CN214115710U - Vacuum coating workpiece disc turning device - Google Patents

Vacuum coating workpiece disc turning device Download PDF

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Publication number
CN214115710U
CN214115710U CN202022727092.7U CN202022727092U CN214115710U CN 214115710 U CN214115710 U CN 214115710U CN 202022727092 U CN202022727092 U CN 202022727092U CN 214115710 U CN214115710 U CN 214115710U
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China
Prior art keywords
frame
workpiece
rotating
workpiece frame
annular work
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CN202022727092.7U
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Chinese (zh)
Inventor
任海宾
党亚军
马文鹏
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Nanyang Qingshui Technology Co ltd
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Nanyang Qingshui Technology Co ltd
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Priority to CN202022727092.7U priority Critical patent/CN214115710U/en
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Abstract

The utility model discloses a vacuum coating work piece dish turning device, change the annular work piece frame that detects the part and set up in the worker and change the detection part bottom including the worker, annular work piece frame comprises interior annular work frame and outer annular work frame, the outside of interior annular work frame is equipped with outer annular work frame, interior annular work frame is fixed in the bottom that the worker changes the detection part soon, the axial trough has been seted up along the top equipartition in the periphery of interior annular work frame, the axial trough all clamps the rotation fixed pressure seat I that is used for fixed work piece dish top, outer annular work frame week along the top equipartition have with the symmetrical upset part fixed station of top axial trough is followed to interior annular work frame periphery. The utility model discloses simple structure, convenient operation to realized the requirement of the disposable clamping of work piece and accomplishing two-sided coating film, effectual improvement operating speed and production efficiency.

Description

Vacuum coating workpiece disc turning device
Technical Field
The utility model belongs to the technical field of optical equipment, concretely relates to vacuum coating work piece dish turning device.
Background
Many optical parts need two surface coating films to meet the use requirements, such as some cut-off filters, spectroscopes and the like, two different film systems need to be respectively coated on two surfaces of a substrate to realize various different light splitting requirements; as the most common lens, the two sides must be plated with antireflection films to obtain good imaging quality and high transmittance; the general method is that the part is placed in a vacuum chamber to be plated on one surface, and then the part is taken out from the vacuum chamber to be plated on the second surface, and the method is effective, but has long time and low efficiency; taking the antireflection film as an example, the first surface is plated, a workpiece is taken out after the part is cleaned, evacuated, heated and plated to be cooled, at least six to seven hours are needed, particularly a large workpiece needs to be processed, the needed period is longer, the process needs to be repeated when the second surface is plated, and the part is plated for more than ten hours, so people always imagine that the two-surface film plating is completed after one-time vacuum pumping.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the defects of the prior art, and provides a vacuum coating workpiece disc turnover device which has simple structure and convenient operation, realizes the one-time clamping of workpieces and meets the requirement of double-sided coating.
In order to achieve the above design purpose, the utility model adopts the following technical scheme: a vacuum coating workpiece disc turnover device comprises a work rotation detection component and an annular workpiece frame arranged at the bottom of the work rotation detection component, wherein the annular workpiece frame consists of an inner annular tool frame and an outer annular tool frame, the outer side of the inner annular tool frame is provided with an outer annular tool frame, the inner annular tool frame is screwed and fixed at the bottom of the work rotation detection component, the periphery of the inner annular tool frame is uniformly provided with shaft grooves along the top, rotating fixed pressing seats I for fixing the top end of a workpiece disc are clamped in the shaft grooves, the periphery of the outer annular tool frame is uniformly provided with turnover component fixing tables symmetrical to the periphery of the inner annular tool frame along the top shaft grooves along the top, the middle part of the turnover component fixing table is provided with rotating fixed pressing seats II matched with the rotating fixed pressing seats I which are clamped in the top shaft grooves along the periphery of the inner annular tool frame, and the tail ends of shaft levers of the rotating fixed pressing seats are provided with poking pieces for turnover, the rotary fixed pressing seat is characterized in that a workpiece disc is clamped between the rotary fixed pressing seat I and the rotary fixed pressing seat II, a rotary shifting fork matched with a tail shifting piece of a shaft lever of the rotary fixed pressing seat II is arranged on one side of an outer ring type workpiece frame of the ring type workpiece frame, the rotary shifting fork is composed of a cylinder, a motor and a shifting fork, the top end of an inner rod of the cylinder is provided with the motor, and an output rotating shaft of the motor is provided with the shifting fork.
And supporting pull plates for fixing and supporting are uniformly distributed between the inner annular tool frame and the outer annular tool frame of the annular workpiece frame.
The turnover part fixing table is characterized in that a positioning boss is arranged at one end of the inner side wall of the turnover part fixing table, and a notch matched with the positioning boss at one end of the inner side wall of the turnover part fixing table is formed in one side of the bottom end of the workpiece disc.
The utility model discloses beneficial effect: when coating, the device realizes the one-time clamping of the workpiece and the requirement of double-sided coating in the same equipment, effectively improves the working speed and the production efficiency, and the supporting pulling plates for fixing and supporting are uniformly distributed between the inner annular frame and the outer annular frame of the annular workpiece frame in the device, in the actual production, the using strength of the annular workpiece frame is increased, the connecting strength between the inner annular workpiece frame and the outer annular workpiece frame is effectively changed, the positioning boss is arranged at one end of the inner side wall of the turnover part fixing table, the notch which is arranged at one side of the bottom end of the workpiece tray and is matched with the positioning boss at one end of the inner side wall of the turnover part fixing table is formed, in actual production, an operator can quickly position the workpiece disc according to the positioning boss arranged at one end of the inner side wall of the fixing table and the notch formed in one side of the bottom end of the workpiece disc, and production speed is effectively improved. The utility model discloses simple structure, convenient operation to realized the requirement of the disposable clamping of work piece and accomplishing two-sided coating film, effectual improvement operating speed and production efficiency.
Drawings
Fig. 1 is a schematic view of a vacuum coating workpiece tray turnover device of the present invention.
Detailed Description
The following detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings. As shown in fig. 1: a vacuum coating workpiece disc turning device comprises a work rotation detection component 1 and an annular workpiece frame arranged at the bottom of the work rotation detection component 1, wherein the annular workpiece frame consists of an inner annular workpiece frame 2 and an outer annular workpiece frame 3, the outer side of the inner annular workpiece frame 2 is provided with the outer annular workpiece frame 3, the inner annular workpiece frame 2 is rotationally fixed at the bottom of the work rotation detection component 1, the periphery of the inner annular workpiece frame 2 is uniformly provided with shaft grooves 4 along the top, rotating fixed pressing seats I5 for fixing the top end of a workpiece disc are respectively clamped in the shaft grooves 4, the periphery of the outer annular workpiece frame 3 is uniformly provided with turning component fixing platforms 6 symmetrical to the periphery of the inner annular workpiece frame 2 along the top shaft grooves 4 along the top part, the middle parts of the turning component fixing platforms 6 are provided with rotating fixed pressing seats II 7 matched with the rotating fixed pressing seats I5 which are respectively clamped in the periphery of the inner annular workpiece frame 2 along the top shaft grooves 4, the tail end of the shaft lever of the rotating fixed pressing seat II 7 is provided with a shifting piece 8 used for overturning, a workpiece disc 9 is clamped between the rotating fixed pressing seat I5 and the rotating fixed pressing seat II 7, one side of an outer ring type tool rest 3 of the ring type workpiece rest is provided with a rotating shifting fork matched with the shifting piece 8 at the tail end of the shaft lever of the rotating fixed pressing seat II 7, the rotating shifting fork is composed of a cylinder 10, a motor 11 and a shifting fork 12, the top end of an inner rod of the cylinder 10 is provided with the motor 11, and the shifting fork 12 is arranged on an output rotating shaft of the motor 11.
And supporting pull plates 13 for fixing and supporting are uniformly distributed between the inner annular tool frame 2 and the outer annular tool frame 3 of the annular workpiece frame.
A positioning boss 14 is arranged at one end of the inner side wall of the turnover part fixing table 6, and a notch 15 matched with the positioning boss 14 at one end of the inner side wall of the turnover part fixing table 6 is formed in one side of the bottom end of the workpiece disc 9.
The utility model discloses during the use: the two ends of the workpiece disc 9 are respectively arranged between the rotary fixed pressing seat I5 and the rotary fixed pressing seat II 7, then the power supply is turned on, the work rotation detection part 1 can detect the original point of the workpiece frame and the turnover frequency of the workpiece disc 9, when the workpiece disc 9 needs to be turned over to plate another surface during film coating, the work rotation detection component 1 firstly detects the original position of the workpiece frame, when the workpiece rack is positioned at the original point position, the rod in the cylinder 10 in the shifting fork is rotated to drive the shifting fork 12 to extend out, so that the shifting fork is inserted into the shifting piece 8 at the tail end of the shaft lever of the rotating fixed pressing seat II 7, then the motor 11 at the top end of the rod in the cylinder 10 is used for turning the shifting piece 8 to drive the workpiece disk 9 to turn 180 degrees, when the work rotating detection part 1 detects that the workpiece frame rotates for a circle, the workpiece frame can stop rotating, and the air cylinder drives the shifting fork to retract, so that the whole overturning process is completed and the film can be coated.

Claims (3)

1. The utility model provides a vacuum coating work piece dish turning device which characterized in that: the workpiece turning detection device comprises a workpiece turning detection component and an annular workpiece frame arranged at the bottom of the workpiece turning detection component, wherein the annular workpiece frame consists of an inner annular workpiece frame and an outer annular workpiece frame, the outer side of the inner annular workpiece frame is provided with an outer annular workpiece frame, the inner annular workpiece frame is screwed and fixed at the bottom of the workpiece turning detection component, the periphery of the inner annular workpiece frame is uniformly provided with shaft grooves along the top, rotating fixed pressing seats I for fixing the top ends of workpiece discs are clamped in the shaft grooves, the periphery of the outer annular workpiece frame is uniformly provided with turnover part fixing tables symmetrical to the periphery of the inner annular workpiece frame along the top shaft grooves along the top, the middle parts of the turnover part fixing tables are provided with rotating fixed pressing seats II matched with the rotating fixed pressing seats I clamped in the periphery of the inner annular workpiece frame along the top shaft grooves, the tail ends of shaft levers of the rotating fixed pressing seats are provided with shifting pieces for turning, the workpiece discs are clamped between the rotating fixed pressing seats I and the rotating fixed pressing seats II, one side of an outer ring-shaped workpiece frame of the ring-shaped workpiece frame is provided with a rotating shifting fork matched with a shifting piece at the tail end of a shaft lever of the rotating fixing pressing seat II, the rotating shifting fork consists of a cylinder, a motor and a shifting fork, the top end of an inner rod of the cylinder is provided with the motor, and an output rotating shaft of the motor is provided with the shifting fork.
2. The vacuum coating workpiece tray turnover device of claim 1, wherein: and supporting pull plates for fixing and supporting are uniformly distributed between the inner annular tool frame and the outer annular tool frame of the annular workpiece frame.
3. The vacuum coating workpiece tray turnover device of claim 2, wherein: the turnover part fixing table is characterized in that a positioning boss is arranged at one end of the inner side wall of the turnover part fixing table, and a notch matched with the positioning boss at one end of the inner side wall of the turnover part fixing table is formed in one side of the bottom end of the workpiece disc.
CN202022727092.7U 2020-11-23 2020-11-23 Vacuum coating workpiece disc turning device Active CN214115710U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022727092.7U CN214115710U (en) 2020-11-23 2020-11-23 Vacuum coating workpiece disc turning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022727092.7U CN214115710U (en) 2020-11-23 2020-11-23 Vacuum coating workpiece disc turning device

Publications (1)

Publication Number Publication Date
CN214115710U true CN214115710U (en) 2021-09-03

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CN202022727092.7U Active CN214115710U (en) 2020-11-23 2020-11-23 Vacuum coating workpiece disc turning device

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CN (1) CN214115710U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114150280A (en) * 2021-10-26 2022-03-08 南阳清水科技有限公司 Automatic turnover device for drum type magnetron sputtering machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114150280A (en) * 2021-10-26 2022-03-08 南阳清水科技有限公司 Automatic turnover device for drum type magnetron sputtering machine
CN114150280B (en) * 2021-10-26 2023-09-29 南阳清水科技有限公司 Automatic overturning device for drum type magnetron sputtering machine

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