CN213504737U - Rotary shielding mechanism - Google Patents
Rotary shielding mechanism Download PDFInfo
- Publication number
- CN213504737U CN213504737U CN202021910046.4U CN202021910046U CN213504737U CN 213504737 U CN213504737 U CN 213504737U CN 202021910046 U CN202021910046 U CN 202021910046U CN 213504737 U CN213504737 U CN 213504737U
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- Prior art keywords
- shield cover
- shielding cover
- sprocket
- shielding
- mechanism according
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- 230000007246 mechanism Effects 0.000 title claims abstract description 21
- 230000005540 biological transmission Effects 0.000 claims abstract description 18
- 238000012216 screening Methods 0.000 claims 6
- 244000309464 bull Species 0.000 abstract description 4
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 description 15
- 239000011248 coating agent Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model discloses a rotatory shielding mechanism, which comprises a mounting bracket, be provided with the base in the mounting bracket, the base top is provided with the bracing piece, the bracing piece top is provided with the shield cover, the side opening has been seted up to shield cover one side, side opening inside callipers is equipped with the cardboard, the inside center department of shield cover is provided with the cylinder target, the shield cover top is connected with linking bridge through the connecting piece, the linking bridge bottom is provided with electric telescopic handle, linking bridge top transmission is connected with the bull stick, the bull stick top is provided with first sprocket, first sprocket is connected with the second sprocket through chain drive, the second sprocket is through the transmission shaft coaxial coupling who is connected with the mounting bracket transmission motor. The utility model has the advantages of being scientific and reasonable in structural design, the stable performance, the practicality is strong.
Description
Technical Field
The utility model relates to a rotatory shielding equipment technical field specifically is a rotatory shielding mechanism.
Background
In modern science and technology and industrial production, vacuum coating technology is in a very important position, and particularly vacuum sputtering coating and vacuum ion coating are physical vapor deposition coating methods which are widely applied. For vacuum coating machines provided with side wall heaters and using targets of different composition, there is generally the problem of the need for shielding, namely: when the coating target with one component works, the coating target surfaces of other coating targets which do not work and have different components and the radiation surface of the heater are polluted by the components of the working target film and are coated, so that the radiation capability of the heater is reduced and the components on the surfaces of the other targets are changed, and the subsequent coating operation is difficult. In particular, in recent years, the requirements of the plating process of composite films and gradient films are increasing, the control requirements on the components of film materials are stricter, and the shielding problem of a plating target is more prominent. In fact, just as all the spare inner wall surfaces of the coating vacuum chamber are additionally provided with the shielding plates, the shielding plates are additionally arranged in front of the heater and the coating target of the multi-target vacuum coating machine, so that the pollution among different material targets is prevented, and the quality stability of a composite coating product with multiple materials coated on the surface is ensured. The prior art coating target shielding mechanism has large occupied space, inconvenient adjustment and low operability, and the reliability is reduced after long-time use, thereby seriously influencing the coating quality and efficiency of a vacuum coating machine. To this end, we propose a rotary shield mechanism.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a rotatory shielding mechanism to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a rotatory shielding mechanism, includes the mounting bracket, be provided with the base in the mounting bracket, the base top is provided with the bracing piece, the bracing piece top is provided with the shield cover, the side opening has been seted up to shield cover one side, side opening inside callipers is equipped with the cardboard, the inside center department of shield cover is provided with the cylinder target, the shield cover top is connected with linking bridge through the connecting piece, the linking bridge bottom is provided with electric telescopic handle, linking bridge top transmission is connected with the bull stick, the bull stick top is provided with first sprocket, first sprocket is connected with the second sprocket through chain drive, the second sprocket is through the transmission shaft coaxial coupling who is connected with the mounting bracket transmission motor.
Preferably, a bearing is arranged inside the bottom wall of the shielding cover, and the bottom end of the cylindrical target penetrates through the bearing to be connected with the supporting rod.
Preferably, the side wall of the clamping plate is movably connected with the inner wall of the shielding case.
Preferably, the bottom of the electric telescopic rod is fixedly connected with the clamping plate.
Preferably, the rotating rod is movably connected with the mounting frame through a bearing.
Preferably, the motor is fixedly connected with the mounting frame through a fixing piece.
Preferably, the side of the shielding case is further provided with a fixing seat.
Compared with the prior art, the beneficial effects of the utility model are that: this kind of rotary shielding mechanism, structural design is simple reasonable, has stronger practicality, is used for carrying out coating film machining through seting up rectangle side opening in one side of shield cover, through the drive mechanism that first sprocket, chain and second sprocket are constituteed, can drive the shield cover fast and rotate, and the transmission process is steady reliable, can the angle of quick adjustment shield cover, improves the processing effect, and the cardboard can accomplish the shielding to the cylinder target or remove the shielding process through the electric telescopic handle automatic rising at top, the utility model discloses compact structure, reasonable in design, the novelty is good.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic view of the structure of the shielding case of the present invention.
In the figure: the device comprises a mounting frame 1, a base 11, a supporting rod 12, a shielding cover 13, a side opening 14, a clamping plate 15, a cylindrical target 16, a connecting support 17, an electric telescopic rod 18, a rotating rod 19, a first chain wheel 2, a chain 21, a second chain wheel 22, a motor 23 and a fixed seat 3.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution: the utility model provides a rotatory shielding mechanism, including mounting bracket 1, be provided with base 11 in the mounting bracket 1, 11 tops of base are provided with bracing piece 12, bracing piece 12 tops are provided with shield cover 13, side opening 14 has been seted up to shield cover 13 one side, side opening 14 inside callipers are equipped with cardboard 15, cardboard 15's lateral wall and 13 inner wall swing joint of shield cover, shield cover 13 inside center department is provided with cylinder target 16, shield cover 13 diapire inside is provided with the bearing, the bearing is passed to the bottom of cylinder target 16 and is connected with bracing piece 12, shield cover 13 top is connected with linking bridge 17 through the connecting piece, linking bridge 17 bottom is provided with electric telescopic handle 18, electric telescopic handle 18's bottom and cardboard 15 fixed connection, cardboard 15 can be through 18 automatic rising of electric telescopic handle at top, accomplish the shielding to cylinder target 16 or remove.
The top of the connecting support 17 is in transmission connection with a rotating rod 19, the rotating rod 19 is movably connected with the mounting rack 1 through a bearing, a first chain wheel 2 is arranged at the top of the rotating rod 19, the first chain wheel 2 is in transmission connection with a second chain wheel 22 through a chain 21, the second chain wheel 22 is in coaxial connection with a motor 23 through a transmission shaft in transmission connection with the mounting rack 1, the motor 23 is fixedly connected with the mounting rack 1 through a fixing piece, a control switch is further arranged on the mounting rack 1 and used for controlling the electric telescopic rod 18 and the motor 23, the motor 23 is connected with a power supply and a switch through a lead, a rectangular side opening 14 is formed in one side of the shielding cover 13 and used for coating processing, the shielding cover 13 can be rapidly driven to rotate through a transmission mechanism consisting of the first chain wheel 2, the chain 21 and the second chain wheel 22, the transmission process is stable, the processing effect is improved, the side face of the shielding case 13 is also provided with a fixed seat 3, and the fixed seat 3 is used for supporting and placing a workpiece to be coated.
The working principle is as follows:
in the film coating process of the rotary shielding mechanism, all targets are started according to process requirements, some targets work and some targets do not work, in order to prevent mutual pollution between the cylindrical targets and influence the processing quality in the coating process, each cylindrical target 16 is provided with a shielding mechanism, when the cylindrical target 16 does not work, in order to prevent surface pollution caused by sputtering of other targets, the electric telescopic rod 18 is controlled to stretch through the switch, the clamping plate 15 downwards blocks the side opening 14, at the moment, the periphery of the cylindrical target 16 is shielded by the shielding cover 13, when the cylindrical target 16 needs to be coated, the electric telescopic rod 18 drives the clamping plate 15 to move upwards, the motor 23 is driven by a switch, the motor 23 drives the shielding case 13 to rotate through a chain wheel and chain transmission structure, the side opening 14 is adjusted to a proper angle, and the cylindrical target 16 sputters through the side opening 14 to perform film coating operation on a workpiece.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. A rotary shielding mechanism comprises a mounting frame (1), and is characterized in that: a base (11) is arranged in the mounting rack (1), a support rod (12) is arranged at the top of the base (11), a shielding cover (13) is arranged at the top of the supporting rod (12), a side opening (14) is arranged at one side of the shielding cover (13), a clamping plate (15) is clamped in the side opening (14), a cylindrical target (16) is arranged at the center of the interior of the shielding cover (13), the top of the shielding cover (13) is connected with a connecting bracket (17) through a connecting piece, an electric telescopic rod (18) is arranged at the bottom of the connecting bracket (17), the top of the connecting bracket (17) is connected with a rotating rod (19) in a transmission way, a first chain wheel (2) is arranged at the top of the rotating rod (19), the first chain wheel (2) is connected with a second chain wheel (22) through a chain (21) in a transmission way, the second chain wheel (22) is coaxially connected with a motor (23) through a transmission shaft in transmission connection with the mounting frame (1).
2. A rotary screening mechanism according to claim 1, wherein: the bottom wall of the shielding cover (13) is internally provided with a bearing, and the bottom end of the cylindrical target (16) penetrates through the bearing to be connected with the supporting rod (12).
3. A rotary screening mechanism according to claim 1, wherein: the side wall of the clamping plate (15) is movably connected with the inner wall of the shielding cover (13).
4. A rotary screening mechanism according to claim 1, wherein: the bottom of the electric telescopic rod (18) is fixedly connected with the clamping plate (15).
5. A rotary screening mechanism according to claim 1, wherein: the rotating rod (19) is movably connected with the mounting frame (1) through a bearing.
6. A rotary screening mechanism according to claim 1, wherein: the motor (23) is fixedly connected with the mounting frame (1) through a fixing piece.
7. A rotary screening mechanism according to claim 1, wherein: the side of the shielding cover (13) is also provided with a fixed seat (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021910046.4U CN213504737U (en) | 2020-09-04 | 2020-09-04 | Rotary shielding mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021910046.4U CN213504737U (en) | 2020-09-04 | 2020-09-04 | Rotary shielding mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213504737U true CN213504737U (en) | 2021-06-22 |
Family
ID=76444880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021910046.4U Expired - Fee Related CN213504737U (en) | 2020-09-04 | 2020-09-04 | Rotary shielding mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213504737U (en) |
-
2020
- 2020-09-04 CN CN202021910046.4U patent/CN213504737U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210622 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |