CN213616032U - Static pressure rotary supporting device for lower grinding disc of grinding machine - Google Patents
Static pressure rotary supporting device for lower grinding disc of grinding machine Download PDFInfo
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- CN213616032U CN213616032U CN202021681486.7U CN202021681486U CN213616032U CN 213616032 U CN213616032 U CN 213616032U CN 202021681486 U CN202021681486 U CN 202021681486U CN 213616032 U CN213616032 U CN 213616032U
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Abstract
The utility model discloses a static pressure rotary supporting device for a grinding disc under a grinding machine, which comprises a rotary workpiece for arranging the lower grinding disc, a static pressure rotary table arranged below the rotary workpiece, a return flow disc arranged below the static pressure rotary table and used for receiving static pressure oil, and a rotary shaft passing through the static pressure rotary table and connected with the rotary workpiece, wherein the static pressure rotary table comprises an upper working surface and a lower fixed surface, the static pressure oil is injected between the upper working surface and the lower fixed surface of the static pressure rotary table, the upper working surface floats, so that the rotary shaft drives the rotary workpiece to rotate stably, the device lifts the upper working surface of the static pressure rotary table by utilizing the static pressure oil, avoids the friction between the upper working surface and the lower fixed surface of the static pressure rotary table, ensures the stable rotation between a tray and a rotary part, improves the slicing quality of silicon wafers, and the yield, and simultaneously reduces the production cost, is suitable for popularization.
Description
Technical Field
The utility model belongs to grind quick-witted equipment field, specifically speaking relate to a grind quick-witted lower for abrasive disc static pressure gyration strutting arrangement.
Background
The grinding process of the semiconductor silicon wafer is characterized in that a grinding procedure is carried out in the process of processing the semiconductor silicon wafer, the semiconductor silicon wafer is placed between an upper grinding disc and a lower grinding disc, grinding liquid is introduced between the upper grinding disc and the lower grinding disc, the upper grinding disc and the lower grinding disc rotate in opposite directions and are used for grinding the silicon wafer, the requirement for precision in grinding processing of the semiconductor silicon wafer is high, the thickness variation of the silicon wafer is smaller than 1 micrometer, and the thickness deviation is +/-2 micrometers, so that the rotating stability and the disc surface jumping value of the upper grinding disc and the lower grinding disc need.
Among the prior art, generally use joint bearing to make the last grinding pan of grinding machine and can float the regulation in certain angle, lower grinding pan is fixed on antifriction bearing, guarantees the rotation stationarity of grinding pan down through the antifriction bearing of high accuracy, owing to guarantee antifriction bearing's high accuracy, therefore antifriction bearing's life is shorter relatively, in case antifriction bearing wearing and tearing, the precision demand is extremely easily unsatisfied to the semiconductor silicon chip of grinding, and the frequent change ball bearing also can increase manufacturing cost.
Accordingly, further developments and improvements are still needed in the art.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problems, the present invention provides a static pressure rotary support device for a lower grinding disc of a grinding machine, which has the advantages of good stability, small end face run-out value, long service life and suitability for popularization.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a grind machine is static pressure gyration strutting arrangement for abrasive disc down, its is including the rotating workpiece who is used for setting up abrasive disc down, set up in the static pressure revolving stage of rotating workpiece below, set up the backward flow dish that is used for accepting static pressure oil under the static pressure revolving stage and pass static pressure revolving stage and backward flow dish and rotating workpiece connected's pivot, the static pressure revolving stage includes working face and lower stationary plane, static pressure oil is through pouring into on the static pressure revolving stage between working face and the lower stationary plane, goes up the working face and floats to realize the pivot and drive the steady rotation of rotating workpiece.
Preferably, the static pressure rotary table is a constant pressure static pressure rotary table.
Preferably, the static pressure rotary table is provided with an oil inlet, and the oil inlet is arranged along the outer edge of the static pressure rotary table.
Preferably, the maximum floating height of the working surface on the static pressure rotary table is 0.01-0.04mm, and the lower fixing surface is provided with an oil outlet.
Preferably, the backflow disc is provided with an annular oil storage groove for receiving the static pressure oil flowing out of the oil outlet, and an oil outlet pipe for discharging the static pressure oil is arranged at the bottom of the oil storage groove.
Preferably, the static pressure station is used for pumping static pressure oil into the static pressure rotary table, the static pressure station is provided with an oil inlet pipe and an oil outlet pipe, the static pressure station pumps the static pressure oil into the static pressure rotary table through the oil inlet pipe, and the static pressure oil in the return disc is recovered into the static pressure station through the oil outlet pipe.
Preferably, the device further comprises a tray for connecting the rotating workpiece and the rotating shaft, and the tray is arranged on the upper end face of the working face of the static pressure turntable.
Preferably, the middle of the lower surface of the tray protrudes and two sides of the lower surface of the tray are sunken, the edge of the lower surface of the tray is provided with a protrusion, and the upper end surface of the upper working surface of the static pressure turntable corresponds to the lower surface of the tray and is sunken and two sides of the lower surface of the tray protrude.
Has the advantages that:
the utility model provides a grind machine under for abrasive disc static pressure gyration strutting arrangement, the device utilize the static pressure oil to lift up the working face on the static pressure revolving stage, avoided the friction between working face and the lower stationary plane on the static pressure revolving stage to ensured the steady rotation between tray and the rotary part, improved the one-tenth piece quality of silicon chip, and the yields has reduced manufacturing cost simultaneously, is fit for promoting.
Drawings
Fig. 1 is a schematic structural view of a static pressure rotary supporting device for a lower grinding disc of a grinding machine according to an embodiment of the present invention;
fig. 2 is a schematic cross-sectional view of a static pressure rotary supporting device for a lower grinding plate of a grinding machine according to an embodiment of the present invention.
In the drawings: 100 rotating workpieces, 200 static pressure rotary tables, 210 oil inlet pipes, 220 upper working surfaces, 230 lower fixing surfaces, 300 return trays, 310 oil storage tanks, 320 oil outlet pipes, 400 rotating shafts, 500 static pressure stations and 600 pallets.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following description, together with the drawings of the present invention, clearly and completely describes the technical solution of the present invention, and based on the embodiments in the present application, other similar embodiments obtained by those skilled in the art without creative efforts shall all belong to the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustration and not for limitation of the present invention.
Specific example 1:
as shown in fig. 1 and 2, the utility model provides a grind static pressure gyration strutting arrangement for abrasive disc under machine, it is including the rotatory work piece 100 that is used for setting up abrasive disc down, set up in static pressure revolving stage 200 of rotatory work piece 100 below, set up be used for accepting the backward flow dish 300 of static pressure oil under static pressure revolving stage 200, and pass static pressure revolving stage 200 and backward flow dish 300 and the pivot 400 that rotatory work piece 100 is connected, static pressure revolving stage 200 includes working face 220 and lower stationary plane 230, static pressure oil is through pouring into on the static pressure revolving stage between working face 220 and the lower stationary plane 230, goes up working face 220 and floats to realize that pivot 400 drives the steady rotation of rotatory work piece 100.
Specifically, the static pressure rotary table 200 is a constant pressure type static pressure rotary table, which can ensure that the pressure of static pressure oil in the static pressure rotary table 400 is stable, and can ensure that the floating height is unchanged under the condition of unchanged load, thereby ensuring the stability of the static pressure rotary table 400.
Specifically, the static pressure rotary table 200 is provided with an oil inlet, and the oil inlet is arranged along the outer edge of the static pressure rotary table 200, so that static pressure oil can enter between the upper working surface 220 and the lower fixing surface 230 of the static pressure rotary table to lift the upper working surface 220, so that the upper working surface 220 is separated from contact with the lower fixing surface 230, and the end face runout value during grinding is reduced.
Specifically, the maximum floating height of the working surface 220 on the static pressure turntable is 0.01-0.04mm, and an oil outlet is formed in the lower fixing surface.
In the preferred embodiment, the maximum floating height of the working surface 220 on the static pressure turntable is 0.02mm
Specifically, the backflow disc 300 is provided with an annular oil storage tank 310 for receiving the static pressure oil flowing out of the oil drainage tube, and an oil outlet pipe 320 for discharging the static pressure oil is arranged at the bottom of the oil storage tank 310.
Specifically, the static pressure station 500 for pumping static pressure oil into the static pressure rotary table 200 is further included, the static pressure station 500 is provided with an oil inlet pipe 210 and an oil outlet pipe 320, the static pressure station 500 pumps the static pressure oil into the static pressure rotary table 200 through the oil inlet pipe 210, the static pressure oil in the return disc 300 is recovered into the static pressure station 500 through the oil outlet pipe 320, an oil cooling system is arranged in the static pressure station 500, the circulated static pressure oil is cooled through the oil cooling system and then pumped into the static pressure rotary table 200 again through the static pressure station 500 for recycling, waste of the static pressure oil is reduced, and production cost is reduced.
Specifically, the device further comprises a tray 600 for connecting the rotating workpiece 100 and the rotating shaft 400, wherein the tray 600 is arranged on the upper end face of the working face 220 on the static pressure turntable.
Specifically, protruding both sides are sunken in the middle of the tray 600 lower surface, and tray 600 lower surface edge is provided with the arch, the sunken both sides protrusion in the middle of the corresponding tray 600 lower surface of last working face 220 up end of static pressure revolving stage, through the inseparable cooperation of working face terminal surface on tray 600 lower surface and the static pressure revolving stage, make tray 600 rotate along with the rotation of working face 220 on the static pressure revolving stage, avoided because both connect inseparable enough and cause tray 600 and static pressure revolving stage on the working face 220 asynchronous rotation, cause the friction between them, and then produce wearing and tearing, influence the quality of flaking of silicon chip.
In a preferred embodiment, the oil inlet pipe 210 is arranged around the outer surface of the whole static pressure rotary table 200, a plurality of oil inlets are arranged in the static pressure rotary table 200 corresponding to the oil inlet pipe 210, and the arrangement of the plurality of oil inlets can enable static pressure oil to enter the static pressure rotary table 200 more uniformly, so that the phenomenon that the working surface 220 on the static pressure rotary table 200 turns on one side due to the fact that the static pressure oil enters from one side is avoided, and the use of a lower grinding disc of a grinding machine is influenced.
In a preferred embodiment, the number of the oil outlet drainage tubes is 20, each oil outlet drainage tube is correspondingly provided with one oil outlet pipe 320, the oil outlet drainage tubes are tightly attached to the outer wall of the oil storage tank 310, and the oil outlet pipes 320 are arranged inside the oil storage tank 310.
In a preferred embodiment, the tray 600 is provided with bolt holes for connecting the rotating shaft 400, and the tray 600 is fixedly connected with the rotating shaft 400 through bolts, so that the rotating shaft 400 drives the tray 600 to rotate stably.
In a preferred embodiment, the tray 600 is provided with three positioning pins, the distance between any two positioning pins of the three positioning pins is equal, one of the three positioning pins is a cylindrical positioning pin, the other positioning pins are rhombic positioning pins, and the three positioning pins can ensure that the workpiece is completely positioned and the tray 600 and the working surface 220 on the static pressure rotary table keep synchronous rotation.
Specific example 2:
the same parts in this embodiment as those in embodiment 1 are not described again, but the differences are:
in a specific embodiment, the lower fixing surface 230 of the static pressure turntable is provided with an oil outlet drainage tube, the upper working surface 220 of the static pressure turntable is provided with a drainage cavity for receiving the upper end of the oil outlet drainage tube, the drainage cavity is provided with a drainage seal for preventing static pressure oil from entering, the oil outlet drainage tube penetrates through the lower fixing surface through an oil outlet, the lower end of the oil outlet drainage tube is fixedly arranged on the lower end surface of the lower fixing surface 230, the oil outlet drainage tube is arranged in the drainage cavity of the upper working surface 220 of the pressure reduction turntable and seals the drainage cavity, so that static pressure oil cannot flow out of the oil outlet drainage tube in the floating process of the upper working surface 220 of the static pressure turntable, and the rising height of the upper working surface 220 of the static pressure turntable can reach the specified height.
In a specific embodiment, the drainage cavity is equal to the maximum floating height of the working surface 220 on the static pressure rotary table, when the working surface 220 on the static pressure rotary table floats to the maximum height, the static pressure station 500 continuously transfers oil into the static pressure rotary table 200, and the oil outlet drainage tube in the drainage cavity outputs redundant static pressure oil input into the static pressure station 500 and output to the static pressure rotary table 200, so that the working surface 220 on the static pressure rotary table is prevented from continuously floating, meanwhile, the circulating static pressure oil can play a role in cooling, and sealing failure caused by heat generated by high-speed rotation of the static pressure rotary table 200 can be prevented.
The specific working method of the embodiment of the utility model is as follows: the static pressure station 500 is started, static pressure oil is pumped into the static pressure rotary table 200 through the static pressure station 500, the static pressure oil lifts the upper working surface 220 of the static pressure rotary table, after the upper working surface 220 is lifted to a specified height, the static pressure oil flows into the oil storage tank 310 of the backflow disc 300 along with the oil outlet drainage pipe and flows out of the oil storage tank 310, the static pressure oil flows back into the static pressure station 500 through the oil outlet pipe 320, the static pressure oil is cooled through an oil cooling system in the static pressure station 500, the static pressure oil is re-pumped into the static pressure rotary table 200 after being cooled, recycling of the static pressure oil is achieved, after the oil outlet pipe 320 starts to flow back to the static pressure station 500, the static pressure rotary table 200 is preheated, after preheating, a power system is started, the rotating shaft 400 is driven to drive the tray 600 and the rotary workpiece 100 to stably rotate on the liquid level of the static pressure oil, and the.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the scope of the invention, i.e. the present invention is intended to cover all equivalent variations and modifications within the scope of the present invention.
Claims (8)
1. The static pressure rotary supporting device for the lower grinding disc of the grinding machine is characterized by comprising a rotating workpiece, a static pressure rotary table, a backflow disc and a rotating shaft, wherein the rotating workpiece is used for arranging the lower grinding disc, the static pressure rotary table is arranged below the rotating workpiece, the backflow disc is arranged below the static pressure rotary table and is used for bearing static pressure oil, and the rotating shaft penetrates through the static pressure rotary table and the backflow disc to be connected with the rotating workpiece.
2. The static pressure rotary supporting device for the lower grinding disc of the grinding machine according to claim 1, wherein the static pressure rotary table is a constant pressure type static pressure rotary table.
3. The static pressure rotary supporting device for the lower grinding disc of the grinding machine according to claim 1, wherein the static pressure rotary table is provided with an oil inlet, and the oil inlet is arranged along the outer edge of the static pressure rotary table.
4. The static pressure rotary supporting device for the lower grinding disc of the grinding machine as claimed in claim 2, wherein the maximum floating height of the working surface of the static pressure rotary table is 0.01-0.04mm, and the oil outlet is arranged on the lower fixing surface.
5. The static pressure rotary supporting device for the grinding disc under the grinding machine according to claim 4, wherein the return disc is provided with an annular oil storage groove for receiving the static pressure oil flowing out from the oil outlet, and the bottom of the oil storage groove is provided with an oil outlet pipe for discharging the static pressure oil.
6. The static pressure rotary supporting device for the lower grinding disc of the grinding machine as claimed in claim 5, further comprising a static pressure station for pumping static pressure oil into the static pressure rotary table, wherein the static pressure station is provided with an oil inlet pipe and an oil outlet pipe, the static pressure station pumps the static pressure oil into the static pressure rotary table through the oil inlet pipe, and the static pressure oil in the return disc is recovered into the static pressure station through the oil outlet pipe.
7. The static pressure rotary supporting device for the lower grinding disc of the grinding machine according to claim 1, further comprising a tray for connecting the rotating workpiece and the rotating shaft, wherein the tray is provided on the upper end surface of the upper working surface of the static pressure rotary table.
8. The static pressure rotary supporting device for the lower grinding disc of the grinding machine according to claim 7, wherein the lower surface of the tray is convex in the middle and concave on two sides, the edge of the lower surface of the tray is provided with a protrusion, and the upper end surface of the upper working surface of the static pressure rotary table is convex corresponding to the lower surface of the tray and concave on two sides in the middle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021681486.7U CN213616032U (en) | 2020-08-12 | 2020-08-12 | Static pressure rotary supporting device for lower grinding disc of grinding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021681486.7U CN213616032U (en) | 2020-08-12 | 2020-08-12 | Static pressure rotary supporting device for lower grinding disc of grinding machine |
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| Publication Number | Publication Date |
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| CN213616032U true CN213616032U (en) | 2021-07-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202021681486.7U Active CN213616032U (en) | 2020-08-12 | 2020-08-12 | Static pressure rotary supporting device for lower grinding disc of grinding machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116945012A (en) * | 2023-09-04 | 2023-10-27 | 西可装备制造(衡阳)有限公司 | Polishing apparatus |
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2020
- 2020-08-12 CN CN202021681486.7U patent/CN213616032U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116945012A (en) * | 2023-09-04 | 2023-10-27 | 西可装备制造(衡阳)有限公司 | Polishing apparatus |
| CN116945012B (en) * | 2023-09-04 | 2024-03-26 | 西可装备制造(衡阳)有限公司 | Polishing apparatus |
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