CN213558589U - Cleaning device with scrubbing function for semiconductor processing - Google Patents
Cleaning device with scrubbing function for semiconductor processing Download PDFInfo
- Publication number
- CN213558589U CN213558589U CN202022189757.3U CN202022189757U CN213558589U CN 213558589 U CN213558589 U CN 213558589U CN 202022189757 U CN202022189757 U CN 202022189757U CN 213558589 U CN213558589 U CN 213558589U
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- fixedly connected
- plate
- semiconductor processing
- cleaning device
- brushing
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Abstract
The utility model discloses a belt cleaning device is used in semiconductor processing with scrub function belongs to semiconductor processing device technical field, including bottom plate, pillar, roof, actuating mechanism, storage mechanism and scrubbing mechanism, the upper surface of bottom plate passes through the lower fixed surface of pillar and roof and is connected, and the surface cover of pillar is equipped with a plurality of sliding sleeves, two second stationary blades of the left surface fixedly connected with of sliding sleeve, and it has the connecting rod to articulate between two second stationary blades, and the other end of connecting rod articulates between two first stationary blades. The utility model discloses in, through setting up sliding sleeve, connecting rod and storage mechanism, the one end that the sliding sleeve can drive the connecting rod reciprocates, and the other end of connecting rod can drive and control about the storage mechanism, can spray the washing liquid to the storage mechanism, under the mating reaction of washing liquid, semiconductor material by the cleaning performance better, and the in-process of scrubbing also can lead to semiconductor material to appear rocking the condition of violent collision, can not lead to semiconductor material to damage.
Description
Technical Field
The utility model belongs to the technical field of the semiconductor processing device, especially, relate to a belt cleaning device for semiconductor processing with scrub function.
Background
The semiconductor is a substance with the resistivity between metal and an insulator and a negative resistance temperature coefficient, has the function of controllable conductivity, and needs to be cleaned during processing, but the existing cleaning device still places a large amount of semiconductor materials in the cleaning frame, controls the cleaning frame to shake in water for cleaning, but the semiconductor materials may collide with each other during cleaning, if the semiconductor materials are damaged due to collision, the subsequent sale is influenced, and the cleaning effect of pure water flow flushing is not good.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a: the cleaning device with the brushing function for the semiconductor processing is provided in order to solve the problems that semiconductor materials may collide with each other when the existing cleaning device cleans, and the cleaning effect is not good.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a semiconductor processing cleaning device with a brushing function comprises a bottom plate, a supporting column, a top plate, a driving mechanism, a storage mechanism and a brushing mechanism, wherein the upper surface of the bottom plate is fixedly connected with the lower surface of the top plate through the supporting column, a plurality of sliding sleeves are sleeved on the outer surface of the supporting column, two second fixing pieces are fixedly connected to the left side surface of each sliding sleeve, a connecting rod is hinged between the two second fixing pieces, the other end of each connecting rod is hinged between the two first fixing pieces, the first fixing pieces are fixedly connected to the right side surface of the storage mechanism, the storage mechanism is arranged in the brushing mechanism, and the brushing mechanism is fixedly connected to the upper surface of the bottom plate;
sliding sleeve fixed connection is in the left surface of curb plate, and the right flank fixedly connected with baffle of curb plate, the right side of baffle are provided with actuating mechanism, and actuating mechanism sets up on the roof, the surface cover of pillar is equipped with the spring, the both ends of spring respectively with the lower surface of sliding sleeve and the last fixed surface of bottom plate be connected.
As a further description of the above technical solution:
the storage mechanism comprises a collecting box fixedly connected with a first fixing plate, the upper surface of the collecting box is hinged with an cover plate, and a second filter screen and a first filter screen are respectively arranged on the opposite surfaces of the collecting box and the cover plate.
As a further description of the above technical solution:
the upper surface of collecting the box has seted up the through-hole, is provided with the handle in the through-hole, the lower fixed surface of handle is connected with the connecting plate, and the left surface fixedly connected with dead lever of connecting plate, the equal fixedly connected with first brush hair of upper surface and lower surface of dead lever.
As a further description of the above technical solution:
scrubbing mechanism includes the portal frame of fixed connection on the bottom plate, a plurality of rectangle frames of fixedly connected with in the portal frame, and a plurality of rectangle frames are from last down align to grid setting, and the upper surface and the lower surface of rectangle frame inner wall all are provided with the second brush hair, both sides have all laminated the backup pad around the rectangle frame lower surface, and two backup pads are fixed connection respectively at the front and the back of portal frame inner wall.
As a further description of the above technical solution:
the driving mechanism comprises a fixing plate fixedly connected to the top plate, the fixing plate penetrates through the upper surface of the top plate and extends to the lower side of the top plate, a first driving wheel and a second driving wheel are connected to the back of the fixing plate in a rotating mode, the first driving wheel and the second driving wheel are connected through a belt in a transmission mode, and the belt penetrates through a limiting hole formed in the upper surface of the top plate.
As a further description of the above technical solution:
the back of the first driving wheel is fixedly connected with an output shaft of the motor, the motor is fixedly installed on the upper surface of the top plate, the back of the second driving wheel is fixedly connected with a turntable, a push plate is fixedly connected to the outer surface of the turntable, and the push plate is located on the lower side of the baffle.
To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:
1. the utility model discloses in, through setting up the sliding sleeve, connecting rod and storage mechanism, the one end that the sliding sleeve can drive the connecting rod reciprocates, the other end of connecting rod can drive and control the removal of storage mechanism, can spray the washing liquid on to storage mechanism, scrub the mechanism through the setting, can deposit a large amount of semiconductor material in the storage mechanism, storage mechanism can control in scrubbing the mechanism simultaneously and remove, scrub the mechanism this moment and scrub the semiconductor material in the storage mechanism, under the mating reaction of washing liquid, semiconductor material by the cleaning performance better, and the in-process of scrubbing also can lead to semiconductor material to appear rocking the condition of violent collision, can not lead to the semiconductor material to damage.
2. The utility model discloses in, through setting up storage mechanism, and storage mechanism is including collecting box, handle, dead lever and first brush hair, and the handle can drive the dead lever back-and-forth movement, and the dead lever can the back-and-forth movement stir the material removal in the collection box, and the time length of the position of collecting the interior material of box at this moment is changeed, consequently scrub the mechanism and can scrub a large amount of semiconductor materials comprehensively, has further improved the cleaning performance to semiconductor materials.
Drawings
Fig. 1 is a schematic structural view of a semiconductor processing cleaning device with a brushing function according to the present invention;
fig. 2 is a schematic side view of a brushing mechanism of a semiconductor processing cleaning apparatus with a brushing function according to the present invention;
fig. 3 is a schematic cross-sectional view of a storage mechanism in a semiconductor processing cleaning apparatus with a scrubbing function according to the present invention.
Illustration of the drawings:
1. a pillar; 2. a base plate; 3. a sliding sleeve; 4. a top plate; 5. a spring; 6. a connecting rod; 7. a first fixing sheet; 8. a storage mechanism; 81. a collection box; 82. a first filter screen; 83. a through hole; 84. a handle; 85. a second filter screen; 86. fixing the rod; 87. a first bristle; 9. a brushing mechanism; 91. a second bristle; 92. a rectangular frame; 93. a support plate; 94. a gantry; 10. a side plate; 11. a baffle plate; 12. a drive mechanism; 121. a fixing plate; 122. a first drive pulley; 123. a second transmission wheel; 124. a turntable; 125. pushing the plate; 126. a limiting hole; 127. a motor; 128. a belt.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a cleaning device with a scrubbing function for semiconductor processing comprises a bottom plate 2, a support column 1, a top plate 4, a driving mechanism 12, a storage mechanism 8 and a scrubbing mechanism 9, wherein the upper surface of the bottom plate 2 is fixedly connected with the lower surface of the top plate 4 through the support column 1, a plurality of sliding sleeves 3 are sleeved on the outer surface of the support column 1, two second fixing plates are fixedly connected with the left side surface of each sliding sleeve 3, a connecting rod 6 is hinged between the two second fixing plates, the other end of each connecting rod 6 is hinged between the two first fixing plates 7, the first fixing plates 7 are fixedly connected with the right side surface of the storage mechanism 8, the storage mechanism 8 comprises a collecting box 81 fixedly connected with the first fixing plates 7, a cover plate is hinged to the upper surface of the collecting box 81, a second filter screen 85 and a first filter screen 82 are respectively arranged on the opposite surfaces of the collecting box 81 and the cover plate, a handle 84 is arranged in the through hole 83, a connecting plate is fixedly connected to the lower surface of the handle 84, a fixing rod 86 is fixedly connected to the left side surface of the connecting plate, first bristles 87 are fixedly connected to the upper surface and the lower surface of the fixing rod 86, a collection box 81, a cover plate, a first filter screen 82 and a second filter screen 85 are arranged, a large amount of semiconductor materials can be stored in the collection box 81, the cover plate can cover the collection box 81 and be matched with the collection box 81 to fix the semiconductor materials, under the action of the first filter screen 82 and the second filter screen 85, external cleaning liquid can flow into the collection box 81 to wash the semiconductor materials when being poured on the storage mechanism 8, and the second bristles 91 can enter the collection box 81 through the first filter screen 82 and the second filter screen 85 to wash the semiconductor materials;
the storage mechanism 8 is arranged in the brushing mechanism 9, the brushing mechanism 9 is fixedly connected to the upper surface of the base plate 2, the brushing mechanism 9 comprises a portal frame 94 fixedly connected to the base plate 2, the portal frame 94 can fix a plurality of rectangular frames 92 together, the portal frame 94 is internally fixedly connected with a plurality of rectangular frames 92, the rectangular frames 92 are uniformly arranged from top to bottom, the upper surface and the lower surface of the inner wall of each rectangular frame 92 are provided with second bristles 91, the collection box 81 can pass through the rectangular frame 92 by arranging the rectangular frames 92 and the second bristles 91, the rectangular frames 92 can limit the collection box 81 to avoid that the collection box 81 is separated from a track to influence cleaning work when moving, the second bristles 91 can extend into the collection box 81 to brush the semiconductor material in the collection box 81, the front side and the rear side of the lower surface of each rectangular frame 92 are respectively attached with a support plate 93, the two supporting plates 93 are respectively and fixedly connected to the front side and the back side of the inner wall of the portal frame 94, and the collecting box 81 can stably move left and right on the supporting plates 93 by arranging the supporting plates 93, so that the collecting box 81 cannot derail;
the sliding sleeve 3 is fixedly connected to the left side surface of the side plate 10, the right side surface of the side plate 10 is fixedly connected with the baffle 11, the right side of the baffle 11 is provided with the driving mechanism 12, the driving mechanism 12 is arranged on the top plate 4, the driving mechanism 12 comprises a fixing plate 121 fixedly connected to the top plate 4, the fixing plate 121 penetrates through the upper surface of the top plate 4 and extends to the lower side of the top plate 4, the back surface of the fixing plate 121 is rotatably connected with a first driving wheel 122 and a second driving wheel 123, the first driving wheel 122 and the second driving wheel 123 are in transmission connection through a belt 128, the belt 128 penetrates through a limiting hole 126 formed in the upper surface of the top plate 4, the first driving wheel 122 and the second driving wheel 123 are arranged, the motor 127 can drive the first driving wheel 122 to rotate when the motor 127 works, the first driving wheel 122 can drive the second driving wheel 123 to rotate through the belt 128, the back surface of the, the motor 127 is fixedly installed on the upper surface of the top plate 4, the back of the second transmission wheel 123 is fixedly connected with the turntable 124, the outer surface of the turntable 124 is fixedly connected with the push plate 125, the push plate 125 is located on the lower side of the baffle plate 11, by arranging the turntable 124, the push plate 125, the baffle plate 11 and the side plate 10, the turntable 124 can drive the push plate 125 to move when rotating, the push plate 125 can drive the baffle plate 11 to move upwards, the baffle plate 11 can drive the sliding sleeves 3 to move upwards through the side plate 10, so that the sliding sleeves 3 can control the collection boxes 81 to move rightwards through the connecting rod 6, the outer surface of the sliding rod is sleeved with the spring 5, two ends of the spring 5 are respectively fixedly connected with the lower surface of the sliding sleeve 3 and the upper surface of the bottom plate 2, by arranging the spring 5, when the sliding sleeve 3 moves upwards to the highest position and the baffle plate 11 is not extruded by the push, at this time, the other end of the connecting rod 6 can push the collecting box 81 to move leftward.
The working principle is as follows: during the use, the workman opens the apron and puts into a large amount of semiconductor materials to collecting box 81, then close the apron and fix semiconductor materials, control actuating mechanism 12 work and push up baffle 11 and upwards move, baffle 11 can drive sliding sleeve 3 rebound through curb plate 10, the left end of connecting rod 6 can stimulate storage mechanism 8 and move right this moment, when push pedal 125 no longer extrudees baffle 11, spring 5 can contract and drive sliding sleeve 3 rebound, the left end of connecting rod 6 can promote storage mechanism 8 and move left this moment, with this control storage mechanism 8 and remove about repeatedly, external washing liquid is sprayed on storage mechanism 8 simultaneously, storage mechanism 8 can be effectively washd when scrubbing mechanism 9.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (6)
1. A cleaning device with a brushing function for semiconductor processing comprises a bottom plate (2), a support column (1), a top plate (4), a driving mechanism (12), a storage mechanism (8) and a brushing mechanism (9), it is characterized in that the upper surface of the bottom plate (2) is fixedly connected with the lower surface of the top plate (4) through a strut (1), a plurality of sliding sleeves (3) are sleeved on the outer surface of the strut (1), the left side surface of the sliding sleeve (3) is fixedly connected with two second fixing plates, a connecting rod (6) is hinged between the two second fixing plates, the other end of the connecting rod (6) is hinged between the two first fixing plates (7), the first fixing plates (7) are fixedly connected with the right side surface of the storage mechanism (8), the storage mechanism (8) is arranged in the brushing mechanism (9), and the brushing mechanism (9) is fixedly connected to the upper surface of the bottom plate (2);
sliding sleeve (3) fixed connection is at the left surface of curb plate (10), and the right flank fixedly connected with baffle (11) of curb plate (10), and the right side of baffle (11) is provided with actuating mechanism (12), and actuating mechanism (12) set up on roof (4), the surface cover of pillar (1) is equipped with spring (5), and the both ends of spring (5) are connected with the lower surface of sliding sleeve (3) and the last fixed surface of bottom plate (2) respectively.
2. The semiconductor processing cleaning device with the brushing function according to claim 1, wherein the storage mechanism (8) comprises a collection box (81) fixedly connected with the first fixing plate (7), a cover plate is hinged on the upper surface of the collection box (81), and a second filter screen (85) and a first filter screen (82) are respectively arranged on the opposite surfaces of the collection box (81) and the cover plate.
3. The semiconductor processing cleaning device with the brushing function as claimed in claim 2, wherein a through hole (83) is formed in the upper surface of the collecting box (81), a handle (84) is arranged in the through hole (83), a connecting plate is fixedly connected to the lower surface of the handle (84), a fixing rod (86) is fixedly connected to the left side surface of the connecting plate, and first bristles (87) are fixedly connected to the upper surface and the lower surface of the fixing rod (86).
4. The semiconductor processing cleaning device with the brushing function according to claim 1, wherein the brushing mechanism (9) comprises a portal frame (94) fixedly connected to the bottom plate (2), a plurality of rectangular frames (92) are fixedly connected in the portal frame (94), the rectangular frames (92) are uniformly arranged from top to bottom, the upper surface and the lower surface of the inner wall of each rectangular frame (92) are provided with second bristles (91), the front side and the rear side of the lower surface of each rectangular frame (92) are respectively attached with supporting plates (93), and the two supporting plates (93) are respectively and fixedly connected to the front side and the back side of the inner wall of the portal frame (94).
5. The semiconductor processing cleaning device with the brushing function according to claim 1, wherein the driving mechanism (12) comprises a fixing plate (121) fixedly connected to the top plate (4), the fixing plate (121) penetrates through the upper surface of the top plate (4) and extends to the lower side of the top plate (4), a first driving wheel (122) and a second driving wheel (123) are rotatably connected to the back surface of the fixing plate (121), the first driving wheel (122) and the second driving wheel (123) are in transmission connection through a belt (128), and the belt (128) penetrates through a limiting hole (126) formed in the upper surface of the top plate (4).
6. The semiconductor processing cleaning device with the brushing function according to claim 5, wherein the back surface of the first driving wheel (122) is fixedly connected with an output shaft of a motor (127), the motor (127) is fixedly arranged on the upper surface of the top plate (4), the back surface of the second driving wheel (123) is fixedly connected with a rotating disc (124), the outer surface of the rotating disc (124) is fixedly connected with a push plate (125), and the push plate (125) is positioned on the lower side of the baffle plate (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022189757.3U CN213558589U (en) | 2020-09-29 | 2020-09-29 | Cleaning device with scrubbing function for semiconductor processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022189757.3U CN213558589U (en) | 2020-09-29 | 2020-09-29 | Cleaning device with scrubbing function for semiconductor processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213558589U true CN213558589U (en) | 2021-06-29 |
Family
ID=76580182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022189757.3U Expired - Fee Related CN213558589U (en) | 2020-09-29 | 2020-09-29 | Cleaning device with scrubbing function for semiconductor processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213558589U (en) |
-
2020
- 2020-09-29 CN CN202022189757.3U patent/CN213558589U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210629 |
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| CF01 | Termination of patent right due to non-payment of annual fee |