CN213517879U - Novel scanning type LED exposure machine equipment - Google Patents
Novel scanning type LED exposure machine equipment Download PDFInfo
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- CN213517879U CN213517879U CN202022777137.1U CN202022777137U CN213517879U CN 213517879 U CN213517879 U CN 213517879U CN 202022777137 U CN202022777137 U CN 202022777137U CN 213517879 U CN213517879 U CN 213517879U
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- connecting seat
- frame
- fixedly connected
- exposure machine
- groove
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Abstract
The utility model belongs to the technical field of the exposure machine, a novel scanning formula LED exposure machine equipment is related to, wherein, comprises a frame, the spout has been seted up to the inside of frame, the inside sliding connection of spout has the slide rail, the fixed surface of slide rail is connected with the connecting seat, the cavity has been seted up to the inside of connecting seat, the inside sliding connection of cavity has the baffle, the last fixed surface of baffle is connected with the transfer line, the one end fixedly connected with handle of transfer line, the handle overlap joint is at the surface of connecting seat, the spring has been cup jointed on the surface of transfer line, the lower fixed surface of baffle is connected with the card post. The novel scanning LED exposure machine equipment has the advantages that the installation of the frame and the connecting seat can be completed only by simple pushing through the arrangement of the sliding groove, the sliding rail, the clamping column, the spring, the baffle and the handle, the purpose of facilitating disassembly and assembly is achieved, replacement and maintenance of the frame are facilitated, and the working efficiency is improved.
Description
Technical Field
The utility model belongs to the technical field of the exposure machine, concretely relates to novel scanning formula LED exposure machine equipment.
Background
The exposure machine is a complex semiconductor processing device integrating electron optics, electricity, machinery, vacuum and computer technologies, is widely applied to the semiconductor integrated circuit manufacturing industry after 70 years, utilizes focused electron beams to expose organic polymers under the control of a computer, and is commonly used in the fields of semiconductor manufacturing, photoelectric electronics, flat panels, radio frequency microwaves, diffraction optics, micro-electro-mechanical systems, concave-convex or flip chip devices, circuit boards and other required fine printing.
Lamps and lanterns all fix through fixing device such as bolt in traditional exposure machine, need longer dismantlement and installation in maintenance or change process, this has greatly increased manufacturing cost, has reduced production efficiency.
SUMMERY OF THE UTILITY MODEL
To solve the problems set forth in the background art described above. The utility model provides a novel scanning formula LED exposure machine equipment, it has solved the inconvenient technical problem of dismouting.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a novel scanning formula LED exposure machine equipment, includes the frame, the spout has been seted up to the inside of frame, the inside sliding connection of spout has the slide rail, the fixed surface of slide rail is connected with the connecting seat, the cavity has been seted up to the inside of connecting seat, the inside sliding connection of cavity has the baffle, the last fixed surface of baffle is connected with the transfer line, the one end fixedly connected with handle of transfer line, the handle overlap joint is at the surface of connecting seat, the spring has been cup jointed on the surface of transfer line, the lower fixed surface of baffle is connected with the card post, the fixed surface of card post is connected with pressure sensor, card post joint is in the inside of frame, the inside fixedly connected with electric putter of card post, the inside fixedly connected with battery and the PLC controller of connecting seat.
As a further aspect of the present invention: the spring is arranged in the cavity, one end of the spring is fixedly connected to the surface of the baffle, and the other end of the spring is fixedly connected to the inner surface of the connecting seat.
As a further aspect of the present invention: the surface of the frame is provided with a groove, an exposure lamp body is fixedly connected inside the groove, and the exposure lamp body is a UV-LED exposure lamp.
As a further aspect of the present invention: the front side face of the connecting seat is fixedly connected with a switch, and the switch is electrically connected with the storage battery, the PLC, the electric push rod and the pressure sensor through conducting wires.
As a further aspect of the present invention: the surface of the connecting seat is provided with a limiting groove, and the handle is arranged inside the limiting groove.
As a further aspect of the present invention: the inside of frame has seted up the draw-in groove, the frame passes through draw-in groove and card post looks joint, electric putter's one end joint is in the inside of draw-in groove.
Compared with the prior art, the beneficial effects of the utility model are that:
1. this neotype scanning formula LED exposure machine equipment through setting up spout, slide rail, card post, spring, baffle and handle, in actual application, through the cooperation between the aforesaid, only needs simple promotion can accomplish the installation of frame and connecting seat, has reached the purpose that makes things convenient for the dismouting to make things convenient for the change and the maintenance of frame, improve work efficiency.
2. This neotype scanning formula LED exposure machine equipment through setting up PLC controller, electric putter, battery, pressure sensor and draw-in groove, in actual application, through the cooperation between the aforesaid, after card post and draw-in groove joint are accomplished, the one end of electronic promotion carries out horizontal joint with the draw-in groove to ensure the fixed effect of connecting seat and frame, guarantee the safe in utilization of this device, improve the security of this device.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic structural view of a front view section of the present invention;
FIG. 2 is a schematic structural view of a middle frame of the present invention;
FIG. 3 is a schematic front view of the connecting seat of the present invention;
in the figure: 1. a frame; 2. a card slot; 3. an electric push rod; 4. clamping the column; 5. a pressure sensor; 6. a groove; 7. an exposure lamp body; 8. a storage battery; 9. a PLC controller; 10. a baffle plate; 11. a spring; 12. a cavity; 13. a handle; 14. a transmission rod; 15. a limiting groove; 16. a connecting seat; 17. a chute; 18. a slide rail; 19. and (4) switching.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Examples
Referring to fig. 1-3, the present invention provides the following technical solutions: the utility model provides a novel scanning formula LED exposure machine equipment, which comprises a frame 1, spout 17 has been seted up to the inside of frame 1, spout 17's inside sliding connection has slide rail 18, slide rail 18's fixed surface is connected with connecting seat 16, cavity 12 has been seted up to the inside of connecting seat 16, the inside sliding connection of cavity 12 has baffle 10, the last fixed surface of baffle 10 is connected with transfer line 14, the one end fixedly connected with handle 13 of transfer line 14, handle 13 overlap joint is at the surface of connecting seat 16, spring 11 has been cup jointed on transfer line 14's surface, spring 11 sets up the inside at cavity 12, spring 11's one end fixed connection is on the surface of baffle 10, spring 11's other end fixed connection is at the internal surface of connecting seat 16, the lower fixed surface of baffle.
Through setting up spout 17, slide rail 18, card post 4, spring 11, baffle 10 and handle 13, in actual application, through the cooperation between the aforesaid, only need simple promotion can accomplish the installation of frame 1 and connecting seat 16, reached the purpose that makes things convenient for the dismouting to make things convenient for the change and the maintenance of frame 1, improve work efficiency.
Through setting up PLC controller 9, electric putter 3, battery 8, pressure sensor 5 and draw-in groove 2, in the application of reality, through the cooperation between the aforesaid, accomplish the back at card post 4 and 2 joints of draw-in groove, the one end of electronic promotion carries out horizontal joint with draw-in groove 2 to ensure the fixed effect of connecting seat 16 and frame 1, guarantee the safe in utilization of this device, improve the security of this device.
Specifically, a limiting groove 15 is formed on the surface of the connecting seat 16, and the handle 13 is arranged inside the limiting groove 15.
Specifically, draw-in groove 2 has been seted up to frame 1's inside, and frame 1 passes through draw-in groove 2 and blocks 4 looks joints of post, and electric putter 3's one end joint is in the inside of draw-in groove 2.
The utility model discloses a theory of operation does:
s1, when the device is installed, firstly, the handle 13 is lifted upwards, then the frame 1 is taken, the sliding groove 17 formed in the frame 1 is in sliding connection with the sliding rail 18 on the surface of the frame 1, then the pushing is continuously carried out until the position of the clamping column 4 corresponds to the position of the clamping groove 2, then the handle 13 is loosened, the clamping column 4 is clamped in the clamping groove 2 under the reaction force of the baffle 10 and the spring 11, then the pressure sensor 5 contacts the surface in the clamping groove 2, the PLC 9 controls the electric push rod 3 to work, one end of the electric push rod 3 is transversely clamped with the clamping groove 2, and therefore the fixing effect of the frame 1 and the connecting seat 16 is guaranteed;
s2, when the device is required to be disassembled, the electric push rod 3 is controlled to retract only through the switch 19, then the handle 13 is lifted upwards, the baffle plate 10 is driven to extrude the spring 11, the clamping column 4 can be driven to be separated from the clamping groove 2, then the frame 1 is pushed to complete the disassembly of the device, so that the time required for disassembly and replacement of the device is shortened, and the working efficiency is improved.
While embodiments of the present invention have been shown and described, it is to be understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that modifications, alterations, substitutions and variations may be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.
Claims (6)
1. A novel scanning LED exposure machine equipment, includes frame (1), its characterized in that: the improved structure of the automobile seat is characterized in that a sliding groove (17) is formed in the frame (1), a sliding rail (18) is connected to the sliding groove (17) in a sliding manner, a connecting seat (16) is fixedly connected to the surface of the sliding rail (18), a cavity (12) is formed in the connecting seat (16), a baffle (10) is connected to the cavity (12) in a sliding manner, a transmission rod (14) is fixedly connected to the upper surface of the baffle (10), a handle (13) is fixedly connected to one end of the transmission rod (14), the handle (13) is lapped on the outer surface of the connecting seat (16), a spring (11) is sleeved on the surface of the transmission rod (14), a clamping column (4) is fixedly connected to the lower surface of the baffle (10), a pressure sensor (5) is fixedly connected to the surface of the clamping column (4), the clamping column (4) is clamped in the frame (1), and an electric push rod (3), the interior of the connecting seat (16) is fixedly connected with a storage battery (8) and a PLC (programmable logic controller) (9).
2. A novel scanning LED exposure machine apparatus according to claim 1, characterized in that: the spring (11) is arranged in the cavity (12), one end of the spring (11) is fixedly connected to the surface of the baffle plate (10), and the other end of the spring (11) is fixedly connected to the inner surface of the connecting seat (16).
3. A novel scanning LED exposure machine apparatus according to claim 1, characterized in that: the surface of the frame (1) is provided with a groove (6), an exposure lamp body (7) is fixedly connected inside the groove (6), and the exposure lamp body (7) is a UV-LED exposure lamp.
4. A novel scanning LED exposure machine apparatus according to claim 1, characterized in that: the front side face of the connecting seat (16) is fixedly connected with a switch (19), and the switch (19) is electrically connected with the storage battery (8), the PLC (9), the electric push rod (3) and the pressure sensor (5) through conducting wires.
5. A novel scanning LED exposure machine apparatus according to claim 1, characterized in that: the surface of the connecting seat (16) is provided with a limiting groove (15), and the handle (13) is arranged in the limiting groove (15).
6. A novel scanning LED exposure machine apparatus according to claim 1, characterized in that: draw-in groove (2) have been seted up to the inside of frame (1), frame (1) is through draw-in groove (2) and card post (4) looks joint, the one end joint of electric putter (3) is in the inside of draw-in groove (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022777137.1U CN213517879U (en) | 2020-11-26 | 2020-11-26 | Novel scanning type LED exposure machine equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022777137.1U CN213517879U (en) | 2020-11-26 | 2020-11-26 | Novel scanning type LED exposure machine equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213517879U true CN213517879U (en) | 2021-06-22 |
Family
ID=76426052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022777137.1U Active CN213517879U (en) | 2020-11-26 | 2020-11-26 | Novel scanning type LED exposure machine equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213517879U (en) |
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2020
- 2020-11-26 CN CN202022777137.1U patent/CN213517879U/en active Active
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