CN213520678U - Dustproof water cooling system based on ultrashort pulse laser - Google Patents

Dustproof water cooling system based on ultrashort pulse laser Download PDF

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Publication number
CN213520678U
CN213520678U CN202022364008.XU CN202022364008U CN213520678U CN 213520678 U CN213520678 U CN 213520678U CN 202022364008 U CN202022364008 U CN 202022364008U CN 213520678 U CN213520678 U CN 213520678U
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China
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water
cooling
plate
bottom plate
way joint
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CN202022364008.XU
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Chinese (zh)
Inventor
安玉瑞
李峰
赵卫
杨小君
梁毅超
王娜
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The utility model relates to a dust protected water cooling system based on ultrashort pulse laser. The utility model aims at solving prior art and having the inside great temperature variation of laser instrument and easily causing the directional skew of light beam, the particulate matter of a large amount of suspensions in the air very easily to get into laser instrument internal contamination optical lens piece and crystal, cause energy loss, make the technical problem that the optical lens piece burns out, provide a dust protected water cooling system based on ultrashort pulse laser instrument. This system is ultrashort pulse laser and each component bottom that the degree of generating heat is great, especially amplify and compress the great each component bottom of degree of generating heat in water-cooling module and the enlarged compression water-cooling module, water-cooling board or water-cooling seat have been set up respectively, combine the reasonable setting in circulation water route, play abundant water-cooling effect, make ultrashort pulse laser output light keep good light beam directional stability, still all set up fixed seal structure for optic fibre entrance hole and light-emitting hole department, inside in order to avoid the suspended particles to get into the laser.

Description

Dustproof water cooling system based on ultrashort pulse laser
Technical Field
The utility model relates to a laser instrument water cooling system, concretely relates to dust protected water cooling system based on ultrashort pulse laser instrument.
Background
Ultrashort pulse lasers are lasers operating in a pulsed manner, the pulse width (pulse time width) of the ultrashort pulse generally being less than 10-12And the pulse width range is generally several femtoseconds to several hundred femtoseconds, and the laser beam can emit ultrafast and super-strong laser beams, and has wide application prospect in the fields of micromachining, medical treatment, microscopic substance detection and the like.
In general, an ultrashort pulse laser needs to continuously operate for tens of hours or even hundreds of hours, so that the requirement on stability is very high. Since the heating power of the internal heat source of the laser is close to 300w, which means that the temperature of the internal heat source of the laser rises to dozens or even hundreds of degrees centigrade in a short time, the structural member for fixing the optical device inside the laser and the whole fixing plate are deformed due to the change of the temperature, and the pointing deviation of the light beam is easily caused.
In addition, the operating environment of ultrashort pulse laser is generally the mill workshop, and the environment is comparatively abominable, can't possess the condition in ultraclean room, and the particulate matter of a large amount of suspensions in the air very easily gets into laser inside pollution optical lens and crystal, then causes energy loss slightly, makes optical lens burn out seriously, seriously influences the normal work of ultrashort pulse laser.
Disclosure of Invention
The utility model aims at solving the problem that the existing ultra-short pulse laser has the inside great temperature variation of laser and easily causes the directional skew of light beam, the particulate matter of a large amount of suspensions in the air very easily gets into laser inside pollution optical lens piece and crystal, causes energy loss, makes the technical problem that optical lens piece burns out even, provides a dust protected water cooling system based on ultra-short pulse laser.
In order to solve the technical problem, the utility model provides a technical solution as follows:
a dustproof water cooling system based on an ultrashort pulse laser is characterized in that: the water cooling device comprises a water cooling machine, a water cooling bottom plate, a first four-way joint assembly, an LD driving water cooling plate, an amplifying and compressing water cooling module, an electro-optic water cooling plate, an LD water cooling plate, a second four-way joint assembly and a shell, wherein the first four-way joint assembly, the LD driving water cooling plate, the amplifying and compressing water cooling module, the electro-optic water cooling plate, the LD water cooling plate and the second four-way joint assembly;
a first water inlet joint component is arranged on one side, close to the first four-way joint integration, of the surface of the water-cooling bottom plate, a first water outlet joint component is arranged on one side, close to the second four-way joint integration, of the surface of the water-cooling bottom plate, the first water inlet joint component and the first water outlet joint component are located on the same diagonal line of the water-cooling bottom plate, and the first water inlet joint component and the first water outlet joint component are communicated through a flow channel arranged inside the water-cooling bottom plate;
the amplifying and compressing water-cooling module comprises an amplifying and compressing water-cooling bottom plate, a first three-way joint assembly, a silicate crystal water-cooling plate, a single crystal optical fiber water-cooling seat, a diaphragm water-cooling seat, a volume grating water-cooling seat and a second three-way joint assembly, wherein the first three-way joint assembly, the silicate crystal water-cooling plate, the single crystal optical fiber water-cooling seat, the diaphragm water-cooling seat, the volume grating water-cooling seat and the second three-way joint assembly are arranged on the surface; wherein, the amplifying and compressing water-cooling bottom plate, the wall plate and the upper cover form a closed space together;
a second water inlet joint component is arranged on the side surface of the amplification and compression water-cooling bottom plate close to the LD driving water-cooling plate, and a second water outlet joint component is arranged close to the first water outlet joint component;
the wall plate is provided with an optical fiber wire inlet hole and an optical fiber light outlet hole, an optical fiber fixing and sealing piece is arranged at the optical fiber wire inlet hole, a window glass fixing and sealing piece is arranged at the optical fiber light outlet hole, and window glass is arranged in the window glass fixing and sealing piece;
the water in the water cooler flows into the first four-way joint and is divided into three paths after being integrated;
the first path sequentially flows through the LD driving water cooling plate, the amplifying and compressing water cooling bottom plate, the electro-optic water cooling plate and the LD water cooling plate and then flows into a second four-way joint for integration;
the second path flows through the first water inlet joint component and a flow channel in the water-cooling bottom plate and then flows into the second four-way joint assembly through the first water outlet joint component;
the third path passes through the wall plate through the second water inlet joint component and flows into the first three-way joint assembly, and the third path is divided into two paths at the first three-way joint assembly; one path of the water-cooled fiber flows into a second three-way joint for integration after sequentially flowing through a silicate crystal water-cooled plate and a single crystal fiber water-cooled seat; the other path of water flows into a second three-way joint assembly after sequentially flowing through the diaphragm water-cooling seat and the volume grating water-cooling seat, and the water at the second three-way joint assembly passes through the wall plate through a second water outlet joint assembly and flows into a second four-way joint assembly;
and finally, water at the integrated part of the second four-way joint flows back to the water cooling machine.
Further, in order to improve the sealing performance of the optical fiber inlet hole, the optical fiber fixing sealing element comprises a front pressing plate, a rear pressing plate and a rubber gasket;
the rear pressing plate is a hollow cylinder with a flange at one end, and a rubber gasket groove is formed in the center of one end of the flange of the rear pressing plate;
the rubber gasket is arranged in the rubber gasket groove, the center of the rubber gasket is provided with an optical fiber access hole, and the rubber gasket is provided with a notch for introducing an optical fiber;
a through hole is formed in the center of the front pressure plate, the diameter of the through hole is smaller than the outer diameter of the rubber gasket, and a convex edge used for pressing the rubber gasket is arranged at the orifice of the through hole;
the front pressing plate is fixedly connected with the flange of the rear pressing plate;
the rear pressing plate is fixedly connected to the wall plate;
the rubber gasket has a temperature resistance of more than 100 ℃.
Further, in order to improve the sealing performance at the light outlet hole, the window glass fixing and sealing element is a hollow cylinder with a flange at one end, and the window glass is embedded in the hollow cylinder and is close to the flange end.
Furthermore, in order to improve the sealing performance of the amplifying and compressing water-cooling module, a first sealing ring is arranged between the flange of the rear pressure plate and the wall plate, a second sealing ring is arranged between the flange of the window glass fixing sealing element and the wall plate, a third sealing ring is arranged between the upper cover and the wall plate, and the tolerance temperature of the first sealing ring, the second sealing ring and the third sealing ring is above 100 ℃.
Further, heat conduction to the water-cooling bottom plate is reduced, the water-cooling bottom plate is integrated with the first four-way connector, the LD driving water-cooling plate, the amplification compression water-cooling module, the electro-optic water-cooling plate, the LD water-cooling plate and the second four-way connector respectively, the amplification compression water-cooling bottom plate is integrated with the first three-way connector, the silicate crystal water-cooling plate, the single crystal optical fiber water-cooling seat, the diaphragm water-cooling seat, the volume grating water-cooling seat and the second three-way connector are integrated, and heat insulation bosses are arranged between the water-cooling bottom plate and the amplification compression water-cooling bottom plate.
Furthermore, in order to improve the water cooling efficiency, the flow channels in the water cooling bottom plate and the amplification and compression water cooling bottom plate are S-shaped, and the diameters of the flow channels are 6-12 mm.
Further, in order to reduce the volume of the whole machine, the length multiplied by the width multiplied by the height of the water-cooled bottom plate is (1010 +/-100) mmX (570 +/-50) mmX (35 +/-5) mm.
Furthermore, in order to adjust parameters of the water cooling machine in time, a first temperature and humidity sensor is arranged on the surface of the water cooling bottom plate, a second temperature and humidity sensor is arranged on the wall plate, a sensitive end of the second temperature and humidity sensor is located in a closed space of the amplification and compression water cooling module, and output ends of the first temperature and humidity sensor and the second temperature and humidity sensor are connected with an input end of a display screen arranged outside the shell.
Further, according to specific requirements, the front pressing plate is fixedly connected with the rear pressing plate, and the rear pressing plate is fixedly connected with the wall plate through bolts or glue.
Further, in order to avoid pipeline blockage, a filter is arranged between the water cooler and the second four-way joint assembly.
Compared with the prior art, the utility model has the following beneficial effects:
1. the utility model provides a dust protected water cooling system based on ultrashort pulse laser instrument, for ultrashort pulse laser instrument and each component bottom that the degree of generating heat is great, especially, enlarge the compression water-cooling module and enlarge each component bottom that the degree of generating heat is great in the compression water-cooling module, water-cooling board or water-cooling seat have been set up respectively, combine the reasonable setting in circulation water route, effectively take away the heat of the inside production of ultrashort pulse laser instrument, play abundant water-cooling effect, guarantee that the inside optical device of laser instrument works under constant temperature state, thereby make ultrashort pulse laser instrument output light keep good light beam directional stability, avoid ultrashort pulse laser instrument because of the great problem that causes the directional skew of light beam of inside temperature variation.
2. The utility model discloses still all set up fixed seal structure for the optic fibre entrance hole on the ultrashort pulse laser instrument enlargies compression water-cooling module and light-emitting hole department to inside avoiding the particulate matter of a large amount of suspensions in the air to get into the laser instrument, cause the lens to destroy or power loss scheduling problem, guarantee ultrashort pulse laser instrument's normal work, can also prevent to damage optic fibre.
3. The amplifying compression water-cooling bottom plate, the circle of wall plate and the upper cover which are arranged along the edge of the amplifying compression water-cooling bottom plate jointly form a closed space, and by adopting the structure, the air flow speed is low, the efficiency of heat conduction of devices through natural convection is reduced, the heat conduction is reduced to the greatest extent, and the heat-generating devices are prevented from influencing the working performance of other devices.
4. Sealing rings are arranged between the rear pressing plate and the wall plate, between the window glass fixing sealing element and the wall plate and between the upper cover and the wall plate, so that the sealing performance of the amplifying compression water-cooling module is further improved.
5. The heat insulation boss is arranged at the bottom of the water cooling seat or the water cooling plate of each heating device, so that the heat conduction to the water cooling bottom plate can be reduced, the large-area contact between parts and the water cooling bottom plate is avoided, the processing cost can be reduced by the small heat insulation boss, and the processing precision can be ensured.
6. In order to fully take away heat through circulating water, the flow channels in the water-cooling bottom plate and the amplification and compression water-cooling bottom plate are S-shaped; the diameter of each flow passage is 6mm-12mm, and the diameter is determined by the processing technology and the heat dissipation capacity.
7. In order to reduce the volume of the whole machine and improve the space utilization rate, the length, the width and the height of the water-cooled bottom plate are (1010 +/-100) mmX (570 +/-50) mmX (35 +/-5) mm.
8. Temperature and humidity sensors are arranged inside the amplifying and compressing water-cooling module and on the water-cooling bottom plate, so that the temperature and humidity information inside the laser can be timely fed back to the outside of the shell to form a feedback system, the parameters of the water-cooling machine can be timely adjusted, and the whole water-cooling system can run more reasonably.
Drawings
FIG. 1 is a schematic view of a waterway connection according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an external structure of an enlarged compressed water cooling module according to an embodiment of the present invention;
fig. 3 is a schematic structural view of an optical fiber fixing and sealing member according to an embodiment of the present invention;
FIG. 4 is a cross-sectional view of an optical fiber fixing and sealing member according to an embodiment of the present invention;
FIG. 5 is a cross-sectional view of a window glass fixing and sealing member according to an embodiment of the present invention;
FIG. 6 is a schematic structural view of a first four-way joint assembly and a bottom heat-insulating boss thereof according to an embodiment of the present invention;
FIG. 7 is a cross-sectional view of a water-cooled bottom plate according to an embodiment of the present invention;
FIG. 8 is a cross-sectional view of an enlarged compressed water-cooled bottom plate according to an embodiment of the present invention;
description of reference numerals:
1-a water cooling machine, 2-a water cooling bottom plate, 3-a first four-way joint integration and 4-LD driving water cooling plate;
5-an amplification compression water-cooling module, 501-an amplification compression water-cooling bottom plate, 502-a first three-way joint integration, 503-a silicate crystal water-cooling plate, 504-a single crystal optical fiber water-cooling seat, 505-a diaphragm water-cooling seat, 506-a volume grating water-cooling seat, 507-a second three-way joint integration, 508-a wall plate, 5081-an optical fiber fixing sealing element, 50811-a front pressure plate, 508111-a through hole and 508112-a convex edge, 50812-rear pressure plate, 508121-rubber gasket groove, 50813-rubber gasket, 508131-optical fiber access hole, 508132-notch, 5082-window glass fixed seal, 50821-window glass, 5083-first seal ring, 5084-second seal ring, 509-upper cover, 5010-second water inlet joint component and 5011-second water outlet joint component;
6-electro-optical water cooling plate, 7-LD water cooling plate, 8-second four-way joint integration, 9-first water inlet joint component, 10-first water outlet joint component, 11-heat insulation boss, 12-first temperature and humidity sensor and 13-second temperature and humidity sensor.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and examples.
In order to improve the comprehensive performance of the ultrashort pulse laser, the dustproof water cooling system is based on the optical principle, so that the serious heating of the device is avoided, and the stable pointing of the laser beam is ensured as the primary target; with effectively dustproof, avoid in the air a large amount of suspended particulate matters to get into inside pollution optical lens and the crystal of laser instrument and be the second target to reduce the complete machine volume, improve space utilization and be the third target, designed one set of dust protected water cooling system, can carry out the water-cooling to each electronic components and all kinds of drive hardware in the ultrashort pulse laser.
Considering that the amplification and compression water cooling module 5 is used as a core module of the short pulse laser, a plurality of optical devices are arranged inside the amplification and compression water cooling module 5, and the cooling effect of the amplification and compression water cooling module 5 is a key factor for determining the cooling effect of the whole laser, that is, in order to avoid the structure of the whole module from being deformed by heating, the heat dissipation problem of a plurality of heating devices inside the amplification and compression water cooling module 5 needs to be considered. The design idea is as follows: the local water cooling of the amplification compression water cooling module 5 with larger heating degree is taken as the main part, and the whole water cooling of the rest parts is taken as the auxiliary part. The purpose of integral water cooling is to ensure that the heat inside the laser is uniformly distributed, and the purpose of local water cooling is to prevent overhigh temperature of a device which generates heat seriously. The main path is firstly connected to the water cooler 1, and then is divided into three branches through the first four-way joint assembly 3, and the three branches are respectively connected with different modules, wherein the three branches comprise an amplification compression water cooling module 5, a water cooling bottom plate 2, an LD driving water plate and the like. The three branches are connected in parallel, and each branch is respectively connected with different elements needing water cooling.
In order to realize the first objective, the dustproof water cooling system based on the ultrashort pulse laser comprises a water cooler 1, a water cooling bottom plate 2, a first four-way joint assembly 3, an LD driving water cooling plate 4, an amplification compression water cooling module 5, an electro-optic water cooling plate 6, an LD water cooling plate 7, a second four-way joint assembly 8 and a shell, wherein the first four-way joint assembly 3, the LD driving water cooling plate 4, the amplification compression water cooling module 5, the electro-optic water cooling plate 6, the LD water cooling plate 7 and the second four-way joint assembly 8; a first water inlet joint component 9 is arranged on one side, close to the first four-way joint assembly 3, of the surface of the water-cooling bottom plate 2, a first water outlet joint component 10 is arranged on one side, close to the second four-way joint assembly 8, of the surface of the water-cooling bottom plate 2, the first water inlet joint component 9 and the first water outlet joint component 10 are located on the same diagonal line of the water-cooling bottom plate 2, and the first water inlet joint component 9 and the first water outlet joint component 10 are communicated through a flow channel arranged inside the water-cooling bottom plate 2; the amplification and compression water-cooling module 5 comprises an amplification and compression water-cooling bottom plate 501, a first three-way joint assembly 502, a silicate crystal water-cooling plate 503, a single crystal optical fiber water-cooling seat 504, a diaphragm water-cooling seat 505, a volume grating water-cooling seat 506, a second three-way joint assembly 507, a circle of wall plate 508 arranged along the edge of the amplification and compression water-cooling bottom plate 501, and an upper cover 509 arranged at the top of the wall plate 508; the amplifying and compressing water-cooling bottom plate 501, the wall plate 508 and the upper cover 509 jointly form a closed space, and by adopting the structure, the air flow speed is low, the efficiency of heat conduction of devices through natural convection is reduced, the heat conduction is reduced to the greatest extent, and the heat-generating devices are prevented from influencing the working performance of other devices. A second water inlet joint component 5010 is arranged on the side surface of the amplification and compression water-cooling bottom plate 501 close to the LD driving water-cooling plate 4, and as shown in FIG. 2, a second water outlet joint component 5011 is arranged close to the first water outlet joint component 10; two optical fiber entrance holes and four light-emitting holes are formed in the wall plate 508, and the light-emitting holes are used for detecting the performance of internal light beams and obtaining required light beams.
In order to achieve the second objective, an optical fiber fixing and sealing piece 5081 is arranged at each optical fiber inlet hole, a window glass fixing and sealing piece 5082 is arranged at each optical fiber outlet hole, and window glass 50821 is arranged in the window glass fixing and sealing piece 5082.
Fig. 1 is a schematic diagram of water path connection, and as shown in the diagram, water in the water cooler 1 flows into a first four-way joint assembly 3 and is divided into three paths; the first path flows into a second four-way joint integration 8 after sequentially flowing through an LD driving water cooling plate 4, an amplifying and compressing water cooling bottom plate 501, an electro-optic water cooling plate 6 and an LD water cooling plate 7; the second path flows through a first water inlet joint component 9 and a flow channel in the water-cooling bottom plate 2 and then flows into a second four-way joint assembly 8 through a first water outlet joint component 10; the third path passes through the wallboard 508 through the second water inlet joint component 5010 and flows into the first three-way joint assembly 502, the first three-way joint assembly 502 is divided into two paths, one path sequentially flows through the silicate crystal water cooling plate 503 and the single crystal optical fiber water cooling seat 504 and then flows into the second three-way joint assembly 507, the other path sequentially flows through the diaphragm water cooling seat 505 and the volume grating water cooling seat 506 and then flows into the second three-way joint assembly 507, and water at the second three-way joint assembly 507 passes through the wallboard 508 through the second water outlet joint component 5011 and flows into the second four-way joint assembly 8; and the water at the second four-way joint assembly 8 finally flows back to the water cooler 1 through a filter.
As shown in fig. 3 and 4, the fiber fixing seal 5081 includes a front pressure plate 50811, a rear pressure plate 50812, and a rubber gasket 50813; the rear pressing plate 50812 is a hollow cylinder with a flange at one end, and a rubber gasket groove 508121 is formed in the center of one end of the flange of the rear pressing plate 50812; the rubber gasket 50813 is arranged in the rubber gasket groove 508121, the center of the rubber gasket 50813 is provided with an optical fiber access hole 508131, and the rubber gasket 50813 is provided with a notch 508132 for leading in an optical fiber; a through hole 508111 is formed in the center of the front pressure plate 50811, the diameter of the through hole 508111 is smaller than the outer diameter of the rubber gasket 50813, and a convex edge 508112 for pressing the rubber gasket 50813 is arranged at the orifice of the through hole 508111; the front pressure plate 50811 is fixedly connected with the flange of the rear pressure plate 50812; the rear pressure plate 50812 is fixedly connected to the wall plate 508; the fixed connection is bolt connection or glue connection; the temperature resistance of the rubber gasket 50813 is above 100 ℃, and the material of the rubber gasket 50813 or the sealing ring with the temperature resistance above 100 ℃ can be fluorine rubber or silicon rubber. As shown in fig. 5, the window glass fixing seal 5082 is a hollow cylinder with a flange at one end, and the window glass 50821 is embedded in the hollow cylinder and close to the flange end. The flange of back clamp plate 50812 with department is equipped with first sealing washer 5083 between the wallboard 508, the flange of window glass fixed seal 5082 with be equipped with second sealing washer 5084 between the wallboard 508, upper cover 509 with be equipped with the third sealing washer between the wallboard 508, first sealing washer 5083, second sealing washer 5084 and the tolerance temperature of third sealing washer all are more than 100 ℃.
The water-cooling bottom plate 2 is respectively arranged among the first four-way joint integration 3, the LD driving water-cooling plate 4, the amplification compression water-cooling module 5, the electro-optic water-cooling plate 6, the LD water-cooling plate 7 and the second four-way joint integration 8, the amplification compression water-cooling bottom plate 501 is respectively arranged among the first three-way joint integration 502, the silicate crystal water-cooling plate 503, the single crystal optical fiber water-cooling seat 504, the diaphragm water-cooling seat 505, the volume grating water-cooling seat 506 and the second three-way joint integration 507, and heat insulation bosses 11 are respectively arranged between the water-cooling bottom plate 2 and the amplification compression water-cooling bottom plate 501. Fig. 6 is a schematic structural view of the first four-way joint assembly 3 and the bottom heat insulation boss 11 thereof. Since in thermal conduction, the larger the contact area between two objects, the more heat is conducted per unit time. Therefore, in order to reduce the conduction of heat to the bottom plate and avoid the large-area contact of parts and the bottom plate, the water-cooling fixing seat of each heating device is also provided with a heat insulation boss 11, and the small boss has the advantages of reducing the processing cost and ensuring the processing precision.
Fig. 7 and 8 are sectional views of the water-cooled bottom plate 2 and the enlarged compressed water-cooled bottom plate 501, respectively, and it can be seen from the drawings that the flow channels in the water-cooled bottom plate 2 and the enlarged compressed water-cooled bottom plate 501 are both S-shaped, the diameter of each flow channel is 6mm-12mm, the diameter is determined by the processing technology and the heat dissipation capacity, the depth-diameter ratio is large, the processing is difficult, and therefore the mode of processing two ends is adopted. Taking the water-cooled bottom plate 2 as an example, N parallel flow channels are arranged in the water-cooled bottom plate 2, two ends of each flow channel are communicated with the outside of the plate, the flow channel close to one side of the first four-way joint assembly 3 is a first flow channel, the flow channel close to one side of the second four-way joint assembly 8 is an nth flow channel, one open end of the first flow channel is sealed by a circular blind cover, the first water inlet joint assembly 9 is close to the open end and communicated with the first flow channel, the other open end of the first flow channel is communicated with one open end of the adjacent side of the second flow channel by a U-shaped groove and sealed by a U-shaped blind cover, …, the other open end of the N-1 flow channel is communicated with one open end of the adjacent side of the nth flow channel by a U-shaped groove and sealed by a U-shaped blind cover, the other open end of the nth flow channel is sealed by a circular blind cover, the first water outlet joint assembly 10, the N flow passages form S-shaped flow passages which are communicated with the first water inlet connector assembly 9 and the second water inlet connector assembly 5010, and the distance between every two adjacent flow passages is 115 +/-5 mm. A fourth sealing ring is arranged between the U-shaped blind cover and the U-shaped groove, a fifth sealing ring is arranged between the circular blind cover and the flow channel, and the tolerance temperature of the fourth sealing ring and the tolerance temperature of the fifth sealing ring are both above 100 ℃.
To achieve the third object, the length × width × height of the water-cooled floor panel 2 is (1010 ± 100) mm × (570 ± 50) mm × (35 ± 5) mm.
The surface of the water-cooling bottom plate 2 is provided with a first temperature and humidity sensor 12, the wall plate 508 is provided with a second temperature and humidity sensor 13, the sensitive end of the second temperature and humidity sensor 13 is positioned in the closed space of the amplification and compression water-cooling module 5, the output ends of the first temperature and humidity sensor 12 and the second temperature and humidity sensor 13 are connected and arranged at the input end of a display screen outside the shell, and the sensitive data of the first temperature and humidity sensor 12 and the second temperature and humidity sensor 13 are displayed at the display screen. Temperature and humidity sensors are arranged inside the amplification and compression water cooling module 5 and on the water cooling bottom plate 2, so that the temperature and humidity information inside the laser can be timely fed back to the outside to form a feedback system, and the parameters of the water cooling machine 1 can be timely adjusted through the sensors, so that the whole water cooling system can run more reasonably.
The spatial position distribution of each module in the water cooling system ensures the optical requirement of the ultrashort pulse laser, and the space utilization is reasonable. The test shows that: the water cooling system meets the temperature requirements that most optical devices can normally work at the normal working temperature of about 23 ℃ and the temperature fluctuation is within +/-5 ℃.
Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same, and it is obvious for a person skilled in the art to modify the specific technical solutions described in the foregoing embodiments or to equally replace some technical features of the embodiments, and these modifications or replacements do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions protected by the present invention.

Claims (10)

1. The utility model provides a dust protected water cooling system based on ultrashort pulse laser ware which characterized in that: the water cooling device comprises a water cooling machine (1), a water cooling bottom plate (2), a first four-way joint assembly (3), an LD driving water cooling plate (4), an amplification compression water cooling module (5), an electro-optic water cooling plate (6), an LD water cooling plate (7) and a second four-way joint assembly (8) which are arranged on the surface of the water cooling bottom plate (2), and a shell which is arranged above the water cooling bottom plate (2) and forms a closed space with the water cooling bottom plate (2);
a first water inlet joint component (9) is arranged on one side, close to the first four-way joint assembly (3), of the surface of the water-cooling bottom plate (2), a first water outlet joint component (10) is arranged on one side, close to the second four-way joint assembly (8), of the surface of the water-cooling bottom plate (2), the first water inlet joint component (9) and the first water outlet joint component (10) are located on the same diagonal line of the water-cooling bottom plate (2), and the first water inlet joint component (9) is communicated with the first water outlet joint component (10) through a flow channel arranged inside the water-cooling bottom plate (2);
the amplification and compression water-cooling module (5) comprises an amplification and compression water-cooling bottom plate (501), a first three-way joint integration (502), a silicate crystal water-cooling plate (503), a single crystal optical fiber water-cooling seat (504), a diaphragm water-cooling seat (505), a volume grating water-cooling seat (506) and a second three-way joint integration (507) which are arranged on the surface of the amplification and compression water-cooling bottom plate (501), a circle of wall plate (508) arranged along the edge of the amplification and compression water-cooling bottom plate (501), and an upper cover (509) arranged on the top of the wall plate (508); wherein the amplifying and compressing water-cooling bottom plate (501), the wall plate (508) and the upper cover (509) form a closed space together;
a second water inlet joint component (5010) is arranged on the side face of the amplification and compression water-cooling bottom plate (501) close to the LD driving water-cooling plate (4), and a second water outlet joint component (5011) is arranged close to the first water outlet joint component (10);
an optical fiber wire inlet hole and an optical fiber light outlet hole are formed in the wall plate (508), an optical fiber fixing sealing piece (5081) is arranged at the optical fiber wire inlet hole, a window glass fixing sealing piece (5082) is arranged at the optical fiber light outlet hole, and window glass (50821) is arranged in the window glass fixing sealing piece (5082);
the water in the water cooling machine (1) flows into the first four-way joint assembly (3) and then is divided into three paths;
the first path flows through the LD driving water cooling plate (4), the amplification compression water cooling bottom plate (501), the electro-optic water cooling plate (6) and the LD water cooling plate (7) in sequence and then flows into a second four-way joint assembly (8);
the second path flows through a first water inlet joint component (9) and a flow channel in the water-cooling bottom plate (2) and then flows into a second four-way joint assembly (8) through a first water outlet joint component (10);
the third path passes through the wall plate (508) through a second water inlet joint assembly (5010) and flows into a first three-way joint assembly (502), and the first three-way joint assembly (502) is divided into two paths; one path of the water flows into a second three-way joint assembly (507) after sequentially flowing through a silicate crystal water cooling plate (503) and a single crystal optical fiber water cooling seat (504); the other path of water flows through a diaphragm water cooling seat (505) and a volume grating water cooling seat (506) in sequence and then flows into a second three-way joint assembly (507), and water at the second three-way joint assembly (507) passes through the wall plate (508) through a second water outlet joint component (5011) and flows into a second four-way joint assembly (8);
and finally, water at the second four-way joint integration (8) flows back to the water cooling machine (1).
2. The ultra-short pulse laser-based dust-proof water cooling system of claim 1, wherein: the fiber securing seal (5081) includes a front pressure plate (50811), a rear pressure plate (50812), and a rubber gasket (50813);
the rear pressure plate (50812) is a hollow cylinder with a flange at one end, and a rubber gasket groove (508121) is formed in the center of one end of the flange of the rear pressure plate (50812);
the rubber gasket (50813) is arranged in the rubber gasket groove (508121), the center of the rubber gasket (50813) is provided with an optical fiber access hole (508131), and the rubber gasket (50813) is provided with a notch (508132) for introducing an optical fiber;
a through hole (508111) is formed in the center of the front pressure plate (50811), the diameter of the through hole (508111) is smaller than the outer diameter of the rubber gasket (50813), and a convex edge (508112) used for pressing the rubber gasket (50813) is arranged at the hole opening of the through hole (508111);
the front pressure plate (50811) is fixedly connected with the flange of the rear pressure plate (50812);
the rear pressure plate (50812) is fixedly connected to the wall plate (508);
the rubber gasket (50813) has a temperature resistance of above 100 ℃.
3. The ultra-short pulse laser-based dust-proof water cooling system of claim 2, wherein: the window glass fixing sealing piece (5082) is a hollow cylinder with a flange at one end, and the window glass (50821) is embedded in the hollow cylinder and close to the flange end.
4. The ultra-short pulse laser-based dust-proof water cooling system of claim 3, wherein: the flange of back clamp plate (50812) with department is equipped with first sealing washer (5083) between wallboard (508), the flange of window glass fixed seal spare (5082) with be equipped with second sealing washer (5084) between wallboard (508), upper cover (509) with be equipped with the third sealing washer between wallboard (508), first sealing washer (5083), second sealing washer (5084) and the tolerance temperature of third sealing washer all are more than 100 ℃.
5. The ultra-short pulse laser-based dust-proof water cooling system according to any one of claims 1 to 4, wherein: the water-cooling bottom plate (2) is respectively integrated with a first four-way joint (3), an LD driving water-cooling plate (4), an amplification compression water-cooling module (5), an electro-optic water-cooling plate (6), an LD water-cooling plate (7) and a second four-way joint (8), the amplification compression water-cooling bottom plate (501) is respectively integrated with a first three-way joint (502), a silicate crystal water-cooling plate (503), a single crystal optical fiber water-cooling seat (504), a diaphragm water-cooling seat (505), a volume grating water-cooling seat (506) and a second three-way joint (507), and a heat insulation boss (11) is arranged between the water-cooling bottom plate (2) and the amplification compression water-cooling bottom plate (501).
6. The ultra-short pulse laser-based dust-proof water cooling system of claim 5, wherein: and the flow channels in the water-cooling bottom plate (2) and the amplification and compression water-cooling bottom plate (501) are S-shaped, and the diameters of the flow channels are 6-12 mm.
7. The ultra-short pulse laser-based dust-proof water cooling system of claim 6, wherein: the length, the width and the height of the water-cooled bottom plate (2) are (1010 +/-100) mmX (570 +/-50) mmX (35 +/-5) mm.
8. The ultra-short pulse laser-based dust-proof water cooling system of claim 7, wherein: the surface of the water-cooling bottom plate (2) is provided with a first temperature and humidity sensor (12), the wallboard (508) is provided with a second temperature and humidity sensor (13), the sensitive end of the second temperature and humidity sensor (13) is positioned in the closed space of the amplification and compression water-cooling module (5), and the output ends of the first temperature and humidity sensor (12) and the second temperature and humidity sensor (13) are connected with the input end of a display screen arranged outside the shell.
9. The ultra-short pulse laser-based dust-proof water cooling system of claim 2, wherein: the fixed connection is bolted connection or glue connection.
10. The ultra-short pulse laser-based dust-proof water cooling system of claim 9, wherein: and a filter is arranged between the water cooler (1) and the second four-way joint assembly (8).
CN202022364008.XU 2020-10-21 2020-10-21 Dustproof water cooling system based on ultrashort pulse laser Withdrawn - After Issue CN213520678U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112310789A (en) * 2020-10-21 2021-02-02 中国科学院西安光学精密机械研究所 Dustproof water cooling system based on ultrashort pulse laser

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112310789A (en) * 2020-10-21 2021-02-02 中国科学院西安光学精密机械研究所 Dustproof water cooling system based on ultrashort pulse laser
CN112310789B (en) * 2020-10-21 2024-05-31 中国科学院西安光学精密机械研究所 Dustproof water cooling system based on ultrashort pulse laser

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