CN213558707U

CN213558707U - High-purity ruthenium target surface cleaning device

Info

Publication number: CN213558707U
Application number: CN202022202127.5U
Authority: CN
Inventors: 王永超; 赵泽良
Original assignee: Henan Oriental Materials Co ltd
Current assignee: Shanghai Suwu Shenying Electronic Materials Co ltd
Priority date: 2020-09-30
Filing date: 2020-09-30
Publication date: 2021-06-29
Anticipated expiration: 2030-09-30

Abstract

The utility model discloses a high-purity ruthenium target surface cleaning device, include support, pneumatic cylinder, lifter plate, put thing frame and work box, pneumatic cylinder fixed connection is on the upside inner wall of support, the lower extreme at the pneumatic cylinder is installed to the lifter plate, put the lower extreme of thing frame butt joint at the lifter plate, work box fixed connection is on the downside inner wall of support, the inner wall fixedly connected with filter screen of work box, the inner wall of work box and the lower extreme fixedly connected with storage case that is close to the filter screen, injection mechanism is installed to the left and right sides of storage case, install drying mechanism on the lateral wall of support. This high-purity ruthenium target surface cleaning device uses through the cooperation of filter screen, stock guide and storage case isotructure when using to reached and washed convenient effect, used through the cooperation of spring, fly leaf and heat conduction piece isotructure, thereby reached dry abundant effect.

Description

High-purity ruthenium target surface cleaning device

Technical Field

The utility model belongs to the technical field of the clear cleanness of ruthenium target, especially, relate to high-purity ruthenium target surface cleaning device.

Background

Ruthenium is a hard, brittle and light grey polyvalent rare metal element, is one of platinum group metals, is really the cheapest metal in the platinum group metals, so the ruthenium has wide application, stable property and strong corrosion resistance, and a ruthenium metal sputtering target material becomes one of important raw materials in a vertical magnetic recording multilayer film structure, is usually applied to a magnetic recording medium as an intermediate layer and mainly plays roles of increasing thermal stability, reducing noise and the like.

Because high-purity ruthenium target directly exposes in the air in process of production, because special production is adjusted, at this moment impurity in a lot of air can adhere in the surface of ruthenium target, untimely processing can influence subsequent processing, need wash rust-resistant to high-purity ruthenium target steel casing in the in-process of preparation high-purity ruthenium target, current cleaning methods mostly adopt the water source to directly clean and wash, this kind of washing mode is with high costs, inefficiency and the potential safety hazard is also very big, the surface also rusts easily simultaneously, causes the lithium cell to use inconveniently.

Therefore, we propose a high purity ruthenium target surface cleaning device to solve the above problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problems and providing a device for cleaning the surface of a high-purity ruthenium target with convenient washing and sufficient drying.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

high-purity ruthenium target surface cleaning device, including support, pneumatic cylinder, lifter plate, put thing frame and work box, pneumatic cylinder fixed connection is on the upside inner wall of support, the lower extreme at the pneumatic cylinder is installed to the lifter plate, put the butt joint of thing frame at the lower extreme of lifter plate, work box fixed connection is on the downside inner wall of support, the inner wall fixedly connected with filter screen of work box, the inner wall of work box and the lower extreme fixedly connected with storage case that is close to the filter screen, injection mechanism is installed to the left and right sides of storage case, install drying mechanism on the lateral wall of support.

Preferably, the injection mechanism comprises a liquid guide pipe, a water pump, a telescopic water pipe and a spray head, the liquid guide pipe is inserted at the left side and the right side of the material storage box, the water pump is installed in the middle of the liquid guide pipe, one end of the telescopic water pipe is fixedly connected to the inner wall of the working box, and the spray head is fixedly connected to the other end of the telescopic water pipe.

Preferably, drying mechanism comprises spring, fly leaf, heat conduction piece, leading wheel and haulage rope, the one end fixed connection of spring is on the inner wall of support, fly leaf fixed connection is at the other end of spring, heat conduction piece fixed connection deviates from the one end of spring at the fly leaf, the one end fixed connection of haulage rope is in the middle part in the fly leaf outside, leading wheel fixed connection is on the lateral wall of support.

Preferably, the position of the object placing frame corresponds to the working box, and the width of the object placing frame is smaller than the width of the inner wall of the working box.

Preferably, the upper end and the lower end of the liquid guide pipe penetrate through the working box, and the upper end of the liquid guide pipe is connected to the inside of the telescopic water pipe.

Preferably, the inner wall of the upper side of the bracket is fixedly connected with the same guide wheels, and the other end of the traction rope is wound around the two guide wheels and is fixedly connected to the side surface of the lifting plate.

Compared with the prior art, the beneficial effects of the utility model are that:

1. this high-purity ruthenium target surface cleaning device uses through the cooperation of filter screen, stock guide and storage case isotructure when using, puts the thing frame and gets into the work box, at this moment opens the water pump for the water source spouts to putting in the thing frame via the shower nozzle, drops to the filter screen on via gravity after the water source washs afterwards, on the stock guide that arrives the downside after being filtered by the filter screen, is guided to in the storage case afterwards, thereby has reached and has washed convenient effect.

2. This high-purity ruthenium target surface cleaning device uses through the cooperation of spring, fly leaf and heat conduction piece isotructure when using, and the pneumatic cylinder moves through the lifter plate and puts the thing frame and shift up, and at this moment the lifter plate can cancel the pulling force to the haulage rope gradually, and the spring drives the fly leaf and moves to the inboard gradually, and the heat conduction piece is close to gradually and puts the thing frame afterwards, and at this moment the material of heat conduction piece in can the opposition thing frame heats the drying to dry abundant effect has been reached.

Drawings

FIG. 1 is a schematic structural view of a high purity ruthenium target surface cleaning apparatus according to the present invention;

FIG. 2 is a schematic view of a connection structure of the retractable water pipe and the spray head;

fig. 3 is a schematic view of a connection structure of the spring, the movable plate and the heat-conducting block.

In the figure: the device comprises a support 1, a hydraulic cylinder 2, a lifting plate 3, a storage frame 4, a work box 5, a filter screen 6, a material guide plate 7, a material storage box 8, a liquid guide pipe 9, a water pump 10, a telescopic water pipe 11, a spray head 12, a spring 13, a movable plate 14, a heat conduction block 15, a guide wheel 16 and a traction rope 17.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-3, the high-purity ruthenium target surface cleaning device comprises a support 1, a hydraulic cylinder 2, a lifting plate 3, a storage frame 4 and a working box 5, wherein the hydraulic cylinder 2 is fixedly connected to the inner wall of the upper side of the support 1, the type of the hydraulic cylinder 2 is 80 x 40 x 300-8MPA, the lifting plate 3 is installed at the lower end of the hydraulic cylinder 2, the storage frame 4 is butted at the lower end of the lifting plate 3, and through holes are designed on the outer surface of the storage frame 4, so that materials in the storage frame 4 can be effectively cleaned, the working box 5 is fixedly connected to the inner wall of the lower side of the support 1, the storage frame 4 is arranged corresponding to the working box 5, the width of the storage frame 4 is smaller than that of the inner wall of the working box 5, a filter screen 6 is fixedly connected to the inner wall of the working box 5, a storage box 8 is fixedly connected to the inner wall of the working box 5 and the lower end close, and a drying mechanism is arranged on the side wall of the bracket 1.

The injection mechanism is by catheter 9, water pump 10, flexible water pipe 11 and shower nozzle 12, catheter 9 pegs graft in the left and right sides of storage case 8, water pump 10 installs the middle part at catheter 9, who's pump 10's model is 50GW25-10-1.5, the one end fixed connection of flexible water pipe 11 is on the inner wall of work box 5, the inside to work box 5 is all run through at the upper and lower both ends of catheter 9, and the inside at flexible water pipe 11 is connected to catheter 9's upper end, shower nozzle 12 fixed connection is at the other end of flexible water pipe 11, the adjustment can take place for the length of flexible water pipe 11, such design makes the effectual inside of putting the thing frame 4 of washing of shower nozzle 12.

Drying mechanism is by spring 13, movable plate 14, heat conduction piece 15, leading wheel 16 and haulage rope 17 are constituteed, the one end fixed connection of spring 13 is on the inner wall of support 1, movable plate 14 fixed connection is at the other end of spring 13, heat conduction piece 15 fixed connection is at the one end that movable plate 14 deviates from spring 13, heat conduction piece 15 comprises resistive material, heat conduction piece 15 can produce the heat after the heating, the middle part in the movable plate 14 outside of one end fixed connection of haulage rope 17, leading wheel 16 fixed connection is on the lateral wall of support 1, the same leading wheel 16 of inner wall fixedly connected with of support 1 upside, two leading wheel 16 fixed connection are walked around to the other end of haulage rope 17 in the side of lifter plate 3.

Now, the operation principle of the present invention is described as follows:

when the high-purity ruthenium target surface cleaning device is used, a user firstly adds a ruthenium target to be treated into the storage frame 4, then the hydraulic cylinder 2 is started, the hydraulic cylinder 2 drives the lifting plate 3 on the lower side to move downwards, then the lifting plate 3 drives the storage frame 4 to move downwards until the storage frame 4 enters the working box 5, then the water pump 10 is started, so that a water source is sprayed into the storage frame 4 through the spray head 12, then the water source falls onto the filter screen 6 through gravity after being cleaned, reaches the guide plate 7 on the lower side after being filtered by the filter screen 6, then is guided into the storage box 8, and then the water source is driven into the telescopic water pipe 11 through the water pump 10 and the liquid guide pipe 9 again;

after the completion of stewing when washing, pneumatic cylinder 2 shifts up through lifter plate 3 drive thing frame 4, and at this moment lifter plate 4 can cancel the pulling force to haulage rope 17 gradually, and at this moment spring 13 needs the reconversion, and spring 13 drives fly leaf 14 and moves to inboard gradually afterwards, and heat conduction piece 15 is close to gradually and puts thing frame 4 afterwards, and at this moment heat conduction piece 15 can heat the drying to the material of putting in the thing frame 4.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. High-purity ruthenium target surface cleaning device, including support (1), pneumatic cylinder (2), lifter plate (3), put thing frame (4) and work box (5), its characterized in that, pneumatic cylinder (2) fixed connection is on the upside inner wall of support (1), the lower extreme at pneumatic cylinder (2) is installed in lifter plate (3), put thing frame (4) butt joint at the lower extreme of lifter plate (3), work box (5) fixed connection is on the downside inner wall of support (1), the inner wall fixedly connected with filter screen (6) of work box (5), the inner wall of work box (5) just is close to lower extreme fixedly connected with storage case (8) of filter screen (6), injection mechanism is installed to the left and right sides of storage case (8), install drying mechanism on the lateral wall of support (1).

2. The high-purity ruthenium target surface cleaning device according to claim 1, wherein the spraying mechanism comprises a liquid guide pipe (9), a water pump (10), a telescopic water pipe (11) and a spray head (12), the liquid guide pipe (9) is inserted at the left side and the right side of the material storage box (8), the water pump (10) is installed in the middle of the liquid guide pipe (9), one end of the telescopic water pipe (11) is fixedly connected to the inner wall of the working box (5), and the spray head (12) is fixedly connected to the other end of the telescopic water pipe (11).

3. The high-purity ruthenium target surface cleaning device according to claim 1, wherein the drying mechanism comprises a spring (13), a movable plate (14), a heat conducting block (15), a guide wheel (16) and a traction rope (17), one end of the spring (13) is fixedly connected to the inner wall of the support (1), the movable plate (14) is fixedly connected to the other end of the spring (13), the heat conducting block (15) is fixedly connected to one end of the movable plate (14) which is far away from the spring (13), one end of the traction rope (17) is fixedly connected to the middle of the outer side of the movable plate (14), and the guide wheel (16) is fixedly connected to the side wall of the support (1).

4. The high-purity ruthenium target surface cleaning device according to claim 1, wherein the placement frame (4) is disposed corresponding to the working box (5), and the width of the placement frame (4) is smaller than the width of the inner wall of the working box (5).

5. The apparatus for cleaning a target surface of high purity ruthenium according to claim 2 wherein the upper and lower ends of the liquid guide tube (9) are both penetrated into the inside of the working tank (5), and the upper end of the liquid guide tube (9) is connected to the inside of the telescopic water tube (11).

6. The high-purity ruthenium target surface cleaning device according to claim 3, wherein the same guide wheel (16) is fixedly connected to the inner wall of the upper side of the support (1), and the other end of the traction rope (17) is fixedly connected to the side surface of the lifting plate (3) by bypassing the two guide wheels (16).