CN213658787U - Probe clamp suitable for photoelectric chip test system - Google Patents

Probe clamp suitable for photoelectric chip test system Download PDF

Info

Publication number
CN213658787U
CN213658787U CN202021851973.3U CN202021851973U CN213658787U CN 213658787 U CN213658787 U CN 213658787U CN 202021851973 U CN202021851973 U CN 202021851973U CN 213658787 U CN213658787 U CN 213658787U
Authority
CN
China
Prior art keywords
probe
pressure sensor
photoelectric probe
sliding clamping
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202021851973.3U
Other languages
Chinese (zh)
Inventor
赵楠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hebei Bote Semiconductor Equipment Technology Co ltd
Original Assignee
Hebei Bote Semiconductor Equipment Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hebei Bote Semiconductor Equipment Technology Co ltd filed Critical Hebei Bote Semiconductor Equipment Technology Co ltd
Priority to CN202021851973.3U priority Critical patent/CN213658787U/en
Application granted granted Critical
Publication of CN213658787U publication Critical patent/CN213658787U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measuring Fluid Pressure (AREA)

Abstract

The application discloses probe anchor clamps suitable for photoelectricity chip test system. The method comprises the following steps: the pressure detection assembly is used for quantifying the pressure value of the photoelectric probe, and the sliding clamping assembly is used for clamping the photoelectric probe; the bottom of the installation part is provided with the through groove, the pressure sensor is fixedly connected with the bottom of the installation part, and the other end of the pressure sensor is connected with the fixing part through the connecting part; when the probe section is contacted with the chip to be tested, the photoelectric probe drives the pressure sensor to lift upwards, and the bridge structure inside the pressure sensor deforms to generate a corresponding pressure value; sleeving the sliding clamping part on the fixing part, and arranging an accommodating groove and a through hole on the fixing part; when the photoelectric probe is clamped, the mounting section is placed in the through hole, the horizontal section is placed in the accommodating groove, the sliding clamping part is moved to press the mounting section, and the horizontal section is tightly attached to the accommodating groove, so that the clamping process is completed; when the photoelectric probe is replaced, the sliding clamping part is far away from the installation section, and the photoelectric probe can be taken down for replacement.

Description

Probe clamp suitable for photoelectric chip test system
Technical Field
The present disclosure relates generally to the field of chip testing devices, and more particularly to a probe clamp for a optoelectronic chip testing system.
Background
The commonly used chip testing method is contact testing, i.e. after the probe is clamped by a clamp to contact with the surface of the chip, various tests are carried out.
At present, the pressure between the needle point of the photoelectric probe and a chip to be detected cannot be quantified, and can only be judged by the experience and the feeling of an operator, and the traditional clamp device for clamping the probe has the disadvantages of complex structure, more used parts, unstable structure, inconvenience in replacing the probe and easiness in losing the parts; therefore, improvements in the conventional probe clamping device are needed.
Disclosure of Invention
In view of the above-mentioned defects or shortcomings in the prior art, it is desirable to provide a probe clamp suitable for an optoelectronic chip testing system, which can accurately obtain pressure data, effectively control the contact pressure between a probe and a chip, is simple and convenient to operate, has a simple structure, and is easy to implement.
In a first aspect, the present application provides a probe fixture suitable for use in an optoelectronic chip testing system, comprising: the pressure detection assembly is used for quantifying the pressure value of the photoelectric probe, and the sliding clamping assembly is used for clamping the photoelectric probe;
the photoelectric probe is provided with a probe section, a horizontal section and a mounting section, and the probe section is used for contacting with a chip to be tested;
the pressure detection assembly includes: a mounting portion and a pressure sensor; a through groove is formed in the bottom of the mounting part; the pressure sensor is arranged in parallel with the through groove, one end of the pressure sensor is fixedly connected with one side of the bottom of the mounting part, and the other end of the pressure sensor is fixedly connected with the connecting part;
the sliding clamp assembly includes: a fixed part fixed with the connecting part and a sliding clamping part capable of freely moving on the fixed part; the surface of one side of the fixing part, which is far away from the connecting part, is provided with an accommodating groove and a through hole which are adjacently arranged, and the through hole is far away from the end part of the fixing part; the holding tank is used for holding the horizontal segment, the through-hole is used for placing the installation section.
According to the technical scheme provided by the embodiment of the application, the sliding clamping part is provided with two symmetrically-arranged handheld parts.
According to the technical scheme provided by the embodiment of the application, the handheld part is detachably connected with the side wall of the sliding clamping part.
According to the technical scheme provided by the embodiment of the application, the method further comprises the following steps: and the auxiliary clamping part is used for assisting the sliding clamping part to clamp the photoelectric probe.
According to the technical scheme provided by the embodiment of the application, the top of the installation part is also provided with a connecting piece for fixedly connecting with the adjusting seat.
According to the technical scheme provided by the embodiment of the application, the connecting part is detachably connected with one end of the fixing part.
According to the technical scheme provided by the embodiment of the application, the method further comprises the following steps: a control system electrically connected to the pressure sensor.
In summary, the present disclosure specifically discloses a specific structure of a probe clamp suitable for a test system of a photo chip. The pressure detection assembly is designed to test the pressure value of the photoelectric probe, so that the contact pressure between the photoelectric probe and a chip to be detected can be obtained more accurately, and the pressure between the photoelectric probe and the chip to be detected can be adjusted more accurately; the photoelectric probe is clamped and fixed by the sliding clamping assembly, the photoelectric probe is convenient to assemble and disassemble, used parts are reduced, and the problem of part loss is avoided;
the installation part is used as a basic installation part of the device, the bottom of the installation part is provided with a through groove, one end of the pressure sensor is fixedly connected with one side of the bottom of the installation part, and the pressure sensor is arranged in parallel with the through groove; the other end of the pressure sensor is connected with the fixed part through the connecting part; when the probe section of the photoelectric probe is contacted with the chip to be detected, the photoelectric probe drives the connecting part and the pressure sensor to be lifted upwards by utilizing a reaction force, at the moment, a bridge structure in the pressure sensor is deformed, so that a corresponding pressure value is generated, and the contact pressure of the photoelectric probe and the chip to be detected is adjusted according to the pressure value; further, the sliding clamping part is sleeved on the fixing part, the fixing part is used as a moving path of the sliding clamping part, an accommodating groove and a through hole are arranged on one side, away from the connecting part, of the fixing part, and the through hole is far away from the end part of the fixing part; when the photoelectric probe is clamped, the mounting section of the photoelectric probe is placed in the through hole, the horizontal section of the mounting section of the photoelectric probe can be placed in the accommodating groove, the sliding clamping part is moved to press the mounting section of the photoelectric probe, and the horizontal section of the sliding clamping part is tightly attached to the bottom wall of the accommodating groove, so that the clamping process is completed; when the photoelectric probe needs to be replaced, the sliding clamping part is slid away to be away from the photoelectric probe, the photoelectric probe is not contacted with the mounting section, and the photoelectric probe can be taken down for replacement.
In order to further facilitate the movement of the sliding clamping part, one end of the handheld part is fixedly connected with the side wall of the sliding clamping part, and the handheld part is moved so as to move the sliding clamping part.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
fig. 1 and fig. 2 are schematic structural diagrams of a probe clamp suitable for an optoelectronic chip testing system.
Fig. 3 is a schematic structural view of the auxiliary clamping portion.
Reference numbers in the figures: 1. an installation part; 2. a pressure sensor; 3. a connecting portion; 4. a fixed part; 5. A slide clamping portion; 6. a photoelectric probe; 7. an auxiliary clamping portion; 8. a hand-held portion; 9. accommodating grooves; 10. and a through hole.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
Example one
Referring to fig. 1, a schematic structural diagram of a probe clamp suitable for an optoelectronic chip testing system according to a first embodiment of the present disclosure includes: a pressure detection assembly for quantifying the pressure value of the photoelectric probe 6 and a sliding clamping assembly for clamping the photoelectric probe 6;
the photoelectric probe 6 is provided with a probe section, a horizontal section and a mounting section, and the probe section is used for contacting with a chip to be tested;
the pressure detection assembly includes: a mounting portion 1 and a pressure sensor 2; a through groove is formed in the bottom of the mounting part 1; the pressure sensor 2 is arranged in parallel with the through groove, one end of the pressure sensor is fixedly connected with one side of the bottom of the mounting part 1, and the other end of the pressure sensor is fixedly connected with the connecting part 3;
the sliding clamp assembly includes: a fixed part 4 fixed to the connecting part 3 and a slide clamping part 5 movable on the fixed part 4; the surface of one side of the fixing part 4, which is far away from the connecting part 3, is provided with an accommodating groove and a through hole which are adjacently arranged, and the through hole is far away from the end part of the fixing part 4; the holding tank is used for holding the horizontal segment, the through-hole is used for placing the installation section.
In the embodiment, the pressure detection component is designed to quantify the pressure value of the photoelectric probe 6, so that the contact pressure between the photoelectric probe and the chip to be detected is more accurately obtained, and the pressure between the photoelectric probe and the chip to be detected is better adjusted; the photoelectric probe 6 is clamped and fixed by the sliding clamping assembly, the photoelectric probe 6 is convenient to assemble and disassemble, used parts are reduced, and the problem of part loss is avoided;
the mounting part 1 is used as a basic mounting part of the device, the bottom of the mounting part is provided with a through groove, space is provided for lifting the end part of the pressure sensor 2, and the mounting part also has a protection effect on the pressure sensor 2;
the pressure sensor 2 is arranged in parallel with the through groove, one end of the pressure sensor is fixedly connected with one side of the bottom of the mounting part 1, and the other end of the pressure sensor is fixedly connected with the connecting part 3 and used for detecting the contact pressure between the photoelectric probe 6 and the chip to be detected; here, the model number of the pressure sensor 2 is, alternatively, for example, csl-6390-500 g;
when the probe section of the photoelectric probe 6 is in contact with the chip to be detected, the photoelectric probe 6 drives the connecting part 3 and the pressure sensor 2 to be lifted upwards by utilizing the reaction force, at the moment, the bridge structure inside the pressure sensor 2 is deformed, so that a corresponding pressure value is generated, and the contact pressure of the photoelectric probe 6 and the chip to be detected is adjusted according to the pressure value;
the connecting part 3 is used as a connecting medium between the pressure sensor 2 and the fixing part 4 and is made of an insulating material;
a fixing part 4 fixed to the connecting part 3 and guiding the movement of the slide clamping part 5; the surface of the fixing part 4, which is far away from the connecting part 3, is provided with an accommodating groove and a through hole which are adjacently arranged, the through hole is far away from the end part of the fixing part 4, the accommodating groove is used for accommodating the horizontal section, and the through hole is used for placing the mounting section;
the sliding clamping part 5 is sleeved on the fixing part 4, can freely move on the fixing part 4, and is used for clamping the photoelectric probe 6; when the photoelectric probe 6 is clamped, the mounting section of the photoelectric probe 6 is placed in the through hole, the horizontal section of the mounting section of the photoelectric probe 6 can be placed in the accommodating groove, the sliding clamping part 5 is moved to press the mounting section of the photoelectric probe 6, and the horizontal section of the sliding clamping part is tightly attached to the bottom wall of the accommodating groove, so that the clamping process is completed; when the photoelectric probe 6 needs to be replaced, the sliding clamping part 5 is slid away to be away from the photoelectric probe 6, and the photoelectric probe 6 can be taken down without contacting with the mounting section for replacement.
In any preferred embodiment, two symmetrically arranged handholds 8 are provided on the sliding clamping part 5.
In this embodiment, the holding portion 8 is fixedly connected to the side wall of the sliding clamping portion 5, and the number of the holding portion is two, and the two are symmetrically arranged, so that the sliding clamping portion 5 can be conveniently moved.
In any preferred embodiment, the hand-held portion 8 is detachably connected to the side wall of the sliding clamping portion 5.
In the present embodiment, the connection manner of the hand-held portion 8 and the side wall of the sliding clamping portion 5 is not limited herein, and optionally, for example, a threaded connection, specifically: the side wall of the sliding clamping part 5 is provided with a threaded hole, the surface of one end of the handheld part 8 is provided with a thread, and the end is screwed into the threaded hole of the side wall of the sliding clamping part 5, so that the connection between the handheld part 8 and the sliding clamping part 5 is realized.
In any preferred embodiment, further comprising: and an auxiliary clamping part 7 for assisting the sliding clamping part 5 to clamp the photoelectric probe 6.
In the present embodiment, as shown in fig. 3, the auxiliary clamping portion 7, which is a separate component, is used to assist the slide clamping portion 5 in clamping the photo probe 6; in the process of clamping the photoelectric probe 6, when a gap exists between the sliding clamping part 5 and the photoelectric probe 6 cannot be stably clamped, the auxiliary clamping part 7 is inserted into the gap between the sliding clamping part 5 and the photoelectric probe 6, so that the effect of clamping the photoelectric probe 6 by the sliding clamping part 5 is ensured; here, the auxiliary clamping portion 7 is, optionally, of the type such as a copper sheet.
In any preferred embodiment, the top of the mounting part 1 is further provided with a connecting piece for fixedly connecting with an adjusting seat.
In this embodiment, the connecting piece sets up 1 top of installation department, with the adjustment seat rigid coupling for this device can install and fix on the adjustment seat.
In any preferred embodiment, the connecting portion 3 is detachably connected to one end of the fixing portion 4.
In this embodiment, the connection manner of the connecting portion 3 and the fixing portion 4 is not limited herein, and optionally, for example, a bolt connection, specifically: the end of the connecting portion 3 is connected to one end of the fixing portion 4 by a bolt.
In any preferred embodiment, further comprising: and a control system electrically connected with the pressure sensor 2.
In the embodiment, the design control system controls the pressure sensor 2 to detect the contact pressure between the photoelectric probe 6 and the chip to be detected, and receives pressure data so that an operator can adjust the contact pressure; the control system is in communication connection with the pressure sensor 2 through a cable, so that data transmission is realized; here, the control system is of the type such as a computer.
The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by a person skilled in the art that the scope of the invention as referred to in the present application is not limited to the embodiments with a specific combination of the above-mentioned features, but also covers other embodiments with any combination of the above-mentioned features or their equivalents without departing from the inventive concept. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.

Claims (7)

1. A probe fixture suitable for use in a optoelectronic chip testing system, comprising: a pressure detection assembly for quantifying the pressure value of the photoelectric probe (6) and a sliding clamping assembly for clamping the photoelectric probe (6);
the photoelectric probe (6) is provided with a probe section, a horizontal section and a mounting section, and the probe section is used for contacting with a chip to be tested;
the pressure detection assembly includes: a mounting part (1) and a pressure sensor (2); a through groove is formed in the bottom of the mounting part (1); the pressure sensor (2) is arranged in parallel with the through groove, one end of the pressure sensor is fixedly connected with one side of the bottom of the mounting part (1), and the other end of the pressure sensor is fixedly connected with the connecting part (3);
the sliding clamp assembly includes: a fixed part (4) fixedly connected with the connecting part (3) and a sliding clamping part (5) capable of freely moving on the fixed part (4); the surface of one side, away from the connecting part (3), of the fixing part (4) is provided with an accommodating groove and a through hole which are adjacently arranged, and the through hole is away from the end part of the fixing part (4); the holding tank is used for holding the horizontal segment, the through-hole is used for placing the installation section.
2. The probe clamp suitable for the optoelectronic chip testing system as recited in claim 1, wherein the sliding clamping portion (5) is provided with two symmetrically arranged holding portions (8).
3. The probe holder suitable for optoelectronic chip testing system as recited in claim 2, wherein said hand-held portion (8) is detachably connected to said side wall of said sliding clamping portion (5).
4. The probe holder of claim 1, further comprising: and an auxiliary clamping part (7) for assisting the sliding clamping part (5) to clamp the photoelectric probe (6).
5. The probe clamp suitable for the optoelectronic chip testing system as recited in claim 1, wherein a connecting member is further disposed on a top of the mounting portion (1) for fixedly connecting with the adjusting seat.
6. The probe holder for optoelectronic chip testing system as recited in claim 1, wherein the connecting portion (3) is detachably connected to one end of the fixing portion (4).
7. The probe holder of claim 1, further comprising: and the control system is electrically connected with the pressure sensor (2).
CN202021851973.3U 2020-08-31 2020-08-31 Probe clamp suitable for photoelectric chip test system Active CN213658787U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021851973.3U CN213658787U (en) 2020-08-31 2020-08-31 Probe clamp suitable for photoelectric chip test system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021851973.3U CN213658787U (en) 2020-08-31 2020-08-31 Probe clamp suitable for photoelectric chip test system

Publications (1)

Publication Number Publication Date
CN213658787U true CN213658787U (en) 2021-07-09

Family

ID=76694358

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202021851973.3U Active CN213658787U (en) 2020-08-31 2020-08-31 Probe clamp suitable for photoelectric chip test system

Country Status (1)

Country Link
CN (1) CN213658787U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113820579A (en) * 2021-09-18 2021-12-21 深钛智能科技(苏州)有限公司 Semiconductor chip test system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113820579A (en) * 2021-09-18 2021-12-21 深钛智能科技(苏州)有限公司 Semiconductor chip test system
CN113820579B (en) * 2021-09-18 2022-11-29 深钛智能科技(苏州)有限公司 Semiconductor chip test system

Similar Documents

Publication Publication Date Title
US7855568B2 (en) Probe apparatus with mechanism for achieving a predetermined contact load
CN213658787U (en) Probe clamp suitable for photoelectric chip test system
CN103029039A (en) Pressure detection device and polishing equipment using the same
CN103389025A (en) Device for detecting depth of screw slot
US8360666B2 (en) Method for assembling camera module
CN104128706A (en) Compact type optical transmitting and receiving assembly clamp for coupling and welding of coaxial type photoelectric device
JP2011526364A (en) Device for clamping and fixing the reference scale
CN211123220U (en) Flat cable testing device
KR101697092B1 (en) Sublance
US8275254B2 (en) Camera module and method for assembling the same
KR102039088B1 (en) Apparatus for holding specimen
TW201346232A (en) Instrument for testing LED
CN116520219A (en) Magnetic attraction measuring device
JP2008185570A (en) Probe unit and inspection device
CN106940342B (en) Comprehensive calibration standard device of magnetic yoke type magnetic particle inspection machine
CN104259710B (en) The adjustable location type light transmitting-receiving subassembly fixture of coaxial type opto-electronic device coupling welding
CN211740861U (en) Tension clamp for detecting tensile strength of retainer
CN208644570U (en) A kind of workpiece mounting device
JP3203651U (en) Extensometer
CN113124803B (en) Screw press-fitting displacement monitoring system
CN214669324U (en) Sample fixing mechanism of dielectric loss tester
EP3290877A1 (en) Sensor assembly and liquid level detection device
CN218765658U (en) Temperature test tool
JP3123580U (en) Adhesive strength tester
CN208606990U (en) A kind of coaxial pigtail laser module testing fixture

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant