portions of two sides in the installation frame (71), clamping blocks (15) welded to the middle portions of two sides of the first nanometer film (62), the second nanometer film (63), the third nanometer film (64) and the fourth nanometer film (65) are connected to the inside of the clamping grooves (14) in a clamping mode, and fixing bolts (16) are connected to the upper end and the lower end of the middle portions of two sides of the installation frame (71) in a threaded penetrating mode.