CN213546282U - High-efficient conveyor of silicon chip - Google Patents

High-efficient conveyor of silicon chip Download PDF

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Publication number
CN213546282U
CN213546282U CN202022277320.5U CN202022277320U CN213546282U CN 213546282 U CN213546282 U CN 213546282U CN 202022277320 U CN202022277320 U CN 202022277320U CN 213546282 U CN213546282 U CN 213546282U
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CN
China
Prior art keywords
support
rotating wheel
wheel
rotating
feeding seat
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Expired - Fee Related
Application number
CN202022277320.5U
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Chinese (zh)
Inventor
谢立平
林锐
李唐
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Kunshan Laiqilong Precision Technology Co ltd
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Kunshan Laiqilong Precision Technology Co ltd
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Priority to CN202022277320.5U priority Critical patent/CN213546282U/en
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Publication of CN213546282U publication Critical patent/CN213546282U/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model discloses a high-efficient conveyor of silicon chip, including installing fortune material bottom plate in the frame, setting up in material loading seat, input module and the output module of fortune material bottom plate one end, input module and output module install respectively in the frame and superpose from top to bottom, material loading seat can reciprocate along the vertical direction, and when material loading seat moved to the upper end, it was adjoined with one end of input module, input module transported the basket to material loading seat, and when material loading seat moved to the lower extreme, it was adjoined with one end of input module, and transported the basket to input module; the feeding device is characterized in that a feeding driving assembly used for driving the feeding seat to move up and down is arranged on the outer side of the feeding seat, a material basket is placed above the feeding seat, and a plurality of material sheets which are arranged at intervals in the vertical direction are sequentially loaded in the material basket. The utility model discloses a piece by piece to the silicon chip is automatic to be got and is taken, has both improved degree of automation and machining efficiency, can avoid the artificial damage silicon chip again, improves the efficiency and the quality of processing.

Description

High-efficient conveyor of silicon chip
Technical Field
The utility model relates to a high-efficient conveyor of silicon chip belongs to line photovoltaic processing technology field.
Background
In recent years, solar photovoltaic power generation technology is continuously improved, production cost is continuously reduced, conversion efficiency is continuously improved, and the application of photovoltaic power generation is increasingly popularized and rapidly developed, so that the photovoltaic power generation technology gradually becomes an important source of power supply. The photovoltaic silicon chip is a core part in a solar power generation system and is also the part with the highest value in the solar power generation system. The photovoltaic silicon chip is used for converting solar energy into electric energy, and the electric energy is transmitted to the electric storage to be stored or is directly used for pushing a load to work. The quality and cost of the photovoltaic silicon wafer will directly determine the quality and cost of the entire solar power system.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a high-efficient conveyor of silicon chip, it has realized getting to take the silicon chip piece by piece is automatic, has both improved degree of automation and machining efficiency, can avoid the artificial damage silicon chip again, improves the efficiency and the quality of processing.
In order to achieve the above purpose, the utility model adopts the technical scheme that: a high-efficiency conveying device for silicon wafers comprises a conveying bottom plate, a feeding seat, an input assembly and an output assembly, wherein the conveying bottom plate is arranged on a rack, the feeding seat is arranged at one end of the conveying bottom plate, the input assembly and the output assembly are respectively arranged on the rack and are vertically superposed, the feeding seat can vertically move up and down, when the feeding seat moves to the upper end, the feeding seat is abutted to one end of the input assembly, the input assembly conveys a material basket onto the feeding seat, and when the feeding seat moves to the lower end, the feeding seat is abutted to one end of the input assembly and conveys the material basket onto the input assembly;
a feeding driving assembly for driving the feeding seat to move up and down is arranged on the outer side of the feeding seat, a material basket is placed above the feeding seat, and a plurality of material sheets which are arranged at intervals in the vertical direction are sequentially loaded in the material basket;
the upper surface of the material conveying bottom plate is provided with a support, two sides of the support are symmetrically provided with transmission belts for transmitting material sheets, and a transmission motor for driving the transmission belts is arranged on the support;
a main driving wheel is installed on an output shaft of the transmission motor, a first rotating shaft is rotatably installed on the support, two ends of the first rotating shaft respectively extend outwards from two sides of the support, a driven driving wheel is installed at one end of the first rotating shaft which is positioned at the same side of the main driving wheel, and the driven driving wheel is in transmission connection with the main driving wheel through a synchronous belt;
the first rotating wheels are respectively arranged on the first rotating shaft and positioned on two sides of the support, a plurality of second rotating wheels are respectively rotatably arranged on two sides of the support, and the first rotating wheels and the second rotating wheels positioned on the same side of the support are in transmission connection through a transmission belt;
the first rotating shaft is positioned on two sides of the support and is respectively provided with a first rotating wheel, two sides of the support are respectively rotatably provided with a plurality of second rotating wheels, a movable plate is slidably arranged above the support and can reciprocate along the material conveying direction, two side end surfaces of the movable plate, which are close to one end of the feeding seat, are respectively provided with a rotatable third rotating wheel, the first rotating wheel, the second rotating wheel and the third rotating wheel which are positioned on the same side of the support are in transmission connection through a transmission belt, the upper surface of the third rotating wheel is flush with the upper surface of one second rotating wheel on the same side, so that the transmission belt connected between the third rotating wheel and the second rotating wheel with flush upper surfaces is a horizontal transmission surface which can be contacted with material sheets, and one end of the transmission belt, which is close to the feeding seat, can extend into the material;
the support is provided with a movable block in a sliding mode, the upper surface of the movable block is connected with the lower surface of the movable plate, which is far away from one end of the third rotating wheel, so that the movable block and the movable plate can move synchronously, a rotatable supporting wheel is arranged on one side end face of the movable block, the supporting wheel is in transmission connection with the first rotating wheel, the second rotating wheel and the third rotating wheel on the same side through a transmission belt, the supporting wheel is in contact with one surface of the transmission belt, and the third rotating wheel is in contact with the other surface of the transmission belt.
The further improved scheme in the technical scheme is as follows:
1. in the scheme, the movable block is connected with the support through the sliding rail and the sliding block.
2. In the scheme, two driving rotating wheels connected through a driving belt are installed on one side of the support, and one of the driving rotating wheels is connected with an output shaft of a motor installed on the support.
3. In the scheme, the movable block is connected with the driving belt through a connecting block.
Because of above-mentioned technical scheme's application, compared with the prior art, the utility model have the following advantage:
1. the utility model discloses the high-efficient conveyor of silicon chip, it has realized transporting the high efficiency of monolithic silicon chip, piece by piece full-automatic, has improved the stability and the security of transporting the process simultaneously, avoids external force and artificial intervention, avoids the damage of silicon chip completely, and degree of automation is high.
2. The high-efficiency conveying device for the silicon wafers of the utility model has the movable plate which can be slidably arranged above the support and can reciprocate along the conveying direction, the two side end surfaces of the movable plate close to one end of the material receiving area are respectively provided with a rotatable third rotating wheel, the first rotating wheel, the second rotating wheel and the third rotating wheel which are positioned at the same side of the support are connected by the transmission belt, the upper surface of the third rotating wheel is flush with the upper surface of one second rotating wheel on the same side, so that a conveying belt connected between the third rotating wheel with the flush upper surface and the second rotating wheel is a horizontal conveying surface capable of contacting with the material sheets, the third rotating wheel on the movable plate drives the transmission belt to reciprocate, so that automatic taking of the silicon wafers one by one is realized, manual discharging is reduced, the automation degree and the processing efficiency are improved, the silicon wafers can be prevented from being damaged manually, and the processing efficiency and the processing quality are improved; furthermore, a movable block is slidably mounted on the support, the upper surface of the movable block is connected with the lower surface of the movable plate far away from one end of the third rotating wheel, so that the movable block and the movable plate can move synchronously, a rotatable supporting wheel is mounted on one side end face of the movable block, the supporting wheel is in transmission connection with the first rotating wheel, the second rotating wheel and the third rotating wheel on the same side through a transmission belt, the supporting wheel is in surface contact with the transmission belt, the third rotating wheel is in surface contact with the other side of the transmission belt, and the transmission belt is guaranteed to be always kept in a tensioning state through synchronous movement of the supporting wheel and the third rotating wheel on the movable block, and further stability and safety of silicon wafer conveying are guaranteed.
Drawings
Fig. 1 is a schematic view of the overall structure of the feeding machine for photovoltaic processing of the present invention;
FIG. 2 is a schematic view of a partial structure of the efficient silicon wafer conveying device of the present invention;
FIG. 3 is a schematic view of a partial structure of the efficient silicon wafer conveying device of the present invention;
FIG. 4 is a schematic view of a partial structure of the efficient silicon wafer conveying device of the present invention;
fig. 5 is the local structural schematic diagram of the high-efficiency conveying device for silicon wafers of the present invention.
In the above drawings: 1. a frame; 2. an input component; 3. an output component; 4. a support plate; 5. a motor; 6. a rotating shaft; 7. a roller; 8. a conveyor belt; 11. a material conveying bottom plate; 12. a support; 13. a transmission motor; 14. a transfer belt; 15. a main drive wheel; 16. a first rotating shaft; 17. a driven wheel; 18. a first runner; 19. a second runner; 24. a movable plate; 25. a third rotating wheel; 26. a movable block; 27. a support wheel; 28. a drive belt; 29. driving the rotating wheel; 30. connecting blocks; 36. a web; 37. a feeding seat; 38. a feeding drive assembly; 39. a material basket.
Detailed Description
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example 1: a high-efficiency conveying device for silicon wafers comprises a conveying bottom plate 11 arranged on a rack 1, a feeding seat 37 arranged at one end of the conveying bottom plate 11, an input assembly 2 and an output assembly 3, wherein the input assembly 2 and the output assembly 3 are respectively arranged on the rack 1 and are overlapped up and down, the feeding seat 37 can move up and down along the vertical direction, when the feeding seat 37 moves to the upper end, the feeding seat is adjacent to one end of the input assembly 2, the input assembly 2 conveys a material basket 39 onto the feeding seat 37, and when the feeding seat 37 moves to the lower end, the feeding seat is adjacent to one end of the input assembly 2 and conveys the material basket 39 onto the input assembly 2;
the input assembly 2, the output assembly 3 and the feeding seat 37 respectively comprise two support plates 4, a motor 5, a rotating shaft 6, rollers 7 arranged on the rotating shaft 6 and a transmission belt 8 for transmitting a material basket 39, the two parallel rotating shafts 6 are respectively connected between the two support plates 4 and positioned at two ends of the support plates 4, the rollers 7 are arranged at two ends of the rotating shaft 6 at intervals, the rollers 7 arranged at the same end of the rotating shaft 6 are connected through the transmission belt 8, and the motor 5 in transmission connection with the rotating shaft 6 is arranged on the support plates 4 and used for driving the rotating shaft 6 to rotate;
a feeding driving assembly 38 for driving the feeding seat 37 to move up and down is arranged on the outer side of the feeding seat 37, a material basket 39 is placed above the feeding seat 37, and a plurality of material sheets 36 which are arranged at intervals along the vertical direction are sequentially loaded in the material basket 39;
the upper surface of the material conveying bottom plate 11 is provided with a support 12, two sides of the support 12 are symmetrically provided with a conveying belt 14 for conveying material sheets 36, and a conveying motor 13 for driving the conveying belt 14 is arranged on the support 12;
a main driving wheel 15 is installed on an output shaft of the transmission motor 13, a first rotating shaft 16 is rotatably installed on the support 12, two ends of the first rotating shaft 16 respectively extend out from two sides of the support 12, one end of the first rotating shaft 16 positioned at the same side of the main driving wheel 15 is provided with a driven driving wheel 17, and the driven driving wheel 17 is in transmission connection with the main driving wheel 15 through a synchronous belt;
a first rotating wheel 18 is respectively arranged on the first rotating shaft 16 and positioned at two sides of the support 12, a plurality of second rotating wheels 19 are respectively arranged at two sides of the support 12 in a rotating manner, and the first rotating wheel 18 and the second rotating wheels 19 positioned at the same side of the support 12 are in transmission connection through a transmission belt 14;
a first rotating wheel 18 is respectively installed on the first rotating shaft 16 and positioned at two sides of the support 12, a plurality of second rotating wheels 19 are respectively installed on two sides of the support 12 in a rotating manner, a movable plate 24 is slidably installed above the support 12 and can reciprocate along the material conveying direction, a rotatable third rotating wheel 25 is respectively installed on two side end surfaces of the movable plate 24 close to one end of the material loading seat 37, the first rotating wheel 18, the second rotating wheel 19 and the third rotating wheel 25 positioned at the same side of the support 12 are in transmission connection through a transmission belt 14, the upper surface of the third rotating wheel 25 is flush with the upper surface of one second rotating wheel 19 at the same side, so that the transmission belt 14 connected between the third rotating wheel 25 and the second rotating wheel 19 with flush upper surfaces is a horizontal transmission surface capable of contacting with the material sheet 36, and one end of the transmission belt 14 close to the material loading seat 37 can extend into the material basket 39;
a movable block 26 is slidably mounted on the support 12, an upper surface of the movable block 26 is connected with a lower surface of one end of the movable plate 24 far away from the third rotating wheel 25, so that the movable block 26 and the movable plate 24 move synchronously, a rotatable supporting wheel 27 is mounted on one side end surface of the movable block 26, the supporting wheel 27 is in transmission connection with the first rotating wheel 18, the second rotating wheel 19 and the third rotating wheel 25 on the same side through the transmission belt 14, the supporting wheel 27 is in contact with one surface of the transmission belt 14, and the third rotating wheel 25 is in contact with the other surface of the transmission belt 14.
Two driving rotating wheels 29 connected through a driving belt 28 are installed on one side of the support 12, wherein one driving rotating wheel 29 is connected with an output shaft of a motor installed on the support 12;
the feeding driving assembly 38 comprises a motor, a vertically arranged screw rod and a movable block sleeved on the screw rod through threads, an output shaft of the motor is connected with the screw rod, and the movable block is connected with the feeding seat 37.
Example 2: a high-efficiency conveying device for silicon wafers comprises a conveying bottom plate 11 arranged on a rack 1, a feeding seat 37 arranged at one end of the conveying bottom plate 11, an input assembly 2 and an output assembly 3, wherein the input assembly 2 and the output assembly 3 are respectively arranged on the rack 1 and are overlapped up and down, the feeding seat 37 can move up and down along the vertical direction, when the feeding seat 37 moves to the upper end, the feeding seat is adjacent to one end of the input assembly 2, the input assembly 2 conveys a material basket 39 onto the feeding seat 37, and when the feeding seat 37 moves to the lower end, the feeding seat is adjacent to one end of the input assembly 2 and conveys the material basket 39 onto the input assembly 2;
the input assembly 2, the output assembly 3 and the feeding seat 37 respectively comprise two support plates 4, a motor 5, a rotating shaft 6, rollers 7 arranged on the rotating shaft 6 and a transmission belt 8 for transmitting a material basket 39, the two parallel rotating shafts 6 are respectively connected between the two support plates 4 and positioned at two ends of the support plates 4, the rollers 7 are arranged at two ends of the rotating shaft 6 at intervals, the rollers 7 arranged at the same end of the rotating shaft 6 are connected through the transmission belt 8, and the motor 5 in transmission connection with the rotating shaft 6 is arranged on the support plates 4 and used for driving the rotating shaft 6 to rotate;
a feeding driving assembly 38 for driving the feeding seat 37 to move up and down is arranged on the outer side of the feeding seat 37, a material basket 39 is placed above the feeding seat 37, and a plurality of material sheets 36 which are arranged at intervals along the vertical direction are sequentially loaded in the material basket 39;
the upper surface of the material conveying bottom plate 11 is provided with a support 12, two sides of the support 12 are symmetrically provided with a conveying belt 14 for conveying material sheets 36, and a conveying motor 13 for driving the conveying belt 14 is arranged on the support 12;
a main driving wheel 15 is installed on an output shaft of the transmission motor 13, a first rotating shaft 16 is rotatably installed on the support 12, two ends of the first rotating shaft 16 respectively extend out from two sides of the support 12, one end of the first rotating shaft 16 positioned at the same side of the main driving wheel 15 is provided with a driven driving wheel 17, and the driven driving wheel 17 is in transmission connection with the main driving wheel 15 through a synchronous belt;
a first rotating wheel 18 is respectively arranged on the first rotating shaft 16 and positioned at two sides of the support 12, a plurality of second rotating wheels 19 are respectively arranged at two sides of the support 12 in a rotating manner, and the first rotating wheel 18 and the second rotating wheels 19 positioned at the same side of the support 12 are in transmission connection through a transmission belt 14;
a first rotating wheel 18 is respectively installed on the first rotating shaft 16 and positioned at two sides of the support 12, a plurality of second rotating wheels 19 are respectively installed on two sides of the support 12 in a rotating manner, a movable plate 24 is slidably installed above the support 12 and can reciprocate along the material conveying direction, a rotatable third rotating wheel 25 is respectively installed on two side end surfaces of the movable plate 24 close to one end of the material loading seat 37, the first rotating wheel 18, the second rotating wheel 19 and the third rotating wheel 25 positioned at the same side of the support 12 are in transmission connection through a transmission belt 14, the upper surface of the third rotating wheel 25 is flush with the upper surface of one second rotating wheel 19 at the same side, so that the transmission belt 14 connected between the third rotating wheel 25 and the second rotating wheel 19 with flush upper surfaces is a horizontal transmission surface capable of contacting with the material sheet 36, and one end of the transmission belt 14 close to the material loading seat 37 can extend into the material basket 39;
a movable block 26 is slidably mounted on the support 12, an upper surface of the movable block 26 is connected with a lower surface of one end of the movable plate 24 far away from the third rotating wheel 25, so that the movable block 26 and the movable plate 24 move synchronously, a rotatable supporting wheel 27 is mounted on one side end surface of the movable block 26, the supporting wheel 27 is in transmission connection with the first rotating wheel 18, the second rotating wheel 19 and the third rotating wheel 25 on the same side through the transmission belt 14, the supporting wheel 27 is in contact with one surface of the transmission belt 14, and the third rotating wheel 25 is in contact with the other surface of the transmission belt 14.
The movable block 26 is connected with the support 12 through a slide rail and a slide block; the movable block 26 is connected with a driving belt 28 through a connecting block 30;
the second wheel 19, which is 4 on the same side of the support 12, is in contact with one surface of the conveyor belt 14, and the other surface of the conveyor belt 14 is in contact with the first wheel 18.
When the efficient conveying device for the silicon wafers is adopted, the efficient and piece-by-piece full-automatic conveying of the single silicon wafers is realized, the stability and the safety of the conveying process are improved, external force and manual intervention are avoided, the damage of the silicon wafers is completely avoided, and the automation degree is high;
in addition, the third rotating wheel on the movable plate drives the transmission belt to reciprocate, so that automatic taking of the silicon wafers one by one is realized, manual discharging is reduced, the automation degree and the processing efficiency are improved, the silicon wafers can be prevented from being damaged manually, and the processing efficiency and the processing quality are improved;
furthermore, the synchronous movement of the supporting wheel and the third rotating wheel on the movable block ensures that the transmission belt is always kept in a tensioning state, and further ensures the stability and the safety of the silicon wafer transportation.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose of the embodiments is to enable people skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.

Claims (4)

1. A high-efficient conveyor of silicon chip which characterized in that: the feeding device comprises a material conveying bottom plate (11) arranged on a rack (1), a feeding seat (37) arranged at one end of the material conveying bottom plate (11), an input assembly (2) and an output assembly (3), wherein the input assembly (2) and the output assembly (3) are respectively arranged on the rack (1) and are stacked up and down, the feeding seat (37) can move up and down along the vertical direction, when the feeding seat (37) moves to the upper end, the feeding seat is adjacent to one end of the input assembly (2), the input assembly (2) conveys a material basket (39) onto the feeding seat (37), and when the feeding seat (37) moves to the lower end, the feeding seat is adjacent to one end of the input assembly (2) and conveys the material basket (39) onto the input assembly (2);
a feeding driving assembly (38) for driving the feeding seat (37) to move up and down is arranged on the outer side of the feeding seat (37), a material basket (39) is placed above the feeding seat (37), and a plurality of material sheets (36) which are arranged at intervals in the vertical direction are sequentially loaded in the material basket (39);
the upper surface of the material conveying bottom plate (11) is provided with a support (12), two sides of the support (12) are symmetrically provided with a transmission belt (14) for transmitting material sheets (36), and a transmission motor (13) for driving the transmission belt (14) is arranged on the support (12);
a main driving wheel (15) is mounted on an output shaft of the transmission motor (13), a first rotating shaft (16) is rotatably mounted on the support (12), two ends of the first rotating shaft (16) respectively extend out from two sides of the support (12), a driven driving wheel (17) is mounted at one end of the first rotating shaft (16) positioned on the same side of the main driving wheel (15), and the driven driving wheel (17) is in transmission connection with the main driving wheel (15) through a synchronous belt;
a first rotating wheel (18) is respectively arranged on the first rotating shaft (16) and positioned at two sides of the support (12), a plurality of second rotating wheels (19) are respectively rotatably arranged at two sides of the support (12), and the first rotating wheel (18) and the second rotating wheels (19) positioned at the same side of the support (12) are in transmission connection through a transmission belt (14);
the first rotating wheel (18) is respectively arranged on the first rotating shaft (16) and positioned at two sides of the support (12), a plurality of second rotating wheels (19) are respectively rotatably arranged at two sides of the support (12), a movable plate (24) is slidably arranged above the support (12) and can reciprocate along the material conveying direction, a rotatable third rotating wheel (25) is respectively arranged on two side end surfaces of one end of the movable plate (24) close to the material feeding seat (37), the first rotating wheel (18), the second rotating wheel (19) and the third rotating wheel (25) positioned at the same side of the support (12) are in transmission connection through a transmission belt (14), the upper surface of the third rotating wheel (25) is flush with the upper surface of one second rotating wheel (19) at the same side, so that the transmission belt (14) connected between the third rotating wheel (25) with the flush upper surface and the second rotating wheel (19) is a horizontal transmission surface capable of being in contact with the material sheet (36), one end of the transmission belt (14) close to the feeding seat (37) can extend into the material basket (39);
the support (12) is slidably provided with a movable block (26), the upper surface of the movable block (26) is connected with the lower surface of one end of the movable plate (24) far away from the third rotating wheel (25), so that the movable block (26) and the movable plate (24) synchronously move, a rotatable supporting wheel (27) is arranged on one side end face of the movable block (26), the supporting wheel (27) is in transmission connection with the first rotating wheel (18), the second rotating wheel (19) and the third rotating wheel (25) on the same side through the conveying belt (14), the supporting wheel (27) is in contact with one surface of the conveying belt (14), and the third rotating wheel (25) is in contact with the other surface of the conveying belt (14).
2. The efficient silicon wafer conveying apparatus according to claim 1, wherein: the movable block (26) is connected with the support (12) through a sliding rail and a sliding block.
3. The silicon wafer high-efficiency conveying apparatus according to claim 1 or 2, wherein: two driving rotating wheels (29) connected through a driving belt (28) are installed on one side of the support (12), and one of the driving rotating wheels (29) is connected with an output shaft of a motor installed on the support (12).
4. A high-efficiency transporting apparatus for silicon wafers as set forth in claim 3, wherein: the movable block (26) is connected with the driving belt (28) through a connecting block (30).
CN202022277320.5U 2020-10-14 2020-10-14 High-efficient conveyor of silicon chip Expired - Fee Related CN213546282U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022277320.5U CN213546282U (en) 2020-10-14 2020-10-14 High-efficient conveyor of silicon chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022277320.5U CN213546282U (en) 2020-10-14 2020-10-14 High-efficient conveyor of silicon chip

Publications (1)

Publication Number Publication Date
CN213546282U true CN213546282U (en) 2021-06-25

Family

ID=76497263

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022277320.5U Expired - Fee Related CN213546282U (en) 2020-10-14 2020-10-14 High-efficient conveyor of silicon chip

Country Status (1)

Country Link
CN (1) CN213546282U (en)

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Granted publication date: 20210625