CN102765047A - Hydrostatic rotational supporting component for vertical shafting and grinding and polishing machine - Google Patents
Hydrostatic rotational supporting component for vertical shafting and grinding and polishing machine Download PDFInfo
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- CN102765047A CN102765047A CN2012102782733A CN201210278273A CN102765047A CN 102765047 A CN102765047 A CN 102765047A CN 2012102782733 A CN2012102782733 A CN 2012102782733A CN 201210278273 A CN201210278273 A CN 201210278273A CN 102765047 A CN102765047 A CN 102765047A
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Abstract
The invention discloses a hydrostatic rotational supporting component for a vertical shafting, comprising an upper hydrostatic bearing, a lower hydrostatic bearing, a thrust ring, an inner sleeve and an outer sleeve. The inner sleeve is connected with a rotational component; the outer sleeve is connected with a fixed component; the upper part of the inner sleeve is provided with a thrust shaft shoulder; the thrust ring is fixed on the lower part of the inner sleeve; the outer sleeve is sleeved outside the inner sleeve; the inner wall of the outer sleeve is provided with a thrust lug boss; the thrust lug boss is located between the thrust shaft shoulder and the thrust ring; the upper hydrostatic bearing is arranged between the thrust shaft shoulder and the thrust ring; and the lower hydrostatic bearing is arranged between the thrust shaft shoulder and the thrust ring. The hydrostatic rotational supporting component for the vertical shafting is simple and compact in structure and convenient to overhaul, can be assembled and disassembled rapidly and conveniently, has high rotating precision, is very suitable for precision and ultra-precision grinding. The invention also discloses a grinding and polishing machine, wherein the main shaft of the lower grinding disc of the grinding and polishing machine is driven by the hydrostatic rotational supporting component.
Description
Technical field
The present invention relates to the fluid pressure rotation supporting structure and the accurate ultra polisher lapper of vertical shaft system, relate in particular to the fluid pressure rotating support assembly and the polisher lapper that are used for vertical shaft system.
Background technology
The accurate ultra polisher lapper is mainly used in single face, the twin grinding to non-metallic materials such as Sapphire Substrate, crystal, silicon chip, photoelectric material, optical glass, mobile phone glass, handset touch panel, potsherd, quartz plate, graphite-seal ring and Silicon Wafers, can also be used for single face, twin grinding processing to various metal materials such as copper, iron, aluminium, stainless steel, mould steel, plastics, aluminium alloy, kirsite, titanium alloy, nickel alloy, ashbury metal, carbide alloy, carbon steel and wolfram steel.The rotor of polisher lapper is as core component, and the height of its performance directly has influence on the integral level of accurate ultra polisher lapper, and rotor bearing is to the even running important influence of lathe.
At present, the rotor that is applied to the accurate ultra polisher lapper is mainly the parts of roller bearings.Its weak point is: (1) this rotor part is not independent functional part, can not manufacture and design separately, and the precision that is assembled to the integral grinding polishing machine depends on the precision of sleeve and inner shaft system; Assembly period is long; Cost is high, and assembly precision should not guarantee, the repair demolition difficulty; (2) rolling bearing in the roller bearing component is a rotary work under contact condition, inevitably has fretting wear and fatigue wear, and service life is shorter, after work a period of time, must take main shaft apart and keep in repair.Therefore the rotor of existing accurate ultra polisher lapper be not suitable for short production cycle, assembly precision is high, the grinding and polishing precision high, repair demolition requirement easily.
Hydrodynamic journal liquid polymers are because the effect that bearing capacity is strong, lubricant medium has damping vibration attenuation and " homogenizing " error; Therefore adopt hydrodynamic journal liquid polymers high, be very suitable for spindle unit as the accurate ultra equipment for grinding as mechanical production devices main shaft good rigidly, the rotating accuracy of supporting.But the fluid pressure rotor is used for the accurate ultra polisher lapper, and needs solve inside and outside sleeve in the structural design, go up radial-thrust bearing, descend structure difficult problems such as radial-thrust bearing, oil-feed oil return.
Summary of the invention
The technical problem that the present invention will solve is the deficiency that overcomes prior art, provide a kind of simple and compact for structure, can be quickly and easily to its carry out dismounting, be convenient to its overhaul, rotating accuracy is high, be very suitable for the fluid pressure rotating support assembly that is used for vertical shaft system of accurate ultra attrition process and the polisher lapper with this bearing assembly.
For solving the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of fluid pressure rotating support assembly that is used for vertical shaft system; Comprise hydrodynamic journal liquid polymers, following hydrodynamic journal liquid polymers, thrust ring, the interior cover that is connected with revolving part and the overcoat that is connected with fixture; Cover top is provided with the thrust shaft shoulder in said, and said thrust ring is fixed in said interior cover bottom, and said overcoat is sheathed on outside the interior cover; Said outer casing inner wall is provided with the thrust boss; Said thrust boss is between the thrust shaft shoulder and thrust ring, and the said hydrodynamic journal liquid polymers of going up are installed between the thrust shaft shoulder and the thrust boss, and said hydrodynamic journal liquid polymers down are installed between thrust boss and the thrust ring.
The side that said upward hydrodynamic journal liquid polymers and interior cover join is provided with journal bearing fluid pressure oil pocket, and the side that the said upward hydrodynamic journal liquid polymers and the thrust shaft shoulder join is provided with thrust bearing fluid pressure oil pocket.
The side that said hydrodynamic journal liquid polymers down and interior cover join is provided with lower radial bearing fluid pressure oil pocket, and the side that said hydrodynamic journal liquid polymers down and thrust ring join is provided with down thrust bearing fluid pressure oil pocket.
Said overcoat top is provided with the last oil-in into last journal bearing fluid pressure oil pocket and last thrust bearing fluid pressure oil pocket fuel feeding, and said overcoat bottom is provided with the following oil-in into lower radial bearing fluid pressure oil pocket and following thrust bearing fluid pressure oil pocket fuel feeding.
The said hydrodynamic journal liquid polymers of going up are respectively equipped with a upward draining annular groove in last thrust bearing fluid pressure oil pocket both sides; Going up draining annular groove set last link slot on last hydrodynamic journal liquid polymers for two is communicated with; Said hydrodynamic journal liquid polymers down are respectively equipped with a following draining annular groove in following thrust bearing fluid pressure oil pocket both sides, set following link slot connection on the hydrodynamic journal liquid polymers under said two following draining annular grooves warps.
Form oil back chamber between said thrust boss and the interior cover lateral wall; Said outer putting is provided with the oil drain out that is communicated with oil back chamber; The said side of joining with interior cover on the hydrodynamic journal liquid polymers that goes up is provided with drainback passage; Said drainback passage one end of going up is communicated with last draining annular groove and last journal bearing fluid pressure oil pocket, and the other end is communicated with oil back chamber, and a side of joining with interior cover on the said hydrodynamic journal liquid polymers down is provided with down drainback passage; Said drainback passage one end down is communicated with following draining annular groove and lower radial bearing fluid pressure oil pocket, and the other end is communicated with oil back chamber.
Be provided with inboard seal between said thrust ring and the interior cover, said thrust ring outer circumference face is provided with the outer seal mounting groove.
A kind of polisher lapper; Comprise frame, top lap, following abrasive disk, top lap main shaft and following abrasive disk main shaft; Said top lap is by the top lap main shaft drives; Said abrasive disk down is by following abrasive disk main shaft drives, and said abrasive disk main shaft down is to be sheathed on the outer hollow shaft of top lap main shaft, and said abrasive disk main shaft down is installed in said frame through the above-mentioned fluid pressure rotating support assembly that is used for vertical shaft system.
Interior set upper side in the said bearing assembly and following abrasive disk main shaft are affixed, and the lower end is connected with the power source that is used to drive down abrasive disk, and the overcoat in the said bearing assembly is fixedly connected with frame.
Said polisher lapper also comprises the piece-holder dish, is provided with the piece-holder dish axle system that is used to drive said piece-holder dish between said top lap main shaft and the following abrasive disk main shaft.
Compared with prior art, the invention has the advantages that:
The fluid pressure rotating support assembly that is used for vertical shaft system of the present invention; Mainly constitute by last hydrodynamic journal liquid polymers, following hydrodynamic journal liquid polymers, thrust ring, interior cover and overcoat; It is simple and compact for structure, can carry out dismounting to it quickly and easily, is convenient to it is overhauled; It is that radial and axial support is provided that this bearing assembly can be various vertical shaft; The effect that its bearing capacity is strong, lubricant medium has damping vibration attenuation and " homogenizing " error; The main shaft of vertical shaft system is operated steadily and good rigidly, rotating accuracy high, be very suitable for precision, ultraprecision grinding processing.Last thrust bearing fluid pressure oil pocket and last journal bearing fluid pressure oil pocket are integrated in same going up on the hydrodynamic journal liquid polymers; Following thrust bearing fluid pressure oil pocket and lower radial bearing fluid pressure oil pocket are integrated on the same hydrodynamic journal liquid polymers once; This structure make to be installed and is processed convenient; Can reduce production costs, enhance productivity.Last hydrodynamic journal liquid polymers offer independently oil-feed port respectively with following hydrodynamic journal liquid polymers; Can realize two hydrodynamic journal liquid polymers independent oil supplies up and down; Thereby can regulate and control up and down the oil pressure in the hydrodynamic journal liquid polymers chamber in two hydrodynamic journal liquid polymers very easily, with satisfy under disalignment system or the different operating mode to about the various requirement of two hydrodynamic journal liquid polymers.The draining oil channel structures is simple and reliable, can in time discharge, reclaim fluid.Between thrust ring and interior cover, be provided with inboard seal,, on thrust ring outer circumference face, be provided with the outer seal mounting groove to realize inboard sealing, so that cooperate the installation outer seal with the adjacent component of vertical shaft system, thus realize the sealing in the outside.Polisher lapper of the present invention grinds the dish main shaft down through the above-mentioned fluid pressure rotating support assembly supporting that is used for vertical shaft system, and its bearing capacity is strong, operate steadily and good rigidly, rotating accuracy height, and the attrition process precision is improved significantly.
Description of drawings
Fig. 1 is the structural representation of bearing assembly of the present invention.
Fig. 2 is the structural representation of polisher lapper of the present invention.
Each label is represented among the figure:
1, goes up hydrodynamic journal liquid polymers; 2, following hydrodynamic journal liquid polymers; 3, thrust ring; 4, interior cover; 5, overcoat; 6, oil back chamber; 7, Thrust nut; 8, inboard seal; 9, outer seal mounting groove; 11, go up journal bearing fluid pressure oil pocket; 12, go up thrust bearing fluid pressure oil pocket; 13, go up the draining annular groove; 14, go up link slot; 15, go up drainback passage; 21, lower radial bearing fluid pressure oil pocket; 22, following thrust bearing fluid pressure oil pocket; 23, following draining annular groove; 24, following link slot; 25, following drainback passage; 41, the thrust shaft shoulder; 51, thrust boss; 52, oil drain out; 53, go up oil-in; 54, following oil-in; 100, frame; 200, top lap; 300, following abrasive disk; 400, top lap main shaft; 500, following abrasive disk main shaft; 600, piece-holder dish; 700, piece-holder dish axle system.
The specific embodiment
Fig. 1 shows a kind of fluid pressure rotating support assembly embodiment that is used for vertical shaft system of the present invention; This bearing assembly comprises hydrodynamic journal liquid polymers 1, following hydrodynamic journal liquid polymers 2, thrust ring 3, Thrust nut 7, the interior cover 4 that is connected with revolving part and the overcoat 5 that is connected with fixture; Interior cover 4 tops are provided with the thrust shaft shoulder 41; Thrust nut 7 is connected with interior cover 4 lower thread, and Thrust nut 7 upper ends push against thrust ring 3 lower ends and thrust ring 3 is fixed in interior cover 4 bottoms, overlap outside 4 in overcoat 5 is sheathed on; Overcoat 5 inwalls are provided with thrust boss 51; Thrust boss 51 is between the thrust shaft shoulder 41 and thrust ring 3, and last hydrodynamic journal liquid polymers 1 are installed between the thrust shaft shoulder 41 and the thrust boss 51, and following hydrodynamic journal liquid polymers 2 are installed between thrust boss 51 and the thrust ring 3.The fluid pressure rotating support assembly that is used for vertical shaft system of the present invention, it is simple and compact for structure, can carry out dismounting to it quickly and easily, is convenient to it is overhauled; It is that radial and axial support is provided that this bearing assembly can be various vertical shaft; The effect that its bearing capacity is strong, lubricant medium has damping vibration attenuation and " homogenizing " error; The main shaft of vertical shaft system is operated steadily and good rigidly, rotating accuracy high, be very suitable for precision, precision grinding machining.
In the present embodiment, last hydrodynamic journal liquid polymers 1 are provided with journal bearing fluid pressure oil pocket 11 with the side that interior cover 4 joins, and last hydrodynamic journal liquid polymers 1 are provided with thrust bearing fluid pressure oil pocket 12 with the side that the thrust shaft shoulder 41 joins; Following hydrodynamic journal liquid polymers 2 are provided with lower radial bearing fluid pressure oil pocket 21 with the side that interior cover 4 joins; Following hydrodynamic journal liquid polymers 2 are provided with down thrust bearing fluid pressure oil pocket 22 with the side that thrust ring 3 joins; Last thrust bearing fluid pressure oil pocket 12 all is integrated on the hydrodynamic journal liquid polymers 1 with last journal bearing fluid pressure oil pocket 11; Following thrust bearing fluid pressure oil pocket 22 all is integrated in down on the hydrodynamic journal liquid polymers 2 with lower radial bearing fluid pressure oil pocket 21; This structure make to be installed and processes convenient, can reduce production costs, and enhances productivity.
In the present embodiment; Overcoat 5 tops are provided with the last oil-in 53 into last journal bearing fluid pressure oil pocket 11 and last thrust bearing fluid pressure oil pocket 12 fuel feeding; Overcoat 5 bottoms are provided with the following oil-in 54 into lower radial bearing fluid pressure oil pocket 21 and following thrust bearing fluid pressure oil pocket 22 fuel feeding; For last hydrodynamic journal liquid polymers 1 are offered independently oil-in respectively with following hydrodynamic journal liquid polymers 2; Can realize two hydrodynamic journal liquid polymers independent oil supplies up and down; Thereby can be very easily the oil pressure in the hydrodynamic journal liquid polymers chamber in two hydrodynamic journal liquid polymers be up and down regulated and control separately respectively, to satisfy under disalignment system or the different operating mode to the various requirement of two hydrodynamic journal liquid polymers up and down.
In the present embodiment; Last hydrodynamic journal liquid polymers 1 are respectively equipped with one and go up draining annular groove 13 in last thrust bearing fluid pressure oil pocket 12 both sides; Going up draining annular groove 13 set last link slot 14 on last hydrodynamic journal liquid polymers 1 for two is communicated with; Following hydrodynamic journal liquid polymers 2 are respectively equipped with set following link slot 24 connections on the hydrodynamic journal liquid polymers 2 under 23, two following draining annular grooves 23 warps of a following draining annular groove in following thrust bearing fluid pressure oil pocket 22 both sides; Form oil back chamber 6 between thrust boss 51 and interior cover 4 lateral walls; Overcoat 5 is provided with the oil drain out 52 that is communicated with oil back chamber 6; One side of joining with interior cover 4 on the last hydrodynamic journal liquid polymers 1 is provided with drainback passage 15; Last drainback passage 15 1 ends are communicated with last journal bearing fluid pressure oil pocket 11 with last draining annular groove 13, and the other end is communicated with oil back chamber 6, and a side of joining with interior cover 4 on the following hydrodynamic journal liquid polymers 2 is provided with down drainback passage 25; Following drainback passage 25 1 ends are communicated with lower radial bearing fluid pressure oil pocket 21 with following draining annular groove 23, and the other end is communicated with oil back chamber 6.This draining oil channel structures is simple and reliable, can in time discharge and reclaim fluid.
In the present embodiment, be provided with inboard seal 8 between thrust ring 3 and the interior cover 4, to realize inboard sealing; Thrust ring 3 outer circumference faces are provided with outer seal mounting groove 9, so that cooperate the installation outer seal with the adjacent component of vertical shaft system, thus realize the sealing in the outside.
Fig. 1 and Fig. 2 show a kind of polisher lapper embodiment of the present invention; This polisher lapper comprises frame 100, top lap 200, following abrasive disk 300, top lap main shaft 400 and following abrasive disk main shaft 500; Top lap 200 is driven by top lap main shaft 400; Following abrasive disk 300 is by abrasive disk main shaft 500 drivings down, and following abrasive disk main shaft 500 is for being sheathed on the hollow shaft outside the top lap main shaft 400, and following abrasive disk main shaft 500 is installed in frame 100 through the fluid pressure rotating support assembly that is used for vertical shaft system shown in above-mentioned embodiment; Interior cover 4 upper ends in the bearing assembly and following abrasive disk main shaft 500 are affixed; The lower end is connected with the power source that is used to drive down abrasive disk 300, and the overcoat 5 in the bearing assembly is fixedly connected with frame 100, and this structure has improved bearing capacity greatly, abrasive disk main shaft 500 and following abrasive disk 300 are operated steadily; And good rigidly, rotating accuracy height, the attrition process precision is improved significantly.
In the present embodiment; Polisher lapper also further comprises piece-holder dish 600; Being provided with the piece-holder dish axle that is used to drive piece-holder dish 600 between top lap main shaft 400 and the following abrasive disk main shaft 500 is 700; This piece-holder dish axle is 700 to have adopted the planetary gear drive mechanism, and the grinding that workpiece is received is more even.
Though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention.Any those of ordinary skill in the art, under the situation that does not break away from technical scheme scope of the present invention, all the technology contents of above-mentioned announcement capable of using is made many possible changes and modification to technical scheme of the present invention, or is revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not break away from technical scheme of the present invention, all should drop in the scope of technical scheme protection of the present invention any simple modification, equivalent variations and modification that above embodiment did according to technical spirit of the present invention.
Claims (10)
1. one kind is used for the fluid pressure rotating support assembly that vertical shaft is; It is characterized in that: comprise hydrodynamic journal liquid polymers (1), following hydrodynamic journal liquid polymers (2), thrust ring (3), the interior cover (4) that is connected with revolving part and the overcoat (5) that is connected with fixture; Cover (4) top is provided with the thrust shaft shoulder (41) in said; Said thrust ring (3) is fixed in said interior cover (4) bottom; Said overcoat (5) is sheathed on outside the interior cover (4), and said overcoat (5) inwall is provided with thrust boss (51), and said thrust boss (51) is positioned between the thrust shaft shoulder (41) and the thrust ring (3); The said hydrodynamic journal liquid polymers (1) of going up are installed between the thrust shaft shoulder (41) and the thrust boss (51), and said hydrodynamic journal liquid polymers (2) down are installed between thrust boss (51) and the thrust ring (3).
2. the fluid pressure rotating support assembly that is used for vertical shaft system according to claim 1; It is characterized in that: the said hydrodynamic journal liquid polymers (1) of going up are provided with journal bearing fluid pressure oil pocket (11) with the side that interior cover (4) joins, and the said hydrodynamic journal liquid polymers (1) of going up are provided with thrust bearing fluid pressure oil pocket (12) with the side that the thrust shaft shoulder (41) joins.
3. the fluid pressure rotating support assembly that is used for vertical shaft system according to claim 2; It is characterized in that: said hydrodynamic journal liquid polymers (2) down are provided with lower radial bearing fluid pressure oil pocket (21) with the side that interior cover (4) joins, and said hydrodynamic journal liquid polymers (2) down are provided with down thrust bearing fluid pressure oil pocket (22) with the side that thrust ring (3) joins.
4. the fluid pressure rotating support assembly that is used for vertical shaft system according to claim 3; It is characterized in that: said overcoat (5) top is provided with the last oil-in (53) into last journal bearing fluid pressure oil pocket (11) and last thrust bearing fluid pressure oil pocket (12) fuel feeding, and said overcoat (5) bottom is provided with the following oil-in (54) into lower radial bearing fluid pressure oil pocket (21) and following thrust bearing fluid pressure oil pocket (22) fuel feeding.
5. according to claim 3 or the 4 described fluid pressure rotating support assemblies that are used for vertical shaft system; It is characterized in that: the said hydrodynamic journal liquid polymers (1) of going up are respectively equipped with a upward draining annular groove (13) in last thrust bearing fluid pressure oil pocket (12) both sides; Go up draining annular groove (13) for two and go up set last link slot (14) connection through last hydrodynamic journal liquid polymers (1); Said hydrodynamic journal liquid polymers (2) down are respectively equipped with a following draining annular groove (23) in following thrust bearing fluid pressure oil pocket (22) both sides, and said two following draining annular grooves (23) warp upward set following link slot (24) of hydrodynamic journal liquid polymers (2) down is communicated with.
6. the fluid pressure rotating support assembly that is used for vertical shaft system according to claim 5; It is characterized in that: form oil back chamber (6) between said thrust boss (51) and interior cover (4) lateral wall; Said overcoat (5) is provided with the oil drain out (52) that is communicated with oil back chamber (6); The said hydrodynamic journal liquid polymers (1) of going up upward are provided with drainback passage (15) with the side that interior cover (4) joins; Said drainback passage (15) one ends of going up are communicated with last draining annular groove (13) and last journal bearing fluid pressure oil pocket (11); The other end is communicated with oil back chamber (6); Said hydrodynamic journal liquid polymers (2) are down gone up a side of joining with interior cover (4) and are provided with down drainback passage (25), and said drainback passage (25) one ends down are communicated with following draining annular groove (23) and lower radial bearing fluid pressure oil pocket (21), and the other end is communicated with oil back chamber (6).
7. the fluid pressure rotating support assembly that is used for vertical shaft system according to claim 5; It is characterized in that: be provided with inboard seal (8) between said thrust ring (3) and the interior cover (4), said thrust ring (3) outer circumference face is provided with outer seal mounting groove (9).
8. polisher lapper; Comprise frame (100), top lap (200), following abrasive disk (300), top lap main shaft (400) and following abrasive disk main shaft (500); Said top lap (200) is driven by top lap main shaft (400); Said abrasive disk (300) down is by abrasive disk main shaft (500) driving down; Said abrasive disk main shaft (500) down is characterized in that for to be sheathed on the hollow shaft outside the top lap main shaft (400): said abrasive disk main shaft (500) down is through being installed in said frame (100) like each described fluid pressure rotating support assembly that is used for vertical shaft system in the claim 1 to 7.
9. polisher lapper according to claim 8; It is characterized in that: interior cover (4) upper end in the said bearing assembly is affixed with following abrasive disk main shaft (500); The lower end is connected with the power source that is used to drive down abrasive disk (300), and the overcoat in the said bearing assembly (5) is fixedly connected with frame (100).
10. polisher lapper according to claim 8; It is characterized in that: said polisher lapper also comprises piece-holder dish (600), is provided with the piece-holder dish axle system (700) that is used to drive said piece-holder dish (600) between said top lap main shaft (400) and the following abrasive disk main shaft (500).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210278273.3A CN102765047B (en) | 2012-08-07 | 2012-08-07 | Hydrostatic rotational supporting component for vertical shafting and grinding and polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210278273.3A CN102765047B (en) | 2012-08-07 | 2012-08-07 | Hydrostatic rotational supporting component for vertical shafting and grinding and polishing machine |
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| Publication Number | Publication Date |
|---|---|
| CN102765047A true CN102765047A (en) | 2012-11-07 |
| CN102765047B CN102765047B (en) | 2014-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210278273.3A Active CN102765047B (en) | 2012-08-07 | 2012-08-07 | Hydrostatic rotational supporting component for vertical shafting and grinding and polishing machine |
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| CN (1) | CN102765047B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103659587A (en) * | 2013-12-04 | 2014-03-26 | 西安交通大学苏州研究院 | Axial-locking prevention static pressure main shaft structure of radial thrust combined bearing support |
| CN107559261A (en) * | 2017-10-25 | 2018-01-09 | 烟台比吉流体控制技术有限公司 | A kind of hydrostatic support formula hydraulic cylinder end cover |
| CN107575429A (en) * | 2017-10-25 | 2018-01-12 | 烟台比吉流体控制技术有限公司 | A kind of hydrostatic support formula servo oscillating hydraulic cylinder and apply its plant equipment |
| CN107605845A (en) * | 2017-10-25 | 2018-01-19 | 烟台比吉流体控制技术有限公司 | A kind of end cap of servo oscillating formula hydraulic cylinder |
| CN111623038A (en) * | 2020-07-06 | 2020-09-04 | 德本恒嘉精机(昆山)有限公司 | Ultrahigh-precision hydrostatic bearing |
| CN114559367A (en) * | 2022-03-14 | 2022-05-31 | 浙江杰克智能装备有限公司 | Dynamic and static pressure support main shaft assembly |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103659587A (en) * | 2013-12-04 | 2014-03-26 | 西安交通大学苏州研究院 | Axial-locking prevention static pressure main shaft structure of radial thrust combined bearing support |
| CN103659587B (en) * | 2013-12-04 | 2016-08-24 | 西安交通大学苏州研究院 | The hydrostatic spindle structure that the radical-thrust joint bearing of a kind of anti-axial locking supports |
| CN107559261A (en) * | 2017-10-25 | 2018-01-09 | 烟台比吉流体控制技术有限公司 | A kind of hydrostatic support formula hydraulic cylinder end cover |
| CN107575429A (en) * | 2017-10-25 | 2018-01-12 | 烟台比吉流体控制技术有限公司 | A kind of hydrostatic support formula servo oscillating hydraulic cylinder and apply its plant equipment |
| CN107605845A (en) * | 2017-10-25 | 2018-01-19 | 烟台比吉流体控制技术有限公司 | A kind of end cap of servo oscillating formula hydraulic cylinder |
| CN111623038A (en) * | 2020-07-06 | 2020-09-04 | 德本恒嘉精机(昆山)有限公司 | Ultrahigh-precision hydrostatic bearing |
| CN111623038B (en) * | 2020-07-06 | 2023-08-29 | 德本恒嘉精机(昆山)有限公司 | Ultra-high precision hydrostatic bearing |
| CN114559367A (en) * | 2022-03-14 | 2022-05-31 | 浙江杰克智能装备有限公司 | Dynamic and static pressure support main shaft assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102765047B (en) | 2014-10-29 |
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