CN213467319U - Large VSPA vacuum pressure swing adsorption oxygen generation device adopting radial adsorption tower - Google Patents
Large VSPA vacuum pressure swing adsorption oxygen generation device adopting radial adsorption tower Download PDFInfo
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- CN213467319U CN213467319U CN202022278833.8U CN202022278833U CN213467319U CN 213467319 U CN213467319 U CN 213467319U CN 202022278833 U CN202022278833 U CN 202022278833U CN 213467319 U CN213467319 U CN 213467319U
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Abstract
The utility model discloses a large VSPA vacuum pressure swing adsorption oxygen generation device adopting a radial adsorption tower, which comprises an air blower, an oxygen buffer tank, a vacuum pump, an air inlet pipe fitting and an air outlet pipe fitting; the method is characterized in that: a plurality of radial adsorption towers are also arranged between the blower and the oxygen buffer tank; the radial adsorption tower comprises a shell and a gland fixedly connected with the shell; an annular outer pore plate, an annular middle pore plate, an annular inner pore plate, a lower end enclosure, an inner end enclosure, a circular cover plate and a bottom plate are arranged in the shell; and the gland is provided with a first control valve, a second control valve, a compression gas inlet and a lifting lug. The utility model discloses well air channel and interior barrel parallel arrangement, the air is after getting into the air channel in the radial adsorption tower, from last down adsorbing, and the oxygen that obtains gets into the oxygen buffer tank from the oxygen export of lower extreme, makes this radial adsorption tower can make the tower form that height and diameter are less, and can transversely place, and the cost of preparation, transportation and assembly is lower, easy operation, and adsorption effect is good.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to an oxygenerator field, in particular to adopt large-scale VSPA vacuum pressure swing adsorption oxygenerator of radial adsorption tower.
[ background of the invention ]
The pressure swing adsorption oxygen generating device is characterized in that a special molecular sieve for pressure swing adsorption is used for selectively adsorbing impurities such as nitrogen, carbon dioxide, water and the like in air, and the molecular sieve is desorbed under the condition of vacuumizing, so that oxygen with higher purity is prepared in a circulating manner. Generally, the device comprises an air blower, a vacuum pump, an oxygen production adsorption tower, a product storage tank, a pressure equalizing buffer tank, a pipeline program control valve and the like, wherein the adsorption tower is a device for placing a molecular sieve and performing pressure swing adsorption on impurities in air. The existing oxygen-making adsorption tower usually has the advantages that air enters from the lower end and exits from the upper end, the adsorption filler is arranged in the middle, the adsorption tower has a good adsorption effect, the tower body needs to be made into a shape with a higher diameter and needs to be vertically placed, and the transportation and assembly processes are complex, the cost is higher, and the difficulty is higher.
[ summary of the invention ]
The utility model aims at solving the problems and providing a large VSPA vacuum pressure swing adsorption oxygen generation device adopting a radial adsorption tower.
In order to achieve the purpose, the large VSPA vacuum pressure swing adsorption oxygen generation device adopting the radial adsorption tower comprises an oxygen buffer tank, a fan, an air inlet pipe, a product gas outlet pipe, a bypass pipe and an adsorption tower, wherein the air inlet pipe, the product gas outlet pipe and the bypass pipe are connected with the adsorption tower; the method is characterized in that: the adsorption tower is a radial adsorption tower, and the radial adsorption tower comprises a shell and a gland fixedly connected with the shell; an annular outer pore plate, an annular middle pore plate, an annular inner pore plate, a lower end enclosure, an inner end enclosure, a circular cover plate and a bottom plate are arranged in the shell; the middle pore plate is arranged inside the outer pore plate, and the inner pore plate is arranged inside the middle pore plate; the circular cover plate is arranged at the upper end of the shell; the bottom plate is arranged at the lower part of the shell; the gland is provided with a first control valve, a second control valve, a compaction gas inlet and a lifting lug; the lifting lugs are arranged on two sides of the gland.
Preferably, an air channel is formed between the middle pore plate and the inner pore plate; an inner cylinder body is arranged in the inner hole plate; the inner seal head is arranged inside the lower seal head; the air channel is communicated with the lower end enclosure; the inner cylinder body is communicated with the inner sealing head.
Preferably, an air inlet is formed in the port of the lower end socket; the end opening of the inner sealing head is provided with an oxygen outlet.
Preferably, a plurality of supporting columns for supporting are further arranged in the inner end socket.
Preferably, the bottom of the two walls of the air channel is provided with a ring vertical plate.
Preferably, a plurality of annular reinforcing plates for fixing are arranged between the inner cylinder and the inner hole plate.
Preferably, ear type supports are arranged on two sides of the shell.
The air inlet pipe, the product gas outlet pipe, the bypass pipe and the desorption gas discharge pipe are provided with program control valves, and the program control valves and the fan are controlled by a PLC.
The utility model has the advantages that: the air inlet and the oxygen outlet are arranged at the lower end of the radial adsorption tower, the air channel is arranged in parallel with the inner cylinder body filled with the molecular sieve, the air is adsorbed from top to bottom after entering the air channel in the radial adsorption tower, and the obtained oxygen enters the oxygen buffer tank from the oxygen outlet at the lower end, so that the radial adsorption tower can be made into a tower body with smaller height and diameter and can be transversely placed; thereby facilitating the transportation of the adsorption tower, improving the efficiency of assembly and site construction and reducing the production cost.
[ description of the drawings ]
FIG. 1 is a schematic diagram of the present invention;
FIG. 2 is a schematic structural view of the radial adsorption tower of the present invention;
fig. 3 is a schematic view of a partial structure of the present invention.
Illustration of the drawings: 1, an oxygen buffer tank; 2, a fan; 3, air inlet pipe; 4, a product gas outlet pipe; 5, a bypass pipe; 6, an adsorption tower; 61 a housing; 611 outer orifice plate; 612 a middle orifice plate; 613 an inner orifice plate; 614 lower end enclosure; 6141 air inlet; 615 inner sealing head; 6151 oxygen outlet; 6152 support column; 616 a round cover plate; 617 bottom plate; 618 an air channel; 6181 ring vertical plate; 619 an inner cylinder; 6191 reinforcing plate; a 62-ear mount; 63, pressing a cover; 631 a first control valve; 632 a second control valve; 633 compressing the gas inlet; 634 lifting lug; 7 a desorption gas discharge pipe; 8, a silencer; 9 programmed valve.
Detailed Description
The large VSPA vacuum pressure swing adsorption oxygen generation apparatus using the radial adsorption tower of the present invention will be further described with reference to the accompanying drawings.
As shown in fig. 1-3, the large VSPA vacuum pressure swing adsorption oxygen generation device using a radial adsorption tower of this embodiment includes an oxygen buffer tank 1, a fan 2, an air inlet pipe 3, a product gas outlet pipe 4, a bypass pipe 5, and an adsorption tower 6, where the air inlet pipe 3, the product gas outlet pipe 4, and the bypass pipe 5 are connected to the adsorption tower 6, the adsorption tower 6 is further provided with a desorbed gas discharge pipe 7, the desorbed gas discharge pipe 7 is connected to the fan 2, and the fan 2 is connected to a silencer 8 through a pipeline; the method is characterized in that: the adsorption tower 6 is a radial adsorption tower; the adsorption tower 6 comprises a shell 61 and a gland 63 fixedly connected with the shell 61; an annular outer hole plate 611, a middle hole plate 612, an inner hole plate 613, a lower seal head 614, an inner seal head 615, a circular cover plate 616 and a bottom plate 617 are arranged in the shell 61; the middle orifice plate 612 is arranged inside the outer orifice plate 611, and the inner orifice plate 613 is arranged inside the middle orifice plate 612; the round cover plate 616 is arranged at the upper end of the shell 61; the bottom plate 617 is arranged at the lower part of the shell 61; the gland 63 is provided with a first control valve 631, a second control valve 632, a compaction gas inlet 633 and a lifting lug 634; the lifting lugs 634 are arranged at two sides of the gland 63; an air channel 618 is formed between the middle hole plate 612 and the inner hole plate 613; an inner cylinder 619 is arranged in the inner orifice plate 613; the inner seal head 615 is arranged inside the lower seal head 614; the air channel 618 is communicated with the lower seal head 614; the inner cylinder 619 is communicated with the inner sealing head 615; an air inlet 6141 is formed in the port of the lower end enclosure 614; an oxygen outlet 6151 is formed in the port of the inner seal head 615; the blower 1 and the vacuum pump 3 are communicated with an air inlet 6141 through an air inlet pipe fitting 4; the oxygen buffer tank 2 is communicated with an oxygen outlet 6151 through an air outlet pipe fitting 5; a plurality of supporting columns 6152 for supporting are further arranged in the inner sealing head 615; the bottoms of the two walls of the air channel 618 are provided with annular vertical plates 6181; a plurality of annular reinforcing plates 6191 for fixing are arranged between the inner cylinder 619 and the inner hole plate 613; ear type supports 62 are arranged on two sides of the shell 61; in order to improve the adsorption efficiency, the adsorption column 6 is divided into an adsorption column a and an adsorption column B.
In the use process of the utility model, the raw material gas passes through the raw material pipe and enters the air inlet pipe 3, the program control valve 9 on the air inlet pipe 3 for controlling the air inlet of the adsorption tower A is opened, the gas enters the adsorption tower A for adsorption, the impurity gas is adsorbed by the molecular sieve in the adsorption tower to obtain oxygen, the oxygen passes through the program control valve 9 on the product gas outlet pipe 4 and the pressure regulating valve between the gas buffer tank 1 and the product gas outlet pipe 4 and then enters the buffer tank 1, and the oxygen is output after pressure buffering and then enters the next process; when the adsorption tower A is saturated in adsorption, the program control valve 9 on the air inlet pipe 3 for controlling the adsorption tower A to be in an air inlet pipe 3 is closed, meanwhile, the program control valve 9 on the product air outlet pipe 4 for controlling the discharge of oxygen separated from the adsorption tower A is closed to enter desorption, and raw material gas enters the adsorption tower B to start to enter adsorption work;
when the adsorption tower A is desorbed, firstly, a program control valve which controls the adsorption tower A to discharge desorption gas on a desorption gas discharge pipe 7 is opened, a fan starts to work, the fan vacuumizes the adsorption tower A to reduce the pressure in the adsorption tower A and simultaneously release impurity gases such as nitrogen and the like adsorbed by the molecular sieve, and the impurity gases such as nitrogen and the like are conveyed to a silencer by the fan to be discharged; after vacuumizing, closing the program control valve and the fan for discharging desorption gas of the adsorption tower A; and then the finished gas introduced into the adsorption tower B through the bypass pipe enters the adsorption tower A to increase the pressure and stabilize the pressure, after the adsorption tower B is saturated by adsorption, the adsorption tower A enters the adsorption work, the adsorption tower B is also vacuumized and depressurized through a fan during desorption, then the finished gas introduced into the adsorption tower A through the bypass pipe enters the adsorption tower B to increase the pressure and stabilize the pressure, and after the adsorption tower A is saturated by adsorption, the adsorption tower B enters the adsorption work.
The utility model discloses in, the gas flow in the radial adsorption tower flows to and does: air enters the air channel 618 through an air inlet 6141 in the lower end enclosure 614, a molecular sieve capable of adsorbing impurities in the air is arranged in the inner cylinder 619, the air enters the inner cylinder 619 through the inner pore plate 613, and impurities such as nitrogen, carbon dioxide, water and the like in the air are removed through the molecular sieve; the oxygen is discharged to a product gas outlet pipe 4 from an oxygen outlet 6151 of the adsorption tower 6; the air inlet 6141 in the lower end enclosure 614 is also connected with a desorption gas discharge pipe and a fan 2, and impurities adsorbed in the molecular sieve are sucked and extracted by the fan 2 to the silencer 8 for discharge.
In the utility model, the air inlet 6141 and the oxygen outlet 6151 are both arranged at the lower bottom end of the radial adsorption tower 6, the air channel 618 is arranged in parallel with the inner cylinder 619 with the molecular sieve, and the air is adsorbed from top to bottom after entering the air channel 618 in the radial adsorption tower, thereby improving the adsorption effect; the radial adsorption tower can be made into a tower shape with smaller height and diameter and can be transversely placed; thereby facilitating the transportation of the adsorption tower, improving the efficiency of assembly and site construction and reducing the production cost.
The above-mentioned embodiment is right the utility model discloses an explanation, it is not right the utility model discloses a limited, any right the scheme after the simple transform of the utility model all belongs to the protection scope of the utility model.
Claims (8)
1. The large VSPA vacuum pressure swing adsorption oxygen generation device adopting the radial adsorption tower comprises an oxygen buffer tank (1), a fan (2), an air inlet pipe (3), a product gas outlet pipe (4), a bypass pipe (5) and an adsorption tower (6), wherein the air inlet pipe (3), the product gas outlet pipe (4) and the bypass pipe (5) are connected with the adsorption tower (6), the adsorption tower (6) is also provided with a desorption gas discharge pipe (7), the desorption gas discharge pipe (7) is connected with the fan (2), and the fan (2) is connected with a silencer (8) through a pipeline; the method is characterized in that: the adsorption tower (6) is a radial adsorption tower; the radial adsorption tower comprises a shell (61) and a gland (63) fixedly connected with the shell (61); an annular outer hole plate (611), a middle hole plate (612), an inner hole plate (613), a lower seal head (614), an inner seal head (615), a circular cover plate (616) and a bottom plate (617) are arranged in the shell (61); the middle orifice plate (612) is arranged inside the outer orifice plate (611), and the inner orifice plate (613) is arranged inside the middle orifice plate (612); the round cover plate (616) is arranged at the upper end of the shell (61); the bottom plate (617) is arranged at the lower part of the shell (61); a first control valve (631), a second control valve (632), a compaction gas inlet (633) and a lifting lug (634) are arranged on the gland (63); the lifting lugs (634) are arranged on two sides of the gland (63).
2. The large VSPA vacuum pressure swing adsorption oxygen plant using a radial adsorption column of claim 1, wherein: an air channel (618) is formed between the middle orifice plate (612) and the inner orifice plate (613); an inner cylinder body (619) is arranged in the inner orifice plate (613); the inner seal head (615) is arranged inside the lower seal head (614); the air channel (618) is communicated with the lower seal head (614); the inner cylinder body (619) is communicated with the inner seal head (615).
3. The large VSPA vacuum pressure swing adsorption oxygen plant using a radial adsorption column of claim 2, wherein: an air inlet (6141) is formed in the port of the lower end enclosure (614); an oxygen outlet (6151) is formed in the port of the inner seal head (615).
4. The large VSPA vacuum pressure swing adsorption oxygen plant using a radial adsorption column of claim 3, wherein: and a plurality of supporting columns (6152) for supporting are also arranged in the inner seal head (615).
5. The large VSPA vacuum pressure swing adsorption oxygen plant using a radial adsorption column of claim 2, wherein: the bottoms of the two walls of the air channel (618) are provided with ring vertical plates (6181).
6. The large VSPA vacuum pressure swing adsorption oxygen plant using a radial adsorption column of claim 2, wherein: a plurality of annular reinforcing plates (6191) for fixing are arranged between the inner cylinder body (619) and the inner orifice plate (613).
7. The large VSPA vacuum pressure swing adsorption oxygen plant using a radial adsorption column of claim 1, wherein: ear type supports (62) are further arranged on two sides of the shell (61).
8. The large VSPA vacuum pressure swing adsorption oxygen plant using a radial adsorption column of claim 1, wherein: and the air inlet pipe (3), the product gas outlet pipe (4), the bypass pipe (5) and the desorption gas discharge pipe (7) are provided with a program control valve (9), and the program control valve (9) and the fan are controlled by a PLC.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022278833.8U CN213467319U (en) | 2020-10-14 | 2020-10-14 | Large VSPA vacuum pressure swing adsorption oxygen generation device adopting radial adsorption tower |
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| CN202022278833.8U CN213467319U (en) | 2020-10-14 | 2020-10-14 | Large VSPA vacuum pressure swing adsorption oxygen generation device adopting radial adsorption tower |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112619366A (en) * | 2020-12-18 | 2021-04-09 | 昆山易氧空分科技有限公司 | Pressure swing adsorption oxygen generation radial flow adsorption tower |
| CN114247259A (en) * | 2021-12-28 | 2022-03-29 | 湖北中船气体有限公司 | Special large-scale radial adsorption tower of VPSA system oxygen |
| CN115814566A (en) * | 2023-02-10 | 2023-03-21 | 北京中科富海低温科技有限公司 | Radial adsorption tower with optimized flow channel design |
-
2020
- 2020-10-14 CN CN202022278833.8U patent/CN213467319U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112619366A (en) * | 2020-12-18 | 2021-04-09 | 昆山易氧空分科技有限公司 | Pressure swing adsorption oxygen generation radial flow adsorption tower |
| CN114247259A (en) * | 2021-12-28 | 2022-03-29 | 湖北中船气体有限公司 | Special large-scale radial adsorption tower of VPSA system oxygen |
| CN114247259B (en) * | 2021-12-28 | 2023-11-03 | 湖北中船气体有限公司 | Large radial adsorption tower special for VPSA oxygen production |
| CN115814566A (en) * | 2023-02-10 | 2023-03-21 | 北京中科富海低温科技有限公司 | Radial adsorption tower with optimized flow channel design |
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