CN213592642U - Mechanical height and angle adjusting structure of polishing solution shunting device - Google Patents

Mechanical height and angle adjusting structure of polishing solution shunting device Download PDF

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Publication number
CN213592642U
CN213592642U CN202022683488.6U CN202022683488U CN213592642U CN 213592642 U CN213592642 U CN 213592642U CN 202022683488 U CN202022683488 U CN 202022683488U CN 213592642 U CN213592642 U CN 213592642U
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China
Prior art keywords
swing arm
rack
arm
straight arm
polishing solution
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CN202022683488.6U
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Chinese (zh)
Inventor
陈杏辉
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Zhongji Semiconductor Materials (Shenzhen) Co.,Ltd.
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Shenzhen Jiaxin Nanotechnology Co ltd
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Abstract

The utility model discloses a polishing solution diverging device's mechanical type height and angle modulation structure, include: the spray nozzle comprises a base, a straight arm arranged in the base in a sliding mode, a swing arm arranged at the top end of the straight arm in a rotating mode and a plurality of spray nozzles fixed at the top end of the swing arm. The interior of the straight arm is communicated with an external polishing solution source through a water pipe, and the straight arm, the swing arm and the nozzles are communicated. The straight arm is provided with a first rack capable of moving up and down, and the swing arm is provided with a gear meshed with the first rack for transmission. The utility model has the advantages that: the polishing solution shunting device adopts the screw rod to drive the rack, and the mechanical structure of the rack driving gear is used for adjusting the spraying height and angle, so that the cost is greatly reduced, the use is convenient, and the reliability is high. Moreover, the straight arm and the swing arm of the polishing solution shunting device are rotatably connected through the connecting shaft, so that the polishing solution shunting device is high in reliability and not easy to damage.

Description

Mechanical height and angle adjusting structure of polishing solution shunting device
Technical Field
The utility model relates to a polishing equipment's technical field, in particular to polishing solution diverging device's mechanical type height and angle modulation structure.
Background
The shunting operation of the polishing solution is to increase the spraying area of the polishing solution, adapt to the large-size workpiece and make the spraying process more uniform. The existing polishing solution shunting device adopts a hydraulic rod to adjust the spraying height and angle, and is expensive in manufacturing cost. Moreover, the polishing solution shunting device at present adopts the rubber tube to connect at the rotation connection position, and the rubber tube is easy to damage, so that the potential safety hazard exists in production.
SUMMERY OF THE UTILITY MODEL
The main objective of the present invention is to provide a mechanical height and angle adjustment structure of a polishing solution shunting device, which aims to solve the problems of expensive cost and easy damage of the prior polishing solution shunting device.
In order to achieve the above object, the utility model provides a polishing solution diverging device's mechanical type height and angle modulation structure, include: the spray nozzle comprises a base, a straight arm arranged in the base in a sliding mode, a swing arm arranged at the top end of the straight arm in a rotating mode and a plurality of spray nozzles fixed at the top end of the swing arm. The interior of the straight arm is communicated with an external polishing solution source through a water pipe, and the straight arm, the swing arm and the nozzles are communicated. The straight arm is provided with a first rack capable of moving up and down, and the swing arm is provided with a gear meshed with the first rack for transmission.
Preferably, the base is provided with a sliding groove, the bottom of the straight arm is provided with a roller, and the roller rolls in the sliding groove.
Preferably, the straight arm is provided with a locking block in a sliding manner, the locking block is provided with a second rack, the inner wall of the sliding chute is provided with a third rack facing the second rack, and the second rack can be clamped with the third rack.
Preferably, both sides of the top end of the straight arm are provided with guard plates, and the guard plates are communicated with the inside of the straight arm. The inboard of two backplates is equipped with coaxial relative connecting axle, and the connecting axle is cavity, and the one end of connecting axle and the inside intercommunication of backplate, the other end of connecting axle insert in the bottom of swing arm to communicate with the inside of swing arm, and the swing arm rotates around two connecting axles.
Preferably, a sealing sleeve is arranged between the connecting shaft and the inner wall of the swing arm.
Preferably, the outside of straight arm is equipped with the installation department, is equipped with the guide slot along vertical direction in the installation department, is equipped with the screw rod along vertical direction in the guide slot. A part of the first rack is arranged in the guide groove in an up-and-down sliding mode, a threaded sleeve is arranged on the part, arranged in the guide groove in a sliding mode, of the first rack, and the threaded sleeve is sleeved on the screw rod.
Preferably, the outer side wall of the bottom end of the swing arm is provided with a mounting plate, the gear is fixed on the mounting plate, and the gear is coaxial with the two connecting shafts.
Compared with the prior art, the beneficial effects of the utility model reside in that: the polishing solution shunting device adopts the screw rod to drive the rack, and the mechanical structure of the rack driving gear is used for adjusting the spraying height and angle, so that the cost is greatly reduced, the use is convenient, and the reliability is high. Moreover, the straight arm and the swing arm of the polishing solution shunting device are rotatably connected through the connecting shaft, so that the polishing solution shunting device is high in reliability and not easy to damage.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic front sectional view of an embodiment of the present invention;
fig. 2 is a schematic view of a partial cross-sectional structure of the back of an embodiment of the present invention;
FIG. 3 is an enlarged view taken at A in FIG. 1;
the purpose of the present invention is to provide a novel and improved method and apparatus for operating a computer.
Detailed Description
The utility model provides a polishing solution diverging device's mechanical type height and angle modulation structure.
Referring to fig. 1-3, fig. 1 is a schematic front cross-sectional structure view of an embodiment of the present invention, fig. 2 is a schematic partial cross-sectional structure view of a back portion of the present invention, and fig. 3 is an enlarged view of a portion a in fig. 1.
As shown in fig. 1-2, in an embodiment of the present invention, a mechanical height and angle adjusting structure of a slurry shunting device includes: the nozzle comprises a base 100, a straight arm 200 arranged in the base 100 in a sliding way, a swing arm 300 arranged at the top end of the straight arm 200 in a rotating way, and a plurality of nozzles 400 fixed at the top end of the swing arm 300. The inside of the straight arm 200 is communicated with an external polishing solution source through a water pipe 500, and the insides of the straight arm 200, the swing arm 300 and the plurality of nozzles 400 are communicated, so that the external polishing solution is sprayed onto the surface of the workpiece through the straight arm 200, the swing arm 300 and the plurality of nozzles 400.
The straight arm 200 is provided with a first rack 210 capable of moving up and down, the swing arm 300 is provided with a gear 310 engaged with the first rack 210, and when the first rack 210 moves up and down, the swing arm 300 is driven to rotate at the top end of the straight arm 200 through engagement transmission with the gear 310, so that the adjustment of the spraying height and angle of the polishing solution is realized.
Specifically, in this embodiment, the sliding groove 110 is disposed on the base 100, the roller 220 is disposed at the bottom of the straight arm 200, and the roller 220 rolls in the sliding groove 110, so that the straight arm 200, the swing arm 300 and the plurality of nozzles 400 can be driven to slide along the sliding groove 110, and thus both ends of a large-sized workpiece can be sprayed, and the range of spraying polishing solution is greatly increased.
Specifically, in the present embodiment, in order to facilitate sliding and then fixing the straight arm 200, so as to ensure the stability of the polishing solution distribution device when spraying the polishing solution, as shown in fig. 3, an accommodating groove is provided on the straight arm 200, a locking block 230 is slidably disposed in the accommodating groove, a return spring 231 is disposed between the locking block 230 and the bottom of the accommodating groove, and a second rack 232 is disposed on the locking block 230; the inner wall of the sliding groove 110 is provided with a third rack 111 facing the second rack 232, and the second rack 232 can be engaged with the third rack 111 under the elastic force of the return spring 231.
Specifically, in the present embodiment, in order to achieve that the swing arm 300 is always communicated in the process of rotating the top end of the straight arm 200, both sides of the top end of the straight arm 200 are provided with the guard plates 240, and the guard plates 240 are communicated with the inside of the straight arm 200. The inner sides of the two protection plates 240 are provided with connecting shafts 250 which are coaxially opposite, the connecting shafts 250 are hollow, one ends of the connecting shafts 250 are communicated with the inside of the protection plates 240, the other ends of the connecting shafts 250 are inserted into the bottom ends of the swing arms 300 and are communicated with the inside of the swing arms 300, and the swing arms 300 rotate around the two connecting shafts 250.
Specifically, in the present embodiment, in order to ensure the sealing performance between the straight arm 200 and the swing arm 300 when the swing arm 300 rotates, a sealing sleeve 251 is disposed between the connecting shaft 250 and the inner wall of the swing arm 300.
Specifically, in this embodiment, in order to conveniently realize that the first rack 210 can move up and down on the base 100, the outer side of the straight arm 200 is provided with a mounting portion 260, a guide groove is provided in the mounting portion 260 along the vertical direction, and a screw 261 is provided in the guide groove along the vertical direction. A part of the first rack 210 is vertically slidably disposed in the guide groove, and a part of the first rack 210 vertically slidably disposed in the guide groove is integrally connected with a threaded sleeve 211, and the threaded sleeve 211 is sleeved on the screw 261.
Specifically, in this embodiment, in order to facilitate the installation of the gear 310 and ensure that the gear 310 and the bottom end of the swing arm 300 rotate coaxially, the outer side wall of the bottom end of the swing arm 300 is provided with the mounting plate 320, the gear 310 is fixed on the mounting plate 320, and the gear 310 and the two connecting shafts 250 are coaxially arranged.
Compared with the prior art, the beneficial effects of the utility model reside in that: this polishing solution diverging device adopts screw 261 drive rack, and rack drive gear 310's mechanical type structure is adjusted and is sprayed height and angle, greatly reduced the cost, convenient to use, the reliability is high. In addition, the straight arm 200 and the swing arm 300 of the polishing solution shunting device are rotatably connected through the connecting shaft 250, so that the polishing solution shunting device is high in reliability and not easy to damage.
The above only be the preferred embodiment of the utility model discloses a not consequently restriction the utility model discloses a patent range, all are in the utility model discloses a conceive, utilize the equivalent structure transform of what the content was done in the description and the attached drawing, or direct/indirect application all is included in other relevant technical field the utility model discloses a patent protection within range.

Claims (7)

1. A mechanical height and angle adjusting structure of a polishing solution shunting device is characterized by comprising: the spray nozzle device comprises a base, a straight arm arranged in the base in a sliding mode, a swing arm arranged at the top end of the straight arm in a rotating mode and a plurality of spray nozzles fixed at the top end of the swing arm; the interior of the straight arm is communicated with an external polishing solution source through a water pipe, and the straight arm, the swing arm and the plurality of nozzles are communicated; the straight arm is provided with a first rack capable of moving up and down, and the swing arm is provided with a gear meshed with the first rack for transmission.
2. The mechanical height and angle adjustment structure of a slurry dispenser according to claim 1, wherein a sliding groove is formed on the base, and a roller is disposed at the bottom of the straight arm and rolls in the sliding groove.
3. The mechanical height and angle adjustment structure of a slurry dispenser according to claim 2, wherein a lock block is slidably disposed on the straight arm, a second rack is disposed on the lock block, a third rack facing the second rack is disposed on an inner wall of the sliding groove, and the second rack is engageable with the third rack.
4. The mechanical height and angle adjustment structure of a slurry dividing apparatus according to claim 1, wherein guard plates are provided on both sides of the top end of the straight arm, the guard plates communicating with the inside of the straight arm; the swing arm comprises a swing arm body and a connecting shaft, wherein the swing arm body is provided with a swing arm, the swing arm body is provided with a connecting shaft, the swing arm body is provided with a swing arm, the swing arm body.
5. The mechanical height and angle adjustment structure of a slurry distribution device according to claim 4, wherein a sealing sleeve is provided between the connection shaft and the inner wall of the swing arm.
6. The mechanical height and angle adjustment structure of a slurry dispenser according to claim 4, wherein the straight arm is provided at an outer side thereof with a mounting portion, the mounting portion is provided with a guide groove in a vertical direction, and a screw rod is provided in the guide groove in the vertical direction; and one part of the first rack is arranged in the guide groove in a vertically sliding manner, a threaded sleeve is arranged on the part of the first rack in the guide groove in a sliding manner, and the threaded sleeve is sleeved on the screw rod.
7. The mechanical height and angle adjustment structure of a slurry dispenser according to claim 4, wherein a mounting plate is provided on an outer side wall of a bottom end of the swing arm, the gear is fixed to the mounting plate, and the gear is coaxial with the two connecting shafts.
CN202022683488.6U 2020-11-18 2020-11-18 Mechanical height and angle adjusting structure of polishing solution shunting device Active CN213592642U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022683488.6U CN213592642U (en) 2020-11-18 2020-11-18 Mechanical height and angle adjusting structure of polishing solution shunting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022683488.6U CN213592642U (en) 2020-11-18 2020-11-18 Mechanical height and angle adjusting structure of polishing solution shunting device

Publications (1)

Publication Number Publication Date
CN213592642U true CN213592642U (en) 2021-07-02

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Application Number Title Priority Date Filing Date
CN202022683488.6U Active CN213592642U (en) 2020-11-18 2020-11-18 Mechanical height and angle adjusting structure of polishing solution shunting device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113718697A (en) * 2021-09-01 2021-11-30 何宇 Sprinkler for engineering construction

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113718697A (en) * 2021-09-01 2021-11-30 何宇 Sprinkler for engineering construction

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Address after: C603, Zhongdi Building, China University of Geosciences, No. 8 Yuexing Third Road, Gaoxin District Community, Yuehai Street, Nanshan District, Shenzhen City, Guangdong Province, 518000

Patentee after: Zhongji Semiconductor Materials (Shenzhen) Co.,Ltd.

Address before: No. 3101, building A6, Lingwu residential group, niuhu community, Guanlan street, Longhua District, Shenzhen City, Guangdong Province

Patentee before: SHENZHEN JIAXIN NANOTECHNOLOGY CO.,LTD.

CP03 Change of name, title or address