CN213600831U

CN213600831U - Wafer production is with multi-functional inspection desk

Info

Publication number: CN213600831U
Application number: CN202022569548.1U
Authority: CN
Inventors: 孙健; 陈晓达
Original assignee: Hebei Yincheng Photoelectric Technology Co ltd
Current assignee: Hebei Yincheng Photoelectric Technology Co ltd
Priority date: 2020-11-09
Filing date: 2020-11-09
Publication date: 2021-07-02
Anticipated expiration: 2030-11-09

Abstract

The utility model discloses a wafer production is with multi-functional inspection desk, the test machine comprises a test machine, test machine up end center department leans on the front end and leans on the position of rear end fixed operating panel and the operation screen of being provided with respectively, the test machine up end is located one side center department of operating panel and has seted up the seal groove, the test machine up end is located the front end and the rear end of seal groove and has all seted up the spout, the upper end activity that the test machine up end is located the seal groove is provided with the slide, the terminal surface leans on the front side and leans on the rear side and all fixes being provided with the slider, two under the slide the slider keep away from the one end of slide and move about respectively and set up in the spout, seal groove bottom surface center department is fixed and is provided with the probe card, probe. The utility model discloses a wafer production is with multi-functional inspection desk, this novel wafer production is with more comprehensive that multi-functional inspection desk detected, efficiency is higher.

Description

Wafer production is with multi-functional inspection desk

Technical Field

The utility model relates to a wafer inspection technical field especially relates to a wafer production is with multi-functional inspection desk.

Background

English integrated circuit: integrated circuit, abbreviated IC; or microcircuits, microchips, chips/chips, are one way in electronics to miniaturize circuits, and are often fabricated on the surface of semiconductor wafers.

Before using the chip, often need test the chip, the qualified chip of test just can use, but current chip test mode is too single, can't understand each performance of chip comprehensively, and whole testing process not only is troublesome still can waste a large amount of manpowers and financial resources.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a multifunctional inspection table for wafer production.

In order to achieve the above purpose, the utility model adopts the following technical scheme: a multifunctional inspection table for wafer production comprises a testing machine, wherein an operating plate and an operating screen are fixedly arranged at the positions, close to the front end and the rear end, of the center of the upper end face of the testing machine, a sealing groove is formed in the center of the upper end face of the testing machine, the front end and the rear end of the upper end face of the testing machine, which are located at one side of the operating plate, are respectively provided with a sliding groove, a sliding plate is movably arranged at the upper end of the sealing groove, the lower end face of the sliding plate, which is close to the front side and the rear side, is respectively and fixedly provided with a sliding block, one ends, far away from the sliding plate, of the two sliding blocks are respectively and movably arranged in the sliding grooves, a probe card is fixedly arranged at the center of the bottom face of the sealing groove, a probe groove is formed in the center of the upper end face of the testing machine, the position of the lower end face of the supporting rod close to the front side is fixedly provided with a miniature microscope, one side of the upper end face of the testing machine, which is far away from the sealing groove, is fixedly provided with a lower protecting cover close to the front end, the center of the bottom surface of the lower protecting cover is provided with a placing groove, the position of the rear side of the lower protecting cover, which is close to the upper end, is fixedly provided with a hinge, one end of the hinge, which is far away from the lower protecting cover, is fixedly provided with an upper protecting cover, the center of the upper end face of the upper protecting cover, which is close to the front side, is fixedly provided with a second fixing head, the position of the front side of the upper protecting cover, which is close to the lower end, is fixedly provided with a first fixing head, the center of the upper end of the first fixing head is provided with a bolt, the lower end of the bolt penetrates through the first fixing, a gun slot is formed in the rear side, located on the lower protecting cover, of the upper end face of the testing machine, and an electrostatic gun is movably arranged at the inner end of the gun slot.

As a further description of the above technical solution:

and a pull rod is fixedly arranged at the center of the upper end face of the upper protecting cover.

As a further description of the above technical solution:

and a push rod is fixedly arranged at the center of the upper end surface of the sliding plate.

As a further description of the above technical solution:

push hands are fixedly arranged at the centers of the two sides of the testing machine.

As a further description of the above technical solution:

the lower end face of the testing machine is close to four corners and is fixedly provided with a second telescopic rod.

As a further description of the above technical solution:

four the lower extreme of No. two telescopic links all is fixed and is provided with the auto-lock universal wheel.

As a further description of the above technical solution:

the testing machine is electrically connected with the probe card, the heating lamp, the miniature microscope, the operating panel, the operating screen and the electrostatic gun respectively.

As a further description of the above technical solution:

the upper end of the lower protecting cover and the lower end of the upper protecting cover are fixedly provided with rubber pads.

The utility model discloses following beneficial effect has:

compare in current device, this novel wafer production can carry out the micro-detection to the wafer with the small-size microscope of multi-functional inspection desk setting, can also carry out the detection of function and performance to the wafer through the probe card simultaneously, and is very convenient quick.

Compare in current device, this novel wafer production is with static rifle of multi-functional inspection desk setting is used for simulating the human body or is the working body to go to add big voltage in the twinkling of an eye for the wafer, mainly to the reliability test of wafer under harsh environment, and the heat lamp utilizes the high temperature environment to accelerate the ageing of wafer to estimate the life-span of wafer.

Drawings

Fig. 1 is a schematic front view of a multifunctional inspection table for wafer production according to the present invention;

fig. 2 is a schematic top view of a multifunctional inspection table for wafer production according to the present invention;

FIG. 3 is a schematic view of a partial structure of an upper protective cover of a multifunctional inspection table for wafer production according to the present invention;

fig. 4 is a schematic view of a partial structure of a slide plate of a multifunctional inspection table for wafer production according to the present invention.

Illustration of the drawings:

1. a testing machine; 2. a pushing handle; 3. a push rod; 4. a slide plate; 5. a first telescopic rod; 6. a support bar; 7. a miniature microscope; 8. an operation panel; 9. a timer; 10. a first fixing head; 11. a bolt; 12. an upper protective cover; 13. a lower protective cover; 14. a nut; 15. a second fixing head; 16. a self-locking universal wheel; 17. a second telescopic rod; 18. a chute; 19. an operation screen; 20. an electrostatic gun; 21. a gun slot; 22. a hinge; 23. a pull rod; 24. a probe card; 25. probing a groove; 26. a sealing groove; 27. a rubber pad; 28. a heating lamp; 29. a placement groove; 30. a slide block.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1-4, the present invention provides an embodiment: a multifunctional inspection table for wafer production comprises a testing machine 1, wherein an operating panel 8 and an operating panel 19 are fixedly arranged at the center of the upper end face of the testing machine 1 close to the front end and the rear end respectively, the operating panel 19 is used for displaying data, the operating panel 8 is used for controlling the testing machine 1, a sealing groove 26 is formed in the center of one side of the upper end face of the testing machine 1, which is located at the operating panel 8, a sliding groove 18 is formed in the front end and the rear end of the upper end face of the testing machine 1, a sliding plate 4 is movably arranged at the upper end of the upper end face of the testing machine 1, sliding blocks 30 are fixedly arranged at the lower end face of the sliding plate 4 close to the front side and the rear side respectively, one ends of the two sliding blocks 30, which are far away from the sliding plate 4, are movably arranged in the sliding groove 18 respectively, the sliding blocks 30 can slide in the sliding groove 18 through the sliding groove 18, the probe card 24 is used for detecting a wafer through the probe groove 25, the probe groove 25 is arranged at the center of the upper end face of the probe card 24, the telescopic rod 5 is fixedly arranged at the center of the rear side of the upper end face of the testing machine 1, the supporting rod 6 is fixedly arranged at the upper end of the telescopic rod 5, the small microscope 7 is fixedly arranged at the position, close to the front side, of the lower end face of the supporting rod 6, the small microscope 7 is used for observing the wafer through the small microscope 7, the lower protective cover 13 is fixedly arranged at the position, close to the front end, of one side, far away from the sealing groove 26, of the upper end face of the testing machine 1, the lower protective cover 13 is fixedly arranged at the center of the bottom face of the lower protective cover 13, the hinge 22 is fixedly arranged at the position, close to the upper end, far away from the lower protective cover 13, the upper protective cover 12 is fixedly arranged at the, the fixed position that the upper end was leaned on to lower protecting cover 13 front side is provided with fixed head 15 No. two, the fixed position that the lower extreme was leaned on to upper protecting cover 12 front side is provided with fixed head 10 No. one, the upper end center department of fixed head 10 is provided with bolt 11, the lower extreme of bolt 11 runs through fixed head 10 and fixed head 15 No. two and leads to the lower extreme to fixed head 15 No. two, the bolt body of bolt 11 is located the lower extreme screw thread of fixed head 15 and has cup jointed nut 14 No. two, 1 up end of test machine is located the rear side of lower protecting cover 13 and has been seted up gun groove 21, the inner activity of gun groove 21 is provided with static gun 20.

Go up fixed pull rod 23 that is provided with in terminal surface center department on protecting cover 12, be used for opening protecting cover 12 through pull rod 23, slide 4 up end center department is fixed and is provided with push rod 3, be used for promoting slide 4 through push rod 3, test machine 1 both sides center department all fixes and is provided with pushing hands 2, can make this novel multifunctional inspection platform for wafer production more convenient in the transport through pushing hands 2, terminal surface is close to four corners department all and fixedly is provided with No. two telescopic links 17 under test machine 1, can adjust the height of this novel multifunctional inspection platform for wafer production through the flexible of No. two telescopic links 17, the lower extreme of four No. two telescopic links 17 all fixes and is provided with auto-lock universal wheel 16, can make this novel multifunctional inspection platform for wafer production more convenient that removes through auto-lock universal wheel 16, test machine 1 respectively with probe card 24, heat lamp 28, miniature microscope 7, The operation panel 8, the operation panel 19 and the electrostatic gun 20 are electrically connected, the upper end of the lower protecting cover 13 and the lower end of the upper protecting cover 12 are both fixedly provided with rubber pads 27, and the sealing performance of the lower protecting cover 13 and the upper protecting cover 12 can be enhanced through the rubber pads 27.

The working principle is as follows: when the novel multifunctional inspection table for wafer production is used, a wafer is first placed in the probe groove 25, the probe on the probe card 24 directly contacts with the bonding pad or bump on the chip, the chip signal is led out on the operation panel 19, and then the test is performed by the tester 1, and at the same time, the first telescopic rod 5 is adjusted to enable the miniature microscope 7 to observe the wafer, the observed scene is displayed on the operation screen 19, then the static gun 20 is used to emit static electricity to the wafer, the operation screen 19 is observed after the static electricity is emitted, then, the wafer is taken out, the wafer is placed in the placement groove 29, the nut 14 is rotated so that the bolt 11 seals the space between the upper shield 12 and the lower shield 13 through the first fixing head 10 and the second fixing head 15, the heating lamp 28 and the timer 9 are turned on, and the wafer is accelerated to be aged by using the heating lamp 28 in a high-temperature environment, thereby estimating the life of the wafer.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims

1. The utility model provides a wafer production is with multi-functional inspection desk, includes test machine (1), its characterized in that: an operation plate (8) and an operation screen (19) are respectively and fixedly arranged at the positions close to the front end and the rear end of the center of the upper end surface of the testing machine (1), a sealing groove (26) is formed in the center of one side of the operation plate (8) of the upper end surface of the testing machine (1), sliding grooves (18) are respectively formed in the front end and the rear end of the sealing groove (26) of the upper end surface of the testing machine (1), a sliding plate (4) is movably arranged at the upper end of the sealing groove (26) of the upper end surface of the testing machine (1), sliding blocks (30) are fixedly arranged at the positions close to the front side and the rear side of the lower end surface of the sliding plate (4), one ends of the two sliding blocks (30) far away from the sliding plate (4) are respectively and movably arranged in the sliding grooves (18), a probe card (24) is fixedly arranged at the center of the bottom surface of the sealing, a first telescopic rod (5) is fixedly arranged at the center of the rear side of the upper end face of the testing machine (1) positioned in the sealing groove (26), a support rod (6) is fixedly arranged at the upper end of the first telescopic rod (5), a small microscope (7) is fixedly arranged at the position of the lower end face of the support rod (6) close to the front side, a lower protective cover (13) is fixedly arranged at the position of one side of the upper end face of the testing machine (1) far away from the sealing groove (26) close to the front end, a placing groove (29) is formed in the center of the bottom face of the lower protective cover (13), a hinge (22) is fixedly arranged at the position of the rear side of the lower protective cover (13) close to the upper end, an upper protective cover (12) is fixedly arranged at one end of the hinge (22) far away from the lower protective cover (13), a timer (9) is fixedly arranged at the center of the upper end face of the upper protective, the testing machine is characterized in that a first fixing head (10) is fixedly arranged at a position, close to the lower end, of the front side of the upper protecting cover (12), a bolt (11) is arranged at the center of the upper end of the first fixing head (10), the lower end of the bolt (11) penetrates through the first fixing head (10) and the second fixing head (15) to be communicated with the lower end of the second fixing head (15), a nut (14) is sleeved on a bolt body of the bolt (11) at the lower end of the second fixing head (15), a gun groove (21) is formed in the rear side, located on the lower protecting cover (13), of the upper end face of the testing machine (1), and an electrostatic gun (20) is movably arranged at the inner end of the gun groove (21).

2. The multifunctional inspection table for wafer production as recited in claim 1, wherein: a pull rod (23) is fixedly arranged at the center of the upper end face of the upper protecting cover (12).

3. The multifunctional inspection table for wafer production as recited in claim 1, wherein: a push rod (3) is fixedly arranged at the center of the upper end surface of the sliding plate (4).

4. The multifunctional inspection table for wafer production as recited in claim 1, wherein: push hands (2) are fixedly arranged at the centers of the two sides of the testing machine (1).

5. The multifunctional inspection table for wafer production as recited in claim 1, wherein: the lower end face of the testing machine (1) is provided with a second telescopic rod (17) close to four corners.

6. The multifunctional inspection table for wafer production as recited in claim 5, wherein: the lower ends of the four second telescopic rods (17) are fixedly provided with self-locking universal wheels (16).

7. The multifunctional inspection table for wafer production as recited in claim 1, wherein: the testing machine (1) is respectively electrically connected with the probe card (24), the heating lamp (28), the miniature microscope (7), the operating panel (8), the operating screen (19) and the electrostatic gun (20).

8. The multifunctional inspection table for wafer production as recited in claim 1, wherein: the upper end of the lower protecting cover (13) and the lower end of the upper protecting cover (12) are both fixedly provided with rubber pads (27).