CN213530070U

CN213530070U - Reaction chamber for integrated circuit processing

Info

Publication number: CN213530070U
Application number: CN202022242957.0U
Authority: CN
Inventors: 王景文; 周梦; 朱双利
Original assignee: Wuhan Mingjia Xinyuan Technology Co ltd
Current assignee: Wuhan Mingjia Xinyuan Technology Co ltd
Priority date: 2020-10-10
Filing date: 2020-10-10
Publication date: 2021-06-25
Anticipated expiration: 2030-10-10

Abstract

The utility model discloses a be used for integrated circuit processing to use reaction cavity relates to integrated circuit processing equipment technical field, including base and reaction cavity, two supports of top fixedly connected with of base, the equal fixedly connected with reaction cavity in top of support, the top of base just is located one side fixedly connected with heating cabinet of reaction cavity, the utility model discloses beneficial increase: be provided with the washing subassembly, first motor, the gear, release link and slip cap, realized rotating through first motor, realize the adjustment to the overall device height, thereby abluent comprehensiveness has been guaranteed, be provided with temperature sensor and pressure sensor, realized when detecting internal pressure too high, in time discharge through discharge valve pipeline, avoided the too big unnecessary problem that leads to of pressure, in time supply required heat, the simple easy operation of overall device, the cost is reduced, the holistic integrated circuit processing work efficiency is improved.

Description

Reaction chamber for integrated circuit processing

Technical Field

The utility model relates to an integrated circuit processing equipment technical field specifically is a be used for integrated circuit processing to use reaction chamber.

Background

In the processing of an integrated circuit wafer, the wafer is usually placed on a wafer carrier inside a reaction chamber, and a process gas is injected into the reaction chamber to generate plasma under the action of a high-frequency electric field to process the surface of the wafer. The process gas distribution on the surface of the wafer determines the processing speed of the wafer and the processing uniformity of the wafer, and the non-uniform gas distribution causes large variation of the processing speed and uniformity on the surface of the wafer and has great influence on the processing quality and performance of the wafer.

After processing, need to advance to add used reaction chamber and clear up man-hour, prior art is comparatively rigid, current reaction chamber is after carrying out the pressure release, also can lead to inside temperature to descend rapidly, make the next time normally add and bring inconvenience with man-hour, and it is not comprehensive when wasing inside, lead to the time a long time to cause the influence to the life of integrated device easily, increase the cost consumption, consequently, need design one kind can be after carrying out the pressure release automatically for reaction chamber inside replenish the heat, accomplish all-round full angle when wasing, the simple easy operation of integrated device, reduce cost be used for reaction chamber for integrated circuit processing.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a be used for integrated circuit processing to the problem of proposing in solving above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a reaction chamber for integrated circuit processing comprises a base and a reaction chamber, wherein the top of the base is fixedly connected with two supports, the tops of the supports are fixedly connected with the reaction chamber, the top of the base is fixedly connected with a heating box on one side of the reaction chamber, the top of the base is fixedly connected with a water storage box on one side far away from the heating box, a first motor is fixedly arranged in the base, the output end of the first motor is fixedly connected with a threaded rod, the outer side of the threaded rod is fixedly connected with a gear, one end of the threaded rod far away from the gear is sleeved with a sliding sleeve, a spring is fixedly arranged on the top of the base and on one side of the threaded rod, the top of the spring is fixedly connected with a connecting sleeve with an L-shaped structure, and the top of the base is fixedly connected with a fixing plate with an L-shaped structure on, the fixed plate and sliding sleeve sliding connection, fixed plate and adapter sleeve sliding connection, fixedly connected with release link between fixed plate and the adapter sleeve, the top sliding connection of release link and adapter sleeve, the top fixedly connected with diaphragm of sliding sleeve, the diaphragm is close to the one end of reaction chamber and installs the washing subassembly.

Preferably, the cleaning assembly comprises a fixed box and a second motor, the diaphragm runs through the fixed box of one end fixedly connected with of the inside of reaction chamber, the outside fixed mounting of fixed box has the second motor, the inside of fixed box is rotated and is connected with the worm, the output of second motor run through the fixed box and with worm fixed connection, the inside of fixed box is rotated and is connected with the dwang, the outside fixed mounting of dwang has the worm wheel, the worm is connected with the worm wheel meshing, the dwang extends to the one end fixedly connected with in the fixed box outside and has rotary joint, one side fixed mounting of rotary joint has evenly distributed's delivery port.

Preferably, the top of the water storage tank is fixedly provided with a water pump, the output end of the water pump is connected with the water outlet through a water pipeline, and the input end of the water pump is connected with the water storage tank through a water pipeline.

Preferably, the inner wall of the reaction chamber is fixedly provided with a pressure sensor, and the inner wall of the reaction chamber is fixedly provided with a temperature sensor.

Preferably, the top of the reaction chamber is provided with an exhaust valve pipeline, and the bottom of the reaction chamber, which is located between the two supports, is provided with a wastewater outlet.

Preferably, the outside fixed mounting of heating cabinet has control panel, the inside fixed mounting of heating cabinet has the fan, the inside of heating cabinet just is located fan air outlet fixed mounting and has evenly distributed's heating wire, the top fixed mounting of heating cabinet has the air-blower, the output of air-blower is connected with reaction chamber through the defeated wind pipeline, the input of air-blower is connected with the heating cabinet through the defeated wind pipeline.

Preferably, the pressure sensor, the temperature sensor, the fan, the first motor and the second motor are all electrically connected with the control panel.

Compared with the prior art, the beneficial effects of the utility model are that: be provided with the washing subassembly, realized rotating when wasing, rotary joint has then guaranteed that even high-speed operation down also can normally carry water, go out water, abluent comprehensiveness has been improved, be provided with first motor, the gear, release link and slip cap, realized rotating through first motor, realize the adjustment to the overall structure height, thereby abluent comprehensiveness has been guaranteed, be provided with temperature sensor and pressure sensor, realized when detecting internal pressure is too high, in time discharge through the discharge valve pipeline, avoided the too big unnecessary problem that leads to of pressure, realized leading to the internal temperature to descend when discharge atmospheric pressure, when not complying with integrated circuit man-hour required temperature, in time supply required heat, the overall structure is simple easy to operate, the cost is reduced, holistic integrated circuit processing work efficiency has been improved.

Drawings

FIG. 1 is a sectional view of the present invention;

FIG. 2 is a sectional view of the heating box of the present invention;

fig. 3 is an enlarged view of the structure cleaning assembly of the present invention.

In the figure: 1. a base; 2. a support; 3. a reaction chamber; 4. cleaning the assembly; 5. a waste water outlet; 6. A pressure sensor; 7. a temperature sensor; 8. a heating box; 9. a control panel; 10. a blower; 11. A wind delivery pipeline; 12. a water storage tank; 13. a water pump; 14. a water delivery pipeline; 15. a fan; 16. an electric heating wire; 17. a first motor; 18. a gear; 19. a threaded rod; 20. a fixing plate; 21. connecting sleeves; 22. A spring; 23. a sliding sleeve; 24. a transverse plate; 25. a fixed box; 26. a second motor; 27. a worm; 28. Rotating the rod; 29. a worm gear; 30. a rotary joint; 31. a water outlet; 32. an exhaust valve conduit; 33. a reset rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, fig. 2 and fig. 3, the present invention provides a technical solution: a reaction chamber for integrated circuit processing, including base 1 and reaction chamber 3, its characterized in that: the top of the base 1 is fixedly connected with two supports 2, the integral stability is ensured, the tops of the supports 2 are fixedly connected with a reaction chamber 3, the top of the base 1 and one side of the reaction chamber 3 are fixedly connected with a heating box 8, the heat required in internal processing is maintained, the top of the base 1 and one side far away from the heating box 8 are fixedly connected with a water storage box 12, the inside of the base 1 is fixedly provided with a first motor 17, the output end of the first motor 17 is fixedly connected with a threaded rod 19, the outer side of the threaded rod 19 is fixedly connected with a gear 18, one end of the threaded rod 19 far away from the gear 18 is sleeved with a sliding sleeve 23, the top of the base 1 and one side of the threaded rod 19 are fixedly provided with a spring 22, the top of the spring 22 is fixedly connected with a connecting sleeve 21 with an L-shaped structure, the top of the base 1 and, realized holistic normal operating, fixed plate 20 and sliding sleeve 23 sliding connection, fixed plate 20 and adapter sleeve 21 sliding connection, fixedly connected with release link 33 between fixed plate 20 and the adapter sleeve 21, holistic normal lift has been realized, release link 33 and adapter sleeve 21's top sliding connection, sliding sleeve 23's top fixedly connected with diaphragm 24, diaphragm 24 is close to the one end of reaction chamber 3 and installs washing subassembly 4, realized can in time wasing reaction chamber 3 inside.

Further, wash subassembly 4 including fixed case 25 and second motor 26, diaphragm 24 runs through the one end fixedly connected with fixed case 25 of the inside of reaction chamber 3, the outside fixed mounting of fixed case 25 has second motor 26, the internal rotation of fixed case 25 is connected with worm 27, the output of second motor 26 runs through fixed case 25 and with worm 27 fixed connection, the internal rotation of fixed case 25 is connected with dwang 28, the outside fixed mounting of dwang 28 has worm wheel 29, worm 27 is connected with worm wheel 29 meshing, the one end fixedly connected with rotary joint 30 in the dwang 28 extension to the fixed case 25 outside, one side fixed mounting of rotary joint 30 has evenly distributed's delivery port 31, realized can keeping washing under the high-speed rotation, abluent omnidirectional has been improved.

Further, a water pump 13 is fixedly mounted at the top of the water storage tank 12, the output end of the water pump 13 is connected with the water outlet 31 through a water pipeline 14, and the input end of the water pump 13 is connected with the water storage tank 12 through the water pipeline 14, so that a required water source is timely conveyed.

Further, the inner wall fixed mounting of reaction chamber 3 has pressure sensor 6, and the inner wall fixed mounting of reaction chamber 3 has temperature sensor 7, has realized in time feeding back the inside change situation to control panel 9, has made things convenient for the staff to adjust.

Further, exhaust valve pipeline 32 has been seted up at reaction chamber 3's top, and reaction chamber 3's bottom just is located and has seted up waste water outlet 5 between two supports 2, has realized in time discharging waste water and waste gas.

Further, the outside fixed mounting of heating cabinet 8 has control panel 9, the inside fixed mounting of heating cabinet 8 has fan 15, the inside of heating cabinet 8 just is located fan 15 air outlet fixed mounting has evenly distributed's heating wire 16, the top fixed mounting of heating cabinet 8 has air-blower 10, the output of air-blower 10 is connected with reaction chamber 3 through defeated wind pipeline 11, the input of air-blower 10 is connected with heating cabinet 8 through defeated wind pipeline 11, realized in time to the required heat of reaction chamber 3 inside transport.

Further, the pressure sensor 6, the temperature sensor 7, the fan 15, the first motor 17 and the second motor 26 are electrically connected with the control panel 9, so that the whole normal operation is realized.

Specifically, use the utility model discloses the time: the control panel 9 is opened, after the integrated circuit processing is finished, when the internal pressure is overlarge, the pressure sensor 6 timely feeds back to the control panel 9, the adjustment is convenient for workers to make, the integrated circuit is timely discharged through the exhaust valve pipeline 32, the integral device is maintained, the service life is prolonged, the cost is reduced, the first motor 17 operates, the threaded rod 19 rotates upwards through the rotation of the output end, the connecting sleeve 21 is driven to move upwards, the stress of the spring 22 disappears, the reset rod 33 performs reset motion to accelerate the upward movement speed until the transverse plate 24 rises to the required height, the height adjustment of the cleaning component 4 is realized, the cleaning is more comprehensive, the second motor 26 operates, the worm 27 is driven to rotate through the output end, the worm wheel 29 connected in a meshing manner is driven to rotate, the rotating rod 28 is driven to rotate, and the rotary joint 30 drives the water outlet 31 to rotate, realized the limit and rotated the limit and spray water clearance, abluent comprehensiveness has been improved, the waste water of production passes through waste water outlet 5 and in time discharges, after the washing is accomplished, heating wire 16 operates, in time provide the heat, 15 operations of fan, in time with hot-blast output, in time carry to reaction cavity 3 inside through air-blower 10, inside stoving speed has been accelerated on the one hand, on the one hand with inside temperature rise to normal integrated man-hour required temperature, the integrated device is simple easy to operate, the cost is reduced, holistic integrated circuit processing work efficiency has been improved.

In the description of the present invention, it is to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "one side", "top", "inner", "front", "center", "both ends", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second", "third", "fourth" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated, whereby the features defined as "first", "second", "third", "fourth" may explicitly or implicitly include at least one such feature.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "disposed," "connected," "fixed," "screwed" and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate medium, and may be connected through the inside of two elements or in an interaction relationship between two elements, unless otherwise specifically defined, and the specific meaning of the above terms in the present invention will be understood by those skilled in the art according to specific situations.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A reaction chamber for integrated circuit processing, comprising a base (1) and a reaction chamber (3), characterized in that: the device comprises a base (1), two supports (2) fixedly connected to the top of the base (1), a reaction chamber (3) fixedly connected to the top of each support (2), a heating box (8) fixedly connected to one side of the reaction chamber (3) and located at the top of the base (1), a water storage box (12) fixedly connected to one side of the base (1) and far away from the heating box (8), a first motor (17) fixedly installed inside the base (1), a threaded rod (19) fixedly connected to the output end of the first motor (17), a gear (18) fixedly connected to the outer side of the threaded rod (19), a sliding sleeve (23) sleeved on one end of the threaded rod (19) far away from the gear (18), a spring (22) fixedly installed on one side of the base (1) and located on the threaded rod (19), and a connecting sleeve (21) of an L-shaped structure fixedly connected to the top of the spring (22), the top of base (1) just is located fixed plate (20) of one side fixedly connected with L style of calligraphy structure of spring (22), fixed plate (20) and slip cap (23) sliding connection, fixed plate (20) and adapter sleeve (21) sliding connection, fixedly connected with release link (33) between fixed plate (20) and adapter sleeve (21), the top sliding connection of release link (33) and adapter sleeve (21), the top fixedly connected with diaphragm (24) of slip cap (23), diaphragm (24) are close to the one end of reaction chamber (3) and install washing subassembly (4).

2. The reaction chamber of claim 1, wherein: the washing assembly (4) comprises a fixed box (25) and a second motor (26), one end of the transverse plate (24) penetrating through the interior of the reaction chamber (3) is fixedly connected with a fixed box (25), a second motor (26) is fixedly arranged on the outer side of the fixed box (25), a worm (27) is rotatably connected inside the fixed box (25), the output end of the second motor (26) penetrates through the fixed box (25) and is fixedly connected with the worm (27), the inside of the fixed box (25) is rotatably connected with a rotating rod (28), the outer side of the rotating rod (28) is fixedly provided with a worm wheel (29), the worm (27) is meshed with the worm wheel (29), one end of the rotating rod (28) extending to the outer side of the fixed box (25) is fixedly connected with a rotating joint (30), and water outlets (31) which are uniformly distributed are fixedly arranged on one side of the rotary joint (30).

3. The reaction chamber of claim 2, wherein: the water storage tank is characterized in that a water pump (13) is fixedly mounted at the top of the water storage tank (12), the output end of the water pump (13) is connected with the water outlet (31) through a water conveying pipeline (14), and the input end of the water pump (13) is connected with the water storage tank (12) through the water conveying pipeline (14).

4. A reaction chamber for integrated circuit processing as recited in claim 3, wherein: the inner wall fixed mounting of reaction chamber (3) has pressure sensor (6), the inner wall fixed mounting of reaction chamber (3) has temperature sensor (7).

5. The reaction chamber of claim 1, wherein: an exhaust valve pipeline (32) is arranged at the top of the reaction chamber (3), and a wastewater outlet (5) is arranged at the bottom of the reaction chamber (3) and between the two supports (2).

6. The reaction chamber of claim 4, wherein: the outside fixed mounting of heating cabinet (8) has control panel (9), the inside fixed mounting of heating cabinet (8) has fan (15), the inside of heating cabinet (8) just is located fan (15) air outlet fixed mounting and has evenly distributed's heating wire (16), the top fixed mounting of heating cabinet (8) has air-blower (10), the output of air-blower (10) is connected with reaction chamber (3) through defeated wind pipeline (11), the input of air-blower (10) is connected with heating cabinet (8) through defeated wind pipeline (11).

7. The reaction chamber of claim 6, wherein: the pressure sensor (6), the temperature sensor (7), the fan (15), the first motor (17) and the second motor (26) are all electrically connected with the control panel (9).