CN213583703U - Semiconductor processing equipment - Google Patents

Abstract

The present application provides a semiconductor processing apparatus. The semiconductor processing equipment comprises a cabinet body, a processing device and a sealing device. The cabinet body is provided with a window. The processing device is arranged in the cabinet body. The sealing device is arranged in the cabinet body and is positioned between the cabinet body and the processing device. The sealing device comprises a sealing element, a driving element and a shielding element. The sealing element corresponds to the window, and the driving element and the shielding element are both accommodated in the sealing element. The driving piece is connected with the shielding piece. The driving piece is used for driving the shielding piece to move along a first direction relative to the cabinet body so as to selectively shield the window to prevent light from entering the processing device, or at least partially open the window to allow the piece to be detected to enter the processing device along a second direction, and the second direction is different from the first direction. The semiconductor processing equipment utilizes the driving piece to drive the shielding piece to move so as to selectively shield the window or at least partially open the window, so that sample feeding is not influenced, and light rays are prevented from entering the processing device when the samples are not fed.

Description

Semiconductor processing equipment

Technical Field

The application relates to the technical field of detection, in particular to a semiconductor processing device.

Background

Some semiconductor processing equipment may be used for optical inspection, and the processing equipment of such equipment is sensitive to stray light and needs to be protected by a sealed cabinet to prevent stray light from entering the processing equipment and interfering with the inspection. Generally, a window for sample feeding needs to be opened on a cabinet, and how to prevent light from entering a processing device from the window becomes an urgent problem to be solved in the field.

Disclosure of Invention

The embodiment of the application provides a semiconductor processing device.

The semiconductor processing equipment of the embodiment of the application comprises a cabinet body, a processing device and a sealing device. The cabinet body is provided with a window. The processing device is arranged in the cabinet body. The sealing device is arranged in the cabinet body and is positioned between the cabinet body and the processing device. The sealing device comprises a sealing element, a driving element and a shielding element. The seal corresponds to the window. The driving piece and the shielding piece are both accommodated in the sealing piece. The driving piece is connected with the shielding piece. The driving piece is used for driving the shielding piece to move along a first direction relative to the cabinet body so as to selectively shield the window to prevent light from entering the processing device or at least partially open the window to allow the piece to be detected to enter the processing device along a second direction, and the second direction is different from the first direction.

In some embodiments, the sealing device is mounted to an inner side wall of the cabinet and/or an outer side wall of the treatment device, and the seal abuts both the inner side wall of the cabinet and the outer side wall of the treatment device.

In certain embodiments, the cabinet includes a window and an adjustment. The window is arranged at the window part. The adjusting piece is mounted on the window portion, and the adjusting piece can move in the window portion to adjust the opening size of the window.

In some embodiments, the window portion projects toward a side adjacent to the sealing device, the window portion including adjacent first and second faces, the trim being mounted to the second face.

In some embodiments, the adjusting member defines an opening, and a diameter of the opening is smaller than a diameter of the window in the first direction.

In certain embodiments, the driver includes a body and a moving portion extending from within the body. The two ends of the moving part are respectively connected with the body and the shielding piece, and the moving part can move along the first direction relative to the body.

In certain embodiments, the sealing device further comprises a mount located inside the seal, the mount being mounted to the processing device, the drive being mounted to the mount.

In some embodiments, the sealing member includes a sealing portion that abuts against an inner side wall of the cabinet body, and the sealing portion is provided with a groove for blocking light passing through a gap between the shielding member and the sealing portion from being transmitted toward the inside of the processing device.

In certain embodiments, the shield is located outside of the recess or the shield is at least partially received within the recess.

In some embodiments, the outer side wall of the treatment device is provided with a connection port, and the window is communicated with the connection port when the shielding piece moves along the first direction relative to the cabinet body to at least partially open the window.

In some embodiments, the semiconductor processing apparatus further comprises a processing apparatus disposed above the processing device and configured to inspect the to-be-inspected object within the processing device.

The semiconductor processing equipment of the embodiment of the application utilizes the sealing piece corresponding to the window to limit light entering the cabinet body from the window within the sealing range of the sealing piece, so that the light entering the cabinet body is prevented from entering the processing device from other positions outside the sealing range to interfere optical detection in the processing device, and utilizes the driving piece to drive the shielding piece to move, so that the window is selectively shielded to block the light from entering the processing device or at least partially open the window to allow the to-be-detected piece to enter the processing device, sample sending can not be influenced, and the light can be prevented from entering the processing device when the sample is not sent.

Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the present application.

Drawings

The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic perspective view of a semiconductor processing apparatus according to certain embodiments of the present application;

FIG. 2 is a perspective view of a window and an adjustment member of a cabinet according to certain embodiments of the present disclosure;

FIG. 3 is a schematic perspective assembly view of a processing device and sealing device according to certain embodiments of the present disclosure;

figure 4 is a schematic cross-sectional view of a portion of a semiconductor processing apparatus according to certain embodiments of the present application.

Detailed Description

Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative and are only for the purpose of explaining the present application and are not to be construed as limiting the present application.

In the description of the present application, it is to be understood that the terms "thickness," "upper," "top," "bottom," "inner," "outer," etc. indicate orientations or positional relationships based on those shown in the drawings, which are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship.

The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.

Referring to fig. 1 and 3, a semiconductor processing apparatus 1000 is provided. The semiconductor processing apparatus 1000 includes a cabinet 500, a processing device 300, and a sealing device 100. The cabinet 500 is provided with a window 510. The processing device 300 is disposed within the cabinet 500. The sealing device 100 is disposed inside the cabinet 500 between the cabinet 500 and the treating device 300. The sealing device 100 comprises a sealing member 10, a drive member 20, and a shield 30. The seal 10 corresponds to the window 510 and the drive member 20 and the shield 30 are both received within the seal 10. The drive member 20 is connected to the shutter 30. The driving member 20 is used for driving the shielding member 30 to move in a first direction (X1/X2) relative to the cabinet 500 so as to selectively shield the window 510 to block light from entering the processing device 300, or at least partially open the window 510 so that the member to be detected can enter the processing device 300 in a second direction (Y1/Y2). Wherein the second direction (Y1/Y2) is different from the first direction (X1/X2).

The semiconductor processing apparatus 1000 may be used to inspect various types of objects to be inspected, such as inspecting display panels, front covers of mobile phones, rear covers of mobile phones, VR glasses, AR glasses, cover plates of smart watches, glass, wood, iron plates, housings of any devices (e.g., mobile phone housings), and other components that need to be processed or inspected. The semiconductor processing equipment 1000 of the present application can also be used for optical inspection of semiconductors, such as wafer surface defect inspection, optical film thickness inspection, and other optical inspection. The optical detection needs to avoid the interference of stray light, so the processing device 300 needs to be disposed in the cabinet 500 to prevent external stray light from entering the processing device 300 to interfere with the optical detection.

The cabinet 500 is provided with a window 510, and the position of the window 510 corresponds to the processing device 300, so that the to-be-detected object can be sent into the processing device 300 from the window 510 to be detected. The sealing member 10 corresponds to the window 510, and the sealing member 10 can limit the light entering the cabinet 500 from the window 510 to the sealing range of the sealing member 10, so as to prevent the light entering the cabinet 500 from entering the inspection device 300 from other positions outside the sealing range of the sealing member 10 and interfering with the light detection of the object to be detected in the processing device 300.

The driver 20 and the shield 30 are housed within the seal 10. When the member to be detected does not need to pass through the window 510, i.e. when no sample is being taken into the processing device 300 or is being taken from the processing device 300, the driving member 20 can drive the shielding member 30 to move in the first direction X1 relative to the cabinet 500, so that the shielding member 30 shields the window 510 to prevent light from entering the processing device 300 from the window 510. When the object to be detected needs to pass through the window 510, for example, when the object to be detected needs to be fed into the processing device 300, or when the object to be detected needs to be fed out of the cabinet 500, the driving element 20 can drive the shielding element 30 to move along the first direction X2 relative to the cabinet 500, so as to at least partially open the window 510 to allow the object to be detected to pass through, for example, to allow the object to be detected to enter the processing device 300 along the second direction Y1, or to allow the object to be detected to be fed out of the cabinet 500 along the second direction Y2.

The semiconductor processing apparatus 1000 according to the embodiment of the present application limits light entering the cabinet 500 from the window 510 to within the sealing range of the sealing member 10 by using the sealing member corresponding to the window 510, so as to prevent the light entering the cabinet 500 from entering the processing device 300 from other positions outside the sealing range to interfere with the optical detection in the processing device 300, and drives the shielding member 30 to move by using the driving member 20, so as to selectively shield the window 510 to block the light from entering the processing device 300 or at least partially open the window 510 for the object to be detected to enter the processing device 300, so as to prevent the light from entering the processing device 300 when the sample is not being sent.

The following is further described with reference to the accompanying drawings.

Referring to fig. 1 and 4, in some embodiments, the inner sidewall 540 of the cabinet 500 is provided with a light absorbing material to prevent light entering the cabinet 500 from the window 510 from interfering with the optical detection of the semiconductor processing apparatus 1000 after being reflected or refracted. For example, the inner side walls 540 of the cabinet 500 are coated with a light absorbing paint; for example, the inner sidewall 540 of the cabinet 500 is adhered with a light absorbing material such as a light absorbing foil, a light absorbing film, or a light absorbing paper, and for example, the inner sidewall 540 of the cabinet 500 is installed with a light absorbing plate, which is not limited herein.

Referring to fig. 1 and 2, in some embodiments, the cabinet 500 includes a window 520 and an adjusting member 530. The window 510 is opened in the window portion 520, the adjusting member 530 is mounted in the window portion 520, and the adjusting member 530 is movable in the window portion 520 for adjusting the opening size of the window 510. For example, the adjustment member 530 completely blocks the window 510, i.e., the window 510 is 0% open; for example, the adjusting member 530 is moved to separate the window portion 520, such as opening the window 510 by 10%, 15%, 18%, 22%, 37%, 46%, 50%, 61%, 74%, 85%, 99%, etc., which are not listed here, so as to allow the members to be detected of different sizes to pass through the window 510, and ensure that the opening degree of the window 510 is as small as possible to reduce the light entering the window 510 from the outside as much as possible; for another example, the adjusting member 530 is moved to open the window 510 completely, i.e., the window 510 is opened to 100%, so as to allow the member to be detected to pass through.

Referring to fig. 2 and 4, in some embodiments, the window 520 protrudes toward a side near the sealing device 100. The window 520 includes a first surface 521 and a second surface 523 adjacent to each other, and the adjuster 530 is attached to the second surface 523.

The first side 521 is inclined at a predetermined angle with respect to the outer sidewall 550 of the cabinet 500 toward a side near the sealing device 100 to reduce light directly emitted toward the window 510. The preset angle may be 5 °, 7 °, 10 °, 12 °, 15 °, 18 °, 20 °, 24 °, 27 °, 33 °, 39 °, 42 °, 46 °, 50 °, 51 °, 59 °, 60 °, 63 °, 66 °, 70 °, 72 °, 78 °, 80 °, 84 °, 89 °, 90 °, etc., which are not listed herein.

In some embodiments, the adjustment member 530 is movably mounted on the second side 523 to facilitate adjustment of the position of the adjustment member 530 to control the degree to which the window 510 is open. For example, the adjusting member 530 is provided with a guide groove, and the second surface 523 is provided with a guide rail, which can cooperate with the guide groove to move the adjusting member 530 relative to the second surface 523 to adjust the degree of opening of the window 510. For another example, the adjusting member 530 is provided with a guide rail, and the second face 523 is provided with a guide groove, the guide rail can cooperate with the guide groove to move the adjusting member 530 relative to the second face 523 to adjust the opening degree of the window 510.

In some embodiments, the adjusting member 530 is detachably mounted on the second side 523, and the adjusting member 530 can be detached from the second side 523 and mounted at a suitable position to change the degree of opening of the window 510 when the mounting position of the adjusting member 530 needs to be adjusted. For example, the adjusting member 530 has an adjusting hole, the second surface 523 has a plurality of threaded holes, and the adjusting hole can be aligned to different threaded holes and then threaded through the adjusting hole and the threaded holes by screws to enable the adjusting member 530 to be installed at different positions of the second surface 523, so as to adjust the degree of opening of the window 510.

In some embodiments, the adjustment member 530 defines an opening 531. When opening 531 at least partially overlaps window 510, the sample can pass through window 510 from the position where opening 531 overlaps window 510.

In one embodiment, the aperture of the opening 531 is larger than the aperture of the window 510 in the first direction (X1/X2) to reduce light directly entering the window 510.

In yet another embodiment, the aperture of the opening 531 is equal to the aperture of the window 510 in the first direction (X1/X2). Whether the piece to be detected can pass through the opening 531 can be tested before the sample is sent into the processing device 300, and if the piece to be detected can pass through the opening 531, the piece to be detected can certainly pass through the window 510; if the object to be detected cannot pass through the opening 531, the object to be detected cannot necessarily pass through the window 510. Therefore, whether the piece to be detected can smoothly pass through the window 510 or not can be known in advance, so that the user can prevent the piece to be detected which cannot pass through the window 510 from being plugged into the window 510 to damage the window part 520.

In yet another embodiment, the aperture of the opening 531 is smaller than the aperture of the window 510 in the first direction (X1/X2). In this way, the overall size of the adjuster 530 can be smaller than in the case where the aperture of the opening 531 is greater than or equal to the aperture of the window 510 in the first direction (X1/X2). Not only can the material for manufacturing the adjusting member 530 be saved, but also the installation of the adjusting member 530 and the movement of the adjusting member 530 relative to the second face 523 are facilitated. For example, when the window portion 520 protrudes toward a side where the sealing device 100 is located, the smaller-sized trim 530 can be mounted on the second face 523 and can move relative to the second face 523. If the opening 531 of the adjusting member 530 is large, so that the size of the adjusting member 530 is also large, the adjusting member 530 with a large size is not easily mounted on the second surface 523, or is difficult to move relative to the second surface 523 even if mounted on the second surface 523.

Referring to fig. 3 and 4, the driving member 20 can drive the shielding member 30 to move in a first direction (X1/X2) relative to the cabinet 500, and can selectively stop the shielding member 30 at a predetermined position to control the opening degree of the window 510. For example, the driving member 20 drives the shielding member 30 to completely shield the window 510, i.e. the window 510 is 0% open; for another example, the driving member 20 drives the shielding member 30 to move to open the window portion 520 partially, such as opening the window 510 by 10%, 15%, 18%, 22%, 37%, 46%, 50%, 61%, 74%, 85%, 99%, etc., which are not listed here, so as to allow the members to be detected of different sizes to pass through the window 510, and ensure that the opening degree of the window 510 is as small as possible to reduce light entering the window 510 from the outside; for another example, the driving member 20 drives the shutter 30 to move to open the window 510 completely, i.e. the window 510 is opened to 100% so as to allow the object to be detected to pass through.

In some embodiments, the driving member 20 includes a body 21 and a moving portion 23 extending from within the body 21. The moving portion 23 has both ends connected to the body 21 and the shutter 30, respectively. The moving part 23 is movable in a first direction (X1/X2) relative to the body 21.

Specifically, when the moving portion 23 moves along the first direction X1 relative to the body 21, the moving portion 23 moves away from the body 21 to drive the shutter 30 to move along the first direction X1 relative to the body 21. When the moving part 23 moves along the first direction X2 relative to the body 21, the moving part 23 approaches the body 21 to move the shutter 30 along the first direction X2 relative to the body 21.

In one embodiment, the driver 20 is an electric driver 20, the driver 20 being externally connectable; or power is applied from the processing device 300; or is powered from the cabinet 500 to drive the moving part 23 to move in the first direction (X1/X2) relative to the main body 21.

In another embodiment, the driver 20 is a pneumatic driver 20, and the driver 20 may be connected to an external air intake duct; or the treatment device 300 is provided with an air inlet duct, and the driving member 20 can be connected with the air inlet duct of the treatment device 300; or the cabinet 500 is provided with an air inlet duct, and the driving member 20 can be connected with the air inlet duct of the cabinet 500 to move in the first direction (X1/X2) relative to the body 21 by the gas moving part 23.

In one embodiment, the shield 30 is removably mounted to the mobile portion 23 by a threaded connection, a hinged connection, a snap-fit connection, or the like, to facilitate removal of the shield 30 for servicing or replacement of different sized shields 30 when desired.

In another embodiment, the shutter 30 is non-detachably mounted to the moving portion 23 by welding, riveting, bonding, or the like, so that the shutter 30 can be securely mounted without the shutter 30 being displaced when the moving portion 23 moves the shutter 30.

In some embodiments, the moving portion 23 is a moving rod 23, and the moving rod 23 is at least partially housed in the body 21 and can protrude from the body 21. When it is desired to move the shutter 30 relative to the body 21 in the first direction X1, the portion of the moving rod 23 protruding from the body 21 increases to move the shutter 30 relative to the body 21 in the first direction X1. When it is desired to move the shutter 30 relative to the body 21 in the first direction X2, the portion of the moving rod 23 protruding from the body 21 is reduced to move the shutter 30 relative to the body 21 in the first direction X2. The position at which the shutter 30 rests can be controlled by controlling the extent to which the travel bar 23 projects from within the body 21.

Referring to fig. 3 and 4, in some embodiments, the surface of the sealing member 10 is adhered or coated with a light absorbing material to prevent light within the sealing range of the sealing member 10 from leaking from the sealing member 10 to outside the sealing range of the sealing member 10 and interfering with the optical inspection of the semiconductor processing apparatus 1000. For example, the surface of the sealing member 10 is coated with a light-absorbing paint; for example, the surface of the sealing member 10 is adhered with a light absorbing material such as a light absorbing foil, a light absorbing film, or a light absorbing paper, which is not limited herein. In certain embodiments, the sealing device 100 can further include a mounting member 40, the mounting member 40 being located inside the seal 10, the mounting member 40 being mounted to the handling device 300, and the driving member 20 being mounted to the mounting member 40.

In one embodiment, the driving member 20 is removably mounted to the mounting member 40 by a threaded connection, a hinged connection, a snap-fit connection, or the like, to facilitate removal of the driving member 20 for maintenance or replacement when desired.

In yet another embodiment, the driving member 20 is non-detachably mounted to the mounting member 40 by welding, riveting, bonding, etc. to secure the mounting of the driving member 20 without the driving member 20 shifting when the driving moving portion 23 moves.

In one embodiment, the mounting member 40 is removably mounted to the processing device 300 by a threaded connection, a hinged connection, a snap-fit connection, or the like, to facilitate positioning the driving member 20 and the mounting member 40 at different locations on the processing device 300 as desired.

In yet another embodiment, the mounting member 40 is non-removably mounted to the processing device 300 by welding, riveting, bonding, or the like to secure the mounting member 40.

Referring to fig. 4, in some embodiments, the sealing member 10 may include a sealing portion 11, and the sealing portion 11 may interfere with an inner sidewall 540 of the cabinet 500. The sealing portion 11 is provided with a groove 13, and the groove 13 is used for blocking the transmission of light passing through the gap between the shutter 30 and the sealing portion 11 toward the inside of the processing device 300.

When the shutter 30 completely blocks the window 510, there may be a gap between the shutter 30 and the sealing portion 11, and light may be transmitted toward the inside of the processing apparatus 300 through the gap. The sealing part 11 is provided with a groove 13 so that a part of the light entering the gap between the shielding member 30 and the sealing part 11 is refracted or reflected in the groove 13 to change the light path originally transmitted toward the inside of the treating apparatus 300, thereby blocking the light from being transmitted toward the inside of the treating apparatus 300.

In some embodiments, the shield 30 is located outside the recess 13, and the shield 30 does not need to be aligned with the recess 13 when moving, thereby reducing installation difficulty.

In some embodiments, the shield 30 is at least partially received within the recess 13, such that the gap between the shield 30 and the sealing portion 11 is reduced, further preventing light from being transmitted toward the interior of the processing device 300.

Referring to fig. 4, in some embodiments, the outer sidewall 310 of the processing device 300 is provided with a connection port 330, and the connection port 330 is located within the sealing range of the sealing member 10. When the shutter 30 is moved in a first direction relative to the cabinet 500 to an at least partially open window 510, the window 510 is in communication with the connection port 330, so that the item to be inspected can enter the connection port 330 from the window 510, or so that the item to be inspected can be fed out of the window 510 from the connection port 330.

In some embodiments, the connection port 330 is flush with the window 510, that is, the connection port 330 and the window 510 can correspond in both horizontal and vertical directions, so that the transportation equipment can easily input the object to be detected into the connection port 330 from the window 510 or output the object to be detected out of the window 510 from the connection port 330.

In some embodiments, the connecting port 330 is offset from the window 510, i.e., at least one of the horizontal direction and the vertical direction of the connecting port 330 and the window 510 cannot correspond to each other, so that part of the light entering the cabinet 500 from the window 510 cannot be directly transmitted to the connecting port 330 when the object to be tested is transported between the window 510 and the connecting port 330, thereby reducing the light entering the connecting port 330.

Referring to fig. 3 and 4, in some embodiments, the sealing device 100 is mounted on the inner side wall 540 of the cabinet 500. The seal 10 abuts both the inner sidewall 540 of the cabinet 500 and the outer sidewall 310 of the treating device 300.

The sealing device 100 is mounted on the inner side wall 540 of the cabinet 500 and corresponds to the window 510, that is, the relative position between the sealing device 100 and the window 510 is fixed, so that when different processing devices 300 are adapted, the relative position between the sealing device 100 and the window 510 does not need to be adjusted, and only the sealing member 10 needs to be abutted against the outer side wall 310 of the processing device 300, so that the to-be-detected object can be fed into the processing device 300 through the window 510. The seal 10 abuts against the inner sidewall 540 of the cabinet 500 and the outer sidewall 310 of the treating device 300 to prevent light from passing through a gap between the seal 10 and the inner sidewall 540 of the cabinet 500 or a gap between the seal 10 and the outer sidewall 310 of the treating device 300, so as to enhance the sealing effect.

In certain embodiments, the sealing device 100 is mounted to the outer sidewall 310 of the processing device 300. The seal 10 abuts both the inner sidewall 540 of the cabinet 500 and the outer sidewall 310 of the treating device 300.

The sealing device 100 is mounted on the outer sidewall 310 of the processing device 300 and corresponds to the connection port 330, that is, the relative position between the sealing device 100 and the connection port 330 is fixed, so that when the cabinet 500 is adapted to different cabinets 500, the relative position between the sealing device 100 and the connection port 330 does not need to be adjusted, and only the sealing element 10 needs to be abutted against the inner sidewall 540 of the cabinet 500, so that the object to be detected can be fed into the processing device 300 through the window 510. The seal 10 abuts against the inner sidewall 540 of the cabinet 500 and the outer sidewall 310 of the treating device 300 to prevent light from passing through a gap between the seal 10 and the inner sidewall 540 of the cabinet 500 or a gap between the seal 10 and the outer sidewall 310 of the treating device 300, so as to enhance the sealing effect.

In some embodiments, the sealing device 100 is installed on the inner sidewall 540 of the cabinet 500 and on the outer sidewall 310 of the processing device 300, so that the sealing device 100 is stably and firmly installed between the cabinet 500 and the processing device 300, and light leakage due to a large gap between the sealing device 100 and the cabinet 500 or between the sealing device 100 and the processing device 300 caused by the insecure installation of the sealing device 100 is prevented.

For example, the sealing device 100 may be mounted on the inner sidewall 540 of the cabinet 500, the connection port 330 may be aligned with the sealing device 100, and the sealing device 100 may be mounted on the outer sidewall 310 of the processing device 300; alternatively, the sealing device 100 may be mounted on the outer sidewall 310 of the processing device 300, the window 510 may be aligned with the sealing device 100, and the sealing device 100 may be mounted on the inner sidewall 540 of the cabinet 500.

Referring to fig. 1, in some embodiments, the semiconductor processing apparatus 1000 may further include a processing apparatus (not shown) disposed above the processing device 300 and configured to detect the object to be detected in the processing device 300.

Referring to fig. 3, in some embodiments, a detection port 350 is disposed above the processing apparatus 300, and the to-be-detected object fed into the processing apparatus 300 corresponds to the detection port 350, so that the processing apparatus can detect the to-be-detected object.

In certain embodiments, the processing device is an optical processing device that can be used for optical detection. For example, when the object to be detected is a wafer, the optical processing device can emit laser toward the wafer, and the wafer is scanned by the laser to detect surface defects of the wafer.

In the description herein, reference to the terms "certain embodiments," "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a particular feature, structure, material, or characteristic described in connection with the embodiments or examples is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present application, "a plurality" means at least two, e.g., two, three, unless specifically limited otherwise.

Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations of the above embodiments may be made by those of ordinary skill in the art within the scope of the present application, which is defined by the claims and their equivalents.

Claims (11)

1. A semiconductor processing apparatus, comprising:

the cabinet body is provided with a window;

the processing device is arranged in the cabinet body; and

the sealing device is arranged in the cabinet body and positioned between the cabinet body and the processing device, the sealing device comprises a sealing element, a driving element and a shielding element, the sealing element corresponds to the window, the driving element and the shielding element are both contained in the sealing element, the driving element is connected with the shielding element, the driving element is used for driving the shielding element to move along a first direction relative to the cabinet body so as to selectively shield the window to block light from entering the processing device or at least partially open the window to allow a piece to be detected to enter the processing device along a second direction, and the second direction is different from the first direction.

2. The semiconductor processing apparatus according to claim 1, wherein the sealing device is mounted to an inner sidewall of the cabinet and/or an outer sidewall of the processing device, and the seal abuts both the inner sidewall of the cabinet and the outer sidewall of the processing device.

3. The semiconductor processing apparatus of claim 1, wherein the cabinet comprises:

the window part is provided with the window; and

an adjustment member mounted at the window portion, the adjustment member being movable at the window portion for adjusting a size of the window opening.

4. The semiconductor processing apparatus of claim 3,

the window part protrudes towards one side close to the sealing device, the window part comprises a first surface and a second surface which are adjacent, and the adjusting piece is installed on the second surface.

5. The semiconductor processing apparatus of claim 3, wherein the adjustment member defines an opening,

in the first direction, the aperture of the opening is smaller than the aperture of the window; or

In the first direction, the aperture of the opening is equal to the aperture of the window; or

In the first direction, the aperture of the opening is larger than the aperture of the window.

6. The semiconductor processing apparatus of claim 1, wherein the drive comprises:

a body; and

the movable part extends from the body, two ends of the movable part are respectively connected with the body and the shielding piece, and the movable part can move along the first direction relative to the body.

7. The semiconductor processing apparatus of any one of claims 1 to 6,

the sealing device further comprises a mounting member located inside the seal member, the mounting member being mounted on the processing device and the drive member being mounted on the mounting member.

8. The semiconductor processing apparatus according to any one of claims 1 to 6, wherein the sealing member comprises a sealing portion which interferes with an inner side wall of the cabinet, the sealing portion being provided with a groove for blocking transmission of light passing through a gap between the shielding member and the sealing portion toward an inside of the processing device.

9. The semiconductor processing apparatus of claim 8, wherein the shield is located outside of the recess or is at least partially received within the recess.

10. The semiconductor processing apparatus of claim 1, wherein an exterior sidewall of the processing device is provided with a connection port, and the window communicates with the connection port when the shutter is moved in a first direction relative to the cabinet to at least partially open the window.

11. The semiconductor processing apparatus of claim 1, further comprising a processing apparatus disposed above the processing device and configured to inspect the to-be-detected piece within the processing device.

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