CN213529998U - Viscidity dust collector - Google Patents
Viscidity dust collector Download PDFInfo
- Publication number
- CN213529998U CN213529998U CN202021208761.3U CN202021208761U CN213529998U CN 213529998 U CN213529998 U CN 213529998U CN 202021208761 U CN202021208761 U CN 202021208761U CN 213529998 U CN213529998 U CN 213529998U
- Authority
- CN
- China
- Prior art keywords
- dust
- placing
- sticky
- detection
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000428 dust Substances 0.000 title claims abstract description 418
- 238000001514 detection method Methods 0.000 claims abstract description 181
- 230000007246 mechanism Effects 0.000 claims abstract description 111
- 239000007787 solid Substances 0.000 claims abstract description 86
- 239000000853 adhesive Substances 0.000 claims abstract description 48
- 230000001070 adhesive effect Effects 0.000 claims abstract description 48
- 239000003292 glue Substances 0.000 claims abstract description 43
- 230000033001 locomotion Effects 0.000 claims abstract description 34
- 230000000007 visual effect Effects 0.000 claims abstract description 28
- 238000007689 inspection Methods 0.000 claims description 97
- 238000005286 illumination Methods 0.000 claims description 44
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims description 2
- 230000008520 organization Effects 0.000 claims 1
- 238000004140 cleaning Methods 0.000 abstract description 8
- 239000003344 environmental pollutant Substances 0.000 abstract description 3
- 231100000719 pollutant Toxicity 0.000 abstract description 3
- 238000011086 high cleaning Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 108
- 239000007788 liquid Substances 0.000 description 78
- 238000001035 drying Methods 0.000 description 18
- 239000000463 material Substances 0.000 description 16
- 238000011179 visual inspection Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 8
- 238000007598 dipping method Methods 0.000 description 7
- 238000007599 discharging Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 230000005389 magnetism Effects 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000004026 adhesive bonding Methods 0.000 description 4
- 239000011324 bead Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000007605 air drying Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Images
Abstract
The utility model provides a viscidity dust collector, which comprises a placing device, a dust collecting head, a dust collecting mechanism, a glue placing mechanism and a viscidity dust detecting visual device; each dust removing head comprises a dust removing body and an adhesive semi-solid part arranged on the dust removing body; the dust removal mechanism comprises a motion driving mechanism and a dust removal connecting part which are arranged above a preset plane; the dust removal mechanism is fixed on the output end of the motion driving mechanism; the glue placing mechanism comprises a transparent glue bottle which is fixed on a preset plane; the sticky dust detection visual device is arranged on a preset plane and comprises a sticky dust detection light source and at least two sticky dust detection cameras, the sticky dust detection light source is used for illuminating a sticky semi-solid part of a dust removal head connected to a dust removal mechanism, and a user cannot easily generate new pollutants on a detected surface by cleaning after removing dust by using the sticky dust removal device and has high cleaning efficiency on sticky dust.
Description
Technical Field
The utility model belongs to the technical field of remove dust, more specifically say, relate to a viscidity dust collector.
Background
Electronic components and optical components are generally subjected to surface appearance inspection during production and assembly. The surface appearance inspection is to inspect the surface of the electronic component and the surface of the optical element for defects, stains, scratches, cracks, damages, dusts, fingerprints, watermarks, wire bond anomalies, die bond anomalies, and other surface appearance problems. When the surfaces of the electronic components and the optical elements are inspected for dust, it is also necessary to clean the surfaces of the electronic components and the optical elements having dust. The existing dust removing device usually adopts a wet cleaning method or an air blowing cleaning method to clean the surfaces of electronic components and optical elements. In the wet cleaning method and the air blowing cleaning method, electronic components with dust and electronic components without dust are put together to be cleaned, or optical components with dust and optical components without dust are put together to be cleaned, so that the surface of the electronic components without dust is easily polluted and the surface of the optical components without dust is easily polluted.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a viscidity dust collector solves the wet cleaning method that exists among the prior art and blows clean method and lead to the surface that does not have the dust easily contaminated and to the technical problem of the cleaing away inefficiency of viscidity dust.
In order to achieve the above object, the utility model adopts the following technical scheme: the viscous dust removal device comprises a placing device, a dust removal head, a dust removal mechanism, a glue placing mechanism and a sticky dust detection visual device;
the placing device is used for placing a plurality of dust removing heads;
each dust removing head comprises a dust removing body and the viscous semi-solid part arranged on the dust removing body;
the dust removal mechanism comprises a motion driving mechanism and a dust removal connecting part which are arranged above a preset plane;
the dust removal mechanism is fixed on the output end of the motion driving mechanism;
the glue placing mechanism comprises a transparent glue bottle which is fixed on the preset plane;
the sticky dust detection visual device is arranged on the preset plane and comprises a sticky dust detection light source and at least two sticky dust detection cameras, the sticky dust detection light source is used for illuminating a sticky semi-solid part of the dust removal head connected to the dust removal mechanism, and all the sticky dust detection cameras simultaneously shoot images of the sticky semi-solid part of the dust removal head connected to the dust removal mechanism;
the motion driving mechanism is used for driving the dust removal connecting part to drive the dust removal head to move.
Further, the movement driving mechanism is also used for driving the dust removal connecting part to drive the viscous semi-solid part of the dust removal head to be close to or far away from the photographing end of the dust adhesion detection visual device.
Furthermore, a preset detection position is arranged on the preset plane, all the sticky dust detection cameras and the sticky dust detection light source are arranged on the preset plane, all the shooting ends of the sticky dust detection cameras face the preset detection position, and the shooting ends of every two sticky dust detection cameras are not arranged oppositely.
Further, when two dust adhesion detection cameras are arranged, the length direction of the shooting end of one dust adhesion detection camera is along the X axial direction, and the length direction of the shooting end of the other dust adhesion detection camera is along the Y axial direction.
Furthermore, the sticky dust removing device further comprises a glue head detection visual device, the glue head detection visual device comprises a plurality of first glue head detection cameras and glue head detection light sources, each first glue head detection camera is fixed on the placing device and corresponds to the dust removing head placed on the placing device one by one, the shooting end of each first glue head detection camera is used for obtaining the image of the sticky semi-solid part of the corresponding dust removing head, the glue head detection light sources are fixed on the placing device, and the glue head detection light sources are used for providing illumination for all the sticky semi-solid parts on the placing device.
Furthermore, viscidity dust collector still including gluing first detection vision device, it includes that a plurality of seconds glue first detection camera and glue first detection light source to glue first detection vision device, the quantity that first detection camera was glued to the second is less than and places placeeing device the quantity of dust removal head, first detection camera is glued to the second with glue first detection light source and fix on placeeing device, each first detection camera is glued to the second is used for acquireing local image, glue first detection light source be used for all viscidity semi-solid portions on the placeeing device provide the illumination.
Further, the placing device comprises a placing table, the placing table is provided with a plurality of placing grooves, the placing grooves correspond to the dust removing bodies one to one, when the dust removing head is placed on the placing device, the placing grooves clamp the corresponding dust removing bodies, the viscous semi-solid parts corresponding to the clamped dust removing bodies are not in contact with any object and are arranged downwards in the vertical direction, one end of each placing groove penetrates through one side face of the placing table, each dust removing body is provided with a large end part and a small end part, one end of each placing groove penetrating through the placing table is used for the small end part corresponding to the dust removing body to pass through, and one end of each placing groove penetrating through the placing table limits the large end part corresponding to the dust removing body to pass through.
Further, the placing table comprises a U-shaped groove and a placing plate fixed on the U-shaped groove, a fixed opening is formed in one side of the U-shaped groove, facing the bottom of the U-shaped groove, the placing plate covers the fixed opening, a cavity is formed between the bottom of the U-shaped groove and the placing groove, and one end, deviating from the cavity, of each placing groove is arranged on the placing plate.
Further, the placing device comprises a temperature adjusting device, the temperature adjusting device is fixed on the placing table, and the temperature adjusting device is used for enabling the temperature in all the placing grooves to be within a preset temperature range.
Further, the temperature adjusting device is a constant temperature and humidity device, and the constant temperature and humidity device is used for enabling the temperature in all the placing grooves to be within a preset temperature range and the humidity in all the placing grooves to be within a preset humidity range.
The utility model provides a pair of viscidity dust collector's beneficial effect lies in: compared with the prior art, the sticky dust removal device is used for sticking off dust on the detected surface of the detected object, and the sticky dust is easy to remove. The sticky dust removing device is not easy to generate new pollutants on the cleaned detected surface after removing dust. When the dust adhesion detection vision device shoots a size image, the control center or a user controls the dust removal mechanism to enable the viscous semi-solid part of the dust removal head connected to the dust removal mechanism to be positioned between all the dust adhesion detection cameras. All images taken by the dust adhesion detecting camera constitute a size image. The size image facilitates the control center or the user to know the real-time size of the viscous semi-solid part corresponding to the size image, so that whether the viscous semi-solid part is in the preset size range or not is judged according to the real-time size, if the real-time size is not in the preset size range, the control center or the user replaces the dust removal head corresponding to the size image, and if the real-time size is in the preset size range, the control center or the user continues to use the dust removal head corresponding to the size image. When the use times of the dust removing head connected to the dust removing mechanism reach the preset times and the real-time size is within the preset size range, the dust removing head connected to the dust removing mechanism needs to be subjected to gum dipping treatment.
Drawings
Fig. 1 is a schematic structural view of a dust removing device according to a first embodiment of the present invention;
fig. 2 is a schematic structural view of a feeding device of a dust removing device according to a first embodiment of the present invention;
fig. 3 is a schematic structural diagram of an object to be detected according to a first embodiment of the present invention;
fig. 4 is a schematic structural view of a surface inspection vision device of a dust removing device according to a first embodiment of the present invention;
fig. 5 is another schematic structural diagram of a surface inspection vision device of a dust removing device according to an embodiment of the present invention;
fig. 6 is a schematic structural view of a roller conveying device of a dust removing device according to a first embodiment of the present invention;
fig. 7 is a schematic partial structural view of a dust removing device according to a first embodiment of the present invention;
fig. 8 is a schematic partial structural view of a dust removing device according to a first embodiment of the present invention;
fig. 9 is a schematic view of a partial structure of a dust removing device according to a first embodiment of the present invention;
fig. 10 is a schematic partial structural view of a dust removing device according to a first embodiment of the present invention;
fig. 11 is a schematic partial structural view of a dust removing device according to a first embodiment of the present invention;
fig. 12 is a schematic view of a partial structure of a viscous dust removing device according to a third embodiment of the present invention;
fig. 13 is a schematic view of a partial structure of a viscous dust removing apparatus according to a fourth embodiment of the present invention;
fig. 14 is a schematic view of a partial structure of a viscous dust removing device according to a fifth embodiment of the present invention;
fig. 15 is a schematic view of a partial structure of a viscous dust removing apparatus according to a sixth embodiment of the present invention;
fig. 16 is a schematic structural diagram of a dust removing head according to a seventh embodiment of the present invention.
Wherein, in the figures, the respective reference numerals:
1. a feeding device; 11. a material conveying mechanism; 11a, a preset position; 12. a feeding clamping manipulator device; 121. a feeding movable device; 122. a feeding clamping manipulator mechanism; 1221. a first clamping end; 1222. a first fixed end; 13. a blanking clamping manipulator device; 14. a material discharging mechanism; 2. a motion platform; 21. a telemechanical linear drive; 22. placing a platform; 23. a roller conveyor; 3. a surface detection vision device; 31. a surface inspection camera; 311. a surface inspection camera body; 312. a telecentric lens; 32. a surface detection light source; 321. shooting holes; 33. a light-tight barrel; 34. an illumination light source; 341. A light-transmitting hole; 342. an annular illumination source; 343. an LED light source; 35. a distance adjusting device; 36. a non-contact distance detecting device; 4. a viscous dust removal device; 41. a placement device; 411. a clamping portion; 412. a first placing linear driving device; 413. A placing table; 4131. a U-shaped groove; 4132. placing the plate; 414. a placement groove; 415. a cavity; 416. a second placing linear driving device; 42. a dust removal head; 421. a dust removal body; 4211. a fixing plate; 4212. fixing the rod; 4213. sticking a rod; 422. A viscous semi-solid portion; 43. a dust removal mechanism; 431. a first dust removal linear drive device; 432. a second dust removal linear driving device; 433. a dust removal connection part; 4331. a connecting member; 43311. an adsorption surface; 43312. sucking holes; 43313. an annular groove; 434. A guide member; 4341. a guide groove; 4342. an accommodating chamber; 435. a slider; 4351. a slide bar; 4352. a limiting block; 436. A displacement sensor; 437. a rotation driving mechanism; 438. a vision inspection device; 4381. an inspection camera; 43811. inspecting the camera body; 43812. checking the CCTV lens; 4382. inspecting the light source; 4383. inspecting the linear drive; 4384. a liquid level detection light source; 439. a viscous liquid placement mechanism; 4391. a transparent liquid bottle; 4392. a fixed table; 44. a dust removal head production device; 441. a production mechanism; 4411. a first production linear drive; 4412. a second production linear drive; 4413. Producing the connecting part; 44131. a suction member; 44132. a fixed surface; 44133. a suction hole; 442. producing a visual inspection device; 4421. producing a camera; 44211. producing a camera body; 44212. producing a CCTV lens; 4422. producing a light source; 443. A viscous liquid producing storage mechanism; 4431. a transparent bottle; 4432. a positioning table; 45. a height vision detection device; 451. a height detection camera; 452. a height detection light source; 46. a viscous head detection vision device; 461. a first viscous head detection camera; 462. A viscous head detection light source; 463. a second viscous head detection camera; 47. a dust adhesion detection vision device; 471. a dust adhesion detection light source; 472. a dust sticking detection camera; 51. presetting a plane; 52. a transparent detection area; 53. presetting a detection position; 54. presetting a production detection position; 6. an object to be detected; 7. a reference device; 8. refer to the production apparatus.
Detailed Description
In order to make the technical problem, technical solution and advantageous effects to be solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
The first embodiment is as follows: referring to fig. 1 to 3, a dust removing device according to the present invention will now be described. A dust removing device comprises a feeding device 1, a moving platform 2, a surface detection visual device 3 and a viscous dust removing device 4. The feeding device 1, the moving platform 2, the surface detection visual device 3 and the sticky dust removing device 4 are arranged on a preset plane 51. The preset plane 51 is set as a table top of a movable workbench or an inner table top of a movable dust-proof box, so that the installation stability of the feeding device 1, the moving platform 2, the surface detection visual device 3 and the viscous dust removal device 4 is improved. Material feeding unit 1, motion platform 2, surface detection visual device 3 and viscidity dust collector 4 communication connection, specifically, dust clearing device still includes control center, and material feeding unit 1, motion platform 2, surface detection visual device 3 and viscidity dust collector 4 communication connection are in control center. Optimally, the control center comprises an image processing board and a motion processing board which are in communication connection.
Referring to fig. 1, the feeding device 1 is provided with one, and the moving platform 2, the surface detection vision device 3 and the sticky dust removing device 4 are provided with one or more devices. When the motion platform 2, the surface detection vision device 3 and the viscous dust removal device 4 are all provided with one, the feeding device 1 is used for placing the detected object 6 on the motion platform 2 and enabling the detected surface of the detected object 6 to face away from the motion platform 2, and the surface detection vision device 3 and the viscous dust removal device 4 respectively process the detected object 6 on the motion platform 2. When motion platform 2, when surface detects visual device 3 and sticky dirt device all is provided with a plurality ofly, each motion platform 2 and surface detect visual device 3 one-to-one, each motion platform 2 and sticky dirt device one-to-one, material feeding unit 1 is used for placing on arbitrary motion platform 2 in each motion platform 2 and making the detected face of being detected object 6 dorsad motion platform 2, the surface that the motion platform 2 that places the detected object 6 corresponds detects visual device 3 and the viscidity dust collector 4 that corresponds respectively handles this detected object 6, material feeding unit 1, motion platform 2, the quantity of surface detect visual device 3 and viscidity dust collector 4 sets up according to the production demand, this dust clearing device can satisfy more production demand. Specifically, the object to be detected 6 has one or more detection surfaces. Optimally, the object to be detected 6 is set to be a single chip or a first clamped plate or a single glass panel for placing a plurality of chips or a second clamped plate or a single mobile phone display for placing a plurality of glass panels or a third clamped plate for placing a plurality of mobile phone displays.
Referring to fig. 1 to 3, the feeding device 1 includes a material conveying mechanism 11 and a feeding clamping manipulator 12, the material conveying mechanism 11 has a preset position 11a, and the material conveying mechanism 11 is configured to convey the detected object 6 to the preset position 11 a. The material conveying mechanism 11 is disposed on one side of the moving platform 2, and the material loading clamping manipulator device 12 clamps the object to be detected 6 from the preset position 11a and releases and places the clamped object to be detected 6 on the moving platform 2. The feeding clamping manipulator device 12 comprises a feeding movable device 121 and a feeding clamping manipulator mechanism 122, the feeding clamping manipulator mechanism 122 has a first clamping end 1221 and a first fixing end 1222, the first fixing end 1222 is fixed on the output end of the feeding movable device 121, the first clamping end 1221 clamps or releases the detected object 6, specifically, the feeding clamping manipulator mechanism 122 clamps a single chip or a first clamped plate or a single glass panel or a second clamped plate or a single mobile phone display or a third clamped plate. The output end of the feeding moving device 121 can drive the feeding clamping manipulator mechanism 122 to move horizontally and can drive the feeding clamping manipulator mechanism 122 to move vertically. Specifically, the feeding moving device 121 includes a first device and a second device, an output shaft of the first device moves in a horizontal direction, an output shaft of the second device moves in a vertical direction, the first device is set as a first X-axis module or a first Y-axis module, the second device is set as a cylinder or a linear motor, the second device is fixed on the output shaft of the first device, and the first fixed end 1222 is fixed on the output shaft of the second device.
Referring to fig. 1 to 3, the motion platform 2 includes a telemechanical linear driving device 21 and a placing platform 22, the placing platform 22 is fixed on an output end of the telemechanical linear driving device 21, and the telemechanical linear driving device 21 drives the placing platform 22 to move linearly. The placing platform 22 is used for placing the detected object 6. Specifically, the telemechanical linear driving device 21 is set as a second X-axis module or a second Y-axis module, and when the first device is set as the first X-axis module, the telemechanical linear driving device 21 is set as the second Y-axis module; when the first device is set as the first Y-axis module, the telemechanical linear driving device 21 is set as the second X-axis module, so as to ensure that the moving direction of the output shaft of the first device is perpendicular to the moving direction of the telemechanical linear driving device 21, thereby facilitating the reduction of the length of the dust removing device. The motion platform 2 further comprises a movable linear drive. The movable linear driving device is fixed on an output shaft of the telemechanical linear driving device 21, the placing platform 22 is fixed on an output end of the movable linear driving device, and the telemechanical linear driving device 21 drives the movable linear driving device to drive the placing platform 22 to move. The moving direction of the movable linear driving device driven by the telemechanical linear driving device 21 is perpendicular to the moving direction of the movable linear driving device driven placing platform 22, and when the telemechanical linear driving device 21 is set as a second Y-axis module, the movable linear driving device is set as a fifth X-axis module; when the telemechanical linear driving device 21 is set as the second X-axis module, the movable linear driving device is set as the fifth Y-axis module.
Referring to fig. 4, when the surface inspection vision device 3 processes the object 6 to be inspected on the motion platform 2, the surface inspection vision device 3 is used to inspect the surface of the object 6 to be inspected for surface problems, such as defects, dirt, scratches, cracks, damages, dust, fingerprints, watermarks, wire bond anomalies, and die bond anomalies. Specifically, the surface detection vision device 3 is used to detect dust of the object 6 to be detected. The surface detection vision device 3 is arranged above the moving platform 2. The surface inspection vision device 3 includes a surface inspection camera 31 for acquiring a surface image of the inspection object 6 and a surface inspection light source 32 for illuminating the surface of the inspection object 6. The surface detection camera 31 comprises a surface detection camera body 311 and a telecentric lens 312, the telecentric lens 312 is fixed on the photographing end of the surface detection camera body 311, the telecentric lens 312 has high resolution, is not easy to distort and has fixed focal length, and the surface detection camera body 311 and the telecentric lens 312 are matched to easily photograph nano-scale dust. Specifically, the surface detection light source 32 is set to be an annular light source or an annular square light source, both the annular light source and the annular square light source have the shooting hole 321, the shooting end of the surface detection camera 31 faces the shooting hole 321, and the annular light source or the annular square light source is located between the motion platform 2 and the shooting end of the surface detection camera 31, so that dust shot by the surface detection camera 31 is not easily distorted. When the ring light source irradiates dust on the surface of the object 6 to be detected, the dust irradiated on the surface of the object 6 to be detected by the ring light source or the ring square light source is reflected into the surface detection camera 31. The light emitted from the annular light source and the annular square light source is emitted at a low angle and easily irradiates the side surface of the nanoscale dust, so that the surface detection camera 31 obtains a surface image of the nanoscale dust having a height difference and a stereoscopic impression. The control center or the user can also calculate the corresponding dust size according to the surface image. The annular square light source is convenient to install. Optimally, the illumination height of the annular light source or the annular square light source is as follows: the illumination height of the annular light source is the distance from the light emitting side of the annular light source to the detected surface of the detected object, and the illumination height of the annular square light source is the distance from the light emitting side of the annular square light source to the detected surface of the detected object, so that the annular light source and the annular square light source are enabled to perform low-angle illumination. Preferably, the annular light source is set as an annular blue light source or an annular violet light source, the annular square light source is set as an annular blue light source or an annular violet light source, and reflected light is easily formed on the surface of the nanoscale dust by the annular light source with a short wavelength and the annular square light source, so that the dust shot by the surface detection camera 31 is clearer. Further, the surface detection camera body 311 is set as a first industrial camera.
Referring to fig. 5 and 6, when the object 6 is transparent, the surface inspection vision device 3 includes an opaque barrel 33 and an illumination source 34, the illumination source 34 is fixed on the opaque barrel 33, the illumination source 34 is provided with a light hole 341, the light hole 341 is communicated with the opaque barrel 33, the light emitting side of the illumination source 34 faces the light emitting side of the surface inspection source 32, a transparent inspection area 52 is formed between the illumination source 34 and the surface inspection source 32, the photographing end of the surface inspection camera 31 faces both the light hole 341 and the inner side of the opaque barrel 33, because the opaque barrel 33 has opacity, when the transparent plate is located in the transparent detection region 52, only the illumination light source 34 is emitted from the side of the transparent plate opposite to the surface detection light source 32, and the light other than the illumination light source 34 will not irradiate the side of the transparent plate opposite to the surface detection light source 32, so that the surface image photographed by the photographing end of the surface detection camera 31 will not reflect light. Specifically, the illumination source 34 is located inside the light-proof barrel 33 with the light emitting side of the illumination source 34 facing the opening of the light-proof barrel 33, or the illumination source 34 is fixed on the open end of the light-proof barrel 33. The user can find out whether the surface problem exists on the transparent object through the surface detection vision device 3, so that the user can conveniently process the transparent object with the surface problem in the next step. Optimally, the illumination light source 34 is set as an annular illumination light source 342 or an LED light source 343 or an annular square illumination light source (not shown in the figure), when the illumination light source 34 is set as the annular illumination light source 342, an inner ring of the annular illumination light source 342 is set as a light transmitting hole 341, when the illumination light source 34 is set as the LED light source 343, the LED light source 343 includes a light emitting circuit board and a plurality of light beads, the light transmitting hole 341 is disposed on the light emitting circuit board (not shown in the figure), all the light beads are electrically connected on the light emitting circuit board, a preset path is further disposed on the light emitting circuit board, the preset path is disposed around the periphery of the light transmitting hole 341, and all the light beads are uniformly distributed on the light emitting circuit board along the preset path, so that uniform. When the illumination light source 34 is provided as an annular square illumination light source, the inner ring of the annular square illumination light source is provided as the light transmission hole 341. The moving platform 2 can be set as a roller conveying device 23, and the transparent detection area 52 is positioned between the gaps of the adjacent rollers 23 of the roller conveying device 23, so that the convenience and the detection speed of the surface detection vision device 3 for detecting the transparent objects are improved. The illumination height of the annular illumination light source 342 or the annular square illumination light source is as follows: the illumination height of the annular illumination light source 342 is the distance from the light-emitting side of the annular illumination light source 342 to the detected surface of the detected object, and the illumination height of the annular square illumination light source is the distance from the light-emitting side of the annular square illumination light source to the detected surface of the detected object. Preferably, the annular illumination light source 342 is set as an annular blue light source or an annular violet light source, and the annular square illumination light source is set as an annular blue light source or an annular violet light source, so that reflected light is easily formed on the surface of the nanoscale dust by the annular illumination light source 342 with a short wavelength and the annular square illumination light source, and the dust shot by the surface detection camera 31 is clearer.
Referring to fig. 5, the surface inspection vision device 3 further includes a distance adjusting device 35, the surface inspection camera 31 is fixed at an output end of the distance adjusting device 35, and the distance adjusting device 35 is used for adjusting a relative distance between a photographing end of the surface inspection camera 31 and the inspection surface of the inspected object 6. The distance adjusting means 35 is fixed on the predetermined plane 51. When the telemechanical linear driving device 21 is set as the second X-axis module or the second Y-axis module, the distance adjusting device 35 is set as the first Z-axis module or the cylinder.
Referring to fig. 5, the surface inspection vision device 3 further includes a non-contact distance detection device 36, and when the object 6 to be inspected has an inspected surface, the non-contact distance detection device 36 is used for detecting a detection distance between the inspected surface and the inspected surface. The control center or the user adjusts the distance adjusting device 35 according to the detection distance, so as to adjust the relative distance between the surface detection camera 31 and the detected surface, and the surface detection camera 31 can acquire the image of the detected surface more clearly. When the object 6 has a plurality of detected surfaces, the non-contact distance detection device 36 is configured to detect a detection distance between each detected surface and the detected surface, and the control center or the user adjusts a relative distance according to each detection distance, where the relative distance is set as a distance between a photographing end of the surface detection camera 31 and the detected surface corresponding to each detection distance, so that the surface detection camera 31 can more clearly acquire the corresponding surface image of each detected surface. As described above, the non-contact distance detection device 36 does not contact the surface to be detected, and the non-contact distance detection device 36 does not contact the surface to be detected. The surface detection camera 31 and the non-contact distance detection device 36 are arranged on the same side of the telemechanical linear driving device 21, the non-contact distance detection device 36 is fixed above the preset plane 51, is in communication connection with the distance adjustment device 35, and is used for detecting the distance between the detected surface of the detected object 6 and the non-contact distance detection device to control the output end of the distance adjustment device 35 to move, and the photographing end of the surface detection camera 31 and the detection end of the non-contact distance detection device 36 face the preset plane 51. Specifically, the non-contact distance detecting device 36 is a laser distance measuring device, and when the laser distance measuring device detects the detected object 6, the detected distance is more accurate, so that the control center or the user can accurately control the distance adjusting device 35.
Referring to fig. 2, 7, 8 and 9, when the sticky dust removing device 4 processes the detected object 6 on the moving platform 2, the sticky dust removing device 4 is used for sticking off dust on the detected surface of the detected object 6, and the sticky dust removing device 4 is not easy to generate new pollutants on the cleaned detected surface after removing the dust, which can be understood that, when the detected object 6 has one detected surface and the detected surface has dust, the control center or the user makes the sticky dust removing device 4 stick off the dust on the detected surface; when the object 6 has a plurality of detection surfaces, among the plurality of detection surfaces: the part of the detected surface has dust thereon, and the control center or the user causes the adhesive dust removing device 4 to respectively stick off the part of the detected surface. Specifically, when the object to be detected 6 has one detected surface and a plurality of dusts are present on the detected surface, the control center or the user causes the adhesive dust removing device 4 to stick off the plurality of dusts on the detected surface one by one or simultaneously or a plurality of times.
Referring to fig. 7, 8 and 9, the viscous dust removing device 4 includes a placing device 41, a dust removing head 42 and a dust removing mechanism 43, the placing device 41 is used for placing a plurality of dust removing heads 42, and each dust removing head 42 includes a dust removing body 421 and a viscous semi-solid portion 422 formed by attaching a dust-binding liquid to the dust removing body 421 and drying the dust-binding liquid. The viscous semi-solid portion 422 is elastic and viscous. The placing device 41 has a plurality of clamping portions 411, the clamping portions 411 correspond to the dust removing bodies 421 one by one, and the dust-binding liquid is an electronic dust-binding liquid or a quick-drying glue liquid. When the dust removing head 42 is placed on the placing device 41, the clamping portion 411 clamps the corresponding dust removing body 421, and the adhesive semi-solid portion 422 corresponding to the clamped dust removing body 421 is not in contact with any object and is disposed vertically downward. The placing device 41 comprises a placing table 413, a plurality of placing grooves 414 are formed in the placing table 413, and the placing grooves 414 are simple in structure and very practical. Specifically, a plurality of placing grooves 414 are evenly distributed on the placing table 413. In the present embodiment, the placement grooves 414 are provided as circular grooves or polygonal grooves. The placement grooves 414 are formed as the holding portions 411, one end of each placement groove 414 penetrates one side surface of the placement table 413, each dust removing body 421 has a large end portion and a small end portion, one end of each placement groove 414 penetrating the placement table 413 passes through the small end portion of the corresponding dust removing body 421, and one end of each placement groove 414 penetrating the placement table 413 restricts the large end portion of the corresponding dust removing body 421 from passing through. Each dust removing body 421 includes a fixing plate 4211, a fixing rod 4212 and an adhesive rod 4213, and the fixing plate 4211 is set to correspond to the large end of the dust removing body 421. The small end of each dust removing body 421 includes a fixing rod 4212 and an adhesive rod 4213 or only includes an adhesive rod 4213, when the small end of the dust removing body 421 includes only an adhesive rod 4213, the adhesive rod 4213 may be directly fixed on the fixing plate 4211, and the adhesive rod 4213 may be integrally formed with the fixing plate 4211. Specifically, the adhesive rod 4213 is provided as a metal needle or a resin needle.
When the small end of each dust removing body 421 comprises a fixing rod 4212 and an adhesive rod 4213, one end of the fixing rod 4212 is fixed on the fixing plate 4211, one end of the adhesive rod 4213 is inserted into one end of the fixing rod 4212, which is far away from the fixing plate 4211, the length direction of the adhesive rod 4213 is along the length direction of the fixing rod 4212, the other end of the adhesive rod 4213 is located outside the fixing rod 4212, and the adhesive semi-solid part 422 is located at the other end of the adhesive rod 4213. The end of each placement groove 414 remote from the side surface extending through the placement table 413 is connected to form a cavity 415, and all of the adhesive semi-solid portions 422 are located in the cavity 415. The cavity 415 communicates with the outside of the placing table 413. The placing table 413 comprises a U-shaped groove 4131 and a placing plate 4132 fixed on the U-shaped groove 4131, a fixed opening is formed at one side opening facing the bottom of the U-shaped groove 4131, the placing plate 4132 covers the fixed opening, a cavity 415 is formed between the bottom of the U-shaped groove 4131 and the placing groove 414, and one end of each placing groove 414, which is far away from the cavity 415, is arranged on the placing plate 4132. The placing table 413 is simple in structure and very practical. In the present embodiment, the U-shaped groove 4131 is integrally provided with the placement plate 4132 or detachably attached or welded.
Referring to fig. 7, 8 and 9, the dust removing mechanism 43 includes a movement driving mechanism and a dust removing connection portion 433, the movement driving mechanism includes a first dust removing linear driving device 431 and a second dust removing linear driving device 432, the first dust removing linear driving device 431 and the second dust removing linear driving device 432 are disposed above the preset plane 51, the first dust removing linear driving device 431 is used for driving the second dust removing linear driving device 432 to move linearly, the first dust removing linear driving device 431 is set as a third X-axis module or a third Y-axis module, and when the telemechanical linear driving device 21 is set as a second Y-axis module, the first dust removing linear driving device 431 is set as a third Y-axis module; when the telemechanical linear drive 21 is set as the second X-axis module, the first dust removal linear drive 431 is set as the third X-axis module. The second dust removal linear driving device 432 is fixed at the output end of the first dust removal linear driving device 431, the second dust removal linear driving device 432 is used for driving the dust removal connecting part 433 to drive the dust removal head 42 to be close to and far away from the placing table 413, and the dust removal connecting part 433 is driven to drive the dust removal head 42 to be close to and far away from the detected surface, the control center or a user improves the convenience of moving the dust removal head 42 through the first dust removal linear driving device 431 and the second dust removal linear driving device 432, and the detected object 6 on the motion platform 2 is conveniently processed by the dust removal head 42. The dust-removing connecting portion 433 is used for clamping or sucking a dust-removing body 421, so as to achieve the effect of picking and placing the dust-removing body 421. The dust removal connecting part 433 is fixed at the output end of the second dust removal linear driving device 432. The dust removal connection portion 433 is connected to an output shaft of the second dust removal linear driving device 432. The dust removing connecting portion 433 includes a connecting member 4331, and optionally, the connecting member 4331 is provided in a square and a circular member. The connection member 4331 is provided with an absorption surface 43311, and the absorption surface 43311 is used for contacting with the dust removing head 42. The connection member 4331 is provided with at least one suction hole 43312, one end of each suction hole 43312 penetrates the suction surface 43311, and the other end of each suction hole 43312 avoids the suction surface 43311 and penetrates the connection member 4331. The end of each suction hole 43312, which is away from the suction surface 43311, is used to connect a suction device (not shown), and a control center or a user controls the suction device to make the connection member 4331 generate suction or lose suction, so as to facilitate the suction or release of the dust removing body 421, and the connection member 4331 has a simple structure and low cost. The connection member 4331 is provided with an annular groove 43313, and one end of each suction hole 43312 on the suction surface 43311 is located in the annular groove 43313. When the suction device is turned on and the adsorption face 43311 contacts the dust removal head 42, the dust removal head 42 covers the notch of the annular groove 43313, and a vacuum space is formed between the annular groove 43313 and the dust removal head 42, so that the annular groove 43313 improves the stability of the connection part 4331 in adsorbing the dust removal head 42. The dust removing mechanism 43 further includes a magnetic receiving member (not shown), the magnetic receiving member is fixed on the dust removing body 421 and avoids the viscous semi-solid portion 422, at this time, the connecting member 4331 can be selectively set as a power-on member (not shown), the power-on member has a connecting surface and a power-on end, the power-on end is used for being electrically connected with an external power supply, the power-on member is used for being powered on to generate magnetism so as to adsorb the magnetic receiving member on the connecting surface and lose magnetism when power is lost so as to release the magnetic receiving member, and the magnetic receiving member is integrally disposed with. The control center or the user controls the external power supply (not shown) to make the magnetic member generate magnetism or lose magnetism, so as to facilitate the absorption or release of the magnetic member, thereby achieving the effect of absorbing or releasing the dust removing body 421.
Referring to fig. 7, 8 and 9, the second dust-removing linear driving device 432 is used for driving the dust-removing connecting portion 433 to move vertically. The second dust removal linear driving device 432 is set as a second Z-axis module or a second cylinder, and when the first dust removal linear driving device 431 is set as a third X-axis module or a third Y-axis module, the second dust removal linear driving device 432 is set as a second Z-axis module. When the second dust-removing linear driving device 432 is used for driving the dust-removing connecting part 433 to move vertically, the dust-removing mechanism 43 further includes a guide 434 and a sliding part 435, the sliding part 435 is slidably connected to the guide 434, the guide 434 limits the sliding part 435 to slide vertically, the guide 434 and the sliding part 43 rotate synchronously, and the guide 434 is fixed on the output end of the second dust-removing linear driving device 432. The dust removing connecting portion 433 is fixed to the sliding member 435. When the second dust removal linear driving device 432 is used for driving the dust removal connecting part 433 to move vertically, the dust removal mechanism 43 further includes a displacement sensor 436, and the displacement sensor 436 is in communication connection with the second dust removal linear driving device 432. The sliding member 435 has a first end and a second end, the guide member 434 has a first end and a second end, the first end of the guide member 434 is fixed to the output shaft of the second dust removing linear driving device 432, the displacement sensor 436 is fixed to the guide member 434 between the first end of the guide member 434 and the second end of the guide member 434, the first end of the sliding member 435 is fixed to the dust removing connection portion 433, and the second end of the sliding member 435 is located between the displacement sensor 436 and the second end of the guide member 434. When the second dust removing linear driving device 432 drives the dust removing connecting part 433 to contact with the dust on the detected surface, the sliding part 435 and the guiding part 434 move relatively, so that the dust removing head 42 contacts with the dust by the self weight, the detected object needing dust adhesion is prevented from being damaged by the dust removing head 42, and the detected object needing dust adhesion is also prevented from being damaged by the dust removing head 42 due to sudden overlarge external force. When the sliding member 435 moves to the detecting end of the displacement sensor 436, the displacement sensor 436 causes the second dust-removing linear driving device 432 to drive the dust-removing connecting portion 433 away from the detected surface, or causes the second dust-removing linear driving device 432 to stop moving to maintain the current contact state of the dust-removing connecting portion 433 and the detected surface.
Referring to fig. 7, 8 and 9, the placing device 41 further includes a first placing linear driving device 412, the first placing linear driving device 412 drives the placing table 413 to move linearly, and the first placing linear driving device 412 is configured as a seventh X-axis module or a seventh Y-axis module. When the first dust removal linear driving device 431 is set as the third X-axis module, the first placing linear driving device 412 is set as the seventh Y-axis module; when the first dust removing linear driving device 431 is set as the third Y-axis module, the first placing linear driving device 412 is set as the seventh X-axis module, ensuring that all the dust removing heads 42 placed on the placing table 413 are connected by the dust removing connecting part 433. The placing device 41 further comprises a second placing linear driving device 416, the second placing linear driving device 416 is fixed on an output shaft, the placing table 413 is fixed on the output shaft of the second placing linear driving device 416, the moving direction of the output shaft of the first placing linear driving device 412 is perpendicular to the moving direction of the output shaft of the second placing linear driving device 416, and the degree of freedom of horizontal movement of the placing table 413 is improved.
Referring to fig. 7, 8 and 9, in particular, a guide groove 4341 and a receiving cavity 4342 are disposed in the guide 434, the guide groove 4341 has a first end and a second end, the receiving cavity 4342 has a first end and a second end, the first end of the guide groove 4341 penetrates through the guide 434, and the second end of the guide groove 4341 is connected to the first end of the receiving cavity 4342. The sliding member 435 includes a sliding rod 4351 and a limiting block 4352, the sliding rod 4351 slides along the guide groove 4341, one end of the sliding rod 4351 is fixed to the dust-removing connecting portion 433, one end of the sliding rod 4351 away from the dust-removing connecting portion 433 is fixed to the limiting block 4352, the limiting block 4352 is limited in the accommodating cavity 4342, and the limiting block 4352 is movable between a first end of the accommodating cavity 4342 and a second end of the accommodating cavity 4342. The guide groove 4341 plays a role in guiding, has a simple structure and is very practical. The receiving cavity 4342 and the stopper 4352 cooperate to prevent the sliding bar 4351 from disengaging from the guide groove 4341, which serves to prevent the slider 435 from disengaging from the guide 434.
Referring to fig. 7, 8, 9 and 11, the sticky dust removing device 4 further includes a rotation driving mechanism 437 and a vision inspection device 438, the vision inspection device 438 is fixed on the preset plane 51, the rotation driving mechanism 437 is fixed on an output shaft of the second dust removing linear driving device 432, an output end of the rotation driving mechanism 437 is fixed on the dust removing connecting portion 433, the rotation driving mechanism 437 is used for driving the dust removing connecting portion 433 to rotate so as to drive the dust removing head 42 to rotate, and specifically, the rotation driving mechanism 437 is a rotary cylinder or a motor. The visual inspection device 438 is used for shooting a size image of the viscous semi-solid portion 422 of the dust removing head 42 connected to the dust removing mechanism 43, and the size image is convenient for the control center or the user to know the real-time size of the viscous semi-solid portion 422 corresponding to the size image, so as to judge whether the viscous semi-solid portion 422 is in the preset size range according to the real-time size, if the real-time size is not in the preset size range, the control center or the user replaces the dust removing head 42 corresponding to the size image, and if the real-time size is in the preset size range, the control center or the user continues to use the dust removing head 42 corresponding to the size image. When the vision inspection device 438 captures a size image, the control center or the user controls the rotation driving mechanism 437 to drive the dust removing head 42 to rotate, so that the control center or the user can conveniently acquire images of the viscous semi-solid portion 422 of each dust removing head 42 at different angles. Specifically, the size image includes a first image and a second image, and the first image is set such that when the rotation driving mechanism 437 is not operated, the visual inspection device 438 captures an image of the adhesive semi-solid portion 422 of the dust removing head 42 attached to the dust removing mechanism 43; the second image is a size image of the viscous semi-solid portion 422 of the cleaning head 42 connected to the cleaning mechanism 43 captured by the vision inspection device 438 after the viscous semi-solid portion 422 is rotated by 90 ° by the rotation driving mechanism 437. The visual inspection device 438 includes an inspection camera 4381 for acquiring a size image and an inspection light source 4382 for illuminating the adhesive semi-solid portion 422 of the dust removing head 42 attached to the dust removing mechanism 43. The dust removing device is provided with a preset detection position 53, the inspection camera 4381 and the inspection light source 4382 are respectively positioned at two sides of the preset detection position 53, or the inspection camera 4381 and the inspection light source 4382 are positioned at the same side of the preset detection position 53, or the inspection camera 4381 is positioned at one side of the preset detection position 53, and the inspection light source 4382 is positioned at the upper side of the preset detection position 53. The inspection camera 4381 includes an inspection camera body 43811 and an inspection lens including an inspection CCTV lens 43812 or an inspection telecentric lens (not shown), and the inspection CCTV lens 43812 is fixed to a photographing end of the inspection camera body 43811. The inspection CCTV lens 43812 has a focusing function, the focus of the inspection telecentric lens is fixed, and the inspection telecentric lens has high resolution and is not easy to distort. Specifically, the inspection CCTV lens 43812 has a manual focusing function, and the control center or the user manually adjusts the focal length of the inspection CCTV lens 43812 according to the actual use condition of the vision inspection apparatus 438 when using the vision inspection apparatus 438. Optimally, the inspection camera body 43811 is set to be a second industrial camera. The inspection light source 4382 is a planar light source, and has simple structure and low cost.
The viscous dust removing device 4 further comprises a reference device 7, the reference device 7 is arranged at the preset detection position 53, the visual inspection device 438 is further used for shooting a reference image of the reference device 7, the inspection camera 4381 is further used for acquiring the reference image, the inspection light source 4382 is further used for illuminating the reference device 7, the reference image is provided with an image of the reference device 7 and an image of the viscous semi-solid part 422 of the dust removing head 42 on the dust removing mechanism 43, and a size image is acquired through the reference image, so that a control center or a user can conveniently and accurately acquire the real-time size of the viscous semi-solid part 422 corresponding to the size image. Specifically, the reference device 7 includes a light shielding plate having a positioning hole or a plate body having a positioning mark. When the reference device 7 is set as a light shielding plate, the inspection light source 4382 and the inspection camera 4381 are respectively located on both sides of the light shielding plate; when the reference device 7 is a plate body, the inspection light source 4382 and the inspection camera 4381 are located on the same side of the plate body.
Referring to fig. 7, 8, 9 and 11, when the usage times of the dust removing head 42 connected to the dust removing mechanism 43 reach the preset times and the real-time size is within the preset size range, the dust removing head 42 connected to the dust removing mechanism 43 needs to be treated by dipping, specifically, the outer surface of the viscous semi-solid portion 422 of the dust removing head 42 connected to the dust removing mechanism 43 is wrapped with a new layer of dust-binding liquid. After the dust removing head 42 is subjected to the dipping treatment, the dust removing head 42 subjected to the dipping treatment is placed on the placing device 41 to be subjected to the drying treatment. The drying time range of this drying treatment was set to 60s-3600 s. Specifically, the drying treatment is natural air drying treatment, constant temperature drying treatment or constant temperature and humidity treatment. According to the above requirements, the viscous dust removing device 4 further comprises a viscous liquid placing mechanism 439, and the viscous liquid placing mechanism 439 comprises a transparent liquid bottle 4391 and a fixed table 4392 arranged on the viscous liquid placing mechanism 439. The transparent liquid bottle 4391 is used for storing sticky dust liquid, the transparent liquid bottle 4391 is arranged on the fixed table 4392, the fixed table 4392 is fixed on the preset plane 51, and the first dust removal linear driving device 431 is also used for driving the second dust removal linear driving device 432 to drive the dust removal connecting part 433 to move and keep away from the upper part of the bottle mouth of the transparent liquid bottle 4391. When the dust-removing connecting portion 433 is located above the bottle opening of the transparent liquid bottle 4391, the second dust-removing linear driving device 432 is further configured to drive the dust-removing connecting portion 433 to drive the viscous semi-solid portion 422 of the dust-removing head 42 to contact with the sticky liquid in the transparent liquid bottle 4391, and to drive the viscous semi-solid portion 422 of the dust-removing head 42 to be away from the transparent liquid bottle 4391. The vision inspection device 438 is further configured to shoot the transparent liquid bottle 4391, the vision inspection device 438 further includes an inspection linear driving device 4383 and a liquid level detection light source 4384, the inspection camera 4381 is further configured to obtain a liquid level image of the transparent liquid bottle 4391, the liquid level detection light source 4384 is configured to illuminate the transparent liquid bottle 4391, the liquid level detection light source 4384 is located on one side of the transparent liquid bottle 4391, the inspection camera 4381 is fixed on an output shaft of the inspection linear driving device 4383, and the inspection linear driving device 4383 is set to be an inspection X axial module or an inspection Y axial module. The inspection straight line driving device 4383 drives the photographing end of the inspection camera 4381 to preset one side of the detection position 53 and one side of the transparent liquid bottle 4391 respectively, the control center or a user can know the liquid level height in the transparent liquid bottle 4391 according to the liquid level image, and the control center or the user calculates the gumming distance of the viscous semi-solid part 422 connected to the dust removal connecting part 433 moving towards the transparent liquid bottle 4391 according to the liquid level height to ensure that the viscous semi-solid part 422 connected to the dust removal connecting part 433 enters the transparent liquid bottle 4391 and is completely contacted with the sticky liquid. Specifically, the control center or the user obtains the dipping distance according to a first formula, and the first formula is set as follows: s ═ L + (H1-H2), where S is a gum dipping distance, L is a driving distance of the viscous dust liquid when the viscous dust liquid in the transparent liquid bottle 4391 is at the highest liquid level, the viscous semi-solid portion 422 on the dust removal connection portion 433 moves toward the highest liquid level and just comes into contact with the highest liquid level, H1 is a current liquid level height, and H2 is a previous liquid level height adjacent to the current liquid level height. Specifically, the liquid level detection light source 4384 is set to a planar light source. Optimally, the inspection light source 4382 and the liquid level detection light source 4384 are integrally provided, that is, the integrally provided inspection light source 4382 and liquid level detection light source 4384 simultaneously illuminate the viscous semi-solid portion 422 and the transparent liquid bottle 4391 of the dust removing head 42 connected to the dust removing connection portion 433.
Referring to fig. 1 and 2, the feeding device 1 is further used for blanking the moving platform 2. The feeding device 1 further comprises a blanking clamping mechanical arm device 13 and a material discharging mechanism 14, the blanking clamping mechanical arm device 13 is used for clamping the detected object 6 on the moving platform 2 and releasing the clamped detected object 6 to a conveying plane of the material discharging mechanism 14, the material discharging mechanism 14 conveys the detected object 6 on the material discharging mechanism to a preset discharging area, and convenience in collecting the detected object 6 on the moving platform 2 is improved. Specifically, when the detected object 6 on the moving platform 2 is processed by the adhesive dust removing device 4 or the detected object 6 is detected to be free of dust by the surface detection vision device 3, the control center or the user controls to clamp the detected object 6 on the moving platform 2 and release the clamped detected object 6 onto the conveying plane of the material discharging mechanism 14.
The placing device 41 further includes a temperature adjusting device for making the temperature in all the placing slots 414 within a preset temperature range, so that each of the viscous semi-solid portions 422 located in the placing slots 414 is not easily affected by the external ambient temperature. The temperature adjusting device avoids the feeding device 1, the moving platform 2, the surface detection vision device 3, the dust removing head 42, the dust removing mechanism 43, the rotary driving mechanism 437, the vision inspection device 438 and the sticky liquid storage device. The temperature adjusting device is connected to the placing table 413 while avoiding the clamping portion 411, and does not affect the placement of each dust removing head 42 on the placing table 413. The temperature adjusting device is a constant temperature and humidity device for setting the temperature in all the placing grooves 414 and the humidity in all the placing grooves 414 within a predetermined temperature range, and setting the viscous semi-solid portions 422 in the placing grooves 414 in a constant temperature and humidity environment, so that the viscous semi-solid portions 422 have a longer service life.
Referring to fig. 8 to 11, the sticky dust removing device 4 further comprises a dust removing head production device 44, the dust removing head production device 44 comprises a production mechanism 441, a production vision inspection device 442 and a production sticky liquid storage mechanism 443, the production mechanism 441 is used for clamping or sucking a dust removing body 421 without the sticky semi-solid part 422, the production mechanism 441 comprises a production moving device and a production connecting part 4413, the production moving device comprises a first production straight line driving device 4411 and a second production straight line driving device 4412, the first production straight line driving device 4411 and the second production straight line driving device 4412 are arranged above the preset plane 51, and the first production straight line driving device 4411 is used for driving the second production straight line driving device 4412 to move linearly. The second production line driving device 4412 is fixed at the output end of the first production line driving device 4411, the second production line driving device 4412 is used for driving the production connecting part 4413 to drive the dust removing head 42 to approach and leave the placing table 413, and the control center or the user improves the convenience of moving the dust removing head 42 through the first production line driving device 4411 and the second production line driving device 4412. Specifically, when the first production line driving device 4411 is set as a production X-axis module or a production Y-axis module, the second production line driving device 4412 is set as a production Z-axis module or a production cylinder. The production connecting portion 4413 is used for holding or sucking a dust removing body 421, so as to achieve the function of picking and placing the dust removing body 421. The production connection part 4413 is fixed to an output terminal of the second production line driving device 4412. The production connection part 4413 includes a suction piece 44131, and optionally, the suction piece 44131 is provided in a square piece and a circular piece. The suction member 44131 is provided with a fixing surface 44132, and the fixing surface 44132 is adapted to contact the dust removing head 42. The suction piece 44131 is provided with at least one suction hole 44133, one end of each suction hole 44133 penetrates the fixing surface 44132, and the other end of each suction hole 44133 avoids the fixing surface 44132 and penetrates the suction piece 44131. The end of the suction hole 44133, which avoids the fixing surface 44132, is used to connect with a suction device, a control center or a user to control the suction device (not shown), so that the suction piece 44131 generates suction force or loses suction force, which is convenient for sucking or releasing the dust removing body 421, and the suction piece 44131 has simple structure and low cost. The suction piece 44131 is provided with an annular groove, and one end of all the suction holes 44133 on the fixing surface 44132 is positioned in the annular groove. When the air suction device is started and the fixing surface 44132 is in contact with the dust removing head 42, the dust removing head 42 covers the notch of the annular groove, and a vacuum space is formed between the annular groove and the dust removing head 42, so that the annular groove improves the stability of the suction piece 44131 in absorbing the dust removing head 42. The attracting element 44131 may be an electromagnetic element (not shown) having a connecting surface and an energizing end for electrically connecting to an external power source (not shown), and the electromagnetic element is energized to generate magnetism to attract the magnetized element and de-energized to lose magnetism to release the magnetized element. The production vision inspection device 442 takes an image of the viscous semi-solid portion 422 of the dust-removing head 42 attached to the production mechanism 441; the production vision inspection device 442 includes a production camera 4421 and a production light source 4422, the production light source 4422 being used to illuminate the adhesive semi-solid portion 422 of the dust removing head 42 attached to the production mechanism 441. The dust removing device is provided with a preset production detection position 54, the production camera 4421 and the production light source 4422 are respectively positioned at two sides of the preset production detection position 54, or the production camera 4421 and the production light source 4422 are positioned at the same side of the preset production detection position 54, or the production camera 4421 is positioned at one side of the preset production detection position 54, and the production light source 4422 is positioned at the upper side of the preset production detection position 54. The production camera 4421 includes a production camera body 44211 and a production lens set as a production CCTV lens 44212 or a production telecentric lens (not shown), and when the production lens is set as a production CCTV lens 44212, the production CCTV lens 44212 is fixed on a photographing end of the production camera body 44211; when the production lens is set to produce a telecentric lens, the production telecentric lens is fixed to the photographing end of the production camera body 44211. The produced CCTV lens 44212 has focusing function, the focal length of the produced telecentric lens is fixed, the resolution of the picture shot by the produced telecentric lens is high and the picture is not easy to distort, specifically, the produced CCTV lens 44212 has manual focusing function, and the control center or the user adjusts the focal length of the produced CCTV lens 44212 manually according to the actual use condition of the produced visual detection device 442 when the produced visual detection device 442 is used. Optimally, the production camera body 44211 is set as a second industrial camera. The production light source 4422 is set as a planar light source.
The dust-removing head production device 44 further comprises a reference production device 8, the reference production device 8 is arranged on a preset production detection position 54, the production vision detection device 442 is further used for shooting a reference image of the reference production device 8 and the viscous semi-solid part 422 of the dust-removing head 42 on the production mechanism 441, the production camera 4421 is further used for acquiring the reference image, the production light source 4422 is further used for illuminating the reference production device, the reference image is provided with an image of the reference production device 8 and an image of the viscous semi-solid part 422 of the dust-removing head 42 on the production mechanism 441, and a corresponding dimension image of the reference image is acquired through the reference image, so that a control center or a user can know the real-time dimension of the viscous semi-solid part 422 of the dust-removing head 42 on the production mechanism 441. Specifically, the reference production apparatus 8 includes a light shielding plate having a positioning hole or a plate body having a positioning mark. When the reference production apparatus 8 is set as a light shielding plate, the production light source 4422 and the production camera 4421 are respectively located on both sides of the light shielding plate; when the reference production apparatus 8 is provided as a plate body, the production light source 4422 and the production camera 4421 are located on the same side of the plate body.
Referring to fig. 8 to 11, the production viscous liquid storage mechanism 443 includes a transparent bottle 4431 and a positioning table 4432. The transparent bottle 4431 is used for storing the sticky liquid, and the transparent bottle 4431 is arranged on the positioning table 4432. The production vision inspection device 442 is further configured to photograph a dust adhering liquid image of the transparent bottle 4431, the production vision inspection device 442 further includes a production line driving device and a photographing light source, the inspection camera 4381 is further configured to obtain the dust adhering liquid image of the transparent bottle 4431, the photographing light source is configured to illuminate the transparent bottle 4431, the photographing light source is located on one side of the transparent bottle 4431, the control center or the user can know the liquid level height in the transparent bottle 4431 according to the dust adhering liquid image, and the control center or the user calculates the glue dipping distance of the viscous semi-solid portion 422 connected to the dust removal connecting portion 433 moving towards the inside of the transparent bottle 4431 according to the liquid level height.
The production mechanism 441 is used for immersing one end of the dedusting body 421, which is far away from the production mechanism 441, into the sticky dust liquid of the production sticky liquid storage mechanism 443 to form a gluing end, and is also used for taking the gluing end out of the production sticky liquid storage mechanism 443 to be pre-dried to form a pre-drying end, the production mechanism 441 is also used for moving the pre-drying end to a shooting end of the production visual detection device 442, the production visual detection device 442 is used for shooting a production image of the pre-drying end, wherein the pre-drying size information of the pre-drying end is obtained through the production image, a control center or a user judges whether the pre-drying size information is in a preset size range, if the pre-drying size information is in the preset size range, the production mechanism 441 is also used for carrying out main drying on the pre-drying end to form a sticky semi-solid part 422, and the dedusting body 421 with the sticky semi-solid part 422; if the pre-drying size information is not in the preset size range, the pre-drying end is immersed into the sticky dust liquid of the production sticky liquid storage mechanism 443 to form an optimized gluing end, so that the used dust removing head 42 can be used for producing the dust removing head 42 at the same time.
Example two: it is right now that the utility model provides a pair of viscidity dust collector explains. A sticky dust removing device, comprising the sticky dust removing device in the first embodiment.
Example three: referring to fig. 10, 11 and 12, a dust removing device according to the present invention will now be described. A dust removing device, which is different from the first embodiment in the visual inspection device 438. In the third embodiment, the visual inspection device 438 is used only to take an image of the viscous semi-solid portion 422 of each dust removal head 42, and the visual inspection device 438 is not used to take an image of the sticky liquid in the transparent liquid bottle 4391. The viscous dust removing device 4 further comprises a height visual detection device 45, the height visual detection device 45 is used for shooting the sticky dust liquid image of the transparent liquid bottle 4391, the height visual detection device 45 comprises a height detection camera 451 and a height detection light source 452, the height detection camera 451 is used for acquiring the sticky dust liquid image of the transparent liquid bottle 4391, the height detection light source 452 is used for illuminating the transparent liquid bottle 4391, and the height detection light source 452 is positioned on one side of the transparent liquid bottle 4391. Specifically, the height detection light source 452 is set to a planar light source. Optimally, the inspection light source 4382 and the height detection light source 452 are integrally provided, that is, the integrally provided inspection light source 4382 and the height detection light source 452 simultaneously illuminate the adhesive semi-solid portion 422 and the transparent liquid bottle 4391 of the dust removing head 42 connected to the dust removing connecting portion 433.
Example four: referring to fig. 10, 11 and 13, a dust removing device according to the present invention will now be described. A dust removing device, which is different from the first embodiment in the visual inspection device 438. In the fourth embodiment, the visual inspection apparatus 438 is only used to capture the image of the sticky liquid in the transparent liquid bottle 4391, and in this case, the inspection linear driving apparatus 4383 and the inspection light source 4382 of the visual inspection apparatus 438 in the first embodiment do not need to be provided in the third embodiment. The adhesive dust removing device 4 further includes an adhesive head inspection vision device 46, and the adhesive head inspection vision device 46 is configured to take an inspection image set as an image of the adhesive semi-solid portions 422 of all the dust removing heads 42 placed on the placing device 41. The control center or the user acquires the size information corresponding to each viscous semi-solid portion 422 according to the detection image, and determines whether each size information is within a preset size range, if not, the viscous semi-solid portion 422 corresponding to the size information not within the preset size range needs to be replaced, and if so, the viscous semi-solid portion 422 corresponding to the size information within the preset size range continues to be used. The control center or the user controls the dust removing mechanism 43 to be connected with the dust removing head 42 corresponding to the viscous semi-solid part 422 which is continuously used, optimally, the control center or the user can also control the first placing linear driving device 412, and the dust removing mechanism 43 is conveniently connected with the dust removing head 42 corresponding to the viscous semi-solid part 422 which is continuously used.
The sticky head detecting vision device 46 includes a plurality of first sticky head detecting cameras 461 and sticky head detecting light sources 462, each first sticky head detecting camera 461 is fixed on the placing stage 413 of the placing device 41 and a shooting end of each first sticky head detecting camera 461 is disposed in the cavity 415 of the placing stage 413 of the placing device 41, each first sticky head detecting camera 461 corresponds to the dust removing head 42 placed on the placing device 41 one by one, and the shooting end of each first sticky head detecting camera 461 is used for acquiring an image of the sticky semi-solid portion 422 of the corresponding dust removing head 42. The sticky head detecting light source 462 is fixed on the placing table 413 of the placing device 41, and the sticky head detecting light source 462 is used for providing illumination for all the sticky semi-solid portions 422 in the placing table 413 of the placing device 41, so that each first sticky head detecting camera 461 can conveniently and clearly acquire the image of the sticky semi-solid portion 422 of the corresponding dust removing head 42. Specifically, the viscous head detection light source 462 is provided as a plurality of lamp beads (not shown), each of which is fixed in the cavity 415 of the placement stage 413 of the placement device 41.
Example five: referring to fig. 10, 11 and 14, a dust removing device according to the present invention will now be described. A dust removing apparatus is different from the fourth embodiment in that a first sticky head detecting camera 461, a sticky head detecting vision device 46 includes a plurality of second sticky head detecting cameras 463, the number of the second sticky head detecting cameras 463 is smaller than the number of dust removing heads 42 placed on a placing device 41, the dust removing heads 42 placed on the placing device 41 are divided into a plurality of dust removing head groups, each second sticky head detecting camera 463 is fixed on a placing table 413 and the photographing end of each second sticky head detecting camera 463 is arranged in the placing table 413, each second sticky head detecting camera 463 corresponds to each dust removing head group one by one, each second sticky head detecting camera 463 acquires partial images of all dust removing heads 42 in the corresponding dust removing head group, and each partial image constitutes a detection image.
Example six: referring to fig. 10, 11 and 15, a dust removing device according to the present invention will now be described. A dust removing device, which is different from the first embodiment in the visual inspection device 438. In the fifth embodiment, the visual inspection device 438 is used only to capture the image of the sticky liquid in the transparent liquid bottle 4391, and in this case, the rotary drive mechanism 437, the inspection linear drive device 4383 of the visual inspection device 438, and the inspection light source 4382 in the sixth embodiment do not need to be provided. The sticky dust removing device 4 further comprises a sticky dust detection visual device 47, the sticky dust detection visual device 47 is used for shooting a size image of the sticky semi-solid part 422 of the dust removing head 42 connected to the dust removing mechanism 43, the sticky dust detection visual device 47 comprises a sticky dust detection light source 471 and at least two sticky dust detection cameras 472, and the sticky dust detection light source 471 is used for illuminating the sticky semi-solid part 422 of the dust removing head 42 connected to the dust removing mechanism 43. The shooting ends of all the dust adhesion detection cameras 472 face the preset detection position 53, and the shooting ends of every two dust adhesion detection cameras 472 are not arranged oppositely. When the dust adhesion detection vision device 47 captures a size image, the control center or the user controls the dust removing mechanism 43 so that the adhesive semi-solid portion 422 of the dust removing head 42 attached to the dust removing mechanism 43 is positioned between all the dust adhesion detection cameras 472. All the images taken by the dust adhesion detecting camera 472 constitute a size image. The dust adhesion detection light source 471 is disposed below the preset detection position 53 or on one side of the preset detection position 53. Specifically, the dust adhesion detecting camera 472 is provided in two. The length direction of the shooting end of one dust detection camera 472 is along the X-axis, and the length direction of the shooting end of the other dust detection camera 472 is along the Y-axis.
Example seven: referring to fig. 8 and 16, a dust removing head according to the present invention will now be described. A dust removal head comprises the dust removal head 42 in the first embodiment, in particular, one end part of an adhesive rod 4213, which is far away from a fixing rod 4212, is positioned in an adhesive semi-solid part 422, the adhesive rod 4213 is not easy to contact with a measured surface in the dust removal head 42 in the dust adhering process, and the thickness H of the adhesive semi-solid part 422 is set as follows: when one end of the adhesive rod 4213, which is far away from the fixing rod 4212, is vertically downward, the distance from the lowest point of the adhesive semi-solid part 422 to one end of the adhesive rod 4213, which is far away from the fixing rod 4212, is convenient for a control center to quickly obtain the data of the thickness H of the adhesive semi-solid part 422 after obtaining a size image. The thickness H of the adhesive semi-solid portion 422 is set to be 0.1mm-3mm, so that one end, away from the fixing rod 4212, of the adhesive rod 4213 is located in the adhesive semi-solid portion 422 and is not easy to separate from the adhesive rod 4213. The width L of the viscous semi-solid portion 422 is set to: when one end of the adhesive rod 4213, which is away from the fixing rod 4212, is vertically downward, the longest distance between the two sides of the adhesive semi-solid portion 422 facilitates the control center to quickly obtain the data of the width L of the adhesive semi-solid portion 422 after obtaining the size image. The width L of the viscous semi-solid portion 422 is set to: 0.2mm-3mm, the adhesive semi-solid part 422 is ensured to have certain use times, the adhesive semi-solid part 422 is easy to dry and form, and is not easy to leave on the detected surface after being adhered with dust after use. The viscous semi-solid portion 422 of this size range is highly efficient to produce. The dimensional ranges include a range of thicknesses H of the adhesive semi-solid portion 422 and a range of widths L of the adhesive semi-solid portion 422.
Example eight: referring to fig. 8, a dust removing mechanism according to the present invention is described, which includes the dust removing mechanism of the first embodiment, specifically, the dust removing mechanism 43 further includes a plurality of balls (not shown), and all the balls are disposed in the guide groove 4341 and located between the sliding rod 4351 and the guide 434. The dust removing mechanism 43 includes a linear bearing (not shown) fixed in the guide groove 4341, a sliding rod 4351 inserted and slidably connected to the linear bearing, and rolling balls of the linear bearing are balls. By the above, the friction between the sliding member 435 and the guide member 434 is small, and the dust removing head 42 is ensured to automatically contact with the dust on the surface to be detected.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A viscidity dust collector, wherein, said viscidity dust collector includes the placer, removes the dust head, removes the dust organization, glue placement mechanism and glues the dust and measures the visual device;
the placing device is used for placing a plurality of dust removing heads;
each dust removing head comprises a dust removing body and an adhesive semi-solid part arranged on the dust removing body;
the dust removal mechanism comprises a motion driving mechanism and a dust removal connecting part which are arranged above a preset plane;
the dust removal mechanism is fixed on the output end of the motion driving mechanism;
the glue placing mechanism comprises a transparent glue bottle which is fixed on the preset plane;
the sticky dust detection visual device is arranged on the preset plane and comprises a sticky dust detection light source and at least two sticky dust detection cameras, the sticky dust detection light source is used for illuminating a sticky semi-solid part of the dust removal head connected to the dust removal mechanism, and all the sticky dust detection cameras simultaneously shoot images of the sticky semi-solid part of the dust removal head connected to the dust removal mechanism;
the motion driving mechanism is used for driving the dust removal connecting part to drive the dust removal head to move.
2. The viscous dust removal device of claim 1, wherein the motion driving mechanism is further configured to drive the dust removal connection portion to drive the viscous semi-solid portion of the dust removal head to approach or depart from a photographing end of the dust adhesion detection vision device.
3. The viscous dust-removing apparatus according to claim 2, wherein the predetermined plane is provided with a predetermined detecting position, all the dust-binding detecting cameras and the dust-binding detecting light source are disposed on the predetermined plane, the shooting ends of all the dust-binding detecting cameras face the predetermined detecting position, and the shooting ends of two dust-binding detecting cameras are not disposed opposite to each other.
4. The viscous dust-removing apparatus according to claim 3, wherein the two sticky dust detecting cameras are arranged such that the length direction of the photographing end of one of the sticky dust detecting cameras is along the X-axis direction and the length direction of the photographing end of the other sticky dust detecting camera is along the Y-axis direction.
5. The viscous dust removing device according to claim 1, further comprising a glue head detection vision device, wherein the glue head detection vision device comprises a plurality of first glue head detection cameras and glue head detection light sources, each first glue head detection camera is fixed on the placing device, each first glue head detection camera corresponds to the dust removing head placed on the placing device one to one, a shooting end of each first glue head detection camera is used for obtaining an image of the viscous semi-solid part of the corresponding dust removing head, the glue head detection light sources are fixed on the placing device, and the glue head detection light sources are used for providing illumination for all viscous semi-solid parts on the placing device.
6. The viscous dust-removing apparatus of claim 1, further comprising a glue head inspection vision apparatus, wherein the glue head inspection vision apparatus comprises a plurality of second glue head inspection cameras and glue head inspection light sources, the number of the second glue head inspection cameras is smaller than the number of the dust-removing heads disposed on the placement apparatus, the second glue head inspection cameras and the glue head inspection light sources are fixed on the placement apparatus, each of the second glue head inspection cameras is used for acquiring a partial image, and the glue head inspection light sources are used for providing illumination for all viscous semi-solid portions on the placement apparatus.
7. The viscous dust-removing apparatus according to claim 5 or 6, wherein the placing apparatus comprises a placing table having a plurality of placing grooves corresponding to the respective dust-removing bodies, the placing grooves hold the respective dust-removing bodies when the dust-removing head is placed on the placing apparatus, the viscous semi-solid portions corresponding to the held dust-removing bodies are not in contact with any object and are arranged downward in a vertical direction, one end of each placing groove penetrates one side surface of the placing table, each dust-removing body has a large end portion and a small end portion, one end of each placing groove penetrating the placing table is provided for the small end portion corresponding to the dust-removing body to pass through, and one end of each placing groove penetrating the placing table restricts the large end portion corresponding to the dust-removing body to pass through.
8. The viscous dust-removing apparatus according to claim 7, wherein the placing table comprises a U-shaped groove and a placing plate fixed on the U-shaped groove, the side of the U-shaped groove facing the bottom of the U-shaped groove is opened to form a fixing opening, the placing plate covers the fixing opening, a cavity is formed between the bottom of the U-shaped groove and the placing plate, and one end of each placing groove facing away from the cavity is arranged on the placing plate.
9. The sticky dust removing device according to claim 7, wherein the placing means comprises a temperature adjusting means fixed on the placing table for adjusting the temperature in all the placing grooves to be within a predetermined temperature range.
10. The viscous dust-removing apparatus according to claim 9, wherein the temperature-adjusting means is a constant temperature and humidity means for setting the temperature in all the placing trays within a preset temperature range and setting the humidity in all the placing trays within a preset humidity range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021208761.3U CN213529998U (en) | 2020-06-23 | 2020-06-23 | Viscidity dust collector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021208761.3U CN213529998U (en) | 2020-06-23 | 2020-06-23 | Viscidity dust collector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213529998U true CN213529998U (en) | 2021-06-25 |
Family
ID=76475670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021208761.3U Active CN213529998U (en) | 2020-06-23 | 2020-06-23 | Viscidity dust collector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213529998U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113894106A (en) * | 2021-10-09 | 2022-01-07 | 杭州中欣晶圆半导体股份有限公司 | Automatic feeding and discharging system of cleaning machine and operation method |
-
2020
- 2020-06-23 CN CN202021208761.3U patent/CN213529998U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113894106A (en) * | 2021-10-09 | 2022-01-07 | 杭州中欣晶圆半导体股份有限公司 | Automatic feeding and discharging system of cleaning machine and operation method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111781215A (en) | Viscidity dust collector | |
| CN111781216A (en) | Dust removing device | |
| CN108188043B (en) | Appearance detection equipment and method for lithium battery cell | |
| CN111940419A (en) | Dust removal method, device, equipment and storage medium | |
| JP3516709B2 (en) | Ophthalmic lens inspection apparatus and method | |
| TWI333544B (en) | Substrate inspection apparatus | |
| CN213121641U (en) | Surface detection vision device and detection system | |
| CN211718140U (en) | Automatic change check out test set | |
| JP2012004306A (en) | Adsorption nozzle inspection device of component mounting machine | |
| CN213529998U (en) | Viscidity dust collector | |
| CN113109365A (en) | Defect detection system and method suitable for various workpieces | |
| CN111921986A (en) | Dust removal method | |
| CN213121662U (en) | Viscidity dust collector | |
| CN213121664U (en) | Dust removing device | |
| CN212693623U (en) | Viscidity dust collector | |
| CN212693622U (en) | Dust removing device | |
| CN213121663U (en) | Dust removing device | |
| CN213968092U (en) | Dust removal mechanism | |
| CN213121642U (en) | Surface detection vision device and detection system | |
| CN212681903U (en) | Dust removal head | |
| CN214150485U (en) | Integrated detection equipment | |
| CN111855687A (en) | Connector defect detection system and method | |
| CN111781214A (en) | Dust removing device | |
| CN111774379A (en) | Dust removal head | |
| CN111921985A (en) | Preparation method of dust removal head |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231220 Address after: 215000, 2nd Floor, Building B, Dongcheng Science and Technology Entrepreneurship Park, Tangqiao Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee after: Zhongke Jianwei Intelligent Equipment (Suzhou) Co.,Ltd. Address before: NO.201, building 3, No.528, Huarong Road, Langkou community, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Fuyuan Software Co.,Ltd. |
|
| TR01 | Transfer of patent right |